FEI Scios 2 Manuals

Manuals and User Guides for FEI Scios 2. We have 1 FEI Scios 2 manual available for free PDF download: User's Operation Manual

FEI Scios 2 User's Operation Manual (224 pages)

Scanning Electron Microscope and Focused Ion Beam (FIB) system

Brand: FEI | Category: Microscope | Size: 33 MB

Table of Contents
3
Chapter 1 System Overview

7
- User Manuals
  
  7
  - FEI Microscope Systems Safety Manual
    7
  - User Operation Manual
    7
- System Capabilities
  
  8
  - System Performance
    8
Chapter 2 System Control

11
- System Layout
  
  11
  - Other Software and Hardware
    11
- Interface Elements
  
  12
  - Software
    12
  - Hardware
    12
  - Mains Switchboard
    14
- System States
  
  15
  - System Startup
    16
  - Overnight and Standby
    17
  - System Shutdown
    19
- Vacuum System
  
  20
  - Vacuum Status
    21
  - Vacuum Modes
    22
- Equipment
  
  24
  - Detector Types and Application
    24
  - Stages and Accessories
    25
Chapter 3 Software Control

27
- Software Interface Elements
  
  27
  - Icons
    27
  - Tool-Tips
    27
  - Pull-Down Menus
    27
  - Command Buttons
    28
  - Property Editor
    28
  - Edit Boxes
    28
  - Radio Buttons / Check Boxes
    28
  - Adjusters
    29
  - 2D Controls
    30
  - Modules
    30
  - Dialogs
    30
  - Tabs
    30
  - Progress Bars
    30
- Xt Microscope Server Software
  
  31
- Microscope Control Software
  
  32
  - Workspace Customization
    32
  - Menu Bar
    35
  - Toolbar
    49
  - Imaging Area
    53
  - Status Bar
    55
  - Control Pages and Modules
    56
- Preferences Dialog
  
  65
- FEI Account Manager Application
  
  76
  - Accounts Control
    76
  - User Logins and Account Settings
    79
- Entering Commands in Summary
  
  80
  - Using Mouse
    80
  - Using Keyboard
    81
Chapter 4 Alignments

85
- Common Rules
  85
- Buttons and Control Elements
  85
- Alignments List
  86
- Automatic Alignments
  
  87
  - Results
    88
- Magnification Correction
  
  89
- E-Column: Aperture Selection
  
  90
- E-Column: Preventive Maintenance
  
  91
- E-Column: Supervisor Alignments
  
  92
- 100 - ION: Source Control
  
  98
- I-Column: Aperture Management
  
  100
- I-Column: Manual Beam Alignment
  
  101
- I-Column: Alignments
  
  102
- Stage Alignments
  
  104
- 154 - Water Bottle Venting
  
  105
- Plasma Cleaning / External Plasma Cleaning
  
  106
- Pump Buffer
  
  107
- Vacuum Actions
  
  108
- GIS Alignment (Option)
  
  109
Chapter 5 Operating Procedures

111
- Specimen Preparation and Handling
  
  112
  - Needed Items
    112
  - Natural Specimen
    112
  - Coated Specimen
    112
  - Mounting Specimen on Holder
    112
  - Specimen Baking Unit
    113
- Microscope Control
  
  116
  - Operation Pre-Check
    116
  - Inserting / Exchanging Specimen
    117
  - Selecting Vacuum Mode
    117
  - Imaging Onscreen
    118
- Optimizing Imaging
  
  119
  - Principles of SEM Imaging
    119
  - Magnification
    119
  - Scan Speed
    120
  - Contrast & Brightness
    120
  - Focusing
    121
  - Correcting Astigmatism
    121
  - Direct Adjustments
    122
  - Digital Imaging Enhancement / Imaging Mixing / Coloring
    124
  - Accelerating Voltage and Beam Currents
    126
  - Column Use Cases
    128
- Standard Detectors
  
  129
  - Everhart Thornley Detector (ETD)
    129
  - Infrared CCD Camera
    129
  - Low Vacuum Detector (LVD)
    130
  - Trinity Detectors T1 / T2
    131
  - T3 (Option)
    131
- Capturing and Handling Single Image
  
  132
  - Image Types
    132
  - Saving / Opening / Printing
    133
- Recording Movies (Saving Multiple Images)
  
