Scanning electron microscope and focused ion beam (fib) system (224 pages)
Summary of Contents for FEI Tecnai G2 F20
Page 1
FEI Tecnai G F20 Operating Procedures (6/01/2017) 1. Startup 1. Sign-up in the microscope log-book 2. Startup the software if not already running: Start the software in this sequence: Tecnai User Interface Digital Micrograph (TEM Imaging and Analysis) ...
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holder. Wait until the red light on the Compustage is off before proceeding. (b) Remove the objective aperture by sliding the lever to the right. Align the specimen holder with the small pin at approximately 3 o’clock. Carefully insert the end of the specimen holder into the stage until you reach the end. Then rotate clockwise to about 5 o’clock whilst very gently pushing inwards.
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2. Microscope Alignments 1. Eucentric height adjustment (a) Open the column valves under the Setup menu. At a magnification of about 4000- 5000 x, find a noticeable feature on your specimen. (b) Activate the alpha-wobbler. Change the Z height on the right-hand control panel to minimize the image displacement.
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4. Direct Alignments: Under the Tune menu go to Direct Alignments Perform direct alignments at 50,000X and close to focus on the specimen. (a) Beam Shift alignment: Click on Beam Shift and go to crossover. Center the beam in the middle of the phosphor screen using Multifunction knobs X and Y.
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(c) Rotation Center alignment: Find an identifiable object in your specimen. Click on Rotation Center and minimize its displacement using MF X and Y. (d) Comma free alignment: Use the Orius CCD to go slightly underfocus (-500 nm). Using the live FFT correct Direct Alignments: Comma free alignment X Y.
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3. STEM mode (a) Find an area of interest at a low magnification (~10 k); (b) In the STEM menu click STEM, Diffraction mode will be activated; press the Diffraction button to deactivate the Diffraction mode; (c) Under the Direct Alignments, perform Beam Shift, Beam-Tilt Pivot Points X/Y, and Rotation Center (turn the outer ring of the objective focus know counter-clock wise to...
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Using
t he
F alcon
I I
o n
t he
T ecnai
F 20
1. Perform
a ll
m icroscope
a lignments
o ut
o f
L ow
D ose
2.
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Focal
l ength
( mm)
2.7
Detector
FEI
F alcon
I I
Physical
p ixel
s ize
( μm)
14
...
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