Brooks ATM 100 Manuals

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Brooks ATM 100 User Manual

Brooks ATM 100 User Manual (232 pages)

Atmospheric Single-Arm Robot

Brand: Brooks | Category: Robotics | Size: 5.17 MB

Table of Contents

Table of Contents
4
Figures

12
Changes

16
Introduction

18
Chapter Contents

19
- Atmospheric Single-Arm Robot Overview
  19
  - Robot Accessories
    21
  - Robot Systems
    22
  - User Interfaces
    24
  - Configuration
    25
- About this Manual
  27
- Note, Hazards, Andpictograms
  28
- Specifications
  29
Safety

34
- Regulatory Compliance
  35
- Safety Considerations
  36
  - Personnel Safety Guidelines
    36
  - Equipment Safety Guidelines
    37
- Robot Safeguards
  39
- Emergency Stop (EMS/MOFF)
  40
- EMC and ESD Protection
  42
  - ESD/EMI Precautions
    42
- Safety Labels
  43
  - Laser Warning Labels
    43
  - High Voltage Label
    44
  - Pinch Point Label for SEMI S2 Systems
    44
  - Fuse Label
    44
  - Underwriter Lab Label
    45
  - Manufacturing Labels
    45
- SEMI S2 Systems
  46
- Safety Interlocks
  47
- Mechanical Hazards
  48
- Electrical Hazards
  50
  - Lockout/Tagout
    50
  - Electrical Hazard Classifications
    51
- Laser Hazards
  53
- Gas Hazards
  54
- Chemical Hazards
  55
- Thermal Hazards
  56
- Vacuum Hazards
  57
- Fire and Explosion Hazards
  58
- Environmental Hazards
  59
  - Noise
    59
  - Vibration
    59
- Teach Pendant
  60
  - Using the EMERGENCY STOP
    60
  - Using the Dead-Man Switch
    60
- Matrix of Emergency and Corrective Response Actions
  62
- Material Safety Information
  63
- Brooks Automation Revision
  63
  - Isopropyl Alcohol Safety Information
    64
  - Msdss for C Grease
    65
  - MSDS for LG 2 Grease
    67
  - MSDS for Braycote 803
    69
Chapter Contents

73
Installation

73
- Site Requirements
  73
  - Space
    73
  - Environmental
    73
  - Facilities Requirements
    73
- Unpacking and Inspection
  75
  - Unpacking Instructions
    75
- Installation Procedure
  77
  - Tools and Materials
    77
  - Mounting
    77
  - Moving the Robot or Robotic System
    78
  - Attaching the Robot to the Frame
    79
  - Leveling the Robot
    79
- Connecting the Robot and Controller
  82
  - Overcurrent Protection
    83
  - Facilities Connections
    84
  - Communication Connections
    85
  - Connecting the Teach Pendant
    86
  - Installing the EQT 32 Interface
    87
- Setup
  89
- Safety Verification
  91
- Teaching and Operating
  92
  - Robot Axis and Station Naming Conventions
    92
- Check-Out
  94
- Alignment and Calibration
  95
Chapter Contents

97
Subsystems

97
- System Overview
  97
  - Smart Controller
    98
  - Wafer Pre-Aligner
    98
  - Linear Track
    98
- User Interfaces
  99
- Robot Accessories
  100
  - End Effectors
    100
  - Laser Scanner
    100
Operational Interfaces

103
- Interface Overview
  103
  - Power Connections
    105
  - Electrical Connections
    105
  - High Voltage Barriers
    105
  - Controller Fuses
    105
  - Ground Connections
    105
  - Robot Cables
    106
Operation

108
Chapter Contents

109
- Theory of Operation
  109
- Moving and Homing a Robot Axis
  110
- Teaching Stations
  111
- Setting the Optional Z-Axis Brake
  112
- Teaching a Robot Only
  113
- Teaching a Robot and Pre-Aligner
  114
- Scanner Mapping
  116
- Teaching the Scanner Mapping
  118
  - Teaching the Scanner in Special Situations
    120
- Robot Parameter File
  121
  - Adjusting Robot Parameters
    122
- Flipper End Effector
  123
  - Accessing Galil Mode
    123
  - Finding the Home Switch
    123
  - Applying Tension to the Spring
    124
  - Defining the Flip
    124
  - Saving the Positions
    125
  - Testing the Flipper
    126
Adjustments and Calibration

