Gamma Vacuum DIGITEL Instruction Manual
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Gamma Vacuum DIGITEL Instruction Manual

Tspq controller
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DIGITEL TSPq controller
Instruction manual
www.gammavacuum.com
900035_B
Original instructions

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  • Page 1 DIGITEL TSPq controller Instruction manual www.gammavacuum.com 900035_B Original instructions...
  • Page 2 Copyright notice © Gamma Vacuum 2021. Part of the Atlas Copco Group Trademark credit Gamma Vacuum and the Gamma Vacuum logo are trademarks of 2700 4th Avenue East, Ste 100, Shakopee, MN 55379, USA Disclaimer The content of this manual may change from time to time without notice.

  • Page 3: Table Of Contents

    5.2. Number of TSP pump connectors........14 5.3. DIGITEL TSPq standalone configuration......14 5.4.
  • Page 4 Ethernet communication......... 33 10.1.
  • Page 5 Figure 3: Ambient sputter shield..........12 Figure 4: DIGITEL TSPq standalone configuration......14 Figure 5: DIGITEL TSPq + Remote TSP controller configuration.

  • Page 6: Safety And Compliance

    900035_B - Safety and compliance Safety and compliance 1.1. Definition of Warnings and Cautions NOTICE: For safe operation from the start, read these instructions carefully before you install or commission the equipment and keep them safe for future use. Read all the safety instructions in this section and the rest of this manual carefully and make sure that you obey these instructions.

  • Page 7: Safety Symbols

    900035_B - Safety and compliance 1.2. Safety symbols The safety symbols on the products show the areas where care and attention is necessary. The safety symbols that follow are used on the product or in the product documentation. Warning/Caution An appropriate safety instruction must be followed or caution to a potential hazard exists.
  • Page 8 900035_B - Safety and compliance WARNING: AVERTISSEMENT : 警告: Heavy object. To avoid Objet lourd. Pour éviter 重量のある装置、部品。 muscle strain or back les blessures 筋挫傷、背中や腰の怪我 injury, use lifting aids musculaires ou を避けるために、取り外 and proper lifting dorsales, utilisez des しや交換はリフトを使用 techniques when engins de levage et des した適切な吊り上げ方法...

  • Page 9: General Information

    900035_B - General information General information 2.1. Approvals TSP products are shown to meet the intent of Directive 89/336/EEC for Electromagnetic Compatibility and Low-Voltage Directive 73/23/EEC for product Safety. Compliance was demonstrated to the following specifications as listed in the Official Journal of the European Communities: ▪...

  • Page 10: Introduction

    WARNING: Do not use unauthorized parts. Such parts may compromise safety. Contact Gamma Vacuum with any questions. The TSP is designed to be used in high to extreme vacuum environments, but it can be operated over a wide range of pressures. TSPs effectively remove chemically active gases and are excellent in combination with an ion pump.

  • Page 11: Liquid Nitrogen (Ln2) Cryoshroud

    900035_B - Introduction Figure 1. Titanium Sublimation Pump (TSP) 3.2. Liquid Nitrogen (LN2) cryoshroud A cryoshroud provides capture and hold of water (H O) and carbon dioxide ) pumping when cooled with liquid nitrogen (LN It provides a surface for sublimated titanium while preventing line of sight migration of titanium (Ti).

  • Page 12: Figure 3: Ambient Sputter Shield

    900035_B - Introduction Figure 3. Ambient sputter shield 900035_B Page 12...

  • Page 13: Installation

    Inspect for any obvious damage If the equipment is damaged in any way, a claim should be filed with the carrier immediately and notification given to Gamma Vacuum. If equipment must be returned for inspection or repair, obtain authorization from Gamma Vacuum prior to shipping.

  • Page 14: Controller Configuration

    ▪ No connectors. Remote connection J113 connector installed. Used in combination with Remote TSP Controller. See DIGITEL TSPq + Remote TSP controller configuration on page 15 for details. 5.3. DIGITEL TSPq standalone configuration Figure 4. DIGITEL TSPq standalone configuration 900035_B Page 14...

  • Page 15: Digitel Tspq + Remote Tsp Controller Configuration

    900035_B - Controller configuration 5.4. DIGITEL TSPq + Remote TSP controller configuration Figure 5. DIGITEL TSPq + Remote TSP controller configuration 900035_B Page 15...

