900026_F - Safety and compliance Safety and compliance 1.1. Definition of Warnings and Cautions NOTICE: For safe operation from the start, read these instructions carefully before you install or commission the equipment and keep them safe for future use. Read all the safety instructions in this section and the rest of this manual carefully and make sure that you obey these instructions.
900026_F - Safety and compliance 1.2. Safety symbols The safety symbols on the products show the areas where care and attention is necessary. The safety symbols that follow are used on the product or in the product documentation. Warning/Caution An appropriate safety instruction must be followed or caution to a potential hazard exists.
900026_F - Safety and compliance WARNING: AVERTISSEMENT : 警告: Heavy object. To avoid Objet lourd. Pour éviter 重量のある装置、部品。 muscle strain or back les blessures 筋挫傷、背中や腰の怪我 injury, use lifting aids musculaires ou を避けるために、取り外 and proper lifting dorsales, utilisez des しや交換はリフトを使用 techniques when engins de levage et des した適切な吊り上げ方法...
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4. Do not operate the SPCe without a proper electrical ground or near water. The SPCe may be damaged and its safety reduced, if it is operated outside specifications. 5. In the event that this unit is not used in accordance with its intended purpose of controlling an ion pump, safety and protection requirements are subjected to change and not specified by the manufacturer.
24 V d.c. power supply (depends on the ordered part number) supplied with the SPCe. It is equipped with an universal power input too permit operation from 85 to 260V a.c., 50 or 60 Hz. It is 1/4 rack and 2u high with an optional half rack or full rack mount kit.
3.1. Inspect for any obvious damage If the SPCe is damaged in any way, a claim should be filed with the carrier immediately and notification given to Gamma Vacuum. If equipment must be returned for inspection or repair, obtain authorization from Gamma Vacuum prior to shipping.
900026_F - Installation Installation ▪ The SPCe can be mounted in a standard 19 in. (48.3 cm) rack or used as a free-standing unit. Optional 19-in. Rack Adapter Kit (part 310057) and Half-Rack Adapter Kit (part 360242) are available. ▪ When installing, make sure the rear power cord is accessible.
900026_F - Operation Operation 5.1. Front panel Figure 1. Front panel LED indicators and LCD display LEDs indicate the status of the main power, high voltage, and the set point. The LCD displays operation parameters, messages, and menu options. During ion pump operation, the screen displays voltage, current, and pressure.
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Starting the ion pump 1. If the ion pump size has not been entered into the System Menu, enter the ion pump size. The SPCe will not start until the ion pump size has been entered. 2. Press and hold High Voltage on the front panel for 1-2 seconds.
Operation parameters, messages, and menu options are shown on the LCD display. 6.1. Display during ion pump operation When the ion pump is in operation, the SPCe displays voltage, current, and pressure. Figure 2. Display during ion pump operation Accessing Main Menu Settings The main menu categories are: ▪...
▪ When the off point value is set to 0.1e-10, the off point value will be ignored, and once the setpoint is active, the setpoint will remain active independent of the pressure thereafter. ▪ Error: The setpoint will turn on when the SPCe has an error condition. Figure 7. Setpoint function config Figure 8. Setpoint...
The default value is one. Changing this value will have a linear relationship with respect to pressure. This setting can be changed, for example, when calibrating the SPCe pressure to a known gauge pressure. Figure 9. Factor Pressure is calculated using the following current-to-pressure calculation: Where: ▪...
The default is 2 mA per l/s. Figure 12. Current Foldback Voltage Feature With the Foldback feature enabled, the SPCe will reduce the voltage once a specified pressure is reached. The specified pressure can be set in the range of 1x10 to 1x10 Torr.
900026_F - Display menu ▪ Current: 1VDC per 10uA ▪ Current: 1VDC per 100uA ▪ Current: 1VDC per 1mA ▪ Current: 1VDC per 10mA ▪ MidiVac Emulation The logarithmic output calculates the log base 10 of the selected measurement (current or pressure) and adds an offset in order to make the voltage output positive.
HV when input power is restored. This is independent on the HV on/off state. Normally, when DC power is applied to the SPCe, the SPCe does not start until the Power button is pressed. In the case where power loss recovery criteria are satisfied (see above), the SPCe will turn on when DC power is applied and start high voltage.
Figure 21. RS protocol Mode There are three user input modes to the SPCe. They are changed by selecting Mode on the Comm menu. Select the type of communication for the controller. ▪ Local: The controller only accepts change commands made via the keypad.
