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Versum Materials GASGUARD AP10 Installation, Operation & Maintenance Manual

Source systems
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Installation / Operation / Maintenance
GASGUARD
Source Systems
 
 
Manual
®
Manual Part Number: 123223
Edition:
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Versum Materials Confidential 
 
 
 
 
 
AP10
Rev-1

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Summary of Contents for Versum Materials GASGUARD AP10

  • Page 1 Installation / Operation / Maintenance Manual           ® GASGUARD AP10 Source Systems Manual Part Number: 123223 Edition: Rev-1 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Versum Materials Confidential ...
  • Page 2 Versum Materials, Inc. The information and data should be available only to those with a need to know. Versum Materials, Inc. makes no representation that the information and data is appropriate for the recipient, and each recipient needs to independently evaluate the appropriateness of the information and data for its use.
  • Page 3 Versum Materials product. This warranty shall not apply to, and Versum Materials shall not be responsible for, any loss arising in connection with the purchase or use of any Versum Materials product which...
  • Page 4 Chapter 9 – Troubleshooting Rev-0 MNL000464.doc  Initial Release Chapter 10 – Maintenance _______________________________________________________________________________________________________________ MNL000454.doc Revision 1 02/22/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Versum Materials Confidential  Page C - 4...
  • Page 5 Rev-0 MNL000469.doc  Initial Release Appendix B Rev-0 MNL000470.doc  Initial Release _______________________________________________________________________________________________________________ MNL000454.doc Revision 1 02/22/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Versum Materials Confidential  Page C - 5...
  • Page 6 Versum Materials, Inc. The information and data contained herein are proprietary to Versum Materials, Inc. and are not to be copied, reproduced, duplicated or disclosed to others, in whole or in part, without prior written consent of Versum Materials, Inc.
  • Page 7 Section 2: Dimensions and Mounting    This section provides an overview of methods to mount the system as well as envelope dimensions for typical systems. © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data...
  • Page 8   Section 10: Maintenance  This section provides a guide to routine maintenance operations.     © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data...
  • Page 9 Directive (PED) for Gasguard™ equipment. (Applicable only within the European community)   Appendix D  This Appendix contains the Supplemental Information for GASGUARD® Acetylene Source Systems © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data...
  • Page 10 • • •   9: Troubleshooting • •   10: Maintenance • •     11: System Specific • • • Information © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data...
  • Page 11   © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...
  • Page 12     1.1.1 Level or Intensity of Hazard    Indicates an immediate hazard, which if not  avoided, will result in death or serious injury.        MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...
  • Page 13 It may also be use to alert against unsafe practices. MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...
  • Page 14 The formation for explosive gas mixtures of flammable gas and air when exposed to an ignition source.   MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...
  • Page 15 This symbol represents PPE (Personal Protective Equipment). Proper PPE shall be worn when working with this system. MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 16 This symbol warns of a pinch hazard. This hazard exists on cabinet doors equipped with automatic closers.         MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 17             This symbol cautions against the improper anchoring of cabinets. MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...
  • Page 18 (self-contained breathing apparatus, emergency shutdown systems, plant alarm locations, etc.) MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 7...
  • Page 19 Always provide adequate ventilation in the work area to decrease the risk of an oxygen deficient atmosphere.   MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 8...
  • Page 20 (cartridge or filter type gas masks cannot be used). See the information on personal protective equipment in this section for details.   MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9...
  • Page 21 Follow Typical Minimal Lockout or Tagout System Procedures described by Occupational Safety and Health Admin., Labor Para. 1910.147. MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 10...
  • Page 22       Falling Equipment Hazard    This system is a top heavy device.  If it is not properly  installed, it could fall and injure, crush or kill personnel  working in the area.              MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 11...
  • Page 23 Safetygrams found in the Safety section of the Operation Manual.       Pinch Hazard    A pinch hazard exists on cabinet doors equipped with  automatic closers.          MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 12...
  • Page 24 In addition to the personal protective equipment, the following safety equipment is highly recommended and is required when VERSUM MATERIALS, INC. MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 13...
  • Page 25 Adequate ventilation as described in section 3.7. •     If you are unsure what personal protective equipment  list to follow for the gases being used, DO NOT  continue.  Failure to understand the hazards and use  the proper personal protective equipment may cause  INJURY or DEATH.  Contact Versum Materials, Inc. for  the gas category.  MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 14...
  • Page 26 Corrosive gas leak detector (ex. MDA) •   Self contained positive pressure breathing apparatus • MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 15...
  • Page 27 Safety glasses with side shields •   Leather gloves •   Safety shoes •     MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 16...
  • Page 28   Safety glasses with side shields •   Leather gloves •   Safety shoes • MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 17...
  • Page 29   Some gases have more than one hazard.  For example,  fluorine is toxic, corrosive and also an oxidizer.          MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 18...
  • Page 30 A list of most of the toxic gases used in the GASGUARD system follows:   MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 19...
  • Page 31 Silicon tetrafluoride   Fluorine Sulfur tetrafluoride   Germane Trichlorosilane Hydrogen bromide Tungsten hexafluoride Hydrogen chloride MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 20...
  • Page 32 Hydrogen fluoride Boron trifluoride Hydrogen sulfide Chlorine Nitrogen dioxide Chlorine trifluoride Phosphorous pentafluoride Dichlorosilane Silicon tetrachloride MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 21...
  • Page 33 1.10.3 Flammable and Pyrophoric Gas Hazards    Flammable and pyrophoric gases could cause fire, explosions, personal injury or death. MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 22...
  • Page 34 See tables in section 3.7 which list the exhaust requirements per enclosure size for all gases.   MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 23...
  • Page 35 Avoid venting of flammable gases through vents that do not contain an • inert atmosphere. MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 24...
  • Page 36   Diborane Methane   Diborane mixtures Methyl chloride   Dichlorosilane Methyl fluoride   Disilane Trichlorosilane MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 25...
  • Page 37 Do not substitute components or equipment without considering these hazards. Refer to CGA Pamphlet G-4.4 for guidelines and MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 26...
  • Page 38 In some cases, the elevated oxygen levels could linger even after the source has been shut off. Never tie into an oxygen system for personal breathing MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 27...
  • Page 39 See the information on personal protective equipment in Section 1.9 for details. MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 28...
  • Page 40 Nitrogen gas may accumulate in low or confined areas. All requirements of OSHA 1910.146 (Confined Space Guidelines. ) must be met when working with MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 29...
  • Page 41 (cartridge or filter type gas masks cannot be used). See the information on personal protective equipment in this section for details. MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 30...