  • Page 16: Front Panel

    900035_B - Front panel Front panel Figure 6. Front panel Front panel contains: ▪ Main power on/off rocker type switch - Hard switch, when in off position main power is completely cut off from the unit. ▪ 7” TFT WVGA (800x480) Color LCD, 16:9 aspect ratio, touchscreen - Primary user interface.

  • Page 17: Touchscreen User Interface

    900035_B - Touchscreen user interface Touchscreen user interface 7.1. Home screen Tap the screen to show "Turn ON" and "MENU." "MENU" takes you to NEG recipe selection, custom recipe setup, and display setup. Figure 7. Home screen Line one indicates TSP status. Following are possible statuses: ▪...

  • Page 18: Tsp Setup

    900035_B - Touchscreen user interface Line three indicates status of the currently selected TSP filament. See setup on page 18 for details. Figure 8. Home screen (control buttons visible) Available setup: Menu - Invokes main menu. Exit - Clears screen/hides control buttons. TSP Setup - Invokes respective TSP setup screen.

  • Page 19: Display Setup

    900035_B - Touchscreen user interface Filament - Selects active filament (1-4). This filament is used in the sublimation process. The filament status is displayed in brackets next to filament number. Filament status reads (ok) if at the end of the last sublimation cycle, filament current reached at least 80% of the target current value.

  • Page 20: Digital Input Setup

    900035_B - Touchscreen user interface 7.4. Digital input setup Figure 11. Digital input setup screen Total of four digital inputs on connector J104. Digital Input 1 (J104, pin 22) Digital Input 2 (J104, pin 23) Digital Input 3 (J104, pin 24) Digital Input 4 (J104, pin 25) By default all digital inputs are turned off (function set to off).

  • Page 21: Serial Port Setup

    900035_B - Touchscreen user interface 7.5. Serial port setup Figure 12. Serial port setup screen Node Address - Configures unit node address (1-255). Gamma protocol command packet structure requires node address. Serial Standard - Selects serial standard: RS-232, RS-485HD (two wire mode), and RS-485FD (four wire mode).
  • Page 22 900035_B - Touchscreen user interface Link state - Information only. Supported Protocols: Gamma Protocol (Running on TCP port 23) 900035_B Page 22...

  • Page 23: Rear Panel

    Connector J115 NET (Profibus, optional) Standard Sub-D 15-pin female connector. Connection to Profibus interface. For Profibus information reference Profibus user manual, document 900033, available on Gamma Vacuum website under download section. Connector J510 OUTPUT-1 Connector type Amphenol MIL-DTL-5015, P/N 97-3102A-24-22S(946)’.
  • Page 24 900035_B - Rear panel Connector J104, Misc I/O Standard Sub-D 37-pin female connector. Connector J112, SER Standard Sub-D 9-pin female connector. Connection to serial interface. Supported serial standars are RS-232, RS-485 full duplex (four wire setup), and RS-485 half duplex (two wire setup). Table 1.
  • Page 25 900035_B - Rear panel Description Not connected Not connected Reserved - do not use, ground ANALOG OUT 1 - output, analog, range 0 to +10 V d.c. Ground ANALOG OUT 2 - output, analog, range 0 to +10 V d.c. Ground ANALOG OUT 3 - output, analog, range 0 to +10 V d.c.

  • Page 26: Serial Communication

    900035_B - Serial communication Serial communication Following serial protocols are supported: Gamma Protocol 9.1. Gamma protocol over serial connection Gamma protocol command packet structure over serial connection: The command packet is made up of at least five fields. The minimum command packet (single command with no data) is 11 bytes long.

  • Page 27: Gamma Protocol Response Packet Structure Over Serial Connection

    900035_B - Serial communication Field Size Comment TERMINATOR 1 ASCII hex character ASCII carriage return ASCII value of carriage return character placed at the end of a command packet. There is not a space between the checksum and terminator field. Note: Checksum field can be bypassed by specifying “00”.

  • Page 28: Crc Checksum Example

    900035_B - Serial communication Table 5. Response codes Code Description Command executed successfully. Bad command format. Returned if command syntax is not valid. Bad command code. Returned if command code is not valid/does not exist. Bad checksum. Returned if checksum is not valid/does not match calculated checksum.

