Keithley 9139B-PCA Instructions Manual
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Keithley 9139B-PCA Instructions Manual

Keithley 9139B-PCA Instructions Manual

Probe card adapter
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Model 9139B-PCA Probe Card Adapter
Instructions
9139B-PCA-901-01 Rev. A / January 2019
*P9139B-PCA-901-01A*
9139B-PCA-901-01A
www.tek.com/keithley

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Summary of Contents for Keithley 9139B-PCA

  • Page 1 Model 9139B-PCA Probe Card Adapter Instructions 9139B-PCA-901-01 Rev. A / January 2019 *P9139B-PCA-901-01A* 9139B-PCA-901-01A...
  • Page 2 Model 9139B Probe Card Adapter Instructions...
  • Page 3 All rights reserved. Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part, without the prior written approval of Keithley Instruments, LLC, is strictly prohibited. These are the original instructions in English. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, LLC.
  • Page 4 Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages.
  • Page 5 (note that selected parts should be purchased only through Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley office for information.

  • Page 6: Table Of Contents

    Table of contents General information ....................1-1 Introduction .......................... 1-1 Features ..........................1-2 Safety symbols and terms ....................1-3 Related documentation ......................1-3 Unpacking and inspection ....................1-3 Handling precautions ........................ 1-4 Inspection for damage ....................... 1-5 Shipment contents ........................1-5 Probe card adapter overview ..................
  • Page 7 Table of contents Model 9139B Probe Card Adapter Instructions Cleaning ..........................4-3 Replacing a pogo pin ......................4-4 Replacing a pogo pin socket ....................4-5 Replacing the vacuum connection ..................4-6 Replaceable parts ....................5-1 Ordering information ......................5-1 Factory service ........................5-1 Parts list ..........................

  • Page 8: General Information

    Unpacking and inspection ............1-3 Introduction The Model 9139B Probe Card Adapter is an interface specifically designed to connect a Keithley parametric test system to a device under test (DUT) while maintaining system specifications. It provides greater accuracy of parametric tests in applications that require a wide range of measurements, including high voltage up to 1.1 kV, while maintaining low-level measurement...

  • Page 9: Features

    Model 9139B Probe Card Adapter Instructions Refer to the manufacturer documentation for your prober for information about connecting hardware to it. Refer to the documentation provided with your Keithley parametric test system for information about connections to the system. Make sure you order the PCA with the correct stack height for your prober. Refer to...

  • Page 10: Safety Symbols And Terms

    • Reference Manual (part number S530-924-01 and S535-924-01): This manual describes how to use the diagnostic and verification software suite that is part of your Keithley Parametric Test System. Unpacking and inspection The following topics provide information about your shipment.

  • Page 11: Handling Precautions

    Section 1: General information Model 9139B Probe Card Adapter Instructions Handling precautions The 9139B Probe Card Adapter is assembled at the factory to provide the highest quality connections possible between the device under test (DUT) and your system. Use care when handling these parts. Do not touch high-impedance areas of the probe card assembly or the probe card.

  • Page 12: Inspection For Damage

    Model 9139B Probe Card Adapter Instructions Section 1: General information Inspection for damage Carefully unpack your 9139B Probe Card Adapter from its original shipping carton and inspect the card for any obvious signs of physical damage. Report any such damage to the shipping agent immediately.

  • Page 14: Probe Card Adapter Overview

    Section 2 Probe card adapter overview In this section: Probe card adapter standard components ........2-1 Pin arrangement ...............2-3 Leakage paths, low-current and high-voltage capabilities ..2-3 Motherboard characteristics ............2-4 Probe card configuration ............2-4 Probe needle ................2-5 Light cover ................2-5 Probe card adapter standard components The 9139B probe card adapter consists of the following components.
  • Page 15 Insulator, black decal, 9139-313-02 Probe ring shield plate, 9139-310 Probe ground ring, 389-5347 Probe ring insert, 9139A-325 Spacer (sets stack height), 9139B-PCA-01: ST-166-9 (3.790 cm, 1.492 in.); 9139B-PCA-02: ST-166-10 (3.378 cm, 1.330 in.) Probe ring motherboard, 389-5348-XX* Motherboard retainer ring, 9139A-326...

  • Page 16: Pin Arrangement

    The pins are arranged into symmetric sectors around a central point. Figure 4: 9139B-PCA pin arrangement Leakage paths, low-current and high-voltage capabilities The 9139B Probe Card Adapter provides 1.1 kV capability to each of its 64 pins. It also significantly improves low current leakage and settling time on each pin compared to the 9139A-PCA.