900026_F - Display menu Figure 22. Mode Address This parameter is used to set the SPCe serial address. The default value is 5. Figure 23. Address Handshaking This parameter is used to set serial handshaking. The default value is set to disabled.
This parameter is used to set the serial data bits of the SPCe. The default value is 8. Data and stop bits This parameter is used to set the stop bits of the SPCe. The default value is 900026_F Page 25...
DHCP & IP address (Addr) The SPCe is capable of acting as a DHCP (Dynamic Host Configuration Protocol) client. When enabled as a DHCP client, the SPCe will obtain needed network information from a DHCP server. When DHCP is disabled, the user may change the SPCe Ethernet address.
900026_F - Display menu Gateway When DHCP is disabled, the user may change the SPCe Ethernet gateway address. Figure 33. Gateway address MAC address (MAC) This screen shows the controller’s MAC address. Figure 34. MAC address 6.8. Configuration menu (Config) Figure 35.
Figure 37. Pump name LCD timeout The SPCe’s LCD back light can be dimmed to extend the life of the display. By enabling this parameter, the back light is dimmed after a specified amount of time has passed since the last key press. This feature is off by default.
Figure 42. High pot Supply Jump Start (Jump Mode) Enabling Jump Start causes the SPCe to increase the voltage to the set value when initially starting the ion pump. This causes the ion pump to potentially arc from cathode to anode, which creates electrons within the ion pump.
Figure 45. Technician features Events During operation, the SPCe records various vacuum events that occur (short circuit, excessive arcing, etc). These event are recorded and viewable. The event description, time, voltage, current, and pressure are recorded.
900026_F - Display menu Figure 46. Events Update firmware The SPCe firmware can be updated via serial cable or ethernet. The latest version of SPCe software can be download from www.gammavacuum.com. Reference Service Bulletin 00.056.092 in that download for full details.
900026_F - Display messages Display messages During operation, the SPCe may detect and report a number of possible operating conditions. For example, the SAFECONN connector may become disconnected, the vacuum may fail, or the ion-pump may have a problem. These conditions are reported by the following messages on the display:...
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900026_F - Display messages Display Message Display Meaning 31: HV Control Error Supply HV control mechanism malfunctioning. On/Off state is malfunctioning. 32: Current Control Err Supply current control mechanism malfunctioning. 33: Current Measure Err Supply current measuring mechanism malfunctioning. 34: Voltage Control Err Supply HV control mechanism malfunctioning.
900026_F - Back panel operation Back panel operation Figure 49. Back panel view 8.1. Remote hardware option (J1) Figure 50. Remote hardware The SPCe can be controlled by using the miscellaneous I/O 15-pin sub-d connector. Pin number Function Setpoint relay common Setpoint relay NC...
2. The SPCe unit is in error mode. Note: There is a delay after turning on the HV until the SPCe considers the calculated pressure reading to be valid. This reading can take up to one minute. The setpoint relay will not be driven during this period.
Pin 12 is a buffered voltage output that is proportional to the HV output current and can be used to monitor the HV current. The scaling factor defaults to 1 V per 1 mA out. This factor is scaleable from the front panel of the SPCe. Logarithmic Current (i) Examples: Example 1...
The following power supply pins are available on the misc. I/O connector. These power supplies are not protected and should be used with care. Do not attempt to power the SPCe by connecting external power supplies to these pins. ▪ Pin 5 is connected to (approximately) –12 V.
Figure 53. Ethernet connector A Telnet session may be established to port TCP 23, allowing remote control of the SPCe in the same way as serial communications link. Once the Telnet session is established, commands may be issued in the format: spc <two-digit command code>...
9.4. Cabling The SPCe functions as a DTE (Data Terminal Equipment) device. When the controller is connected to another DTE device (such as a personal computer), a null modem serial cable is required to connect the devices. The null modem cable swaps the signal and control lines so that receive and transmit are properly connected.
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Start is the first byte in the command packet and tells remote controllers to start decoding a message. It should be implemented as a #define, so it can be changed if necessary. As a #define, the character is rarely changed because it is hard coded into the SPCe. <SPACE> 2. ADDRESS...
Command packet in ASCII hexadecimal “7e 20 30 35 20 30 31 20 30 30 0D” Response to “0x01” - GET CONTROLLER MODEL “05 OK 00 DIGITEL SPCe 46<CR>” Where “<CR>” is the return carriage character. Note: Command checksum is set to “00” to bypass the checksum field verification by the controller.
