Keithley 2470 User Manual
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Keithley 2470 User Manual

High voltage sourcemeter instrument
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tek.com/keithley
Model 2470
High Voltage SourceMeter
Instrument
®
User's Manual
2470-900-01 Rev. A / May 2019
*P2470-900-01A*
2470-900-01A

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Summary of Contents for Keithley 2470

  • Page 1 Model 2470 High Voltage SourceMeter Instrument ® User’s Manual 2470-900-01 Rev. A / May 2019 *P2470-900-01A* 2470-900-01A...
  • Page 2 Model 2470 High Voltage SourceMeter Instrument User's Manual...
  • Page 3 Cleveland, Ohio, U.S.A. All rights reserved. Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part, without the prior written approval of Keithley Instruments, LLC, is strictly prohibited. These are the original instructions in English. ®...
  • Page 4 Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages.
  • Page 5 (note that selected parts should be purchased only through Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley office for information.

  • Page 7: Table Of Contents

    Set up LAN communications on the instrument ................ 3-5 Set up LAN communications on the computer ................3-6 USB communications ......................3-7 Connect a computer to the 2470 using USB ................3-8 Communicate with the instrument ..................... 3-8 Using the web interface ...................... 3-12 LAN troubleshooting suggestions ....................
  • Page 8 Table of contents Model 2470 High Voltage SourceMeter Instrument User's Manual Making basic front-panel measurements ..............4-1 Introduction .......................... 4-1 Equipment required for this application ................4-2 Device connections ......................4-2 Make front-panel measurements ..................4-3 How to make front-panel measurements .................. 4-3 Leakage current and insulation resistance .............
  • Page 9 Where can I find updated drivers? ..................7-1 How do I upgrade the firmware? ..................7-2 Why can't the 2470 read my USB flash drive? ..............7-2 How do I change the command set? ................... 7-3 Why am I getting a 5074 event code? ................. 7-4 How do I save the present state of the instrument? ............

  • Page 10: Introduction

    With its 1100 V and 10 fA capability, the 2470 is optimized for characterizing and testing high voltage, low leakage devices, materials, and modules, such as silicon carbide (SiC), gallium nitride (GaN), power MOSFETs, transient suppression devices, circuit protection devices, power modules, and batteries.

  • Page 11: Introduction To This Manual

    Introduction to this manual This manual provides detailed applications to help you achieve success with your Keithley Instruments 2470. In addition, this manual provides information about the basics of the front panel to familiarize you with the instrument. This manual presents an overview of each application, followed by instructions to complete the application using the front panel, SCPI code, TSP code, or Keithley KickStart Startup Software.

  • Page 12: Applications

    • Making basic front-panel measurements (on page 4-1): Demonstrates the basic measurement functionality using a single 2470 and a two-terminal device under test (DUT). • Leakage current and insulation resistance (on page 5-1): Demonstrates how to use a 2470 to make high resistance measurements on two-terminal DUTs.

  • Page 13: Front-Panel Overview

    Make sure the operating voltage in your area is compatible. You must turn on the 2470 and allow it to warm up for at least one hour to achieve rated accuracies. Operating the instrument on an incorrect line voltage may cause damage to the instrument, possibly voiding the warranty.
  • Page 14 To turn a 2470 on or off: 1. Before turning the instrument on, disconnect any devices under test (DUTs) from the 2470. 2. To turn your instrument on, press the front-panel POWER switch to place it in the on (|) position.

  • Page 15: Front-Panel Overview

    Model 2470 High Voltage SourceMeter Instrument User's Manual Section 2: Front-panel overview Front-panel overview The front panel of the 2470 is shown below. Descriptions of the controls on the front panel follow the figure. Figure 2: Model 2470 front panel...
  • Page 16 Section 2: Front-panel overview Model 2470 High Voltage SourceMeter Instrument User's Manual Control Graphic Description Returns to the previous screen or closes a dialog box. For example, EXIT key press the EXIT key when the main menu is displayed to return to the home screen.