  • Page 42: Halocarbon

    Nitrogen   Halocarbon 22 Perfluoropropane   Halocarbon 23 Sulfur Hexafluoride   Halocarbon 113 Xenon   MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 31...
  • Page 43 Pressurized gas lines could injure personnel and damage equipment. Never tighten or loosen a fitting when it is under pressure. MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 32...
  • Page 44 Contact your gas supplier for the maximum torque (ft./lbs. or N/m) allowed on diaphragm type MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 33...
  • Page 45 MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 34...
  • Page 46 (usually 200 psig [14 barg] minimum). The cylinder should be changed out at this point to MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 35...
  • Page 47 For a more complex system, a more comprehensive procedure will need to be developed, documented and utilized.     Lockout (or Tagout) Procedure for (Name of Company)    Purpose    MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 36...
  • Page 48 2. If the machine or equipment is operating, shut it down by the normal stopping procedure (depress stop button, open toggle switch, etc.). MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 37...
  • Page 49 Operate the energy isolating devices to restore energy to the machine or equipment.   MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 38...
  • Page 50 Name(s)/Job title(s) of affected employees and how to notify   Type(s) and Location of energy isolating means   MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 39...
  • Page 51 Name(s)/Job title(s) of employees authorized for group lockout or tagout   1910.147 29 CFR Ch.XVII (7-1-90) MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 40...
  • Page 52   The following sign is located on the exterior door of the Gasguard cabinet.   MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 41...
  • Page 53 Chapter - 1 MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 42...
  • Page 54 It is also located on the cylinder strap on both cabinets and racks.                 MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 43...
  • Page 55 They are not to be used to classify gas hazards. Refer to the appropriate MSDS provided with the system documentation.       MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 44...
  • Page 56 Phosphorous pentafluoride Chlorine Sulfur dioxide Carbon tetrachloride Sulfur tetrafluoride Nitrogen dioxide Tungsten hexafluoride Nitric oxide MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 45...
  • Page 57 The following label would be used with the gases listed below it:                   Fluorine Fluorine mixtures   MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 46...
  • Page 58 Carbon monoxide Hydrogen selenide   Diborane mixtures Hydrogen sulfide   Dichlorosilane Phosphine mixtures Diethyl telluride MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 47...

  • Page 59: Halocarbon

    Halocarbon 32 Silane Halocarbon 41 Silane mixtures Hydrogen                 MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 48...
  • Page 60 The following label would be used with the gases listed below it:                   Silicon tetrachloride MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 49...

  • Page 61: Halocarbon

    The following label would be used with the gases listed below it:         Ammonia Halocarbon 125 MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 50...

