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Table of Contents
Related Manuals for entegris Wafergard III NF-750
Summary of Contents for entegris Wafergard III NF-750
- Page 1 WAFERGARD® III NF-75O IN-LINE GAS FILTERS Installation and use manual...
- Page 2 Step 3: Prepare the Filter for Use ......3 Filter Replacement ..........3 Performance Data ..........4 Dimensions ............4 Ordering Information ..........4 Warranty Information ..........5 ENTEGRIS, INC. WAFERGARD® III NF-750 IN-LINE GAS FILTERS MANUAL P74590 REV. B...
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Page 3: Specifications
® gassing and reduces drydown time. The Wafergard ® fluoropolymer filters III NF-750 gas filter provides the strength of Entegris’ • Spin rinse dryers metal membrane with the pressure drop and compact • Inert and reactive gases size of Teflon ®... -
Page 4: Installation And Use
⁄ turn past hand- tight by wrench for VCR ® -compatible fittings. DO NOT overtighten. NOTE: Refer to specific technical guides furnished by fitting manufacturers for additional specifications. ENTEGRIS, INC. WAFERGARD® III NF-750 IN-LINE GAS FILTERS MANUAL P74590 REV. B... -
Page 5: Performance Data
″ Gasket seal (compatible with VCR® fitting) male inlet/outlet WG3N S7 RR2 127 mm (5.00″) ⁄ ″ Gasket seal (compatible with VCR® fitting) male inlet/outlet WG3N S7 RR4 127 mm (5.00″) ⁄ ENTEGRIS, INC. WAFERGARD® III NF-750 IN-LINE GAS FILTERS MANUAL P74590 REV. B... - Page 6 Entegris promptly of any such defect. The exclusive remedy provided herein shall not be deemed to have failed of its essential purpose so long as Entegris is willing and able to repair or replace any nonconforming Entegris product or part or to refund the purchase price paid.
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Page 7: Terms And Conditions Of Sale
For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit www.entegris.com and select “Regional Customer Service Centers” for the center nearest you. Terms and Conditions of Sale All purchases are subject to Entegris’ “Terms and Conditions of Sale.”...
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