  • Page 17: Turn The 2470 Output On Or Off

    When the source of the instrument is turned off, it may not completely isolate the instrument from the external circuit. You can use the Output Off setting to place the 2470 in a known, noninteractive state during idle periods, such as when you are changing the device under test. The output-off states that can be selected for a 2470 are normal, high-impedance, zero, or guard.

  • Page 18: Touchscreen Display

    Turn the navigation control to highlight the item, and then press the navigation control to select it The following topics describe the 2470 touchscreen in more detail. Some of the interactive screens have additional options that are only visible when you scroll down the screen.

  • Page 19: Interactive Swipe Screens

    Section 2: Front-panel overview Interactive swipe screens The 2470 touchscreen display has multiple screens that you can access by swiping left or right on the lower half of the display. The options available in the swipe screens are described in the following topics.
  • Page 20 Section 2: Front-panel overview Model 2470 High Voltage SourceMeter Instrument User's Manual SOURCE swipe screen The SOURCE swipe screen shows the present value of the source and the set values for source, source range, and source limit. You can change the set values from the front panel by selecting the buttons on this screen.
  • Page 21 If you program custom text, it is displayed on the USER swipe screen. For example, you can program the 2470 to show that a test is in process. For details about using remote commands to program the display, refer to Customizing a message for the USER swipe screen.

  • Page 22: Menu Overview

    Store measurements on a USB flash drive If there is measurement data in the buffer, you can copy it from the 2470 to a USB flash drive. The information is saved in the CSV file format.

  • Page 23: Save Screen Captures To A Usb Flash Drive

    Model 2470 High Voltage SourceMeter Instrument User's Manual Section 2: Front-panel overview Save screen captures to a USB flash drive You can save a screen capture of the front-panel display to a graphic file. The instrument saves the graphic file to the USB flash drive in the PNG file format.

  • Page 25: Using A Remote Interface

    You can choose from one of several communication interfaces to send commands to and receive responses from the 2470. You can control the 2470 from only one communications interface at a time. The first interface on which the instrument receives a message takes control of the instrument. If another interface sends a message, that interface can take control of the instrument.

  • Page 26: Gpib Communications

    Refer to the documentation from the GPIB controller vendor for information about installing the GPIB controllers. Connect GPIB cables to your instrument To connect a 2470 to the GPIB interface, use a cable equipped with standard GPIB connectors, as shown below. Figure 11: GPIB connector...
  • Page 27 Figure 12: IEEE-488 connection example To connect the GPIB cable to the instrument: 1. Align the cable connector with the connector on the 2470 rear panel. 2. Attach the connector. Tighten the screws securely but do not overtighten them. 3. Connect any additional connectors from other instruments, as required for your application.

  • Page 28: Set The Gpib Address

    The 2470 is a version 1.4 Core 2011 compliant instrument that supports TCP/IP and complies with IEEE Std 802.3 (ethernet LAN). There is one LAN port (located on the rear panel of the instrument) that supports full connectivity on a 10 Mbps or 100 Mbps network. The 2470 automatically detects the speed.

  • Page 29: Set Up Lan Communications On The Instrument

    Model 2470 High Voltage SourceMeter Instrument User's Manual Section 3: Using a remote interface Contact your network administrator to confirm your specific network requirements before setting up a LAN connection. If you have problems setting up the LAN, refer to LAN troubleshooting suggestions (on page 3-13).

  • Page 30: Set Up Lan Communications On The Computer

    Section 3: Using a remote interface Model 2470 High Voltage SourceMeter Instrument User's Manual Set up manual LAN configuration If necessary, you can set the IP address on the instrument manually. You can also enable or disable the DNS settings and assign a host name to the DNS server.

  • Page 31: Usb Communications

    The green LAN LED on the upper right of the front panel is on when your instrument is connected to the network. Use the LXI Discovery Tool To find the IP address of the 2470, use the LXI Discovery Tool, a utility that is available from the Resources tab of the LXI Consortium website (lxistandard.org/).

