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Orion KRF110-V-04E Quick Start Manual page 6

Dry pump

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*1 Designed capacity: It is the theoretical value calculated from capacity.
pressure-flow rate diagram for the actual flow rate.
*2 Continuous operative vacuum: Operative range of vacuum. Install the gauge and controller
to the pump or the piping, and use the Dry Pump at the continuous operative vacuum or less.
*3 Ultimate vacuum: Continuous operation is not possible at maximum ultimate vacuum of the
pump. It is used as model selection calculation.
*4 Use the thermal set value as a target since the apparatus is different individually.
*5 The operation noise is the actual measured value at the continuous operative vacuum, not the
warrant value.
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Spec.No.  KRF110-V-04E
Please use the

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