FEI Scios 2 User's Operation Manual
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FEI Scios 2 User's Operation Manual

Scanning electron microscope and focused ion beam (fib) system
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User Operation Manual
Edition 1
Mar-2017

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Summary of Contents for FEI Scios 2

  • Page 1 User Operation Manual Edition 1 Mar-2017...
  • Page 2 FreeRTOS Licensing Information This product contains FreeRTOS software. Upon request, FEI Company will provide you with the FreeRTOS source code and any modifications to the FreeRTOS source code made by FEI. Trademark Acknowledgments FEI logo is a trademark of FEI Company.

  • Page 3: Table Of Contents

    FEI Microscope Systems Safety Manual........1-1...
  • Page 4 Capturing and Handling Single Image......5-22 C-ii C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 5 External Current Measurement (Keithley Picoamper Meter) ....7-14 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 6 Multi-Holders ..........7-46 C-iv C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 7: Chapter 1 System Overview

    • Some software functions use shortcuts, which are given beside the heading in the brackets  (for instance: Save (Ctrl + S)) and in the Help menu / Keyboard Shortcuts. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 8: System Capabilities

    The detector system picks up the particles or photons, converts them into a digital signal which is then sent to the control PC and shown on the monitor. C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 9 Quick Loader (option). An exchange time takes a few minutes, with the Quick Loader an exchange is much more faster. Software and interlocks protect the system against a damage and users against an injury. C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 10 Gas Injection System (GIS) Multiple FEI GIS (option) can be installed for material deposition in conjunction with either electron or ion beam pattern definition. Electron beam-induced deposition offers the advantage of not sputtering the deposited material or implanting gallium FIB source ions simultaneously.

  • Page 11: Chapter 2 System Control

    All power and external equipment connectors should be covered by stoppers (part of delivery) when not used! Other Software and Hardware Call a FEI authorized service engineer for advice before installing software or hardware that is not required for system operation. Other software, such as screen savers or hardware network cards, may corrupt the xT microscope Server / Microscope Control software under some circumstances and may invalidate warranty.

  • Page 12: Interface Elements

    For information on all features of these applications see Chapter 3. Password Policy After the FEI software installation there are two initial users / passwords common for the OS Windows and the Microscope Control software (UI): • User: supervisor / Password: supervisor •...
  • Page 13 The point is intended for a defined ground connection between a microscope and a 3rd party module. This connection is not a safe ground! ELPHY SCAN & BLANKING IN Not used. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 14: Mains Switchboard

     C a u t i o n ! Always keep all control elements accessible! This is especially important in case of emergency. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 15: System States

    The Complete shutdown system state can be set only by a supervisor.  See detailed description of all following processes and elements further in this manual. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 16: System Startup

    If this is not possible, call a FEI authorized service engineer! 9. Start the ion column IGP pump with  the 100 – ION: Source Control alignment. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 17: Overnight And Standby

    In the Standby state the electron emission is on and the chamber vacuum is maintained by running vacuum pumps. C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 18 Server software is active. Therefore changing a user does not require Logging off / Logging on at Windows 7™ level. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 19: System Shutdown

    Normally it is used for a system transportation or for service actions, like repair to essential systems (electrical and air supplies). C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 20: Vacuum System

    VV ..Venting Valve ChEV ..Chamber Evacuation Valve WBV ..Water Bottle Valve 2-10 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 21: Vacuum Status

    Otherwise there is a risk of a detector assessment malfunction, and as a result the PLA will not be known by the system. C O N F I D E N T I A L – FEI Limited Rights Data 2-11...

  • Page 22: Vacuum Modes

    5 kV) to reduce beam loss in the gas. For EDX samples are scanned at 7 mm working distance, which is the 2-12 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 23 The system doesn’t watch the limits and higher overpressure (especially for gasses not listed) set by a user! It could switch off the emitter! In some cases the system needs to be started up by a FEI authorized service engineer.

  • Page 24: Equipment

    In case the vacuum safety interlock is activated, the confirmation of switching the detector voltage on after pumping the system is necessary. Safety Interlock Messages FIGURE 2-6 2-14 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 25: Stages And Accessories

    Standard Stub Holder This is the universal stub holder with a lot of numbered position for insertion of stubs with attached samples. C O N F I D E N T I A L – FEI Limited Rights Data 2-15...
  • Page 26 If the maximum sample size is near to the limit, stage tilt can be limited. Beware of hitting the objective pole piece! 2-16 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 27: Chapter 3 Software Control

    Context Menus Right-click on some items to call out the context menu with another corresponding choices. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 28: Command Buttons

    A single one or a group of square Check boxes can be ticked / cleared by clicking on the individual square box. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 29: Adjusters

    Double-clicking on a value in the text area enables to edit it. It is also possible to click on & drag the small bar under the numerical value to continuously change the setting (where applicable). C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 30: 2D Controls

    Tabs where some parameters were changed are highlighted (orange background). Progress Bars An progress of long ongoing procedures over time is indicated in a dedicated dialogs or modules. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 31: Xt Microscope Server Software

    (specifying the software operation / hardware function state). When the Autorun UI checkbox is ticked (default), the Start button automatically starts UI after starting the xT microscope Server. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 32: Microscope Control Software

