Related Manuals for Allwin21 Tegal 90Xe
Summary of Contents for Allwin21 Tegal 90Xe
- Page 1 Allwin21 Corporation Tegal 90Xe Upgrade Chapter 1: Installation Supplement to the Tegal90X Manual Allwin21 Corporation 220 Cochrane Circle, Morgan Hill CA 95037 www.Allwin21.com...
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Page 2: Service Information
Allwin21 Corporation. Statement of Confidentiality The information contained herein is confidential to and the property of Allwin21 Corporation. It may not be reproduced nor disclosed in whole or in part by any method without the prior written permission of Allwin21 Corporation. -
Page 3: Warranty
Allwin21 Corporation liability to the customer or anyone claiming through or on behalf of the customer with respect to any claim or loss arising out of the purchase and/or sale of any Allwin21 Corporation product shall be limited to the original purchase price amount of the product. In no event shall Allwin21... - Page 4 In order to honor a warranty for any Allwin21 ststem, the customer is required to perform the recommended preventive maintenance (PM) on the system. Allwin21 Corporation will perform PM training during system start-up.
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Page 5: Preface
This installation supplement has been written to assist Facility Engineers and Technicians in the installation of the Tegal 90Xe Through-The-Wall (TTW) system with the TTW Upgrade Kit. Building Planners may also use this document to plan facilities for the system. Please read this document carefully before installing the Tegal 90Xe TTW System with the TTW Upgrade Kit. -
Page 6: Table Of Contents
2.7.5 Thermal Hazards ....................13 2.7.6 Mechanical Hazards ..................... 14 2.7.7 RF Radiation Hazards ..................14 Installation Requirements ................16 Purchaser’s Responsibility ....................16 Installation process overview ..................... 16 3.2.1 Installation procedures ..................16 Allwin21 Service ........................ 17 3.3.1 Field Service Installation ..................17... - Page 7 069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement 3.3.2 Training ........................ 17 Site requirements ........................ 17 3.4.1 Facility Preparation ....................18 3.4.2 Space Requirements ..................... 18 3.4.3 Front cover specification ..................18 Facilities ..........................19 3.5.1 Utility Connections ....................19 3.5.2 Electrical ......................
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Page 8: Table Of Figures
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement TABLE OF FIGURES Figure 2-2: Equipe Robot Arm ..................... 2 Figure 2-3: Equipe Robot......................3 Figure 2-4: Wafer Alignment Station ................... 4 Figure 2-5: RF Generator Supply ....................5 Figure 2-6: Adjustable Cassette Holder ..................5 Figure 2-7: Software Computer Controller ................... - Page 9 069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement PAGE INTENTIONALLY LEFT BLANK viii...
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Page 10: Introduction
OVERVIEW This installation supplement manual is aimed to explain the changes and present the additional requirements to the Tegal90Xe series with Allwin21 Corporation TTW Upgrade Kit. It is not a replacement for the Tegal90Xe TTW manuals or its OEM manuals. -
Page 11: Equipe Robot Arm
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement Figure 2-1: Control Interface Board EQUIPE ROBOT ARM 1.2.2 There are two types of Equipe robot arms, a straight robot arm with vacuum and a fork robot arm with vacuum. Based on customer’s needs, one of the two Equipe robot arm types is included with the system. -
Page 12: Equipe Robot
WAFER ALIGNMENT STATION 1.2.4 Allwin21 installed a wafer alignment station that allows the proper alignment of wafer size 3, 4, 5, and 6 inches. Its purpose is to ensure every wafer is centered and the fact is position in the same direction when processed to increase repeatability of results. -
Page 13: Rf Generator
1.2.5 Based on customer’s requirement, an appropriate wattage RF plasma generator is included with the Allwin21 machine. The RF generator generates microwave, which excites the gas molecules inside the chamber to produce plasma. The following RF generator is used: MKS/ENI Elite 300 The unit is air cooled using a built in fan located at the rear of the unit. -
Page 14: Cassette Holder
Figure 2-5: RF Generator Supply CASSETTE HOLDER 1.2.6 Allwin21 has installed a new cassette holder. It replaced the two cassette elevators from the original shuttle cassette to cassette system. The cassette holder can be adjusted to fit wafer carriers between 3 to 6 inches. -
Page 15: Software Controller And Display
Figure 2-7: Software Computer Controller The system is controlled by menu commands from the AW-TGL control software. This software allows a great deal of flexibility and control of the Allwin21 machine. Figure 2-8: Display Panel with AW-TGL Software... - Page 16 069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement PAGE INTENTIONALLY LEFT BLANK...
