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Quanta FEG 250
User's operation manual
FEI Quanta FEG 250 User's Operation Manual
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Contents
Table of Contents
Troubleshooting
Bookmarks
Table of Contents
Table of Contents
Chapter 1 Preface
User Manuals
The User Safety Manual
The User Operation Manual
How to Use this Manual
Chapter 2 System Overview
How Quanta FEG SEM Works
Vacuum System
Image Viewing and Capture
Positioning of the Stage
System Layout of Quanta FEG
Software Interface Elements
Hardware Interface Elements
Quanta FEG Options
Chapter 3 System Operation
Quanta FEG Vacuum System
Vacuum Statuses
Pump Button
Vent Button
Vacuum Modes
High Vacuum (Hivac) Mode
Low Vacuum (Lovac) and ESEM Modes
Quanta FEG System States
Power off
Chapter 4 Software Control
Other Software and Hardware
Software Interface Elements
Icons
Tool-Tips
Pull-Down Menus
Command Buttons
List Boxes
Property Editors
Edit Boxes
Radio Buttons / Check Boxes
Adjusters
2D Controls
Modules
Dialogues
Tabs
Progress Bars
Xt Microscope Server Software
Xt Microscope Control Software
The Title Bar
The Menu Bar
The Toolbar
Image Windows
Pages and Modules
Preferences
FEI User Management Software
Control Possibilities
FEI Account Administrators
Account Logging
Entering Commands in Summary
Using the Mouse
Using the Keyboard
Chapter 5 Operating Procedures
Specimen Preparation and Handling
Needed Items
Natural Specimen
Coated Specimen
Mounting the Specimen to the Holder
Inserting / Exchanging a Specimen and / or a Detector
Obtaining an Image
Operation Pre-Check
Selecting Vacuum Mode
Spot Size
Obtaining an Image on Screen
Optimising an Image
Principles of SEM Imaging
Magnification
Scan Speed and Filtering
Contrast and Brightness
Focusing
Correcting Astigmatism
Pressure and Working Distance (WD)
Digital Imaging Enhancement / Imaging Mixing / Coloring
Detector Types and Usage
Detector Connection
Everhart Thornley Detector (ETD)
Backscattered Electrons (BSED) and Gaseous Analytical (GAD - Optional) Detectors
Large Field Detector (LFD)
The CCD Camera
Gaseous Secondary Electron Detector (GSED)
PLA Cones
Discharges between the Gaseous Detectors and the Sample
Obtaining Image Procedure for Gaseous Detectors
Capturing and Handling Single Image
Image Types
Saving / Opening / Printing
Recording Movies (Saving Multiple Images)
Movie TAB Preferences Dialogue
Movie Procedure
FEI Movie Creator
Playing a Movie
Measurement and Annotation Functions
Tools
Chapter 6 Alignments
Quanta FEG System Alignments
Common Rules
Buttons and Control Elements
Final Lens Aperture Strip Alignment
Aligning Procedure
Gun Alignment
Stigmator Alignment
Stage Rotation Centre
Emitter Startup
94 - CCD Camera Alignment
154 - Water Bottle Venting
Chapter 7 Stages
Stages Types and Accessories
Quanta FEG 250 - 50 MM Stage
Quanta FEG 450 / 650 - 100 / 150 MM Stage
Eucentric Position
Stage Movement Limits
Software Stage Functions
Map Tab
Coordinates Tab
Tilt Tab
Navigation Tab
Stage Related Functions
Stage Movements
Specimen Alignment
Scan Rotation (Shift + F12)
Chapter 8 Maintenance and Troubleshooting
Cleaning Procedures Overview
List of Applied Cleaners
Cleaning Column Parts
Materials and Technique
The Standard Insert
Removing and Disassembling
Housing Cleaning
Platinum Apertures Cleaning
Platinum Apertures Installing
Aperture Strip Module
Removing the Aperture Rod
Replacing the Aperture Module
Replacing the Aperture Rod
Gaseous Detectors
Cleaning the GSED / LFD
Cleaning the GBSD
Stage Maintenance
Stage Mechanics
Specimen Holders
Refilling the Water Bottle
Pre-Vacuum Pump Maintenance
Periodic Check
Troubleshooting
Diagnostics Auto Report
Simple TAD
Chapter 9 System Options
Manual User Interface
Joystick
Automatic Aperture System
Aperture Alignment
Nav-Cam
Capturing Navigation Image Procedure
401 - Nav-Cam Autobrightness
Optional Detectors
Gaseous Back Scattered Electron Detector (GBSD)
In Column Detector (ICD)
Retractable Detectors Control
Scanning Transmission Electrons Microscopy Detector (STEM I)
Annular Scanning Transmission Electrons Microscopy
Detector (STEM II)
Low-Voltage High-Contrast Detector Lens Mounted / Retractable (VCD)
Directional Backscattered Detector - Concentric Backscattered Detector (CBS)
ESEM & Gaseous Analytical Detector
Quad Backscattered Electrons Detector (Quad BSED)
Photo Multiplier Tube / Backscattered Electron Detector Autrata, Centaurus (PMT-BSE)
Energy Dispersive X-Ray (EDX) Analysis
The Support PC
High Vacuum EDX Analysis
LFD EDX Analysis
GSED EDX Analysis
GAD EDX Analysis
STEM EDX Analysis
Cooling Stage / Waterless Cooling Stage
Cooling Stage Parts
Cooling Stage Installation
Software Control
Cooling Stages Basic Operations
Water Cooled Temperature Stage Operation Termination
Wet STEM
Wet STEM Basic Operations
Heating Stage 1000 °C / Heating Stage 1500 °C
Heating Stages Parts
Heating Stage Installation
Software Control
Heating Stages Basic Operations
HS Maintenance
Cryocleanerec
Parts and Accessories
Cryocleaner Operation
Maintenance
Spare Vessel
Plasma Cleaner
Sample Cleaning Procedure
104 - Plasma Cleaning Alignment
Quanta Morphologi
Sample Preparation
Image Acquisition
Recommended Settings
Symmetrical Low Vacuum Detector (SLVD)
Mapping Tool
Image Analysis
Measurement Accuracy Verification
Remote Imaging
Connection to the Microscope PC
Microscope Pc's Desktop Sharing
Controlling the Microscope Remotely
Beam Deceleration
Detection Principles
Stage Modification
Beam Deceleration Applications
Beam Deceleration Module
Specimen Holder Kit Option
Location Positions
Older Interface Adapter
Interface Pillar
Multi-Holders
Polished Mount Holders
Clamp Stubs
Torx Drivers
Quick Loader
General Description
Installation
Operations
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The Quanta FEG
250 / 450 / 650
User Operation Manual
th
5
Edition
20 August, 2010
Copyright © 2010
FEI Company
All rights reserved
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Troubleshooting
Chapter 8 Maintenance and Troubleshooting
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This manual is also suitable for:
Quanta feg 450
Quanta feg 650
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