  • Page 62: Table Of Contents

    Halocarbon 22 Perfluoropropane Halocarbon 23 Sulfur hexafluoride Halocarbon 113 Teteafluoroethane Halocarbon 115 Xenon Halocarbon 116 MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 51...
  • Page 63 The following label would be used with the gases listed below it:       Oxygen Nitrogen trifluoride Oxygen mixtures Nitrogen trifluoride mixtures MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 52...
  • Page 64 Be aware that the regulator may leak if the regulator seat is damaged, corroded or soiled.   MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 53...
  • Page 65 A password security system prevents unauthorized personnel to operate or • modify the GASGUARD controller menu. MNL000456.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 54...
  • Page 66 VERSUM MATERIALS, INC. Safetygram 17 Dangers of Oxygen Deficient Atmospheres Nitrogen Material Safety Data Sheet _______________________________________________________________________________________________________________ MNL000456.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 55...
  • Page 67   2.1.1.4 - 1 Cylinder Euro Rack   2.1.1.5 - 1 Cylinder Wall Mount   MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...
  • Page 68 Chapter - 2 2.1.1.6 - 1 Cylinder Euro Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...
  • Page 69 Approximate Weight = 350 pounds (158.76 Kilograms)   Figure 2.1.1.1: Outline Dimensions 1 Cylinder Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...
  • Page 70 Approximate Weight = 350 pounds (158.76 Kilograms)   Figure 2.1.1.2: Outline Dimensions 1 Cylinder Euro Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 71   Approximate Weight = 250 pounds (113.40 Kilograms) Figure 2.1.1.3: Outline Dimensions 1 Cylinder Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 72 Chapter - 2   Approximate Weight = 250 pounds (113.40 Kilograms) MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...
  • Page 73 Chapter - 2 Figure 2.1.1.4: Outline Dimensions 1 Cylinder Euro Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 7...
  • Page 74 Chapter - 2   Approximate Weight = 185 pounds (83.92 Kilograms) MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 8...
  • Page 75 Chapter - 2 Figure 2.1.1.5: Outline Dimensions 1 Cylinder Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9...
  • Page 76 Approximate Weight = 185 pounds (83.92 Kilograms) Figure 2.1.1.6: Outline Dimensions 1 Cylinder Euro Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 10...
  • Page 77   2.1.2.5 - 2 Cylinder Wall Mount   2.1.2.6 - 2 Cylinder Euro Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 11...
  • Page 78 Approximate Weight = 500 pounds (226.24 Kilograms)   Figure 2.1.2.1: Outline Dimensions 2 Cylinder Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 12...
  • Page 79 Approximate Weight = 500 pounds (226.24 Kilograms)   Figure 2.1.2.2: Outline Dimensions 2 Cylinder Euro Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 13...
  • Page 80   Approximate Weight = 360 pounds (163.29 Kilograms) Figure 2.1.2.3: Outline Dimensions 2 Cylinder Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 14...
  • Page 81 Approximate Weight = 360 pounds (163.29 Kilograms) Figure 2.1.2.4: Outline Dimensions 2 Cylinder Euro Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 15...
  • Page 82 Approximate Weight = 275 pounds (124.73 Kilograms)   Figure 2.1.2.5: Outline Dimensions 2 Cylinder Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 16...
  • Page 83 Approximate Weight = 275 pounds (124.73 Kilograms) Figure 2.1.2.6: Outline Dimensions 2 Cylinder Euro Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 17...
  • Page 84   2.1.3.5 - 3 Cylinder Wall Mount   2.1.3.6 - 3 Cylinder Euro Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 18...
  • Page 85               Approximate Weight = 600 pounds (271.49 Kilograms)   MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 19...
  • Page 86 Chapter - 2 Figure 2.1.3.1: Outline Dimensions 3 Cylinder Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 20...
  • Page 87 Approximate Weight = 600 pounds (271.49 Kilograms) Figure 2.1.3.2: Outline Dimensions 3 Cylinder Euro Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 21...
  • Page 88 Chapter - 2       Approximate Weight = 425 pounds (192.77 Kilograms)   MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 22...
  • Page 89 Chapter - 2 Figure 2.1.3.3: Outline Dimensions 3 Cylinder Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 23...
  • Page 90 Chapter - 2   Approximate Weight = 425 pounds (192.77 Kilograms)   MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 24...
  • Page 91 Chapter - 2 Figure 2.1.3.4: Outline Dimensions 3 Cylinder Euro Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 25...
  • Page 92 Approximate Weight = 300 pounds (136.07 Kilograms)   Figure 2.1.3.5: Outline Dimensions 3 Cylinder Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 26...
  • Page 93 Chapter - 2   Approximate Weight = 300 pounds (136.07 Kilograms) MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 27...
  • Page 94 Chapter - 2 Figure 2.1.3.6: Outline Dimensions 3 Cylinder Euro Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 28...
  • Page 95   2.1.4.5 - 1x1 Cylinder Wall Mount   2.1.4.6 - 1x1 Cylinder Euro Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 29...
  • Page 96               Approximate Weight = 600 pounds (271.49 Kilograms)   MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 30...
  • Page 97 Chapter - 2 Figure 2.1.4.1: Outline Dimensions 1x1 Cylinder Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 31...
  • Page 98               Approximate Weight = 600 pounds (271.49 Kilograms)   MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 32...
  • Page 99 Chapter - 2 Figure 2.1.4.2: Outline Dimensions 1x1 Cylinder Euro Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 33...
  • Page 100 Approximate Weight = 425 pounds (192.77 Kilograms)   Figure 2.1.4.3: Outline Dimensions 1x1 Cylinder Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 34...
  • Page 101 Approximate Weight = 425 pounds (192.77 Kilograms)   Figure 2.1.4.4: Outline Dimensions 1x1 Cylinder Euro Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 35...
  • Page 102 Approximate Weight = 300 pounds (136.07 Kilograms) Figure 2.1.4.5: Outline Dimensions 1x1 Cylinder Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 36...
  • Page 103 Chapter - 2     Approximate Weight = 300 pounds (136.07 Kilograms)   MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 37...
  • Page 104 Chapter - 2 Figure 2.1.4.6: Outline Dimensions 1x1 Cylinder Euro Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 38...
  • Page 105   2.1.5.5 - 1x2 Cylinder Wall Mount   2.1.5.6 - 1x2 Cylinder Euro Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 39...
  • Page 106 Approximate Weight = 650 pounds (294.84 Kilograms)   Figure 2.1.5.1: Outline Dimensions 1x2 Cylinder Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 40...
  • Page 107 Approximate Weight = 650 pounds (294.84 Kilograms)   Figure 2.1.5.2: Outline Dimensions 1x2 Cylinder Euro Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 41...
  • Page 108 Approximate Weight = 450 pounds (204.12 Kilograms)   Figure 2.1.5.3: Outline Dimensions 1x2 Cylinder Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 42...
  • Page 109 Chapter - 2     Approximate Weight = 450 pounds (204.12 Kilograms)   MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 43...
  • Page 110 Chapter - 2 Figure 2.1.5.4: Outline Dimensions 1x2 Cylinder Euro Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 44...
  • Page 111 Approximate Weight = 325 pounds (147.19 Kilograms)   Figure 2.1.5.5: Outline Dimensions 1x2 Cylinder Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 45...
  • Page 112 Approximate Weight = 325 pounds (147.19 Kilograms) Figure 2.1.5.6: Outline Dimensions 1x2 Cylinder Euro Wall Mount MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 46...
  • Page 113   For cabinet anchoring figures see Section 2.2.1. For rack anchoring figures see section 2.2.2. MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 47...
  • Page 114 2.2.1.4 - 1x1 Cylinder Cabinet or 1x1 Cylinder Euro Cabinet   2.2.1.5 - 1x2 Cylinder Cabinet or 1x2 Cylinder Euro Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 48...
  • Page 115 Chapter - 2   Figure 2.2.1.1: Mounting Hole Locations 1 Cylinder Cabinet or 1 Cylinder Euro Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 49...
  • Page 116     Figure 2.2.1.2: Mounting Hole Locations 2 Cylinder Cabinet or 2 Cylinder Euro Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 50...
  • Page 117 Chapter - 2   Figure 2.2.1.3: Mounting Hole Locations 3 Cylinder Cabinet or 3 Cylinder Euro Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 51...
  • Page 118     Figure 2.2.1.4: Mounting Hole Locations 1x1 Cylinder Cabinet or 1x1 Cylinder Euro Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 52...
  • Page 119     Figure 2.2.1.5: Mounting Hole Locations 1x2 Cylinder Cabinet or 1x2 Cylinder Euro Cabinet MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 53...
  • Page 120 2.2.2.4 - 1x1 Cylinder Rack or 1x1 Cylinder Euro Rack   2.2.2.5 - 1x2 Cylinder Rack or 1x2 Cylinder Euro Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 54...
  • Page 121 Chapter - 2             MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 55...
  • Page 122 Chapter - 2 Figure 2.2.2.1: Mounting Hole Locations 1 Cylinder Rack or 1 Cylinder Euro Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 56...
  • Page 123     Figure 2.2.2.2: Mounting Hole Locations 2 Cylinder Rack or 2 Cylinder Euro Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 57...
  • Page 124     Figure 2.2.2.3: Mounting Hole Locations 3 Cylinder Rack or 3 Cylinder Euro Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 58...
  • Page 125     Figure 2.2.2.4: Mounting Hole Locations 1x1 Cylinder Rack or 1x1 Cylinder Euro Rack MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 59...
  • Page 126   Figure 2.2.2.5: Mounting Hole Locations 1x2 Cylinder Rack or 1x2 Cylinder Euro Rack _______________________________________________________________________________________________________________ MNL000457.doc Revision 00 09/16/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 60...
  • Page 127 Refer to Specification Sheet or INS drawing to verify if the internal termination option applies. MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...
  • Page 128 Drawing (INS). An INS drawing is provided only when it is specifically requested by the customer. Please contact your Versum Materials, Inc. commercial representative for assistance. MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...
  • Page 129 1/4”or 3/8” TOD Gas Line Continuous (Passes Through   Bulkhead) Compression Fitting Cabinet Top Grips OD of Tube   MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...
  • Page 130 For coax tubing on silane lines, the pressure decay method with an inert gas (not air) must be used. MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 131   MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 132 The flow rate of this trickle purge is approximately 2-5 LPM (4-10 CFH). Figure 3.4 depicts a typical trickle purge assembly.   MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...
  • Page 133   Figure 3.4: Typical Trickle Purge Assembly MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 7...
  • Page 134 (i.e. towards flammable construction materials, personnel walkways, etc.) or presents another potentially MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 8...
  • Page 135 MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9...
  • Page 136 The vacuum generator will demand a flow of 50-60 LPM (106-127 CFH) of nitrogen during purge cycles. MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 10...
  • Page 137 The presence of oxygen enhances the corrosion effect and may result in deterioration of controller performance. MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 11...
  • Page 138 2. Open the needle valve 4 to 5 turns (counter-clockwise). Allow the controller to purge for 20 minutes.   MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 12...
  • Page 139     Figure 3.5: Rear View of GASGUARD AP10 Controller           MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 13...
  • Page 140 G- 13 requirements, volumetric air flow through the cabinet must be at least 300 times the maximum potential leak rate. MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 14...
  • Page 141 IFC and NFPA code requirements (U.S.A. only). MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 15...
  • Page 142 [3] No Baffles were used on window or in interior. MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 16...
  • Page 143 Notes: [1] Vent stack duct sizes are 6 inch (154 mm) diameter for the MC-1Cyl/2Cyl/3Cyl [2] “Access Hatch Closed” values have been measured, or calculated at the exhaust MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 17...
  • Page 144 An access port baffle is available which reduces access area by 50% to reduce exhaust flow requirements when the hatch is open. MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 18...
  • Page 145 50% of the access hatch area when the window is opened. This baffle reduces air flow requirements through the hatch. MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 19...
  • Page 146     door diffuser       Figure 3.6: Exhaust Hook-up and Ventilation Measurement Location MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 20...
  • Page 147 (145 liters/min @ 2.1 barg)               Figure 3.7: Sprinkler Connection Location MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 21...
  • Page 148 A hydride monitor can detect leaking Silane and shutdown the system eliminating or reducing the risk and size of explosion. MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 22...
  • Page 149   Do not operate equipment without a properly sized RFO installed in the cylinder valve. MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 23...
  • Page 150     _______________________________________________________________________________________________________________ MNL000458.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 24...
  • Page 151 3 wire, 50 to 60 Hertz   • ± 10% Fluctuation of Nominal Voltage Range MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...
  • Page 152 Use #4 AWG ground wire for non EMI/RFI protected systems, installed in the United States. Use Alpha #1239, 1-3/8” flat braid or equivalent for EMI/RFI protected and MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...
  • Page 153 For 1X1 and 1X2 cabinet configurations each cabinet requires grounding to earth ground.   Reference: Worldwide Engineering Specification #4WEQ-9502 Gasguard Gas Cabinet Grounding Specification MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...
  • Page 154 Terminal Connector (single Neutral pole)     Surge Protection   Device         MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 155 Line         Figure 4.4: Power Supply Terminal Connector (Removable)       MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 156 Voltages should be checked at each cabinet after installation to ensure proper levels. MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 157 MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...
  • Page 158 120/240 VAC Conduit           Figure 4.2: Top View of GASGUARD AP10 Controller MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 7...
  • Page 159 Chapter - 4               Figure 4.5: Conduit and Conduit Seals MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 8...
  • Page 160 Digital Inputs                          Figure 4.6: I/O Terminal Blocks   MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9...
  • Page 161 If so equipped, termination for the additional points will be shown in the drawings located in the document envelope. MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 10...
  • Page 162 Typically, supervised inputs are used with the life safety system. Figure 4.7 shows the supervisor input wiring for use with the life safety system.       MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 11...
  • Page 163 Chapter - 4   Figure 4.7: Life Safety Supervisor Input Wiring MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 12...