    / from the Workspace configuration (*.workspace) file. Clicking the Reset to Default Workspace item restores the factory UI layout, which is the one described in this manual. C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 33 New page name input; by clicking the OK button a custom page is created.      Pages customization FIGURE 3-4 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 34 New Shortcut to the edit field and click the Assign button. To revert to the factory setting click the Default button. Shortcuts customization FIGURE 3-5 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 35: Menu Bar

    Databar and with / without overlaid graphics by ticking / clearing the appropriate check box. The settings is remembered per display and used for the subsequent Save actions. C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 36 Select All (Ctrl + A) selects All graphics in the active display. Delete (Delete) deletes all selected graphics in the active display. 3-10 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 37 Photo (Snapshot) / Scanning preset snapshot from all displays with the same beam at once. Videoscope (F3) This function shows the video signal intensity along the actually scanned horizontal line for correcting the contrast and brightness. C O N F I D E N T I A L – FEI Limited Rights Data 3-11...
  • Page 38 Filter continuously averages a specified number (2 or more) of frames, resulting in a better signal-to-noise ratio. This process continues until stopped by changing the scanning condition or by pausing the imaging. 3-12 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 39 Use this function with (almost) focused imaging to obtain the most accurate Magnification, Horizontal Field Width (HFW) and Working Distance (WD) readouts. C O N F I D E N T I A L – FEI Limited Rights Data 3-13...
  • Page 40 The visibility of the individual patterning pixels is greatly enhanced (this is especially important for patterns with extremely large pitch or very thin lines). Imaging with / without Blackout Pattern Area FIGURE 3-7 3-14 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 41 When you need to use an external measuring device (option) click on this item. The Status bar / Specimen Current value shows N/A from that point on. C O N F I D E N T I A L – FEI Limited Rights Data 3-15...
  • Page 42 This procedure enables to capture the sample Navigation image to be used in the Sample Navigation. Navigation Alignment This procedure aligns the Navigation image according to the live reference image. 3-16 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 43 C O N F I D E N T I A L – FEI Limited Rights Data 3-17...
  • Page 44 • Clear button clears all actual messages from the window. • Hide button hides Application Status window. Application Status FIGURE 3-8 Preferences (Ctrl + O – letter) See further. 3-18 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 45 To revert the last step use the Edit menu / Undo (Ctrl + Z) functionality, which is also available at the toolbar. C O N F I D E N T I A L – FEI Limited Rights Data 3-19...
  • Page 46 • Quad Image mode is useful for comparing imaging of the same sample area taken with different beams, detectors or scan conditions. In the Single Image mode, the selected display fills up the screen. 3-20 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 47 (the pattern) Ctrl + B toggles Beam Blank function Ctrl (+ Alt) + arrow by one screen pixel in the respective direction C O N F I D E N T I A L – FEI Limited Rights Data 3-21...
  • Page 48 About Microscope Control The window containing information about the product version is shown. It automatically disappears after the first click on anywhere. 3-22 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 49: Toolbar

    • Take Nav-Cam Photo automatically • Starting the sample chamber Purge process • Stage Holder selecting • Set System to Wake Up and to Sleep states C O N F I D E N T I A L – FEI Limited Rights Data 3-23...
  • Page 50 (both Line and Frame time) changes. 3-24 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 51 The toolbar Pattern Presets assignment to the particular .ptf file can be saved or loaded by the File menu / Export or Import / System Parameters item. C O N F I D E N T I A L – FEI Limited Rights Data 3-25...
  • Page 52 • Brown: actual microscope setting differs from the column preset • Grey: Value is not relevant when respective component is switched off 3-26 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 53: Imaging Area

    / down within the list) and expand or contract automatically to fit the display width as long as there is enough room, which influences all displays with the same beam. C O N F I D E N T I A L – FEI Limited Rights Data 3-27...
  • Page 54 Clicking on the Choose Bitmap item opens a dialog to select a bitmap to be loaded into the databar (if the Bitmap item is ticked). 3-28 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 55: Status Bar

    When you hover the mouse over any icon, a corresponding tooltip appears with actual status for the parameter(s) or just an information. C O N F I D E N T I A L – FEI Limited Rights Data 3-29...

  • Page 56: Control Pages And Modules

    If no dedicated detector is installed, user is asked to determine a detector mounted by PLA accessories dialog (see chapter 2). 3-30 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 57 • Clicking on the right / left arrow increases / decreases magnification by 5%. • Clicking on the left / right between the arrow and the button increases / decreases magnification by 20%. C O N F I D E N T I A L – FEI Limited Rights Data 3-31...
  • Page 58 The Ctrl + clicking on & left-right / up-down dragging within an electron or ion beam display controls the Contrast / brightness. The Low Vacuum detectors could have the Detectors module with specific controls. 3-32 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 59 11. Tilt Correction Module This module enables to correct the imaging distortion for the electron and/or ion beams when tilting the stage. C O N F I D E N T I A L – FEI Limited Rights Data 3-33...
  • Page 60 The digital processing can be applied to any live, paused or loaded image, including an optical one. Enhanced Image Module FIGURE 3-16 3-34 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 61 Some applications require a special gaseous environment, which is provided directly to the required area by the GIS’s (Gas Injection System) installed on your system. C O N F I D E N T I A L – FEI Limited Rights Data 3-35...
  • Page 62 Use the drop down list box to select desired Use case for specific application (see Chapter 5).  Note In addition to restoring factory Column presets, this function also sets some other microscope parameters. 3-36 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 63 • Brown – actual microscope setting differs from the column preset • Grey – Value is not relevant when respective component is switched off C O N F I D E N T I A L – FEI Limited Rights Data 3-37...
  • Page 64 Note Some alignment modules may have some features distributed differently than others, but functionality is the same, if it is not mentioned. 3-38 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 65: Preferences Dialog