  134
  - Movie Settings Dialog
    134
  - Movie Procedure
    136
  - Movie Creator
    137
- Stage Control
  
  140
  - Eucentric Position
    140
  - Software Control
    142
  - Stage Related Functions
    146
- Patterns / Measurements / Annotations
  
  153
- Patterning
  
  154
  - Patterning Control Module
    155
  - Patterns Processing
    158
  - Advanced Patterning Tab Modules
    160
  - Gas Injection Module (Option)
    162
  - Application Files
    163
  - Milling
    165
  - Viewing Cross Sections
    168
Chapter 6 Maintenance

171
- Cleaning Procedures Overview
  
  171
  - List of Applied Cleaners
    171
  - Cleaning Column Parts
    172
  - Materials and Technique
    172
- Aperture Strip Module
  
  173
  - Removing Aperture Rod
    173
  - Replacing Aperture Module
    173
  - Installation of Aperture Rod
    174
- Shutter
  
  174
  - Exchange Procedure
    174
- Stage
  
  176
  - Stage Mechanics
    176
  - Specimen Holders
    176
- Refilling Water Bottle
  
  177
Chapter 7 System Options

179
Easylift

193
- Easylift Module Control
  193
- Easylift Display Control
  194
- Easylift: Needle Exchange / Calibration
  195
- Easylift Basic Procedures
  197
MEMS - Heating Stage

201
- MEMS Parts
  201
- MEMS Installation
  202
- Software Control
  202
Remote Imaging

205
- Connection to Microscope PC
  205
- Microscope Pc's Desktop Sharing
  206
- Controlling Microscope Remotely
  206
UMB Stub Holder Kit

206
Beam Deceleration

207
- Detection Principles
  207
- Beam Deceleration Module
  208
I-Beam Charge Neutralizer

210
- Using Charge Neutralizer
  210
Quick Loader

212
- Description
  212
- Installation
  215
- Operations
  216
Cryocleanerec

218
- Parts and Accessories
  218
- Cryocleaner Operation
  219
- Maintenance
  220
- Spare Vessel
  220
Plasma Cleaner

221
- Sample Cleaning Procedure
  222
- Chamber Cleaning
  222
Specimen Holder Kit Option

223
- Location Positions
  223
- Interface Pillar
  223
- Torx Drivers
  223
- Clamp Stubs
  224
- Multi-Holders
  224

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FEI Scios 2 Manuals

FEI Scios 2 User's Operation Manual (224 pages)

Table of Contents

Chapter 1 System Overview

User Manuals

System Capabilities

Chapter 2 System Control

System Layout

Interface Elements

System States

Vacuum System

Equipment

Chapter 3 Software Control

Software Interface Elements

Xt Microscope Server Software

Microscope Control Software

Preferences Dialog

FEI Account Manager Application

Entering Commands in Summary

Chapter 4 Alignments

Automatic Alignments

Magnification Correction

E-Column: Aperture Selection

E-Column: Preventive Maintenance

E-Column: Supervisor Alignments

100 - ION: Source Control

I-Column: Aperture Management

I-Column: Manual Beam Alignment

I-Column: Alignments

Stage Alignments

154 - Water Bottle Venting

Plasma Cleaning / External Plasma Cleaning

Pump Buffer

Vacuum Actions

GIS Alignment (Option)

Chapter 5 Operating Procedures

Specimen Preparation and Handling

Microscope Control

Optimizing Imaging

Standard Detectors

Capturing and Handling Single Image

Recording Movies (Saving Multiple Images)

Stage Control

Patterns / Measurements / Annotations

Patterning

Chapter 6 Maintenance

Cleaning Procedures Overview

Aperture Strip Module

Shutter

Stage

Refilling Water Bottle

Chapter 7 System Options

Manual User Interface

Joystick

Uninterruptible Power Supply (UPS)

Optional Detectors

Nav-Cam

Energy Dispersive X-Ray (EDX) Analysis

External Current Measurement (Keithley Picoamper Meter)

Easylift

MEMS - Heating Stage

Remote Imaging

UMB Stub Holder Kit

Beam Deceleration

I-Beam Charge Neutralizer

Quick Loader

Cryocleanerec

Plasma Cleaner

Specimen Holder Kit Option

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