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Page 17: Safety Precautions
WARNING Only Allwin21 or qualified personnel should install, start up, operate and/or repair the AW-901 TTW. Damage to the system or injury to personnel could result if the preceding actions are carried out by unqualified personnel. -
Page 18: Utilities Inspection
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement CAUTION Cautions alert you to avoid system damage. WARNING Warnings are given for personnel safety to prevent bodily harm. UTILITIES INSPECTION Inspect the system utility connections and sources before switching on the AW-901 TTW. Visually inspect the following utilities to make sure connections are secure: •... -
Page 19: System Operation
MAINTENANCE During the maintenance operation, observe the following precautions: • Do not use replacement parts not provided or recommended by Allwin21. WARNING Allwin21 is not liable for any damage or injury which may occur when unauthorized parts are used. -
Page 20: Gas Handling
GAS HANDLING Be aware of the following cautions when working with gasses in the AW-901 TTW: Only use gas that has been specified for use in the Tegal 90Xe TTW system. Refer to the • original Tegal 90Xe TTW installation manual for a comprehensive list of acceptable complex process gases. -
Page 21: Hazards
Proper servicing procedures must be followed for gas handling and should only be performed by trained personals. For a complete list of acceptable gasses, their usage and individual gas hazards please refer to the original Tegal 90Xe TTW installation manual for proper and safe gas handling. -
Page 22: Oxygen Hazards
In the event of contact with by product deposits from the chamber, promptly flush the contact area with cold running water and contact first aid or safety personal. Allwin21 Corp. claims no responsibility for the safety of the byproducts in the AW-901 TTW system. -
Page 23: Mechanical Hazards
Depending on proximity, these burns can be serious enough to cause significant injury to personnel. Under normal operating conditions, the Allwin21 machine is properly shielded. RF power supplies and their associated circuitry are extremely dangerous and should be handled only by trained, competent maintenance technicians. - Page 24 069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement Chapter 4: PAGE INTENTIONALLY LEFT BLANK...
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Page 25: Installation Requirements
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement 3. INSTALLATION REQUIREMENTS Chapter 5: Chapter 3 Chapter 3 PURCHASER’S RESPONSIBILITY The purchaser of a new AW-901 TTW is primarily responsible for preparing for the system’s installation. This responsibility includes preparing the physical site to accept the sub-systems and providing the prescribed power, gas, vacuum, and exhaust supplies and lines. -
Page 26: Allwin21 Service
FIELD SERVICE INSTALLATION 3.3.1 As an optional service Allwin21 Corp. provides is the installation of the AW-901 TTW. If it is desirable to have a Allwin21 Field Service Engineer to install the system, contact Allwin21 Corp. The installation is provided after the Allwin21 machine is in place and all of the support utilities have been connected as described in this manual. -
Page 27: Facility Preparation
Please refer to the original Tegal 90Xe TTW installation manual under Section II for physical specification for system dimensions and space required for installation. Physical specification modifications are noted in this supplement manual. -
Page 28: Facilities
All utilities are connected at the rear utility panel of the system. Refer to the original Tegal 90Xe TTW system installation manual for details on the locations and specifications of the system utilities. -
Page 29: Robot Vacuum
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement ROBOT VACUUM 3.5.4 AW-901 TTW requires the use of a vacuum line to assist the wafer transfer process using the Equipe robotic arm. ROBOT VACUUM Purpose: Vacuum for the robot end-effector chuck Requirement: N/A Specification: -25 inHg Fitting: Swagelock ¼”... -
Page 30: Cda (Pneumatic)
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement TUBING IS TOO SMALL As depicted in figure 3-1, the smaller diameter tubing (D1) needs to have a higher pressure so it can have the same amount of gas flow rate as the larger diameter tubing (D2). For D1 to have the same flow rate as D2, the pressure in D1 must be greater than in D2. -
Page 31: Figure 5-2: Recommended Pneumatic Configuration
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement CONNECTION AW-901 TTW can use one to five inert or non-toxic gases as inputs. Each of these gas inputs are connected to a separate MFC and (optionally) pneumatically operated shut off valve. The supply line for the compressed pneumatic air, figure 3-2, is connected to the 1/4"... - Page 32 069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement Chapter 6: PAGE INTENTIONALLY LEFT BLANK...
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Page 33: Setup
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement 4. SETUP Chapter 7: Chapter 4 UNPACKING AND INSPECTING UNCRATING 4.1.1 Detailed unpacking instructions are contained in the system manual shipped with your system. Unpacking should not take place until the manual is removed and the unpacking instructions are thoroughly understood. -
Page 34: Inspection
Do not notify Allwin21, as the initial claim for damages must be filed with the carrier. Retain all shipping containers and packing material for damage inspection and possible return of the damaged unit. - Page 35 Tegal AW-90Xe TTW Installation Supplement Refer to the original Tegal 90Xe TTW system installation manual for instructions on how to properly connect the facilities to the equipment. Any modifications to the original installation and utility setup are noted in this Allwin21 supplement manual.