    It is possible to enable visibility of alignments in the Alignments page / Alignments list by checking the Visible check box next to an alignment name. Alignments Preferences FIGURE 3-19 C O N F I D E N T I A L – FEI Limited Rights Data 3-39...
  • Page 66 / printed with an image. The Keep Screen and File / Print settings synchronized check box keeps both settings identical. 3-40 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 67 Application item by checking the check box next to an application name. Sensitivity Preferences FIGURE 3-21 The Default button sets the original settings. C O N F I D E N T I A L – FEI Limited Rights Data 3-41...
  • Page 68 (electron / ion) selected for the active display. Sensitivity Preferences FIGURE 3-22 All MUI controls are represented except the Magnification. The Default button sets the original settings. 3-42 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 69 • Line Time – line scan duration time • Frame Time – display scan duration time • Refresh Rate – imaging refresh frequency C O N F I D E N T I A L – FEI Limited Rights Data 3-43...
  • Page 70 The Pressure list can be changed to hold specific values frequently used in the Low Vacuum mode in the range from 10 to 500 Pa (from 0.08 to 4 Torr). 3-44 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 71 [mm] / micrometer [µm] • Pressure: Pascal [Pa] / torr [Torr] / millibar [mbar] • Temperature: Kelvin [K] / Celsius [°C] / Fahrenheit [°F] C O N F I D E N T I A L – FEI Limited Rights Data 3-45...
  • Page 72 Shows / hides the question mark button in the module header. • Pause stops immediately (Yes / No) The Pause function acts instantly / waits for the complete scan.  3-46 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 73 Specifies if and when the CCD camera and infrared LED’s should be automatically switched off. The countdown starts when resuming the optical imaging and continues regardless of the operator activity.  C O N F I D E N T I A L – FEI Limited Rights Data 3-47...
  • Page 74 • Default display for Nav-Cam image (Display 1 / Display 2 / Display 3 / Display 4 / Active) This option sets the default Nav-Cam imaging display, which is automatically selected when taking the Nav- Cam photo. 3-48 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 75 The Purge Settings is not remembered separately for each user. If it is of any importance, please check these Preferences before starting the Low Vacuum operation. C O N F I D E N T I A L – FEI Limited Rights Data 3-49...

  • Page 76: Fei Account Manager Application

    You can start the software by clicking the FEI menu / Service Tools / Account Manager icon: This brings up the Log On dialog box, containing User and Password text fields, for entering the FEI Account Manager. For the first time log on with the Supervisor / Supervisor credentials; the application window appears.
  • Page 77 To remove user account the confirmation is needed. • User Sessions (Supervisor) – shows the login (.CSV) file for all user accounts. C O N F I D E N T I A L – FEI Limited Rights Data 3-51...
  • Page 78 Software Control: FEI Account Manager application • Import (Supervisor) / Export – imports selected user(s) from a previously exported (.REG) file. 3-52 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 79: User Logins And Account Settings

    • Digital brightness/contrast/gamma settings • Databar text • Zoom and pan (shift) values for digital zoom mode Others • Various patterning settings C O N F I D E N T I A L – FEI Limited Rights Data 3-53...

  • Page 80: Entering Commands In Summary

    / down (left / right)  Note The given sequence of the key press and mouse button click on is important for some functions. 3-54 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 81: Using Keyboard

    – text / to a window – graphics Ctrl + X (Shift + Delete) cuts a selection to the clipboard – copies and deletes it C O N F I D E N T I A L – FEI Limited Rights Data 3-55...
  • Page 82 Full Frame scanning conditions Ctrl + Shift + M starts movie recording Ctrl + N toggles Sample Navigation On / Off 3-56 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 83 (40%) 80%  (Shift +) Arrows of the field of view in corresponding direction C O N F I D E N T I A L – FEI Limited Rights Data 3-57...
  • Page 84 Software Control: Entering Commands in Summary 3-58 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 85: Chapter 4 Alignments

    • Modulator button – starts automatic parameter oscillation to facilitate the process. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 86: Alignments List

    Resets the GIS crucible filling lifetime counter after its exchange, sets the GIS heating temperature and performs GIS mechanical alignment. Model difference Scios 2 High Vacuum has a slightly modified alignments list. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 87: Automatic Alignments

    • Restore old values and finish: undoes the adjustments, nothing will be saved. • Save new results and finish: keeps new adjustment values and saves them. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 88: Results

    The automatic procedure trusts that the optimal outcome is outside the range of the variable to be aligned. A value is set that is near the border of the range. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 89: Magnification Correction

      Note Switch the Beam menu / Magnification Correction item on only for calibrated conditions, otherwise it can worsen magnification accuracy. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 90: E-Column: Aperture Selection

    Alignments: E-Column: Aperture Selection E-Column: Aperture Selection Try to change the aperture when imaging is poor. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 91: E-Column: Preventive Maintenance

    It takes around 15 to 20 minutes. If it is not successful, run the supervisor level alignment Source DPA & Tilt & Shift. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 92: E-Column: Supervisor Alignments