  • Page 32: Connect A Computer To The 2470 Using Usb

    INSTR: Use the USBTMC protocol To determine these parameters, you can run the Keithley Configuration Panel, which automatically detects all instruments connected to the computer. If you installed the Keithley I/O Layer, you can access the Keithley Configuration Panel through the ® ®...
  • Page 33 Section 3: Using a remote interface To use the Keithley Configuration Panel to determine the VISA resource string: 1. Click Start > Keithley Instruments > Keithley Configuration Panel. The Select Operation dialog box is displayed. Figure 13: Select Operation dialog box 2.
  • Page 34 Section 3: Using a remote interface Model 2470 High Voltage SourceMeter Instrument User's Manual 4. Select USB. 5. Click Next. The Select Instrument Driver dialog box is displayed. Figure 15: Select Instrument Driver dialog box 6. Select Auto-detect Instrument Driver - Model.
  • Page 35 9. In the Virtual Instrument Name box, enter a name that you want to use to refer to the instrument. 10. Select Finish. 11. Select Cancel to close the Wizard. 12. Save the configuration. From the Keithley Configuration Panel, select File > Save. Verify the instrument through the Keithley Communicator: 1. Click Start > Keithley Instruments > Keithley Communicator.

  • Page 36: Using The Web Interface

    Section 3: Using a remote interface Model 2470 High Voltage SourceMeter Instrument User's Manual Using the web interface The 2470 web interface allows you to make settings and control your instrument through a web page. The web page includes: •...

  • Page 37: Lan Troubleshooting Suggestions

    Model 2470 High Voltage SourceMeter Instrument User's Manual Section 3: Using a remote interface LAN troubleshooting suggestions If you are unable to connect to the web interface of the instrument, check the following items: • The network cable is in the LAN port on the rear panel of the instrument, not one of the ®...

  • Page 38: Web Interface Home Page

    Section 3: Using a remote interface Model 2470 High Voltage SourceMeter Instrument User's Manual Web interface Home page Figure 18: Model 2470 web interface Home page The Home page of the instrument provides information about the instrument. It includes: •...

  • Page 39: Review Events In The Event Log

    To clear the event log and update the information on the screen, select the Refresh button. Determining the command set you will use You can control the 2470 with command sets that are based on the SCPI or Test Script Processor ®...
  • Page 40 Section 3: Using a remote interface Model 2470 High Voltage SourceMeter Instrument User's Manual To verify which command set is selected from a remote interface: Send the command: *LANG? To change to the SCPI command set from a remote interface:...

  • Page 41: Making Basic Front-Panel Measurements

    You can make similar measurements on any two-terminal device under test (DUT) if appropriate source values are used. Some of the methods you can use to set up the 2470 to make measurements from the front panel include: •...

  • Page 42: Equipment Required For This Application

    Equipment required for this application: • 2470 High Voltage SourceMeter Instrument • Two insulated banana cables; you can use the set that is provided with the 2470, the Keithley Instruments Model 8608 High-Performance Clip Lead Set • One 10 kΩ resistor to test Device connections Turn the power to the instrument off before attaching connections to the 2470.

  • Page 43: Make Front-Panel Measurements

    Model 2470 High Voltage SourceMeter Instrument User's Manual Section 4: Making basic front-panel measurements Make front-panel measurements For this application, you will: • Select the source and measure functions • Select the source range • Set the source value •...

  • Page 45: Leakage Current And Insulation Resistance

    How to use the 2470 to perform leakage current measurements on a capacitor. • How to use the 2470 to measure insulation resistance between the two conductors of a coaxial cable. The leakage current application applies a voltage for a specified period. This soak period allows time for the device to charge so that you can make a settled-current measurement.

  • Page 46: Equipment Required

    Depending on the device under test (DUT), the current measurement is typically very small, usually <10 nA. For any device, measuring leakage current and insulation resistance involves measuring very small values. To get more accurate readings, connect the DUT to the 2470 rear panel with low-noise triaxial cables.
  • Page 47 Model 2470 High Voltage SourceMeter Instrument User's Manual Section 5: Leakage current and insulation resistance Figure 21: Capacitor leakage and insulation resistance test connection schematics The following figures show the rear-terminal connections to the device under test (DUT) for these applications.

  • Page 48: Measuring Leakage Current

    The remote interface examples show SCPI commands and TSP commands. This application sets the 2470 to source 300 V and measure the resulting leakage current as a function of time. The instrument makes current measurements for a specific period.

