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Tegal 90Xe
Allwin21 Tegal 90Xe Manuals
Manuals and User Guides for Allwin21 Tegal 90Xe. We have
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Allwin21 Tegal 90Xe manual available for free PDF download: Installation Supplement Manual
Allwin21 Tegal 90Xe Installation Supplement Manual (53 pages)
Brand:
Allwin21
| Category:
Industrial Equipment
| Size: 1 MB
Table of Contents
Service Information
2
Warranty
3
Preface
5
Table of Contents
6
Table of Figures
8
Introduction
10
Overview
10
Allwin21 Modifications
10
Control Interface Board
10
Equipe Robot Arm
11
Figure 2-2: Equipe Robot Arm
11
Equipe Robot
12
Wafer Alignment Station
12
Figure 2-3: Equipe Robot
12
RF Generator
13
Figure 2-4: Wafer Alignment Station
13
Cassette Holder
14
Figure 2-5: RF Generator Supply
14
Figure 2-6: Adjustable Cassette Holder
14
Software Controller and Display
15
Figure 2-7: Software Computer Controller
15
Figure 2-8: Display Panel with AW-TGL Software
15
Safety Precautions
17
Overview
17
Notes, Cautions and Warnings
17
Utilities Inspection
18
System Operation
19
Maintenance
19
Gas Handling
20
Hazards
21
Electrical Shock Hazards
21
Process Gas Hazards
21
Process Byproduct Hazards
21
Oxygen Hazards
22
Thermal Hazards
22
Mechanical Hazards
23
RF Radiation Hazards
23
Installation Requirements
25
Purchaser's Responsibility
25
Installation Process Overview
25
Installation Procedures
25
Allwin21 Service
26
Field Service Installation
26
Training
26
Site Requirements
26
Facility Preparation
27
Space Requirements
27
Front Cover Specification
27
Facilities
28
Utility Connections
28
Electrical
28
Air Conditioning
28
Robot Vacuum
29
Adequate Tubing Size
29
Figure 5-1: Gas Pressure and Flow Rate Relationship for Different Tube Diameters
29
CDA (Pneumatic)
30
Figure 5-2: Recommended Pneumatic Configuration
31
Setup
33
Unpacking and Inspecting
33
Uncrating
33
Inspection
34
Unpacking
34
Connecting Facilities
34
Initial Start up
37
Overview
37
Start-Up Procedure
37
Robot Setup
39
Initial Inspection of Equip Robot
39
Facilities Check
39
Robot Check
39
Figure 10-1: Robot Mechanical Parts
39
System Visual Check
40
Clean System Check
40
Robot Alignment
40
Robot Vacuum
40
Robot Maintenance
40
Adjusting the Vacuum Sensor (Equip Robot)
41
Figure 10-2: Adjusting the Vacuum Sensor
41
6.3 Safety Verification
42
Appendix
44
A: Problem Reporting
44
B: How to Order / Return Equipment
46
C: Maintenance Plans
51
D: Manual Revision History
52
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