entegris A200 SMIF POD User Manual
  1. Manuals
  2. Brands
  3. entegris Manuals
  4. Water Filtration Systems
  5. A200 SMIF POD
  6. User manual

entegris A200 SMIF POD User Manual

Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
ADVANCED MATERIALS HANDLING
|
MANUAL
A200 SMIF POD
User manual

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the A200 SMIF POD and is the answer not in the manual?

Questions and answers

Related Manuals for entegris A200 SMIF POD

Summary of Contents for entegris A200 SMIF POD

  • Page 1 ADVANCED MATERIALS HANDLING MANUAL A200 SMIF POD User manual...

  • Page 2: Table Of Contents

    A200 Waferlock Assembly Checklist for Gen V Dome ............11 A200 Waferlock Assembly Checklist for Gen IV Dome ............13 Limited Warranty ............14 For More Information ..........14 Terms and Conditions of Sale ........14 User Manual | Entegris, Inc.

  • Page 3: Overview

    Waferlock Verify the waferlock frame is not Remove from service and warped, deformed, or damaged determine root cause Functional 15 seconds Waferlock Verify the waferlock functions Remove from service and inspection properly determine root cause User Manual | Entegris, Inc.

  • Page 4: Six-Month Inspection Guidelines

    15 seconds Door cassette Inspect for general damage, Replace damaged part, guides inspect for gap between door tighten loose screws cover surface and bottom of guide 1 minute Door flatness Verify door is flat Replace door User Manual | Entegris, Inc.

  • Page 5: 90-Day Procedures

    Experience has shown that in most cases, the spray process provides sufficient cleanliness. Frequency (est.) Every 90 days or before each • Entegris supports both the use of no and very low new lot of wafers concentrations of surfactants, followed by a pure DI water rinse.
  • Page 6 Crazing on outside of shell—note how shallow the cracks are 2. Visually inspect for chipped and broken edges. Focus on the knife edge where the door seals and the bottom of the shell. Waferlock components User Manual | Entegris, Inc.
  • Page 7 • Inspect anti-rotation pins on two corners of the door for pins that are bent or sheared off. Missing pins can allow doors to be inserted into the pod backwards. Waferlock pin is touching the dome wall User Manual | Entegris, Inc.

  • Page 8: Functional Inspection

    Swift movement of the torque Time to perform (est.) 30 seconds meter may give erroneous readings. Required parts None Required tools Philips head screwdriver and equipment User Manual | Entegris, Inc.

  • Page 9: Annual Procedures

    The top surface of the of the pod door. It is generally recommended to seal must be even and smooth. User Manual | Entegris, Inc.
  • Page 10 2. Grasp the sides of the waferlock—watching out for the sharp edges—and pull straight out of the pod. It should pull off of the pivots in one smooth motion. 3. Install the new waferlock and wheel assembly. Press here User Manual | Entegris, Inc.

  • Page 11: Visual Inspection

    • Inspect tightness of AK flange installation if one is installed on the pod. Inspect the flange for damage or excessive wear. • Inspect tightness of side handle installation. Inspect the handles for damage or excessive wear. User Manual | Entegris, Inc.

  • Page 12: A200 Waferlock Assembly Checklist For Gen V Dome

    Slot in Slot out Remarks: Correct Incorrect 3. Make sure the waferlock leg is fully inserted Waferlock Leg: into dome boss hole with no gap No gap Remarks: Correct: no gap Incorrect: gap User Manual | Entegris, Inc.
  • Page 13 6. Make sure the waferlock screw is fully torqued Screw Torque: No gap Remarks: Screw torqued at 6 in•lbf 7. Make sure the waferlock pod dowel pin Waferlock dowel pin: touches the dome wall Touching Remarks: User Manual | Entegris, Inc.

  • Page 14: A200 Waferlock Assembly Checklist For Gen Iv Dome

    Spins freely Jammed Remarks: Screw torqued at 3 in•lbf 2. Make sure the waferlock lock is not tilted Feeler Gauge: (<0.06") by using the feeler gauge. The Pass Fail gauge must not go through. Remarks: User Manual | Entegris, Inc.

  • Page 15: Limited Warranty

    Waferlock Pin: dome wall. No gap is allowed. Touching Remarks: LIMITED WARRANTY Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information, visit entegris.com and select the Legal & Trademark Notices link in the footer. Entegris does not warrant any failure in the case of customers using unapproved foreign components.

Table of Contents