HELIX 9600 Schematics page 9
Low voltage - three phase cryopump power
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Figure 1-1: 9600 Compressor, Low Voltage Schematic. . . . . . . . . . . . . . . . . . . . . . 1-5
Figure 1-2: Autoset, Voltage Control Schematic . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Figure 1-3: Interface Cryo-Torr Box Schematic. . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Figure 1-4: On-Board Splitter Box Schematic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
©2004 Helix Technology Corporation
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Pub. No. 8040426, Rev. 101, 2/10/04
H
ELIX
ECO No. 16163
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