Operation Notices
Precautions...........................................................................................
Screen Operation Guide
Display..................................................................................................
Operating Modes..................................................................................
Maintenance
Malfunction
Troubleshooting.....................................................................................
Installation Notice
Installation
Vacuum pumping..................................................................................
Leakage detection.................................................................................
Test operation.......................................................................................
Attachment
IDU Wiring Diagram..............................................................................
ODU Wiring Diagram............................................................................
1
6
7
8
9
10
11
12
13-14
15-17
18
19
20
20
21
22-26
27-29
30
30
31
31
32
33-34
35-36
37
38
39