    First alignment of this set allows a user to find appropriate sample locations within the sample holder and save them. These positions are used in the following procedures. C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 93 Alignments: E-Column: Supervisor Alignments Aperture Alignment This procedure mechanically centers different electron apertures (on the aperture strip module) in the column. C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 94 • Tilt – centers the beam on the optical axis. • Shift – centers the beam on the center of the final lens. 4-10 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 95 Alignments: E-Column: Supervisor Alignments Image Shift Correct imaging shift when changing accelerating voltage and/or Use case. C O N F I D E N T I A L – FEI Limited Rights Data 4-11...
  • Page 96 Alignments: E-Column: Supervisor Alignments Stigmator Alignment 4-12 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 97 Alignments: E-Column: Supervisor Alignments Focus Centering C O N F I D E N T I A L – FEI Limited Rights Data 4-13...

  • Page 98: 100 - Ion: Source Control

    A). After each UI or microscope server restart the default value is automatically set. • Gun Control Status – possible states are: (Offline / Disabled / Idle / Maintain / Heating / Shutting Down) 4-14 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 99 If very high Extractor voltage (up to 15 000 V) is needed for maintaining of ion emission and if this voltage doesn't decrease after heating, then the LMIS end of life was probably reached (the gallium reservoir is empty). C O N F I D E N T I A L – FEI Limited Rights Data 4-15...

  • Page 100: I-Column: Aperture Management

    I-Column: Aperture Management I-Column: Aperture Management This alignment procedure controls the ion beam aperture strip holes condition.        4-16 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 101: I-Column: Manual Beam Alignment

    The purpose of alignment is to position the beam through the column for maximum beam transmission with minimum beam aberrations, minimizing image motion when you change or wobble lens voltage. C O N F I D E N T I A L – FEI Limited Rights Data 4-17...

  • Page 102: I-Column: Alignments

    Alignments: I-Column: Alignments I-Column: Alignments            4-18 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 103 Alignments: I-Column: Alignments C O N F I D E N T I A L – FEI Limited Rights Data 4-19...

  • Page 104: Stage Alignments

    Make sure the stage tilt is zero during alignment. The magnification should be from 500× to 2 000× and the sample should have a well recognisable feature at least 10 mm from the center to improve accuracy. 4-20 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 105: 154 - Water Bottle Venting

    Alignments: 154 – Water Bottle Venting 154 – Water Bottle Venting See Chapter 6. C O N F I D E N T I A L – FEI Limited Rights Data 4-21...

  • Page 106: Plasma Cleaning / External Plasma Cleaning

    Do not exceed 30 minutes of chamber cleaning once a week at most when the DBS detector is installed. Do not leave sensitive samples (including Au-C resolution test samples) in the chamber during Chamber Cleaning (they may be damaged). 4-22 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 107: Pump Buffer

    To prevent this behaviour, user can run Pump Buffer alignment in advance (it takes about a minute) and start image acquiring after the buffer is pumped down.  C O N F I D E N T I A L – FEI Limited Rights Data 4-23...

  • Page 108: Vacuum Actions

    Alignments: Vacuum Actions Vacuum Actions • Start / Stop IGP’s • Pump / Vent Actions 4-24 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 109: Gis Alignment (Option)

    The Heat / Open / Insert Needle buttons are used for service operations. The Working Temperature unit varies according to Preferences / Units setting, but the Actual Temp. unit is always °C. C O N F I D E N T I A L – FEI Limited Rights Data 4-25...
  • Page 110 Alignments: 254 – GIS Alignment (option) 4-26 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 111: Chapter 5 Operating Procedures

    These procedures assume you are familiar with the xT microscope Server and Microscope Control software (see Chapter 3), which are necessary to start and operate the microscope. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 112: Specimen Preparation And Handling

    Store samples and sample holders in a dry nitrogen storage cabinet. Dust on samples can get drawn into the electron / ion column, degrading performance and requiring a FEI authorized service engineer to correct a problem. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 113: Specimen Baking Unit

    The unit is supplied with the voltage 12 V DC. The adaptor has a replaceable plug to fit in various mains sockets. Connect the supply voltage cable connector to the unit and plug the adaptor to the mains voltage 110–230 V AC. C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 114 There are two possible slots for the tray insertion. The specimen will be exposed to the temperature of 160 °C in the upper position and of 120 °C in the bottom position. C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 115 You can use spare bulb delivered together with the unit. Always use only bulb with the following specification: Type: Low voltage halogen bulb, G4, 12V, 20W Supplier: OSRAM Product ID: 64428 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 116: Microscope Control

    Increase the contrast to produce a reasonable imaging. Increasing brightness and decreasing contrast produce softer imaging and vice versa. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 117: Inserting / Exchanging Specimen

    A little spring is a conductive contact with the final lens pole. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 118: Imaging Onscreen

    11. Focus the imaging and Link Z to FWD. 12. Adjust to a suitable magnification, optimize the imaging using the Contrast & Brightness, Focusing, Astigmatism Correction etc. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 119: Optimizing Imaging

    + Shift consecutively reverses the above described technique (the cursor changes to a magnifying glass with a - sign). The Esc key cancels the operation at any time. • Magnification module • Digital Zoom module C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 120: Scan Speed

     Note Use also the following functions to optimize the Contrast / Brightness: Auto Contrast Brightness (F9), Display Saturation (Shift + F11). 5-10 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 121: Focusing

    Chapter 6), the magnification may be too high for the beam spot size or the sample is charging (apply conductive layer or use the Low Vacuum mode).  Note For normal astigmatism correction use the automatic procedure (Ctrl + F11). C O N F I D E N T I A L – FEI Limited Rights Data 5-11...