  • Page 49: Set Up The Leakage Current Application Using The Front Panel

    Set up the leakage current application using the front panel To set up the application from the front panel: 1. Use the test leads to make the connection from the capacitor to the rear panel of the 2470, as described in Device connections (on page 5-2).

  • Page 50: View The Measurements On The Front-Panel Graph

    Section 5: Leakage current and insulation resistance Model 2470 High Voltage SourceMeter Instrument User's Manual View the measurements on the front-panel graph To view the leakage current measurements on the front-panel graph: 1. Press the MENU key. 2. Under Views, select Graph.

  • Page 51: Set Up The Leakage Current Application Using Scpi Commands

    The following TSP code is designed to be run from Keithley Instruments Test Script Builder (TSB). TSB is a software tool that is available from tek.com/keithley. You can install and use TSB to write code and develop scripts for TSP-enabled instruments. Information about how to use TSB is in the online help for TSB and in the “Introduction to TSP operation”...
  • Page 52 Section 5: Leakage current and insulation resistance Model 2470 High Voltage SourceMeter Instrument User's Manual To enable TSP commands: 1. Press the MENU key. 2. Under System, select Settings. 3. Set the Command Set to TSP. 4. At the prompt to reboot, select Yes.

  • Page 53: Measuring Insulation Resistance

    You typically make insulation resistance measurements between traces on a printed circuit board and between conductors in cables and connectors. This application sets the 2470 to source 700 V and makes 10 resistance readings with a 100 ms interval time. Once the measurements are made, the output is turned off.

  • Page 54: Set Up The Insulation Resistance Application Using The Front Panel

    Model 2470 High Voltage SourceMeter Instrument User's Manual Set up the insulation resistance application using the front panel To set up the application from the front panel: 1. Connect the device under test (DUT) to the rear panel of the 2470, as described in Device connections (on page 5-2).

  • Page 55: Viewing The Measurements On The Front-Panel Graph

    Model 2470 High Voltage SourceMeter Instrument User's Manual Section 5: Leakage current and insulation resistance Viewing the measurements on the front-panel graph To view the insulation resistance measurements on the front-panel graph: 1. Press the MENU key. 2. Under Views, select Graph.

  • Page 56: Set Up The Application Using Scpi Commands

    Section 5: Leakage current and insulation resistance Model 2470 High Voltage SourceMeter Instrument User's Manual Set up the application using SCPI commands The following SCPI commands make insulation resistance measurements by sourcing 700 V and measuring the resistance. The Simple Loop trigger model template is used to make 10 measurements at 100 ms intervals.

  • Page 57: Set Up The Application Using Tsp Commands

    The following TSP code is designed to be run from Keithley Instruments Test Script Builder (TSB). TSB is a software tool that is available from tek.com/keithley. You can install and use TSB to write code and develop scripts for TSP-enabled instruments. Information about how to use TSB is in the online help for TSB and in the “Introduction to TSP operation”...
  • Page 58 Section 5: Leakage current and insulation resistance Model 2470 High Voltage SourceMeter Instrument User's Manual Send the following commands for this example application: --Reset the instrument reset() --Set up the source function. smu.source.func = smu.FUNC_DC_VOLTAGE smu.source.ilimit.level = 1e-3 smu.source.level = 700 --Set up the measure function smu.measure.func = smu.FUNC_DC_CURRENT...

  • Page 59: Measure I-V Characteristics Of Fets

    There are many I-V tests that you can perform with the 2470, including drain or gate leakage, breakdown voltage, threshold voltage, subthreshold swing, and drain current. The number of 2470 instruments required for testing depends on the number of FET terminals that must be biased, swept, and measured.

  • Page 60: Equipment Required

    Section 6: Measure I-V characteristics of FETs Model 2470 High Voltage SourceMeter Instrument User's Manual The SCPI and TSP examples differ in this application. The TSP version uses Keithley Instruments ® TSP-Link , which is a high-speed trigger synchronization and communication bus that test system builders can use to connect multiple instruments in a master and subordinate configuration.

