Related Manuals for Allwin21 GaSonics AURA 1000
Summary of Contents for Allwin21 GaSonics AURA 1000
- Page 1 Allwin21 Corporation GaSonics AURA 1000 Stripper with Allwin21 AW1008 Upgrade Kit Operator’s Manual Allwin21 Corporation 220 Cochrane Circle, Morgan Hill, CA 95037...
- Page 2 A9-0726-01 Rev. A AW1008 Operator’s Manual ALLWIN21 CORPORATION GASONICS AURA 1000 AUTOMATED STRIPPER SYSTEM WITH ALLWIN21 AW1008 UPGRADE KIT OPERATOR’S MANUAL Allwin21 Corporation 220 Cochrane Circle Morgan Hill, California, 95037...
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Page 3: Service Information
Allwin21 Corporation makes no representations or warranties with respect to this Manual, except as outlined in the product warranty. Further, Allwin21 reserves the right to make changes in the specifications of the product described within this Manual at any time without notice and without obligation to Allwin21 Corporation. -
Page 4: Warranty
Allwin21 Corporation or generally accepted in the industry. Allwin21 Corporation shall have no warranty obligation with respect to any product which has been modified or altered, or with respect to data contained in any product returned to Allwin21 Corporation by the customer without written approval. - Page 5 In order to honor a warranty for any Allwin21 system, the customer is required to perform the recommended preventive maintenance (PM) on the system. Allwin21 Corporation will perform PM training during system start-up.
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Page 6: Preface
This manual has been written for technicians and process development engineers working with the Allwin21 System. It provides an overview of the system and its operation, as well as specific operating instructions. It also includes minor service and some troubleshooting procedures. -
Page 7: Table Of Contents
A9-0726-01 Rev. A AW1008 Operator’s Manual TABLE OF CONTENTS ..................ERVICE NFORMATION ...................... ARRANTY ......................REFACE ..................ABLE OF ONTENTS ....................IST OF IGURES ..................1 NTRODUCTION System Overview....................1 1.1.1 System Description ...............1 System Features....................2 Software Overview ....................2 ................3 HEORY OF PERATION... - Page 8 A9-0726-01 Rev. A AW1008 Operator’s Manual Hazards ......................11 3.5.1 Electrical Shock Hazards ............11 3.5.2 Process Gas Hazards ..............11 3.5.3 Process Byproduct Hazards............12 3.5.4 Oxygen Hazards .................12 3.5.5 Thermal Hazards.................13 & P ..............15 OWER OWER Overview......................15 Utilities Inspection..................... 16 Front Control Panel ...................
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Page 9: List Of Figures
A9-0726-01 Rev. A AW1008 Operator’s Manual LIST OF FIGURES Process for Production screen, basic functions............. 25 Figure 5.1: Process for Engineer screen................. 26 Figure 5.2: WTM Manual Operation..................27 Figure 5.3: Process Monitor screen ..................28 Figure 5.4:... - Page 10 A9-0726-01 Rev. A AW1008 Operator’s Manual Page Intentionally Left Blank...
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Page 11: Introduction
The system has two modules: The main unit contains the processing chamber, controller, RF generator, and wafer handling system. The second unit contains the vacuum pump. Allwin21 provides, as an option, the above two modules as an integrated system. The vacuum pump is available from Allwin21 as a separate option. -
Page 12: System Features
This document provides a general discussion of the function and calibration of the control software. The control software allows full control and diagnostics of the Allwin21 system. In addition, it allows the creation of recipes for automated control of all aspects of the... -
Page 13: Theory Of Operation