  • Page 122: Direct Adjustments

    • Apply Focus Centering check box – if selected, the result of focus centering procedure is applied.  Note Ion beam Direct Adjustments are available only for accelerating voltages under 8.06 kV. 5-12 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 123 Move the crosshair to suppress the imaging shift. • Modulator Sin / Cos button – starts modulation of the respective stigmator. • Amplitude slider – sets the modulation amplitude. C O N F I D E N T I A L – FEI Limited Rights Data 5-13...

  • Page 124: Digital Imaging Enhancement / Imaging Mixing / Coloring

    • Invert check box – inverts a corresponding source spectrum. It has the same effect as exchanging the left and right colors selection. • Save button – saves the actual setting as the custom preset. 5-14 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 125 Note This functionality works only with greyscale images (not colored via Color tab), images which are paused or with loaded saved ones. C O N F I D E N T I A L – FEI Limited Rights Data 5-15...

  • Page 126: Accelerating Voltage And Beam Currents

    An intermediate value can be set by the Column module / Beam current/Spot size adjuster on the Beam Control page. Default values in the list box are set in the Preferences dialog / Presets section. 5-16 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 127 When changing the spot size, adjustment of the Detector module / Contrast and/or Brightness may be necessary to optimize the imaging. An alternate approach is to use the Auto Contrast Brightness (F9) function. C O N F I D E N T I A L – FEI Limited Rights Data 5-17...

  • Page 128: Column Use Cases

    For detailed high resolution electron imaging see the Help menu / User Guidance item / High Resolution Imaging. Model difference The LoVac mode can be used only with OptiPlan and Standard Use Cases. 5-18 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 129: Standard Detectors

    (especially in the Z-direction) or tilting the stage. IR LED’s are used to light the specimen chamber interior. C O N F I D E N T I A L – FEI Limited Rights Data 5-19...

  • Page 130: Low Vacuum Detector (Lvd)

    Contrast and Brightness if necessary, until the bright circle of the LVD cone can be seen in the center of the image. Increase magnification and adjust Contrast and Brightness more precisely. 5-20 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 131: Trinity Detectors T1 / T2

    Electrons generated by a primary beam can be collected by the in-column Trinity detector T3 which is located inside the column, just below the aperture strip (see Chapter 7). C O N F I D E N T I A L – FEI Limited Rights Data 5-21...

  • Page 132: Capturing And Handling Single Image

    • BMP file – color image type, full data format. The 8 / 24 bit depth is automatically set when saving the greyscale / color image file. 5-22 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 133: Saving / Opening / Printing

    3. Complete the print setup and click on the OK button to activate the printer and print an image. C O N F I D E N T I A L – FEI Limited Rights Data 5-23...

  • Page 134: Recording Movies (Saving Multiple Images)

    The Preferences / Movie provides selections to set-up conditions for timing and save conditions for the resultant movie. Movie Preferences FIGURE 5-8 5-24 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 135 A warning dialog appears if the hard drive lacks sufficient free space. • Record Databar check box – allows the databar to be included in the video (tif files). C O N F I D E N T I A L – FEI Limited Rights Data 5-25...

  • Page 136: Movie Procedure

    6. Select the File menu / Record Movie again or press keyboard key combination Ctrl + Shift + M to stop the movie recording. 5-26 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 137: Movie Creator

    • Save in – enter the path where the AVI file should be saved. Click on the … button to browse it. • File Name – enter the resulting AVI file name. This field is filled automatically with the first image file name. C O N F I D E N T I A L – FEI Limited Rights Data 5-27...
  • Page 138 Micronbar scales to the magnification. • Units button – sets the Units of Measure / Pressure / Temperature used in the movie Databar. 5-28 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 139 The AVI file movie can be played in the Windows Media Player or any another more advanced movie editing program recognising the *.avi file type. C O N F I D E N T I A L – FEI Limited Rights Data 5-29...

  • Page 140: Stage Control

    4. Switch on the beam, focus the specimen top surface and run the Link Z to FWD function. The FWD is now recognised by the system as the Stage module Z value. 5-30 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 141 A test pattern can be made with a simple pattern using the ion beam, observing it afterwards with the Electron beam to check that the beams coincidence is correct (see further). C O N F I D E N T I A L – FEI Limited Rights Data 5-31...

  • Page 142: Software Control

    This makes it much easier when imaging with electron beam at shorter working distances to accurately reach the beams coincidence (milling position). 5-32 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 143 (highlighted in the location list)  Double-clicking on anywhere in the circle area marks a new location (10) and moves the stage to that position. C O N F I D E N T I A L – FEI Limited Rights Data 5-33...
  • Page 144 • Show Sample Holder Image on Map – switches the sample holder schema representation in the map area • Show Stored Positions in Navigation Displays – switches representation of stored positions in navigation displays On / Off. 5-34 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 145 (usually increase dwell time or resolution). C O N F I D E N T I A L – FEI Limited Rights Data 5-35...