  • Page 61: Set Up External Hardware Triggers

    IEEE-488 connector on the rear panel of 2470 #1. GPIB cable #2 connects the IEEE-488 connectors of the two 2470s. Each 2470 must have a different GPIB address. You can set this up using the front panel. For details, Set the GPIB address (on page 3-4).

  • Page 62: Connections For The Tsp Command Set

    GPIB interface to one of the 2470 IEEE-488 interfaces (2470 #1 in the figure above). Set the TSP-Link node of 2470 #1 to node 1 and the TSP-Link node of 2470 #2 to node 2. 2470-900-01 Rev. A / May 2019...

  • Page 63: Device Connections

    Drain leakage current measurement device connections A drain leakage current measurement on a FET requires only one 2470. For this measurement, the gate-source potential must be 0 V, so the gate and source connection pins are shorted together. The SMU is connected between the drain and source to apply a bias voltage.
  • Page 64 Model 2470 High Voltage SourceMeter Instrument User's Manual Figure 31: Drain leakage current measurement device connections The following figure shows the connections from the rear-panel terminals of the 2470. Figure 32: Drain leakage current measurement rear-panel terminal connections 2470-900-01 Rev. A / May 2019...

  • Page 65: Subthreshold Current Or Drain Family Of Curves Measurement Device Connections

    Connect the source of the FET to the Force LO terminals of both 2470s. To source and measure from all three terminals of the FET, you need a third 2470. The following figure shows an I-V test configuration for a FET using two 2470s.

  • Page 66: Remote Control Of Fet Testing Using Scpi Commands

    The two example sequences of SCPI commands for this application generate a drain family of curves on a FET using two 2470 instruments. One of the examples uses the trigger model to generate the family of curves. The other example uses a linear sweep. You may need to make modifications for operation in your programming environment.
  • Page 67 Model 2470 High Voltage SourceMeter Instrument User's Manual Section 6: Measure I-V characteristics of FETs Send the following commands for this example application: SMU 1, Commands Description SMU 2, or pseudocode  SMU 1 *RST Reset the instrument. :SENS:FUNC "CURR"...
  • Page 68 Section 6: Measure I-V characteristics of FETs Model 2470 High Voltage SourceMeter Instrument User's Manual  SMU 2 *RST Reset the instrument. :SENS:FUNC "CURR"  Set to measure current. :SENS:CURR:RANG:AUTO ON  :ROUT:TERM REAR Set to measure with autorange enabled.

  • Page 69: Set Up The Application Using Scpi Commands In A Linear Sweep

    Model 2470 High Voltage SourceMeter Instrument User's Manual Section 6: Measure I-V characteristics of FETs  SMU 2 :INIT Initiate the trigger model. *WAI  Wait for the model to complete.  Pseudocode vds = [] Create an empty array to hold ids = [] measured voltage values.
  • Page 70 Section 6: Measure I-V characteristics of FETs Model 2470 High Voltage SourceMeter Instrument User's Manual  SMU 2 *RST Reset the instrument. :SENS:FUNC "CURR"  Set to measure current. :SENS:CURR:RANG:AUTO ON  :ROUT:TERM REAR Set to measure with autorange :SOUR:FUNC VOLT enabled.

  • Page 71: Remote Control Of Fet Testing Using Tsp Commands

    The following TSP code is designed to be run from Keithley Instruments Test Script Builder (TSB). TSB is a software tool that is available from tek.com/keithley. You can install and use TSB to write code and develop scripts for TSP-enabled instruments. Information about how to use TSB is in the online help for TSB and in the “Introduction to TSP operation”...
  • Page 72 Section 6: Measure I-V characteristics of FETs Model 2470 High Voltage SourceMeter Instrument User's Manual Send the following commands for this example application: -- Reset the instrument, which also clears the buffer. reset() -- Set up the source function. smu.source.func = smu.FUNC_DC_VOLTAGE smu.source.ilimit.level = 10e-3...