- Page 36 069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement Chapter 8: PAGE INTENTIONALLY LEFT BLANK...
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Page 37: Initial Start Up
Safety Precautions section of this manual. To complete the following procedures, you must first be familiar with the use of the control software. Refer to the Allwin21 operation manual for instructions on the operating the Aw-901 TTW with the control software. - Page 38 8. Turn on the facilities as required for testing. 9. The AW-901 TTW is now ready for testing. Refer to the Operation Manual for complete instructions on Tegal 90Xe TTW system operation, recipe creation, and optimization. Refer to the Service Manual for complete instructions and assistance on Tegal 90Xe TTW...
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Page 39: Robot Setup
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement 6. ROBOT SETUP Chapter 10: Chapter 6 INITIAL INSPECTION OF EQUIP ROBOT FACILITIES CHECK 6.1.1 Verify that all facilities connected to the system are within the required limits. The check should include a pressure check, flow check, or both. ROBOT CHECK 6.1.2 Run five dummy wafers through a Null cycle. -
Page 40: System Visual Check
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement SYSTEM VISUAL CHECK 6.1.3 Visually inspect the system for the following: Pass Fail Repaired Loose circuit boards Loose cables Loose connectors CLEAN SYSTEM CHECK 6.1.4 Check the wafer-handling area and the area underneath for dirt, dust, or pieces of silicon wafer. If necessary, vacuum up debris. -
Page 41: Adjusting The Vacuum Sensor (Equip Robot)
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement 6.2 ADJUSTING THE VACUUM SENSOR (EQUIP ROBOT) An SMC Series ZSE2-T1-15 vacuum sensor is installed in the lower arm link of the robot. The functioning range of this sensor is from 0 to -30 in. Hg (0 to 101592 Pa). The robot vacuum sensor is set for detecting silicon wafers at -15 in. -
Page 42: 6.3 Safety Verification
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement 6.3 SAFETY VERIFICATION Make a visual check of the robot and maximum envelope to ensure that conditions that might cause hazards do not exist. - Page 43 069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement PAGE INTENTIONALLY LEFT BLANK...
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Page 44: Appendix
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement APPENDIX Chapter 11: Appendix PROBLEM REPORTING Email the following problem report to: info@Allwin21.com Give a brief description of the problem in the subject line in 8 words or less. - Page 45 069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement PROBLEM REPORT Contact Name Company Name Address Telephone Email Equipment Model Equipment Serial # Equipment Designation Name (name you refer to machine) Date Software Version Problem Electrical Voltage # of phases wire size circuit breaker size line frequency flow rate...
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Page 46: B: How To Order / Return Equipment
How to exchange parts What to do when the system is down Service Agreements HOW TO ORDER EQUIPMENT AND PARTS To order parts from Allwin21 Corporation, call: Allwin21 Corporation Customer Service Phone: 1-408-778-7788 To obtain a quote and information concerning part availability, please have the following... - Page 47 NOTE An RMA (Return Material Authorization) number must be obtained from Allwin21 prior to shipping any parts back to Allwin21. A Return Material Authorization (RMA) Number is required in order to return or exchange system parts. To obtain an RMA number, call:...
- Page 48 (Return Material Authorization) number to you which must be included when the failed part is returned. The failed part MUST be returned to Allwin21 within ten (10) days in the proper packing container or the full purchase price will be billed. Replacement parts under warranty are shipped out in the timeliest manner possible.
- Page 49 If the system is down and you cannot isolate or fix the problem within a reasonable period of time, call Allwin21 Corporation Customer Service for telephone assistance or a service visit. Telephone numbers are staffed by trained Allwin21 Corporation technicians, who can provide on- the-spot help with difficult problems and advice on repairs.
- Page 50 069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement EQUIPMENT TROUBLESHOOTING EXPERIENCES >80% of equipment down time is caused by connectors. There are many kinds of reasons for bad connections: a. loose connectors b. corroded or oxidized pins of the connectors c.
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Page 51: C: Maintenance Plans
MAINTENANCE PLANS EXTENDED MAINTENANCE PLANS Allwin21 commitment to customer support carries on past the warranty period. By offering a choice of extended maintenance plans, we can satisfy most of your service requirements. Contact Allwin21 Field Service or Sales Administration for more details. -
Page 52: D: Manual Revision History
069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement MANUAL REVISION HISTORY Date rev. Description Dec. 2011 Initial Release 9/18/15 Update 8/28/17 Move Robot section to Operation manual. Chapter 12: Chapter 13: Chapter 14: Chapter 15: Chapter 16: Chapter 17: Chapter 18: Chapter 19: Chapter 20: Chapter 21:... - Page 53 069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement...
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