HELIX 9600 Schematics page 7
Low voltage - three phase cryopump power
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ELIX
Tables
Table 1-1: Legend: Basic Control Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Table 1-2: Legend: On-Board/Cryo Electrical Module P/N 8135127G001. . . . . . . 1-2
Table 1-3: Legend: On-Board Output Module P/N 8135148G001 . . . . . . . . . . . . . 1-3
Table 1-4: Legend: Cryo-Torr Interface P/N 8135904P001. . . . . . . . . . . . . . . . . . . 1-3
Table 1-5: Legend: On-Board Splitter Box P/N 8135203 . . . . . . . . . . . . . . . . . . . . 1-4
©2004 Helix Technology Corporation
Pub. No. 8040426, Rev. 101, 2/10/04
ECO No. 16163
vii
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