  • Page 146: Stage Related Functions

    Shift Zero or the Beam Shift Reset function needs to be applied. In this case the beam shift is reset and the observed point position is adapted by the stage movement. Releasing the mouse button stops the action. 5-36 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 147 Right-clicking on the imaging area (anywhere) deletes points, enabling to define them again. 6. Drag any point to change its position, if needed. Click on the OK button to finish the setting. C O N F I D E N T I A L – FEI Limited Rights Data 5-37...
  • Page 148 Clicking on the framed + / – sign increases / decreases the rotation angle by an incremental value. 5-38 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 149 Details module. Proceed by clicking the Next button. 4. Repeat step 3 for the sample user point (1,0) and (0,1) if needed. C O N F I D E N T I A L – FEI Limited Rights Data 5-39...
  • Page 150 To employ the Sample Navigation there are three possible techniques to acquire (or to use) a Navigation image: • Navigation Montage • Navigation Alignment • Nav-Cam (option) 5-40 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 151 Compute 2pt alignment button to finish the process after setting 2 align points. When any point setting does not satisfy system requirements an Warning message informs a user. C O N F I D E N T I A L – FEI Limited Rights Data 5-41...
  • Page 152 Scan Rotation angle is different from 0°. This can be set in the Preferences dialog / General section / Display scan rotation in CCD displays item. 5-42 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 153: Patterns / Measurements / Annotations

    • Resizing: click on & drag the resizing handle until the desired size is reached (horizontal / vertical / diagonal resizing cursor). Holding the Ctrl key while dragging forces dimensions to be changed proportionally. C O N F I D E N T I A L – FEI Limited Rights Data 5-43...

  • Page 154: Patterning

    (due to milling points and screen pixels mismatch) can occur. To prevent this try to change the field of view. 5-44 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 155: Patterning Control Module

    / down and by clicking on the left / right double arrow to move it to the first / last position. C O N F I D E N T I A L – FEI Limited Rights Data 5-45...
  • Page 156 It is possible to convert any selected Annotation or Measurement graphic to a Bitmap type pattern shape with the use of Convert from Annotation item. 5-46 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 157 The pattern corners become round and the edges become jagged. A good rule of thumb is to pick a magnification where your pattern fills 35–50% of the screen. C O N F I D E N T I A L – FEI Limited Rights Data 5-47...

  • Page 158: Patterns Processing

    • Loop Time – the time required for a single pass (read only) • Area – the surface area of the pattern (read only) 5-48 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 159 • Enabled check box – when ticked the selective milling is enabled • Interval adjuster – sets the time [s] after which the histogram is actualised C O N F I D E N T I A L – FEI Limited Rights Data 5-49...

  • Page 160: Advanced Patterning Tab Modules

    • Y-axis menu (Stage Current / Gray Scale): offers choices for  Y-axis description. No, any or both can be selected. 5-50 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 161 Drift Suppression is active. For optimal performance, decrease the ion beam current to 15 nA or less. This message will disappear when the I-beam current is decreased below 15 nA. C O N F I D E N T I A L – FEI Limited Rights Data 5-51...

  • Page 162: Gas Injection Module (Option)

    When the vacuum status is vented, GIS needles are retracted automatically. In spite of that retract it/them manually before you start any activity inside the chamber (specimen exchange, detector mounting etc.). 5-52 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 163: Application Files

    When using the ion beam (without any gas environment at 30 kV) the Volume per Dose values (Sputter Rates) for various materials can be found in the following table. C O N F I D E N T I A L – FEI Limited Rights Data 5-53...
  • Page 164 Doubling the Z size – the desired volume would be twice larger and the milling time twice longer, doubling the beam current cuts milling time by half. 5-54 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 165: Milling

    If patterning is reset and started again by clicking on the toolbar Start Patterning icon (not regarding any modification was done), it starts from the first pattern and all patterning clocks are set to zero. C O N F I D E N T I A L – FEI Limited Rights Data 5-55...
  • Page 166 Calculate the outline as the height of the box relative to the depth to be milled. If you intend to view at 52° and see details 3 µm from the surface, then the original box should be at least 3 µm high. 5-56 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 167 6. Acquire an electron Snapshot image in a different display. A BSE detector (T1) is suitable for electron imaging during ion patterning. C O N F I D E N T I A L – FEI Limited Rights Data 5-57...

  • Page 168: Viewing Cross Sections

    Ion beam Electron column Cross-section face Ion column visible Electron beam Cross-section face Completely visible 52° stage tilt (Not to Scale) Cross-section face 5-58 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 169 Tilted view into  cross-section Electron beam Cross-section face Stage 0° stage tilt, 180° stage rotation visible scan rotation 180° Cross-section face (Not to Scale) C O N F I D E N T I A L – FEI Limited Rights Data 5-59...
  • Page 170 Operating Procedures: Patterning 5-60 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 171: Chapter 6 Maintenance

    Maintenance This section describes necessary and entirely microscope maintenance procedures that can be carried out by a FEI microscope user. The user maintenance is at a minimum due to the source and column design providing the long uptime.  C a u t i o n !