  • Page 29: Gamma Protocol Commands

    0x122 mod 0x100 and result is 0x22. This is the command checksum. 2. The command to be sent to the unit is, ‘~ 01 01 22’ + cr 3. The unit response is, ’01 OK 00 DIGITEL TSPq 65’. 4. To verify checksum for the response, perform similar calculations.
  • Page 30 900035_B - Serial communication Table 8. Gamma protocol commands Data Data/Response Description Response Command Field Description SYS GET MODEL DIGITEL TSPq Get controller model string. SYS GET FIRMWARE Where: SW Version VERSION X.X is firmware X.XX Get firmware version. version number...
  • Page 31 900035_B - Serial communication Data Data/Response Description Response Command Field Description Turns on TSP R is TSP (1-2) programmed mode. Where: TSP GET ACTIVE FILAMENT R is TSP (1-2) Reads active TSP filament. N is the active filament. Where: TSP GET SUBLIMATION R is TSP (1-2) TARGET LEVEL X is number of amps/...
  • Page 32 900035_B - Serial communication Data Data/Response Description Response Command Field Description Where: R is TSP (1 or 2) M is cycle period in minutes (time between fires) N is number of cycles X.XE-XX is high R, M, N, TSP SET PARAMETERS pressure limit, must E-XX, Configures TSP...

  • Page 33: Ethernet Communication

    Command - SYS GET MODEL, 0x01 Tx – “cmd 01” + cr Rx – “OK 00 DIGITEL TSPq”+ cr + cr +lf + “>” characters. Note: ‘cr’ stands for carriage return ASCII character, ‘lf’ stands for line feed ASCII character.
  • Page 34 900035_B - Ethernet communication Field Size Comment ASCII printable DATA As needed characters only Data field(s) are for any commands that have a data value. Not all commands require data field. If command has more than one data value associated with it, such as setting an X and a Y value, the command field could be followed by two data fields (X and Y) separated by a comma.

  • Page 35: Technical Specifications

    900035_B - Technical specifications Technical specifications Table 9. Technical specifications 460x208x130 mm, length x width x height (3U high, 1/2 Dimensions (maximum) rack wide) Shipping Weight (maximum) 16 kg (36 lbs) Operating Temperature 0 to 40 °C (free airflow around the unit is required) Altitude Sea level to (2000 m) 6560 ft Humidity...

  • Page 36: Warranty And Service

    Gamma Vacuum unless reduced to writing and approved by an officer of Gamma Vacuum. Gamma Vacuum may at any time discharge its warranty as to any of its products by refunding the purchase price and taking back the products.

  • Page 37: Service

    900035_B - Warranty and service ▪ Part number ▪ Serial number ▪ Detailed description of the vacuum system hardware ▪ Detailed description of the vacuum system process (gas species introduced, ultimate pressure, operational pressure) ▪ Detailed reason for the warranty claim To expedite this process, please forward this information to service@gammavacuum.com.

  • Page 38: Returning Material

    Return, repairs, or credit will not be authorized until this form has been signed and returned. Note: Prior to returning any materials, Gamma Vacuum must issue an RMA. The RMA number should be clearly labeled on all shipping information and packages 900035_B...

  • Page 39: Disposal

    900035_B - Disposal Disposal Dispose of the pump and any components and accessories safely and in accordance with all local and national safety and environmental requirements. Particular care must be taken with any components that have been contaminated with dangerous process substances. Take appropriate action to avoid inhalation of any particles that may be present in the pump.
  • Page 40 EU Declaration of Conformity Gamma Vacuum Part of the Atlas Copco Group Documentation Officer 2700 4 Ave E, Suite 100 Jana Sigmunda 300 Shakopee, MN 55379 Lutín , 78349 Czech Republic T: +42(0) 580 582 728 documentation@vt.atlascopco.com The product specified and listed below...
  • Page 41 2021-04-21 You must retain the signed legal declaration for future reference This declaration becomes invalid if modifications are made to the product without prior agreement. Signed for and on behalf of Gamma Vacuum Ian Keech, VP Engineering Marcus Thierley...
  • Page 42 ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION EMC (EU, UK): Class A/B Industrial equipment Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to radio reception in such environments. RoHS (EU, UK): Material Exemption Information This product is compliant with no Exemptions REACH (EU, UK) This product is a complex article which is not designed for intentional substance release.
  • Page 43 2700 4th Avenue E, Suite 100, Shakopee, MN 55379, USA. 1 800 237 3603, 952 445 4841 1 952 445 7615 info@gammavacuum.com www.gammavacuum.com © Gamma Vacuum 2020. | Part of the Atlas Copco Group...

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