128
Chapter Contents

129
- Atmospheric Single-Arm Robot Alignment
  129
  - Required Tools and Test Equipment
    129
  - Alignment Strategy
    129
  - Alignment Process
    130
  - Leveling the Atmospheric Single-Arm Robot
    131
  - Adjusting the Vacuum Sensor
    131
- Flipper Setup
  133
  - Setting up the Flipper
    133
- Tuning PID Motor Parameters
  136
  - To Tune the PID
    136
- Robot Radial Home Flag, Index, and Offset Adjustments
  138
Command Reference

142
- Description
  143
  - Software Control
    143
  - Macros
    143
  - Coordinate File
    144
  - Robot Parameter File
    144
- Commands and Macros for Robots
  145
  - Coordinate File
    145
Chapter Contents

149
Maintenance

149
- Preventive Maintenance
  149
  - Parts
    149
- Preventive Maintenance Schedule and Procedures
  150
- Cleaning
  151
- Robot Leadscrew Lubrication Procedure
  153
- Vacuum Hose Replacement for the Outer Arm Link
  158
  - Required Parts and Tools
    158
  - Procedure
    158
- Checking the Integrity of the Belts in the Robot
  161
  - Tools Required
    161
  - Procedure for the Inspection of the Robot Outer Link
    161
- Diagnostics for the Single-Arm Robot
  163
  - Using EQT to Run Diagnostics
    164
  - Diagnostics for the Single-Arm Robot
    164
  - Test 1: NVS-Ram Test
    165
  - Test 2: Galil and I/O Test
    166
  - Testing Input G
    166
  - Test 3: Encoder Read
    168
  - Test 4: Limit and Home Test
    169
  - Test 7: Servo Test
    170
  - Test 8: Home Test and Set
    171
  - Adjusting the Distance to Index on an ABM 400 Series with Track
    172
  - Test 9: R-Home Test and Set
    174
  - Test 10: Scaling Factor Test
    175
  - Test 11: Vacuum Valve and Vacuum Sensor Test
    176
  - Test 13: Scanning Test
    177
- Using the Teach Pendant to Run Diagnostics
  178
  - STEP #1 (NVSRAM Test)
    178
  - Step #2 (Galil & I/O Test)
    179
  - Step #3 (Encoder Read Test)
    182
  - Step #4 (Limit & Home Test)
    182
  - Step #5 (Amp. Board Setup)
    183
  - Step #6 (Amp. Module Setup)
    183
  - Step #7 (Servo Test)
    183
  - Step #8 (Home Test & Set)
    183
  - Step #9 (R-Home Test & Set)
    185
  - Step #10 (Scaling Factor Test)
    188
  - Step #11 (Vac. Valve/Sensor)
    188
  - Step #12 (Robot I/O's)
    189
  - Step #13 (Scanning)
    189
Troubleshooting

191
- Troubleshooting Overview
  191
Contents

192
- Troubleshooting Robot Start up
  192
  - Robot Start up Procedure
    192
  - Robot will Not Home Procedure
    195
  - Robot will Not Servo on
    197
- Using the Teach Pendant and EQT 32 to Troubleshoot
  199
- Common Problems
  200
- Brooks Automation Revision
  200
- Frequently Asked Questions
  201
  - What Do I Do if I Get a New Robot
    201
  - What Do I Do if I Get a New Controller
    201
- Checking Robot Status
  203
  - Using the STAT/STAT2 Command
    204
- Checking NVSRAM with RNCS Command
  207
- Checking Limit Switch Status with the RLS Command
  208
- Using the GLST Command
  
  212
Appendices

222
- Appendix A: Factory Default Settings
  
  223
- Appendix B: Approved Laser Scanners
  
  224
  - Available Configurations of the HAMA Laser Sensors
    225

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