  • Page 164: Versum Materials, Inc. As Of The Revision And Date Shown. All Rights Reserved

      Supervised Inputs Response   Remote Shutdown Shutdown GASGUARD System     MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 13...

  • Page 165: Versum Materials, Inc. As Of The Revision And Date Shown. All Rights Reserved

    24 VDC @ 1 Amp maximum       COMMON   Relay Output # TB-307 TB-307 TB-307       MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 14...

  • Page 166: Versum Materials, Inc. As Of The Revision And Date Shown. All Rights Reserved

    TB-308             9  10  11  12  13  14  15  16  MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 15...

  • Page 167: Versum Materials, Inc. As Of The Revision And Date Shown. All Rights Reserved

    Digital Inputs (Customer Digital Inputs Pin-Outs)     Signal 24 VDC+   Digital Input # TB-309 TB-309       MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 16...

  • Page 168: Versum Materials, Inc. As Of The Revision And Date Shown. All Rights Reserved

          Signal TB- 24 VDC+ TB-   Digital Input #       MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 17...

  • Page 169: Versum Materials, Inc. As Of The Revision And Date Shown. All Rights Reserved

    Signal TB- 24 VDC+ TB-   Analog Input #             MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 18...

  • Page 170: Versum Materials, Inc. As Of The Revision And Date Shown. All Rights Reserved

    The USB port has a cap that can be used to cover the port when not in use (see figure 4.10).   Figure 4.8: USB Port Warning Label MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 19...

  • Page 171: Versum Materials, Inc. As Of The Revision And Date Shown. All Rights Reserved

    Figure 4.9: AP10 Controller with USB Port on the Face of the Controller                     MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 20...

  • Page 172: Versum Materials, Inc. As Of The Revision And Date Shown. All Rights Reserved

    GASGUARD Cabinets, VMBs and BSGS systems. The GASGUARD AP10 can communicate to GCS (Global Communications System) via MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 21...

  • Page 173: Versum Materials, Inc. As Of The Revision And Date Shown. All Rights Reserved

    GCS will need to supply gas availability data to a site’s tool annunciation system. GCS uses standard TCP/IP network protocol to communicate over all networks. MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 22...

  • Page 174: Versum Materials, Inc. As Of The Revision And Date Shown. All Rights Reserved

    Figure 4.11 Typical GCS Network Architecture                   MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 23...

  • Page 175: Versum Materials, Inc. As Of The Revision And Date Shown. All Rights Reserved

