RAYLASE SUPERSCAN II Manual page 25

SUPERSCAN-IIE
General Specifications
Voltage
Power
Current
Supply
Ripple /
Noise
Ambient Temperature
Storage Temperature
Humidity
Interface Signals
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water 1K < 3) depending on
the interval between auto-calibration cycles
Aperture Dependent Specifications – Mechanical Data
Input Aperture [mm]
Beam Displacement [mm]
Weight, without objective [kg]
Dimension (mm) (L x W x H)
1) Specification for fused Silica mirrors, 2) AXIALSCAN variation only, additional output plate for protection window
Aperture Dependent Specifications - Mirror Variations
Wavelengths
355 nm
532 nm
780 - 980 nm + AL
1064 nm
900 - 1100 nm + AL
1060 – 1080 nm
10600 nm
Standard: QU = Quarz (Fused Silica), SI = Silicium - High Speed: SC = Silicium Carbid, BE = Beryllium
Type Dependent Specifications – Tuning:
Tuning
LN
RA
Type Dependent Specifications – Dynamic Data
Mirror Type
Tuning
Acceleration Time [ms]
1), 2)
Writing Speed [cps]
1)
Positioning Speed [m/s]
Mirror Type
Tuning
Acceleration Time [ms]
1), 2)
Writing Speed [cps]
1)
Positioning Speed [m/s]
1) With F-Theta Lens f=160 / field size 110 mm x 110 mm, 2) Single-stroke font with 1 mm height.
03/2014
±15 to ±18 V
3 A, RMS, max. 10 A
Max. 200 mVpp, @ 20 MHz
bandwidth
+15 to +35 °C
-10 to +60 °C
≤ 80 % non-condensing
Digital XY2-100 Protocol
SS-IIE-10 SS-IIE-12
10.0 12.0
12.4 14.0
approx. 3.3 approx. 3.3
170 x 125 x 170 x 125 x
117.5 117.5
SS-II-10 SS-II-12
SI SI
SI SI
SI SI
SI SI
Description
Low Noise
Short acceleration time
SS-IIE-10
SI
LN RA
≤ 0.30 ≤ 0.19
600 800
16.0 10.0
SS-IIE-20 / SS-IIE-20 L
QU SI
RA RA
≤ 0.58 ≤ 0.61
350 350
6.0 6.0
Typical Deflection (optical)
Resolution optically
Repeatability (RMS)
1)
Max. Gaindrift
1)
Max. Offsetdrift
1), 2)
Long-term Drift
Long-term Drift with water tempering [W]
1), 2)
[W2]
Position noise (RMS)
Auto-calibration option:
3)
Position Accuracy
SS-IIE-15 SS-II-20
15,0 20.0
1
18.55/18.05 26.28/25.63
approx. 3.3 approx. 3.3
170 x 125 x 170 x 125 x
117.5 117.5
SS-II-15
QU, SI
QU, SI, BE
QU
QU, SI, BE
SI,BE
SS-IIE-12
SI QU
RA LN
≤ 0.25 ≤ 0.55 ≤ 0.36
650 350
9.0 8.0
BE QU
RA RA
≤ 0.40 ≤ 0.9
450 -
7.0 4.0
±0.393 rad
12 µrad
2 µrad
< 15 ppm/K
< 10 µrad/K
< 150 µrad
< 100 µrad
< 10 µrad
< 50 µrad/K
SS-IIE-20 L SS-IIE-30
20.0 30.0
1 1
26.28/25.63 35.98/35.38
approx. 5.9 approx. 5.9
203 x 159 x 203 x 159 x
2
150/160.5 150/160.5
SS-II-20 SS-II-30
QU,
QU, SI, BE QU
QU QU
QU, SI, BE QU, SI, SC, BE
SC
QU, SC
SI, BE SI, SC, BE
SS-IIE-15
BE
RA L N
≤ 0.40 ≤ 0.24
435 450
6.0 12.0
SS-IIE-30
SI SiC
RA RA
≤ 0.84 ≤ 0.52
- -
5.0 6.0
1
2
RA
615
9.0
BE
RA
≤ 0.50
-
6.0
SUPERSCAN-IIE