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Related Manuals for Inficon RSH-600
Summary of Contents for Inficon RSH-600
- Page 1 Cover Page RSH-600 Rotary Sensor Head PN 153800-L...
- Page 2 All other brand and product names are trademarks or registered trademarks of their respective companies. Disclaimer The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.
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Page 3: Table Of Contents
Troubleshooting RSH-600 ........ -
Page 4: Introduction
The fixed position of the crystal being measured also makes it unnecessary to change the tooling factor. RSH-600 can be used to deposit a different material on each of six crystals providing greater measurement accuracy. Upon completion of deposition of one material, the deposition controller may be programmed to switch crystals for the next material. -
Page 5: Safety
a Service Engineer with questions regarding troubleshooting, diagnosing or repairing a defective sensor. Sales and Customer Service, to find the INFICON Sales office nearest to you. Repair Service, to find the INFICON Service Center nearest to you. -
Page 6: Returning Your Rsh-600
Customer Support Representative. You must obtain a Return Material Authorization (RMA) number from the Customer Support Representative. If you deliver a package to INFICON without an RMA number, your package will be held and you will be contacted. This will result in delays in servicing your instrument. -
Page 7: Base Configuration
1.6 Base Configuration RSH-600 Rotary Sensor Head....... 15320X-XX Figure 1-2 below for possible configurations. -
Page 8: Specifications
400°C max with water cooling and Copper Head Cover Weight: (standard length) ..200 mm (7.9 in.) RSH-600 - Flat - 3.8 kg (8.5 lb.) RSH-600 - Angled - 4.5 kg (9.9 lb.) -
Page 9: Replacement Parts And Accessories
RSH-600 Operating Manual 1.8 Replacement Parts and Accessories Flat Copper Head Cover ........153731 Angled Copper Head Cover . - Page 10 RSH-600 Operating Manual Figure 1-3 Rotary sensor head - flat Crystal Retainer Assembly P/N 153204 Spring Retainer Assembly P/N 153706 Spring Retainer Contact Kit (set of 6) P/N 153724 Spring Contact P/N 153726 Crystal Holder P/N 153710 Retainer Screw P/N 153709...
- Page 11 RSH-600 Operating Manual Figure 1-4 Rotary sensor head - angled Crystal Retainer Assembly P/N 153204-2 M3x12 Screw P/N 144-224 Spring Contact P/N 153726 Spring Retainer Assembly P/N 153714 Crystal Holder P/N 153716 Retainer Spacer P/N 153717 Retainer Screw P/N 153715...
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Page 12: Installation
CAUTION RSH-600 must be clean and grease free when installed in the vacuum chamber. The sensor must be handled while wearing clean nylon gloves. If parts do become... -
Page 13: Configurations
RSH-600 Operating Manual 2.1 Configurations RSH-600 can be configured with a flat head or a 45° angled head. This allows for mounting in various locations within the vacuum chamber. Standard head covers are made of stainless steel. Copper head covers are available for applications where... -
Page 14: Functional Verification
RSH-600 Operating Manual 2.2 Functional Verification RSH-600 is equipped to operate on a 115 V (ac), 60 Hz line or a 24 V (dc) supply, depending on the model number. The required voltage on the body of the pneumatic valve mounted on the side of RSH-600 can be verified. RSH-600 may be bench checked using the following procedure: Connect air pressure (55 psi) via 6.35 mm (1/4 in.) plastic tubing to the air inlet... -
Page 15: Crystal Sensor Installation
RSH-600 Operating Manual 2.3 Crystal Sensor Installation Install the sensor as far as possible from the evaporation source (a minimum of 30.5 cm (12 in.)) while still being in a position to accumulate thickness at a rate proportional to accumulation on the substrate. -
Page 16: Mounting
The RSH-600 smooth sealing surface mounts to an O-ring sealed nipple (not included). The optional adjustable flange allows the in-vacuum length to be adjustable up to the RSH-600 original length. A flat head cover is typically used for centered top mount applications while the angled heads may be used for either off-center top mount or side mount applications. -
Page 17: Adjustable Flange Installation
O-ring groove in the adjustable flange. Loosen the hex socket head screw on the adjustable flange. Remove the cover from the RSH-600 sensor. If the crystal holder contains any crystals, remove the holder and remove and discard the crystals. Reinstall the crystal holder. - Page 18 RSH-600 Operating Manual Stand the RSH-600 sensor upright on a firm surface. Place the adjustable flange, with smooth side up, over the top of the sensor barrel. With the flange seating surface perpendicular to the sensor barrel, forcefully push the flange downward, sliding the flange onto the sensor barrel.
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Page 19: Copper Head Installation
Note the position of this spring and replace the crystal retainer. Carefully slide the cover over the barrel of RSH-600 until it touches the crystal retainer, then rotate the cover so that the crystal, in contact with the spring, is centered in the hole in the cover. -
Page 20: Crystal Position Feedback Connections
Figure 2-9 Crystal position feedback diagram (crystal 1 is the active crystal) Crystal 1 Crystal 2 Crystal 3 Crystal 4 Crystal 5 Crystal 6 Common 2.10 Protection from Evaporant Place aluminum foil over the RSH-600 head cover and barrel to protect them from evaporants during a vacuum operation. 2 – 9... -
Page 21: Troubleshooting And Maintenance
RSH-600 Operating Manual Chapter 3 Troubleshooting and Maintenance 3.1 Troubleshooting If RSH-600 fails to function, or appears to have diminished performance, the following Symptom/Cause/Remedy charts may be helpful. WARNING There are no user-serviceable components within the RSH-600 sensor. Refer all maintenance to qualified INFICON personnel. - Page 22 RSH-600 Operating Manual Table 3-1 General troubleshooting (continued) SYMPTOM CAUSE REMEDY Large jumps of thickness Mode hopping Mode-hopping is a byproduct reading during deposition of active oscillation with a heavily damped crystal. Temperature stabilization is key to diminishing this. Replace the crystal...
- Page 23 RSH-600 Operating Manual Table 3-1 General troubleshooting (continued) SYMPTOM CAUSE REMEDY Thermal instability: large Inadequate cooling Check cooling water flow changes in thickness reading water/cooling water rate, be certain that cooling during source warm-up temperature too high water temperature is less (usually causes thickness than 30°C...
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Page 24: Maintain The Temperature Of The Crystal
The crystal requires sufficient water cooling to sustain proper operational and temperature stability. Ideally, a constant heat load is balanced by a constant flow of water at a constant temperature. INFICON quartz crystals are designed to provide the best possible stability under normal operating conditions. No crystal can completely eliminate the effects of varying heat loads. -
Page 25: Crystal Replacement
Loosen the three Allen head screws that attach the head cover to the copper clamping ring. (Leave clamping ring attached). Carefully slide the head off of the barrel of the RSH-600 sensor. Loosen center screw of the head to release crystal retainer. -
Page 26: Outline Drawings
RSH-600 Operating Manual Chapter 4 Outline Drawings Figure 4-1 Sensor head NOTE: Dimensions are shown in millimeters. 4 – 1... - Page 27 RSH-600 Operating Manual Figure 4-2 Adjustable flange (dimensions in inches) NOTE: Dimensions are shown in inches. www.inficon.com reachus@inficon.com Due to our continuing program of product improvements, specifications are subject to change without notice. All trademarks are the property of their respective owners.