    The table below lists the IP addresses that can not be used with the AP10 controller. MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 24...
  • Page 176 GCS. The Remote Serial Port Server is connected to the GCS server via Ethernet networking using TCP/IP.                 MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 25...
  • Page 177 Figure 4.12 shows the MMMS GASGUARD Network Wiring Configuration.   Figure 4.12: MMMS Network Interface MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 26...
  • Page 178 RS-485 converter boards to expand the number of available ports from 16 to 32. MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 27...
  • Page 179 GASGUARD AP10 controllers and the network host computer.             Figure 4.13: Daisy-Chain RS-485 Network Wiring Configuration MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 28...
  • Page 180 Figure 4.14: RS-485 Network Field Wiring Between Cabinets/VMBs               MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 29...
  • Page 181 See Figure 4.15 for the location of the network connections on the main processor Figure 4.15: Bottom View of the GASGUARD AP10 Controller Main Interface Board MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 30...
  • Page 182 0°C +60°C       Figure 4.15: AP10 ATEX Label for Systems without a Heater MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 31...
  • Page 183 • The equipment category number 3. The equipment category number 3 means the equipment is suitable for an environment where an explosive atmosphere MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 32...
  • Page 184 • The ambient temperature range, Ta.                 _______________________________________________________________________________________________________________ MNL000459.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 33...
  • Page 185 • Input power supply specs must not exceed the maximum values as listed in Section 4.2 of this manual. _______________________________________________________________________________________________________________ MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 34...
  • Page 186 (other than those recommended by Versum Materials, Inc.) may impair its suitability for use in hazardous locations. _______________________________________________________________________________________________________________ MNL000459.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 35...
  • Page 187 In order to adequately leak test the GASGUARD Source System internal and external piping, the pneumatic emergency shutoff and auto-crossover valves MNL000460.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...
  • Page 188   • Opening vent valves when high pressure process gas is present.   MNL000460.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...
  • Page 189 Touch anywhere on the graphics portion of the screen. You will see a pop-up window entitled: “Password” Using the MNL000460.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...
  • Page 190 “OPEN VALVE”. Pressing CANCEL will close the menu leaving the valve closed. MNL000460.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 191 NOTE: Any valves left in open position will be closed automatically.   From the Main Menu screen, press “LOGOUT” to return to normal display. MNL000460.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 192 _______________________________________________________________________________________________________________ MNL000460.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...
  • Page 193 Versum Materials, Inc. for placement into the source system maintenance file. The Source System Utility Checklist is found on the following two pages. MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 1...
  • Page 194 11. Purge line installed and helium leak tested (see Section 3.5). (If external purge cylinder utilized.)   MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 2...
  • Page 195 15. Hazardous gas monitor installed and operating.   16. Properly sized RFO installed in process cylinder valve (see Section 3.11). MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 3...
  • Page 196     Safety         VERSUM MATERIALS, INC. (Field Start-Up Checklist Complete) MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 4...
  • Page 197 Verify and record cylinder orifice size (see Section     3.11 and warnings Section 8.3) MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 5...
  • Page 198 85 psig to 95 psig max. (5.9-6.6 barg) Purge cylinder installed Gas detection system operational Secondary containment installed MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 6...
  • Page 199 Remove pneumatic bulkheads from the back of the controller. Do all valves operate   MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 7...
  • Page 200 Program name and date   Life safety system utilized ( yes / no )   MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 8...
  • Page 201 Completed Zero Zero Span Span Completed before after before after before After before after MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 6...
  • Page 202   SECTION COMPLETED SIGNATURE DATE Notes: MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 7...
  • Page 203 Right Terminal Box Switch 11 Right Terminal Box Switch 12   CONTINUED ON NEXT PAGE: MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 8...
  • Page 204 Optional Expansion Digital Outputs Relay # 9 Relay #10 Relay #11 Relay #12 Relay #13 Relay #14 MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 9...
  • Page 205 Relay #15 Relay #16     SECTION COMPLETED SIGNATURE DATE   NOTES: MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 10...
  • Page 206 AP10 Source system programs   Process   Pre-purge   Change cylinder   Post purge   MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 11...
  • Page 207 Test shutdowns for process line and aux purge while other side is in gas to tool   SECTION COMPLETED SIGNATURE DATE Notes: MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 12...
  • Page 208 SECTION COMPLETED SIGNATURE DATE   Comments                 MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 13...
  • Page 209 I have received and understood training on the operation of this Source System on the date given below.         Name Date MNL000461.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Page - 14...

  • Page 210: Halocarbon

    PHOSPHINE SILANE SIH4 SILICON SICL4   TETRACHLORIDE SILICON SIF4 TETRAFLUORIDE SULFUR HEXAFLUORIDE TUNGSTEN HEXAFLUORIDE _______________________________________________________________________________________________________________ MNL000461.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 15...