2.1.2 MAIN COMPUTER The main computer is the central control for all Allwin21 functions. The unit sequences all mechanical and pneumatic functions, monitors sensors and the touch screen display, calculates various quantities to derive operational parameters, stores process recipes, and assists with troubleshooting when required. -
Page 14: Plasma Generator
A9-0725-01 Rev. A AW1008 Operator’s Manual 2.1.5 PLASMA GENERATOR The plasma generator is a part of the reaction chamber. A magnetron provides the microwave energy via a waveguide to the ceramic/quartz reaction chamber, where the plasma is created. 2.1.6 AC POWER DISTRIBUTION 208VAC 3-Phase power enters through a power/control enclosure at the rear of the system. -
Page 15: Pneumatic/Mechanical Components
A9-0725-01 Rev. A AW1008 Operator’s Manual PNEUMATIC/MECHANICAL COMPONENTS The major pneumatic/mechanical components consist of the vacuum system, mass flow controller(s), pneumatics, wafer handling system, and the plasma generation system. Pneumatics are enabled only when the computer has determined that the system is in an appropriately safe state. -
Page 16: Pneumatic System
A9-0725-01 Rev. A AW1008 Operator’s Manual 2.3.3 PNEUMATIC SYSTEM Nitrogen or Clean Dry Air (CDA) is used to power the pneumatics system. This includes the bellows valves used in the vacuum system. The entire pneumatics system is enabled by a solenoid that is under computer control. The solenoid only allows the system to pressurize when conditions are safe. -
Page 17: Safety Precautions
Figure 3: OVERVIEW This section provides information intended to prevent damage to the Allwin21 system and injury to operation and maintenance personnel. All hazards are not covered, only those most prevalent and serious. Your full understanding of the capabilities and limitations of this equipment is necessary for safe and efficient operation. -
Page 18: Notes, Cautions And Warnings
AW1008 Operator’s Manual NOTES, CAUTIONS AND WARNINGS When operating and maintaining the Allwin21 system, the following safety procedures and precautions must be followed to avoid certain hazards. Observe all warnings and cautions. Their purpose is to protect personnel from injury and long term health hazards and to protect the machine from damage. -
Page 19: Safety Features
A9-0725-01 Rev. A AW1008 Operator’s Manual SAFETY FEATURES The Allwin21 system incorporates several features to prevent injury either to wafers or personnel. There is a watchdog timer on the interface board. This shuts the system down if the communication between the computer and the system is interrupted or the software freezes. -
Page 20: Gas Handling
AW1008 Operator’s Manual GAS HANDLING Be aware of the following cautions when working with gases in the Allwin21 system: Only use gases that have been specified for use in the Allwin21 system. Typically these include 02, CF CAUTION Allwin21 Corp. -
Page 21: Hazards
Safety interlocks are installed to shut off electrical power to the system when the cover is removed. Only qualified troubleshooting maintenance technicians should be permitted to work on an uncovered Allwin21 system. Allwin21 assumes no liability for injuries or deaths caused by operation with interlocking devices defeated. Caution and safety measures characteristically taken with AC and DC circuitry are imperative. -
Page 22: Process Byproduct Hazards
A9-0725-01 Rev. A AW1008 Operator’s Manual 3.5.3 PROCESS BYPRODUCT HAZARDS The process byproducts found in the chamber surfaces of the Allwin21 system should be treated as potentially hazardous. WARNING Avoid skin, eye, and respiratory contact with process byproducts. Some byproduct chemistries have hazardous characteristics. -
Page 23: Thermal Hazards
A9-0725-01 Rev. A AW1008 Operator’s Manual 3.5.5 THERMAL HAZARDS The quartz tray and isolation tube must be allowed to cool down before they are serviced. Allow 20 to 30 minutes for the quartzware to cool before touching. Burns may result if the quartzware is touched before the cooling time elapses. - Page 24 A9-0725-01 Rev. A AW1008 Operator’s Manual Page Intentionally Left Blank...