▪ and a carriage return terminator. 3. RESPOND: The controlling computer is in count-down timer mode waiting for a response from the SPCe. All controllers must respond within 500 milliseconds once a valid command has been received. A valid response could be an error code indicating that the controller is BUSY with a previous command or an acknowledging response packet.
For non-error conditions, this field returns a status byte/word to the controlling computer, which is defined in the SPCE and can vary with the needs of individual commands within a unit, as well as varying from unit to unit. Data must be in ASCII printable format.
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900026_F - Serial (J3) and ethernet (J2) operation Description Data field Response Data/Response description command MASTER RESET No response due to (legacy) initialization of controller Executes a complete software reset (legacy MPC support command). SET ARC DETECT "YES" or "NO" Enables/disables arc detection.
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900026_F - Serial (J3) and ethernet (J2) operation Description Data field Response Data/Response description command Sets the calibration factor that modifies pressure. SET AUTO-RESTART "YES" or "NO" Sets supply to automatically restart on power GET AUTO RESTART "YES" or "NO" Reads auto restart status of supplies.
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900026_F - Serial (J3) and ethernet (J2) operation Description Data field Response Data/Response description command GET ANALOG MODE 0-10 0 = Logarithmic pressure 1 = Logarithmic current Reads the current/ (7 is MPC pressure analog only) 2 = Volts per 1.0uA 3 = Volts output mode.
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Displays the mode 1 = enable auto HV restart of Auto Recovery. 2 = enable auto power recovery SET_FIRMWARE_UPDATE Sets the SPCe to flash load mode for firmware updates. SET COMM MODE N is the mode 0 = Local Sets the...
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900026_F - Serial (J3) and ethernet (J2) operation Description Data field Response Data/Response description command GET/SET ETHERNET None or None or GTWY "X.X.X.X" "X.X.X.X" (get mode) Gets/Sets Ethernet (set mode) IP gateway address. If no parameters are specified, the current values are returned.
0x122 mod 0x100 and result is 0x22. This is the command checksum. 3. The command to be sent to the unit is, ‘~ 01 01 22’ + carriage return. 4. The unit will respond with, ’01 OK 00 DIGITEL SPCe 48’ 5. To verify checksum for the response, perform similar calculations, 6.
900026_F - Serial (J3) and ethernet (J2) operation Characters Value (Decimal) Value (Hex) 0 X 30 0 X 31 space 0 X 20 0 X 30 0 X 31 space 0 X 20 Total = 290 Total = 0 X 122 Table 5.
LCD screen and finish of the unit. 10.1.2. Service requests Upon notification, Gamma Vacuum will identify the level of service required. To assist in this process, please provide the following information in as much detail as possible: ▪...
Gamma Vacuum, free from defects in material and workmanship. As Buyer’s sole exclusive remedy under this warranty, Gamma Vacuum agrees to either repair or replace, at Gamma Vacuum’s option and free of parts charge to Buyer, and part or parts which, under proper and normal conditions of use, prove to be defective within twelve (12) months from the date of receipt by buyer.
Upon notification, Gamma Vacuum will investigate warranty claims. To initiate a warranty claim, please contact Gamma Vacuum or a representative of Gamma Vacuum directly. To assist in this evaluation, please provide the following information in as much detail as possible: ▪...
900026_F - Disposal Disposal Dispose of the pump and any components and accessories safely and in accordance with all local and national safety and environmental requirements. Particular care must be taken with any components that have been contaminated with dangerous process substances. Take appropriate action to avoid inhalation of any particles that may be present in the pump.
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EU Declaration of Conformity Gamma Vacuum Documentation Officer Part of the Atlas Copco Group Jana Sigmunda 300 2700 4 Ave E, Suite 100 Lutín , 78349 Shakopee, MN 55379 Czech Republic T: +42(0) 580 582 728 documentation@vt.atlascopco.com The product specified and listed below...
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2021-04-21 You must retain the signed legal declaration for future reference This declaration becomes invalid if modifications are made to the product without prior agreement. Signed for and on behalf of Gamma Vacuum Ian Keech, VP Engineering Marcus Thierley...
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ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION EMC (EU, UK): Class A/B Industrial equipment Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to radio reception in such environments. RoHS (EU, UK): Material Exemption Information This product is compliant with no Exemptions REACH (EU, UK) This product is a complex article which is not designed for intentional substance release.
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