  • Page 211: Confidential And Proprietary Data

    7.1 Gas Cabinet    The function of the GASGUARD Cabinet is to ensure a safe environment for MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...
  • Page 212 There is a weight scale option for use with cylinders containing liquefied gases.                 MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...
  • Page 213                       Figure 7.1: GASGUARD cabinet MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...
  • Page 214 A typical rack system is shown in Figure 7.2.                           MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 215                     Figure 7.2: Typical Rack System MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 216 "PROCESS GAS FLOW" mode again, which will now place it into standby until the other cylinder is stopped. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...
  • Page 217 Excess flow sensors may be installed on certain systems.         MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 7...
  • Page 218 MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 8...
  • Page 219 V8, in the controller is used to supply the pneumatic cylinder valve (if present).     MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9...
  • Page 220 Low-Pressure Vent Valve   This pneumatic valve controls flow from the low pressure side of MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 10...
  • Page 221 Purge Cylinder Pressure Transducer   This transducer monitors pressure of the purge gas at the cylinder outlet.   MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 11...
  • Page 222     MV10 High Pressure Purge Gas Isolation Valve (Optional)   MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 12...
  • Page 223 MV16. It should be closed during normal process gas flow.   MV16 Process Purifier Isolation Valve (Optional) MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 13...
  • Page 224 This manual valve is only used when the nitrogen purge panel is external to the cabinet.   MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 14...
  • Page 225 This manual valve isolates a leak test port (typically a VCR connection) from the process panel. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 15...
  • Page 226   PCV1 Process Gas Pressure Regulator   This regulator controls process gas delivery pressure. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 16...
  • Page 227 This check valve is installed to protect the purge gas purifier. It must also be installed in conjunction with PT8.   Vacuum Venturi Check Valve MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 17...
  • Page 228 Purge Gas Delivery Pressure Safety Valve   This pressure safety valve prevents overpressurization of the purge gas delivery piping. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 18...
  • Page 229 FAULT ALARM box in the top right hand corner of the screen.   MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 19...
  • Page 230 Chapter - 7 Figure 7.4: GASGUARD AP10 Controller MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 20...
  • Page 231     Figure 7.5: GASGUARD AP10 Power Up Screen     MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 21...
  • Page 232 Main Menu is shown in Figure 7.6. The Main Menu will remain displayed for a configurable amount of time or until the   key is pressed. LOGOUT MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 22...
  • Page 233 “Main Menu,” at the top of the window again.     Alarm and Controller Status Boxes MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 23...
  • Page 234   MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 24...
  • Page 235     POWER This LED indicates that there is +5 VDC power to the unit. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 25...
  • Page 236 MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 26...
  • Page 237 Refer to Section 4 for further information about this USB port and proper operation.     MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 27...
  • Page 238 The nitrogen flow must be increased until the alarm can be reset. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 28...
  • Page 239 If no problems are found, the process gas flow is started. Flow continues until a process stop, or until an alarm condition causes a shutdown.     MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 29...
  • Page 240 Cycles may be increased (see AP10 Source System Configuration in Section 8.6 of this manual), but not reduced below the minimum. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 30...
  • Page 241 As with the pre purge, the number of purge cycles is determined by the process gas type. Cycles may be increased (See AP10 Source System Configuration in Section MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 31...
  • Page 242 Chapter - 7 8.6 of this manual), but not reduced below the minimum. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 32...
  • Page 243   MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 33...
  • Page 244 Primary system - the system that supplies gas to the tool (through a VMB if MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 34...
  • Page 245     Figure 7.9: RBS - Simplified Piping Interconnections       MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 35...
  • Page 246 Since the backup system is a typical automatic crossover system, no additional valves are required. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 36...
  • Page 247 “Flow” or “Standby”. Pressing will Cancel close the operator prompt and perform no action.     MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 37...
  • Page 248 Selecting “Stop RBS” will take RBS out of standby mode or immediately close the valve V26 if RBS is currently flowing. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 38...
  • Page 249 No RBS label status will be displayed if RBS is stopped (via the main menu).   MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 39...
  • Page 250 RBS will remain in standby;   • If start process gas flow is selected, RBS will remain in standby. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 40...
  • Page 251 “Crossover”, “Stop”, or “Cancel”. If the backup system cabinet is not available at this time, the prompt will not appear.   MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 41...
  • Page 252     MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 42...
  • Page 253 Chapter - 7 Figure 7.11: RBS - Simplified Alarm Signal Interconnections for AP10 Systems MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 43...
  • Page 254 V. low process None Local crossover cylinder weight   RBS - Alarm Conditions & Responses MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 44...
  • Page 255 (see section 3). Since the primary panel is not on line, the flow of gas to the VMB / tool would be interrupted. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 45...
  • Page 256 0.010 inch orifice bypass.   V10 = HPLT supply valve (pneumatic).   MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 46...
  • Page 257 • the pressure rating of PT8   • the pressure available from the leak test gas supply. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 47...
  • Page 258 HPLT must be successfully completed before any further operations are permitted. MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 48...
  • Page 259 Chapter - 7     Figure 7.12: Example HPLT Piping Schematic MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 49...
  • Page 260       LOW HP Shutdown PURGE PT8   HPLT - Alarm Conditions & Responses MNL000462.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 50...
  • Page 261 (see section 1.11) all Process Outlet Isolation Valves (MV-29) to prevent opening while service is being performed. _______________________________________________________________________________________________________________ MNL000462.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 51...
  • Page 262 The gases being used in this equipment may be extremely hazardous. It is the customer's responsibility to assure that MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...
  • Page 263 Evacuate the area.                     Emergency Stop     MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...
  • Page 264 Figure 8.1: Emergency Stop Pushbutton Location MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...
  • Page 265                               MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 266 Using the Controller        This is the screen that is displayed upon power up. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 267   “Invalid Password” will appear at the bottom of window. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 268 All sequences require the operator to follow an executable order. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 269 Do not operate equipment without a properly sized RFO in place   MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...
  • Page 270     Before approaching a hazardous gas cabinet for a cylinder change, verify that there are no  alarm labels displayed on the screen and that the exhaust system is functioning correctly .  Only operators trained in these procedures and the hazardous gas system are allowed to  change cylinders.          MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 7...
  • Page 271 Process gas back-stream hazard can exist if the purge cylinder pressure drops below 200 psig (13.78 barg). MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 8...
  • Page 272   8. Don the required Personal Protective Equipment (PPE) prior to opening cabinet door.   MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9...
  • Page 273   2. Position full cylinder in gas cabinet, and strap loosely. Remove valve protection cap. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 10...
  • Page 274 5. Position valve outlet so that it lines up properly with the pigtail cylinder connection and tighten cylinder strap. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 11...
  • Page 275 3. Close cylinder valve.   4. Slowly open MV13 to vent purge gas from pigtail.   MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 12...
  • Page 276 Reinstall the purge cylinder (reference Section 8.3.1.2 "Full Purge Gas Cylinder Installation.)   Retest following steps 1 through 11 in Section 8.3.1.3. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 13...
  • Page 277 4. Adjust the purge gas regulator, PCV2, to 80-90 psig (5.51-6.20 barg) delivery pressure.   5. Close access window. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 14...
  • Page 278         On the Main Menu window, press the "STOP MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 15...
  • Page 279 Note any other comments about the condition of system.                 MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 16...
  • Page 280 On the Main Menu window, press the "START PRE PURGE" pushbutton.   Follow prompted manual steps on the screen. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 17...
  • Page 281 MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 18...
  • Page 282 This sequence of evacuation and pressurization will be repeated until the configured number of cycles is completed. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 19...
  • Page 283 As an optional feature, a trickle purge of the high pressure     tubing may begin and continue until you press MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 20...
  • Page 284 7. Recheck that process cylinder valve is closed. Do not use a wrench or other devices  to close diaphragm type cylinder  valves.  This could cause valve failure.  The maximum torque on diaphragm  type cylinder valves is 12 foot/pounds  (16.3 Nm).  Certain gases are supplied  with cylinder valves without  MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 21...