  • Page 73: Set Up A Subthreshold Current Measurement Using Tsp Commands

    Model 2470 High Voltage SourceMeter Instrument User's Manual Section 6: Measure I-V characteristics of FETs Set up a subthreshold current measurement using TSP commands The following TSP code uses the trigger model to find the subthreshold swing, S, of a FET using two 2470s communicating with each other using TSP-Link.
  • Page 74 Section 6: Measure I-V characteristics of FETs Model 2470 High Voltage SourceMeter Instrument User's Manual -- Set up TSP-Link triggering. gate.tsplink.line[1].reset() gate.tsplink.line[1].mode = gate.tsplink.MODE_SYNCHRONOUS_MASTER gate.trigger.tsplinkout[1].stimulus = gate.trigger.EVENT_NOTIFY1 -- Populate the stepVals source config list with source levels gateVstart volts to gateVstop volts.
  • Page 75 Model 2470 High Voltage SourceMeter Instrument User's Manual Section 6: Measure I-V characteristics of FETs -- Perform basic exponential fit local diffHighV, diffLowV = 9.9e37, 9.9e37 local fitHighIndex = 0 local fitLowIndex = 0 local gateV = 0 local gateHighV = 0...

  • Page 76: Set Up The Drain Family Of Curves Measurement Using Tsp Commands

    Section 6: Measure I-V characteristics of FETs Model 2470 High Voltage SourceMeter Instrument User's Manual Set up the drain family of curves measurement using TSP commands The following TSP code uses the trigger model to generate a drain family of curves on a FET using two 2470s communicating with each other using TSP-Link.
  • Page 77 Model 2470 High Voltage SourceMeter Instrument User's Manual Section 6: Measure I-V characteristics of FETs -- Populate the stepVals source config list, with source levels 2 V to 5 V. for i = gateVstart, gateVstop, gateStepSize do gate.smu.source.level = i gate.smu.source.configlist.store("stepVals")
  • Page 78 Section 6: Measure I-V characteristics of FETs Model 2470 High Voltage SourceMeter Instrument User's Manual -- Start the trigger model for both SMUs and wait until it is complete drain.trigger.model.initiate() gate.trigger.model.initiate() print("Test Running...") waitcomplete() -- Print the formatted readings. if defbuffer1.n == 0 then print("\nNo readings in buffer\n")

  • Page 79: Troubleshooting Faqs

    What are the Quick Setup options? .......... 7-6 About this section This section helps you find answers to the most common questions encountered with the 2470. For additional FAQs, see "Frequently Asked Questions (FAQs)" in the 2470 Reference Manual. Where can I find updated drivers? For the latest drivers and additional support information, see the Keithley Instruments support website.

  • Page 80: How Do I Upgrade The Firmware

    Upgrade files are available on tek.com/keithley. Why can't the 2470 read my USB flash drive? Verify that the flash drive is formatted with the FAT32 file system. The 2470 only supports FAT and FAT32 drives using MBR (Master Boot Record).

  • Page 81: How Do I Change The Command Set

    Model 2470 High Voltage SourceMeter Instrument User's Manual Section 7: Troubleshooting FAQs How do I change the command set? You can change the command set that you use with the 2470. The remote command sets that are available include: •...

  • Page 82: Why Am I Getting A 5074 Event Code

    5074, "Output voltage limited by interlock." The 2470 is provided with an interlock circuit that must be positively activated in order for the high voltage output to be enabled. The interlock helps facilitate safe operation of the equipment in a test system.

  • Page 83: Why Did My Settings Change

    Why did my settings change? Many of the commands in the 2470 are saved with the source or measure function that was active when you set them. For example, assume you have the measure function set to current and you set a value for display digits.

  • Page 84: What Are The Quick Setup Options

    When you select a Quick Setup, the instrument turns the output on. Carefully consider and configure the appropriate output-off state, source, and limits before connecting the 2470 to a device that can deliver energy, such as other voltage sources, batteries, capacitors, or solar cells.

  • Page 85: Next Steps

    In this section: Additional 2470 information ............8-1 Additional 2470 information This manual has prepared you to start using your new 2470 High Voltage SourceMeter Instrument for your application. For more detailed information, refer to the Keithley Instruments 2470 Reference Manual.
  • Page 86 All Keithley trademarks and trade names are the property of Keithley Instruments. All other trademarks and trade names are the property of their respective companies. Keithley Instruments Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-800-935-5595 • tek.com/keithley 12/17...

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