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Page 25: Power-Up & Power-Down
Figure 4: OVERVIEW This section describes how to power up and power-down the Allwin21 system. Prior to applying power to the system, a visual inspection of the facilities is required. It is also recommended that you read the list of safety precautions given in the Safety Precautions section of this manual. -
Page 26: Utilities Inspection
A9-0725-01 Rev. A AW1008 Operator’s Manual UTILITIES INSPECTION Inspect the system utility connections and sources before switching on the Allwin21 system. Visually inspect the following utilities to make sure connections are secure: Electrical power. Gas-handling inlets. Nitrogen or Clean Dry Air (CDA) inlet for system pneumatics. -
Page 27: Front Control Panel
AW1008 Operator’s Manual FRONT CONTROL PANEL The controls and indicators used for system operation are located on the front of the Allwin21 system. These controls and indicators are: Power ON / OFF buttons Alarm Indicator light Emergency OFF button... -
Page 28: Power-Up Procedure
Ensure that the system power input circuit breakers and power switches are set Step 1. as indicated below: The wall circuit breaker(s) for the computer and Allwin21 system are ON. Ensure all gas valves are turned off. Step 2. -
Page 29: System Operation
MAINTENANCE During maintenance operation, observe the following precautions: Do not use replacement parts that are not provided or recommended by Allwin21 Corporation. CAUTION Allwin21 Corporation is not liable for any damage or injury that may occur when unauthorized parts are used. -
Page 30: Power-Down Procedure
A9-0725-01 Rev. A AW1008 Operator’s Manual POWER-DOWN PROCEDURE The Allwin21 system may be left with power on continuously, unless maintenance to the system requires removing power to the system. NOTE Allwin21 Corp. recommends leaving the computer on when the system is not in use. -
Page 31: Basic Operation
The control software program is also used to create, delete, copy, modify and store the recipes and to execute system diagnostics. The full control of the Allwin21 system is done through the control software and the front control panel. To get an understanding of how to operate the Allwin21 system, you must first be familiar with the use of the menu screens to execute and interrupt a cycle in Run mode. -
Page 32: Software Features
The control software runs on any Pentium class PC computer with a parallel (printer) port. The computer interfaces to the Allwin21 system with only 1 cable, the control interface cable. The interface board inside the machine that translates the computer commands to control the machine has a watchdog timer. - Page 33 A9-0725-01 Rev. A AW1008 Operator’s Manual USING THE MENU SCREENS This section is a general description of how to use the controls of the AW-ASH Control Software. It will cover the use of buttons, editable fields, data display fields and filename lists.
- Page 34 A9-0725-01 Rev. A AW1008 Operator’s Manual The number of filenames the Filename List can display is limited to its size on the screen. However, there may be more filenames for that type of list than can be displayed at one time.
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Page 35: Runnig A Lot
The controller uses a set of operating instructions known as recipes to control processing wafers in the Allwin21 system process chamber. These recipes are created by the Process Engineer to control the parameters of the processing cycle. The Engineer will also create a wafer transfer sequence for the recipe to move the wafers to the different stations. - Page 36 A9-0725-01 Rev. A AW1008 Operator’s Manual Figure 5.2: Process for Engineer screen Location: Main Menu Process for Engineer STEP 1. SELECT A SEQUENCE The first step for using the control software is to select a sequence. Select a sequence from the list of sequences in the column “Auto File”. A sequence name that is at the top of this column and is highlighted means it is selected.
- Page 37 A9-0725-01 Rev. A AW1008 Operator’s Manual STEP 3. PLACE THE CASSETTES ON THE MACHINE Place a cassette with wafers in it on the SEND cassette station and an empty cassette on the RECEIVE cassette station. The cassette station designated as the Send Cassette Station is defined as the first station in the sequence.
- Page 38 A9-0725-01 Rev. A AW1008 Operator’s Manual If no wafers are found, then the robot will remove a wafer from slot one of the SEND cassette and place it in the chamber. When the wafer has been placed inside the process chamber, the Process Monitor screen will be displayed and the process control will begin processing the wafer according to the selected Recipe.
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Page 39: Stop Process
A9-0725-01 Rev. A AW1008 Operator’s Manual STOP PROCESS A process may be interrupted and stopped by pressing the ESC key on the keyboard or clicking on the EXIT button. A wafer transfer may be stopped by clicking on the STOP button. - Page 40 A9-0725-01 Rev. A AW1008 Operator’s Manual Page Intentionally Left Blank...
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Page 41: System Requirements
A9-0725-01 Rev. A AW1008 Operator’s Manual A. SYSTEM REQUIREMENTS Flow Rate and Pressure Requirements Bulkhead Bulkhead Name Flow Pressure Fitting Comments 0-10 SLPM 20-30 psi 1/4" Male VCR Gas #1 (in use) 0-1 SLPM 20-30 psi 1/4" Male VCR Gas #2 (in use) 0-1 SLPM 20-30 psi... -
Page 42: Manual Revision History
A9-0725-01 Rev. A AW1008 Operator’s Manual B. MANUAL REVISION HISTORY Date Description 07/24/09 Initial Release... -
Page 43: Index
A9-0725-01 Rev. A AW1008 Operator’s Manual INDEX Cabinet Exhaust.............18 Quartzware Tray .................13 Facility Scrubber............. 7 Requirements Electrical ..............31 Exhaust ..............31 Pressure..............31 Gas (See Process Gas)........4, 9, 12, 16 System..............31 Interlocks............... 2, 4, 11 Safety........2, 4, 7, 8, 9, 10, 11, 12, 13, 15 Screens Main Menu...............
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