  • Page 285 14. Install cylinder valve protection cap. If necessary, tilt cylinder toward door slightly.   15. Unbuckle cylinder strap and remove cylinder from cabinet. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 22...
  • Page 286 1. Verify that the cylinder contains the same gas as the label on the gas cabinet and process panel.   Never attempt to replace a specified gas with  another gas without consulting equipment  supplier.  Incompatible gases could cause fires,    explosions or extremely corrosive or toxic  compounds.        MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 23...
  • Page 287 7. Remove pigtail cap/plug from pigtail connection.   8. Install new washer on those cylinder connections that require washers. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 24...
  • Page 288                             MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 25...
  • Page 289 If the valve color scheme is red for valve closed and green for valve open, the MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 26...
  • Page 290 This sequence of evacuation and pressurization will be repeated until the configured number of cycles is completed. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 27...
  • Page 291 MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 28...
  • Page 292     In addition, the "GAS FLOWING" LED will illuminate. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 29...
  • Page 293 RECHECK THAT CYLINDER VALVE IS TIGHTLY CLOSED BEFORE LOOSENING CGA CONNECTION FROM CYLINDER VALVE.           MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 30...
  • Page 294   Start                         Finish MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 31...
  • Page 295 Z-purging indicates that the Z-purge is adequate. If a "Low Z- purge" alarm is present, increase the flow rate until the alarm can be reset MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 32...
  • Page 296 10. Install an inert purge gas cylinder in the cabinet. Refer to Section 8.3.1.2 Full Purge Gas Cylinder Installation. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 33...
  • Page 297 16. Follow the prompts on the screen.   17. Refer to Section 8.3.2.3 Full Process Gas Cylinder Installation.     MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 34...
  • Page 298 CHANGE COMPLETE,” press the "START POST PURGE" pushbutton.   19. Follow any prompts that may be on the screen. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 35...
  • Page 299 22. Process gas is now flowing to the process equipment.                             MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 36...
  • Page 300               In addition, the "GAS FLOWING" LED will illuminate. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 37...
  • Page 301 High pressure gas could be vented.    Opening vent valves when high pressure process gas is present.   MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 38...
  • Page 302 8.5.2. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 39...
  • Page 303 „secured‟ until an operator reenters the Manual Mode window. While manual mode is „secured‟, Manual Mode will MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 40...
  • Page 304 Main Menu. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 41...
  • Page 305 Monitor pressures on the screen frequently.   Consider all possible results before opening or closing a valve. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 32...
  • Page 306 The CONFIGURATION MENU will appear as illustrated below.         Figure 8.2: Configuration Menu MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 33...
  • Page 307 VERSUM MATERIALS, INC.   8.6.14 Alarm Conditions   8.6.15 Alarm Delays   8.6.16 Alarm Types     MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 34...
  • Page 308       The following paragraphs describe the parameters that you may view and/or change. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 35...
  • Page 309 These setpoints may include one or more of the following:   Low Process Cyl.    MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 36...
  • Page 310 Use the keypad to type in a numeric value. Press   to accept the Apply changes. Press the pushbutton to exit the window.   MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 37...
  • Page 311 Press to accept the changes. Apply Press the   pushbutton to exit the window. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 38...
  • Page 312 8.5. It is the customer's responsibility to adhere to all operational warnings in Section 8.5 when performing the Digital Out Test.   MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 39...
  • Page 313 (controller input).   Use the scroll bar to view all the analog input values. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 40...
  • Page 314 The valve confirmation mode will be set to CONFIRM or NO CONFIRM. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 41...
  • Page 315 The window will display the end, stop, and fail options lists defined in the Configuration File for the chosen sequence. The end, stop, and MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 42...
  • Page 316 Changes to the prompt list will not be allowed. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 43...
  • Page 317 Use the keypad to type in a numeric value. Press Apply to accept the changes. Press the pushbutton to exit the window. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 44...
  • Page 318 A delay entry of „ 0‟ equates to no delay. The range of values is from 0 to 255 seconds.     MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 42...
  • Page 319 Changes to alarm response sequences will not be allowed. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 43...
  • Page 320 Security List   The 2nd Security List window will display the password number and password for MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 44...
  • Page 321 2nd level passwords and the first character will always be the number two. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 45...
  • Page 322 Write. The operator will be allowed to view the access list or exit the window. Only users with the VERSUM MATERIALS, INC. password will be allowed to MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 46...
  • Page 323 3rd security access. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 47...
  • Page 324   The Screen Saver option will allow the operator to change the screen saver time MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 48...
  • Page 325     Simulation   Permits the user to enable or disable simulation capabilities. MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 49...
  • Page 326   The network comm. type can be set to either RS-485 or Ethernet.   _______________________________________________________________________________________________________________ MNL000463.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 50...
  • Page 327 File from the controller to the target device connected to the controller USB port.     _______________________________________________________________________________________________________________ MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 51...
  • Page 328 The controller will reboot after completing deleting the NV data file from memory.       _______________________________________________________________________________________________________________ MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 52...
  • Page 329 Permits Access to the Operating System Task Bar. Calibrate Touch Screen – Allows the User to Calibrate the Touch Screen _______________________________________________________________________________________________________________ MNL000463.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 53...
  • Page 330 Tag out and   lock out the cylinder valve(s) following     the procedure in Safety Section MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...
  • Page 331   Before performing troubleshooting, review the  Safety section and read the warnings  in following  section.  If at any time during troubleshooting, you  are unsure what to do next, DO NOT CONTINUE.  Contact Versum Materials, Inc..        System Shut Down, No Lights on Controller    Possible Source of MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...
  • Page 332 Check position of cylinder Open cylinder valve, valve valve. pressure should indicate the current purge cylinder pressure. MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...
  • Page 333 Check input to controller, transducer(s) as transducer(s) Check connections and necessary malfunctioning signal from pressure transducers. MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 334 Check if instrument supply   pressure to open? is adequate. Adjust to 85-95 psig (5.9-6.6 barg) if necessary. MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 335 Check input to controller, transducer(s) Check connections and malfunctioning signal from pressure transducers.     MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 336 Are any vent valves open? Check position of all vent Close any vent valves if valves. open MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 337 Adjust to 85-95 psig pneumatic valves is adequate. (5.9-6.6 barg) if receiving sufficient necessary. pressure to open? MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...
  • Page 338 High process gas flow due to Examine process gas system to locate mechanical failure or product surge. cause of signal. MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 7...
  • Page 339 Adjust pneumatic pressure to the less than 65 psig (4.5 barg). controller to 85-95 psig (5.9-6.6 barg). MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 8...
  • Page 340 PT1 path to vent is isolated either from a closed manual valve or an air operated valve in this path not actuating. MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9...
  • Page 341 Increase purge delivery to 80-90 psig psig (4.8 barg) due to low purge (5.5-6.2 barg). delivery pressure. MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 10...
  • Page 342   9.6.8 Cylinder Connection Leaking   Probable Cause Corrective Action MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 11...
  • Page 343 CGA Bulletins found in the Appendix. If leak persists, advise supervisor or contact Versum Materials, Inc. MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 12...
  • Page 344 Ensure that 85-95 psig (5.9-6.6 barg) of pneumatic supply pressure is being supplied to the controller.   MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 13...
  • Page 345 10 psig (0.7 barg). Increase process regulator to deliver more than 10 psig (0.7 barg). MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 14...
  • Page 346   The following is a possible purge cylinder transducer alarm.           MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 15...
  • Page 347 Change purge cylinder following purge setpoint. gas cylinder procedures in Section 8.3.1 of this manual. MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 16...
  • Page 348 Materials, Inc. if regulator will not maintain setpoint.     PT5 (Vent Line Transducer) Alarms    The following are possible vent line transducer alarms. MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 17...
  • Page 349 Corrective Action   Vent line pressure is above user Check pollution abatement equipment setpoint. for obstruction. MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 18...
  • Page 350 Take appropriate action. Contact an Versum Materials, Inc. Representative for assistance. MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 19...
