Versum Materials GASGUARD AP10 Installation, Operation & Maintenance Manual page 56

Source systems
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The following label would be used with the gases listed below it:
 
 
 
 
 
 
 
 
 
 
Boron trifluoride
Chlorine
Carbon tetrachloride
Nitrogen dioxide
Nitric oxide
MNL000456.doc
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Confidential and Proprietary Data
Phosphorous pentafluoride
Sulfur dioxide
Sulfur tetrafluoride
Tungsten hexafluoride
Revision 00
09/19/2016
Chapter - 1
Page - 45

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