  • Page 172: Cleaning Column Parts

    Wash threads with alcohol or isopropanol if absolutely necessary. After cleaning, inspect all parts for residue and stains using a light microscope. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 173: Aperture Strip Module

    2. Open the new module pack and let the new module sit with the connection end uppermost to the edge of the container base. 3. Pick up the new module with the Titanium screw end and fasten, making sure of a good fit. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 174: Installation Of Aperture Rod

    – Keep all tools clean. 1. Vent the system and remove the shutter arm from the microscope chamber by releasing the grey nut. C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 175 Check again the aperture position is like at the beginning of procedure. In case it is not at the image screen center, repeat the exchange procedure. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 176: Stage

    6. First blow dry with a compressed air canister, then dry thoroughly under an infra-red lamp (15 min to 1 hr) at a temperature between 80 °C and 100 °C. Do not bake in an oven! C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 177: Refilling Water Bottle

    The removal of all the gas from the liquid must be accomplished before good imaging is possible. This is done correctly when no bubbles are produced in the water when increasing the pressure in the chamber. C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 178 Maintenance: Refilling Water Bottle C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 179: Chapter 7 System Options

    System Options This chapter covers hardware and software that is an option either integrated in, or accessory to the Scios 2 system (not all of them are described here).  C a u t i o n ! Only optional accessories meeting the manufacturer's specifications shall be used.
  • Page 180 • On-site Training / Support (1 day) – North America / China / Japan • MEMS Hetaing Stage – For further up-to-date information on system options please contact your local FEI representative. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 181: Manual User Interface

    • Button 3 speeds up the stage motion: – 10× in X / Y axis – 5× in Z axis – 2× in R / T axis C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 182: Uninterruptible Power Supply (Ups)

     Note If the Startup procedure fails, contact a FEI authorized service engineer. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 183: Optional Detectors

    • Converter adjuster – 0 for SE and BSE imaging, negative for SI imaging  Note Changing the beam current causes automatic adjustment of the detector contrast. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 184: Retractable Directional Backscattered Detector (Dbs) -  Angular Backscattered Detector (Abs) / Concentric Backscattered Detector (Cbs)

    Mix 4 tab to mix color coded signals to create color images. When the detector is retracted, the information text is shown in each display which uses it. C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 185: Optional Detectors Connection

    • STEM: Scanning Transmission Electron Microscopy  (STEM 3 / STEM 3+)  C a u t i o n ! Connectors insertion is a service operation! C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 186: Directional Gaseous Analytical Detector (Gad)

    The GAD is mounted close to the (optional) X-ray detector collimator, which must not be touched when changing detectors. It is advisable to retract the EDX collimator when mounting / removing the detector on / from the objective lens. C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 187 Whenever the GAD is selected, the optical display is paused (because the CCD camera infra-red LED’s are switched off not to emit the photons supersaturating the detector diode). C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 188: Retractable Annular Scanning Transmission Electron Microscopy Detector  (Stem 3 / Stem 3+)

    Starting the server or venting the chamber. Otherwise a user can use the Retract button. When the detector is retracted, the information text is shown in each display which uses it. 7-10 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 189 Active segments are highlighted in yellow. Area of active segments can be “rotated” using the circle arrow buttons to view orientation contrast changes. C O N F I D E N T I A L – FEI Limited Rights Data 7-11...

  • Page 190: Nav-Cam

    In case a user logs off and the sample and its stage loading position did not change, use the Stage menu / Restore Last Nav-Cam Photo. 7-12 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 191: Energy Dispersive X-Ray (Edx) Analysis

    The high voltage chosen for the analysis still depends mainly on the composition of the sample. C O N F I D E N T I A L – FEI Limited Rights Data 7-13...

  • Page 192: External Current Measurement (Keithley Picoamper Meter)

    In this case the Status bar / Specimen Current value is N/A and the Keithley meter readout shows actual specimen current.  Note When this functionality is not used, switch the picoamper meter off or disconnect it! 7-14 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 193: Easylift

    • Clicking on the Remove / Remove All button – removes selected / all stored position(s). The park and eucentric positions cannot be removed. C O N F I D E N T I A L – FEI Limited Rights Data 7-15...

  • Page 194: Easylift Display Control

    (creating / moving a selected graphical element), be aware it has priority before the EasyLift control. More the mouse cursor is positioned from the starting point, more quickly moves the needle. 7-16 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 195: Easylift: Needle Exchange / Calibration

    7. Check by rotating the Probe shaft if the needle is positioned straight (the needle tip movement during its rotation should µm be within 500 8. Align the needle to the contrast edge. C O N F I D E N T I A L – FEI Limited Rights Data 7-17...
  • Page 196 10. Pump the chamber by clicking on the Vacuum module / Pump button. 11. Follow instructions for subsequent steps.       7-18 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 197: Easylift Basic Procedures

    It is very useful to use iSPI mode (intermittent Simultaneous Patterning and Imaging) to monitor the cutting processes. Patterns for Initial Cutout (Scan Rotated) and Initial Cutout Views FIGURE 7-6 Electron beam view (Cut marks) Ion beam view C O N F I D E N T I A L – FEI Limited Rights Data 7-19...
  • Page 198 You can use a smaller box size if the needle is new or sharply tapered. If you use a smaller box size, adjust the ion beam current accordingly. 7-20 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 199 5. Move the needle to the Park position. 6. Retract the EasyLift needle. 7. Retract Tungsten or Carbon GIS needle. C O N F I D E N T I A L – FEI Limited Rights Data 7-21...
  • Page 200 During final thinning, leave some material at the membrane base to provide structural support. Begin with a relatively low beam current (1 nA or less) to avoid damaging the membrane. 7-22 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 201: Mems - Heating Stage

    Multi-sample holder / MEMS Holder (top view) / MEMS holder installed FIGURE 7-8 Consumables MEMS chips (10 pcs.) / data sheet FIGURE 7-9 C O N F I D E N T I A L – FEI Limited Rights Data 7-23...