  • Page 351 Take appropriate action. Contact an Versum Materials, Inc. Representative for assistance MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 20...
  • Page 352   Probable Cause Corrective Action   Process cylinder weight is below setpoint.     _______________________________________________________________________________________________________________ MNL000464.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 21...
  • Page 353 MNL000465.doc Revision 2 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 10 - 1 Versum Materials Confidential ...
  • Page 354 MNL000465.doc Revision 2 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 10 - 2 Versum Materials Confidential ...
  • Page 355 Chapter– 10 Maintenance Follow the start-up procedure, in Section 8.4. MNL000465.doc Revision 2 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 10 - 3 Versum Materials Confidential ...
  • Page 356 MNL000465.doc Revision 2 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 10 - 4 Versum Materials Confidential ...
  • Page 357 CONTINUED NEXT PAGE Revision 22 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 10 - 5 Versum Materials Confidential ...
  • Page 358 Replace or clean as required. As necessary Analog Exhaust Monitor Verify zero. Yearly (i.e., Setra) Revision 22 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 10 - 6 Versum Materials Confidential ...
  • Page 359   NOTE: Asterisk (*) indicates that Preventative Maintenance task requires a shutdown. Revision 22 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 10 - 7 Versum Materials Confidential ...
  • Page 360 Power and signal wiring Visually inspect for insulation damage, Yearly corrosion, shortages. Revision 22 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 10 - 8 Versum Materials Confidential ...
  • Page 361 Section 4.1 of the Gasguard Operations manual. Tighten connections as needed. Revision 22 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 10 - 9 Versum Materials Confidential ...
  • Page 362 10 years Exhaust Switch 2 years CONTINUED NEXT PAGE _______________________________________________________________________________________________________________ MNL000465.doc Revision 2 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Versum Materials Confidential  Versum Materials Confidential  Confidential and Proprietary Data Page 10 - 10...
  • Page 363 Outdoor: 10 years       System Controller 10 years _______________________________________________________________________________________________________________ MNL000465.doc Revision 22 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Versum Materials Confidential  Versum Materials Confidential  Page 10 - 11...
  • Page 364   11.1 System Specifications    The specifications are shipped with the system. MNL000466.doc Revision 2 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 11 - 1 Versum Materials Confidential ...
  • Page 365 Solenoid and 287- Instrument Air Gauge / Switch, Digital N.O./N.C. 606454 MNL000466.doc Revision 2 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 11 - 4 Versum Materials Confidential ...
  • Page 366 Supply MATERIAL Supply Kit VERSUM Weather Miscellane 130370 MATERIAL Protection Kit MNL000466.doc Revision 2 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 11 - 5 Versum Materials Confidential ...
  • Page 367 MNL000466.doc Revision 2 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 11 - 6 Versum Materials Confidential ...
  • Page 368 Figure 1: Equipment Commodity Code Number on an AP10 Gas Cabinet MNL000466.doc Revision 2 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 11 - 7 Versum Materials Confidential ...
  • Page 369 Figure 3: The AP10 Gas Cabinet equipment commodity code number (circled above) can be found on the enclosure door. _______________________________________________________________________________________________________________ MNL000466.doc Revision 2 02/15/2019 AP10 Source © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Versum Materials Confidential  Confidential and Proprietary Data Page 11 - 8...
  • Page 370 Appendix A UHP Tubing This Appendix contains the SEMC-QAF030 "UHP Tubing and Fitting Specification". _______________________________________________________________________________________________________________ MNL000467.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 1...
  • Page 371 ANSI/ASME B46.1 - 1985 - Specification for surface texture-surface roughness, waviness, and lay. _______________________________________________________________________________________________________________ MNL000467.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 2...
  • Page 372 +- 1/2 degree Wall Thickness Tube and Fittings +- 10% (including saddle area of tees) _______________________________________________________________________________________________________________ MNL000467.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 3...
  • Page 373 6.5.4 The tube shall be blown dry with heated nitrogen gas Fittings Cleaning _______________________________________________________________________________________________________________ MNL000467.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 4...
  • Page 374 10 microinch Ra. Sampling length cutoff shall be 0.030" and traverse length will be 0.150". _______________________________________________________________________________________________________________ MNL000467.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 5...
  • Page 375 Rockwell Rb 90 maximum hardness. This test shall be performed for each size after "pulling". 6.8.12 VERSUM MATERIALS, INC. reserves the right to source inspect all tubing and fittings and inspect the manufacturers facilities upon request. Reports and Certifications: 6.9.1 The vendor shall supply the following reports and certifications as follows: 6.9.1.1...
  • Page 376 Certificate of compliance to the specifications within this document. Reference to pre-approved exceptions to this Work Instruction     _______________________________________________________________________________________________________________ MNL000467.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 7...
  • Page 377                           _______________________________________________________________________________________________________________ MNL000468.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 1...
  • Page 378 Signal Word: Warning Hazard Statements: H280:Contains gas under pressure; may explode if heated. _______________________________________________________________________________________________________________ MNL000468.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 2...
  • Page 379 Product is nonflammable and does not support combustion. Move away from container and cool with water from a protected position. Keep _______________________________________________________________________________________________________________ MNL000468.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 3...
  • Page 380 Containers should not be subjected to temperatures above 50°C (122°F). _______________________________________________________________________________________________________________ MNL000468.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 4...
  • Page 381 : Ensure adequate ventilation, especially in confined areas. protection and hygiene Remarks : Simple asphyxiant. 9. PHYSICAL AND CHEMICAL PROPERTIES _______________________________________________________________________________________________________________ MNL000468.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 5...
  • Page 382 Materials to avoid : No data available. Hazardous decomposition : No data available. _______________________________________________________________________________________________________________ MNL000468.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 6...
  • Page 383 : No data available. toxicity (repeated exposure) Aspiration hazard : No data available. _______________________________________________________________________________________________________________ MNL000468.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 7...
  • Page 384 : UN1066 Proper shipping name : Nitrogen, compressed Class or Division Label(s) : 2.2 _______________________________________________________________________________________________________________ MNL000468.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 8...
  • Page 385 This product does not contain any chemicals known to State of California to cause cancer, birth defects or any other harm. _______________________________________________________________________________________________________________ MNL000468.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 9...
  • Page 386 Appendix -   _______________________________________________________________________________________________________________ MNL000468.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 10...
  • Page 387                           _______________________________________________________________________________________________________________ MNL000469.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 1...
  • Page 388 Standards. Instructions for its safe use and installation are documented in the accompanying Operation and Installation Manual.   _______________________________________________________________________________________________________________ MNL000469.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 2...
  • Page 389                           _______________________________________________________________________________________________________________ MNL000470.doc Revision 00 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 1...
  • Page 390 1.3.1 Cylinder scales are recommended. Under normal operating conditions, pressure measurement may not be an accurate _______________________________________________________________________________________________________________ MNL000470.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 2...
  • Page 391 EFS is selected, the alarm will be configured as a fault (standard EFS _______________________________________________________________________________________________________________ MNL000470.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 3...
  • Page 392 Further Safety Information   Air Products Safetygram #38 _______________________________________________________________________________________________________________ MNL000470.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 4...
  • Page 393 Appendix - D     _______________________________________________________________________________________________________________ MNL000470.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 5...
  • Page 394 Appendix - D     _______________________________________________________________________________________________________________ MNL000470.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 6...
  • Page 395 Appendix - D     _______________________________________________________________________________________________________________ MNL000470.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 7...
  • Page 396 Appendix - D     _______________________________________________________________________________________________________________ MNL000470.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 8...
  • Page 397 Appendix - D 4.2 CGA SA-2 2003 Acetylene Safety Alert _______________________________________________________________________________________________________________ MNL000470.doc Revision 0 09/19/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page APP - 9...

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