  • Page 202: Mems Installation

    It is possible to store parameters for several chips. To maintain data, use the Add, Update, Remove, Remove All buttons. After completing the Calibrate button changes to the On button. 7-24 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 203 Resistance range is from 1 mOhm to 1 kOhm, (10% to <1% rel. error). • Clicking the Calibrate button opens the MEMS Heating System Calibration dialog (see above). C O N F I D E N T I A L – FEI Limited Rights Data 7-25...
  • Page 204 Clicking the black rectangle with an arrow in the Graph header shows the large graph window. Icons at the left bottom corner corresponds to the Navigate menu (see above). 7-26 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 205: Remote Imaging

    Microscope PC. To close the remote connection to the Microscope PC, just close the VNC Viewer window. C O N F I D E N T I A L – FEI Limited Rights Data 7-27...

  • Page 206: Microscope Pc's Desktop Sharing

    • 2 stub modules each holding 3× 1/2” stubs or 2× 1” stubs • 2 clamp bars • User guide • System calibration sample The stub holder is mounted on the stage interface plate. 7-28 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 207: Beam Deceleration

    Their efficiency depends on their active area – the smaller is the inner diameter of the active area, the better. The standard ETD can also be used, but its efficiency is low. C O N F I D E N T I A L – FEI Limited Rights Data 7-29...

  • Page 208: Beam Deceleration Module

     Note For the column Use case application suitable for the Beam Deceleration mode see the Help menu / User Guidance item. 7-30 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 209 Always use a dust off, compressed air or nitrogen to blow all loose particles from the stub / sample before inserting into the microscope chamber! C O N F I D E N T I A L – FEI Limited Rights Data 7-31...

  • Page 210: I-Beam Charge Neutralizer

    The last settings are stored and can be recalled when switching the Charge Neutralization off / on and also after exiting UI software. 7-32 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 211 In case the electrons generation does not start, slowly increase the filament current. Remarks • Checking that the Charge Neutralizer is functioning can be made using a glass sample (FEI part nr 22805 Rev A). • When patterning is paused the Charge Neutralizer stays on.

  • Page 212: Quick Loader

    At the end of the rod closest to the loader chamber is a large slot for coupling and de-coupling the bayonet into or out of the sample carrier when positioned on the carrier adapter. 7-34 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 213 Control buttons are not shining when the system is recovering from vacuum status transition (e.g. immediately after the load/unload sample, during venting the chamber…). After finishing the state transition the control buttons will be in operation again. C O N F I D E N T I A L – FEI Limited Rights Data 7-35...
  • Page 214 The Stage Adapter is connected to the rotation base of the FEI stage by 3 hexagonal headed screws. The base of the adapter has 3 high points for a firm 3-point contact to the rotation base to prevent vibration transmission.

  • Page 215: Installation

    Loading position The load / unload position is preset from factory. If a calibration is needed, run the Quick Loader Alignments first. C O N F I D E N T I A L – FEI Limited Rights Data 7-37...

  • Page 216: Operations

    LOCK position to secure the valve. Good practice is to leave the loader chamber under vacuum. 7-38 C O N F I D E N T I A L – FEI Limited Rights Data...
  • Page 217 In case the sample carrier falls from the loading rod, vent the specimen / loader chamber with gate valve opened, put the carrier back to a correct position and close the gate valve. Proceed from the step 1. C O N F I D E N T I A L – FEI Limited Rights Data 7-39...

  • Page 218: Cryocleanerec

    Care must be taken that the 'O' ring held in the end of the flange is secure, free of dirt and is not crimped when mounting. Vacuum Vessel and Nitrogen Vessel with accessories / Flanges FIGURE 7-13 7-40 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 219: Cryocleaner Operation

    If the chamber is vented with the Nitrogen vessel filled with LN2 (or still significantly below the ambient temperature), it should be removed and baked before it is re-used. C O N F I D E N T I A L – FEI Limited Rights Data 7-41...

  • Page 220: Maintenance

    Spare Vessel It is possible to obtain secondary nitrogen vessel kit, which contains: • Nitrogen Vessel • Vessel Stand • Vessel Plug 7-42 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 221: Plasma Cleaner

    Sometimes, poor image quality can be caused by electron beam etching and re-deposition of etched material also. C O N F I D E N T I A L – FEI Limited Rights Data 7-43...

  • Page 222: Sample Cleaning Procedure

    Any material that can create or release oxide easily (e.g. silver) should not be plasma cleaned. The Au-C resolution tests samples can be left inside the chamber during the Sample Cleaning procedure only and not very often! 7-44 C O N F I D E N T I A L – FEI Limited Rights Data...

  • Page 223: Specimen Holder Kit Option

    The Specimen Holder Kit is universal, the interfacing parts allow the fitting of all the common components to the most of the FEI systems. Major holders in the kit locate with a 2 pin system originating from the stage rotation head, through the interface piece, to the holder.

  • Page 224: Clamp Stubs

    It is available for those who have pre- Quanta 50 mm stage XL30 instruments and want to use this kit. Polished Mount Holders / Older Interface Adapter FIGURE 7-16 7-46 C O N F I D E N T I A L – FEI Limited Rights Data...

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