  • Page 17: Motherboard Characteristics

    Drilled, plated-through holes are provided for needle connection. An unpopulated (blank) probe card is provided with the probe card adapter assembly. Additional blank probe cards are available through your Keithley sales representative. 9139B-901-01 Rev. A / January 2019...

  • Page 18: Probe Needle

    Model 9139B Probe Card Adapter Instructions Section 2: Probe card adapter overview Probe needle Ceramic needles are recommended; other types of needles (such as epoxy) may be used if they conform to the dimensions in the following figure. Figure 5: Probe needle mounting Light cover The light cover shields the opening in the center of the probe card adapter.

  • Page 20: Installation

    Section 3 Installation In this section: Introduction ................3-1 General installation considerations ...........3-1 Installation procedure ..............3-7 Probe card removal procedure ..........3-10 Performance verification ............3-10 Optional top-load (clamshell) mechanism installation .....3-12 Introduction The installation procedures contained in this manual are intended for use only by qualified service personnel.

  • Page 21: Mechanical Structure

    Section 3: Installation Model 9139B Probe Card Adapter Instructions Mechanical structure The mechanical structure of the 9139B enables installation in a wide variety of probers. It consists of a motherboard suspended from the prober ring. See the figure in Probe card adapter standard components (on page 2-1) for details.
  • Page 22 The light cover contains components that allow installation of an interlock switch, such as that provided with a Keithley S530 or S535 Parametric Test Systems, as shown in the following figure. Figure 6: Probe card adapter light cover Do not operate the system until it is properly installed and all prober safety shields are in place.

  • Page 23: Additional Probe Card Adapter Safety Interlock Cable

    The Model 174-7047-XX Safety Interlock Cable provides additional protection from electric shock at the Keithley probe card adapter (PCA). The cable attaches to the prober top plate and the PCA so that if you unlatch the top plate of the prober and lift it up to change a probe card or take off the PCA, the interlock is tripped.

  • Page 24: 9139B Probe Card Adapter Interlock Schematic

    Model 9139B Probe Card Adapter Instructions Section 3: Installation 9139B Probe Card Adapter interlock schematic The following diagram shows an example interlock configuration. Figure 9: 9139B-PCA interlock block diagram 9139B-901-01 Rev. A / January 2019...

  • Page 25: Stack Height

    Stack height must be equal to the stack height of the probe card adapter. The stack height of the Keithley probe card adapter can be 3.378 cm (1.330 in.) or 3.790 cm (1.492 in.), depending on the type of prober and the requirements for cable routing.

  • Page 26: Light Cover And Microscope Clearance

    Model 9139B Probe Card Adapter Instructions Section 3: Installation Light cover and microscope clearance Check the light cover and microscope clearance. Most microscopes are located far enough above the probe card assembly that they do not present clearance problems when the light cover is installed. Some microscopes may protrude into the probe ring assembly to the area below the shield plate.
  • Page 27 Section 3: Installation Model 9139B Probe Card Adapter Instructions Figure 11: Vacuum control box 9139B-901-01 Rev. A / January 2019...
  • Page 28 Model 9139B Probe Card Adapter Instructions Section 3: Installation 7. Install the vacuum supply hose. Route the vacuum supply hose from the vacuum source through the "VACUUM IN" grommet on the vacuum control box. 8. Connect the vacuum control box end of the hose to check valve PF-5 (see the previous figure). Make sure the vacuum supply is at least 50.80 cm (20 in.) Hg.

  • Page 29: Probe Card Removal Procedure

    Section 3: Installation Model 9139B Probe Card Adapter Instructions 4. Align pin 1 of the probe card with pin 1 of the motherboard. Use the alignment marking on the edge of the probe card retainer cap and match to the same markings of the motherboard support ring.

  • Page 30: Performance Verification

    Using the blank probe card provided with the 9139B, run the matrix test from the system diagnostics tool on your Keithley parametric test system to verify probe card adapter performance. For more information about the system diagnostics and verification tool, refer to the Diagnostics and Verification Manual for your system.

  • Page 31: Optional Top-Load (Clamshell) Mechanism Installation

    Optional top-load (clamshell) mechanism installation The following instructions are for the top-load (clamshells) mechanism that are not ordered from Keithley. If present, remove the retainer clips and air fitting as shown in the following figure. Figure 13: 9139B probe card adapter Install the top-load mechanism as instructed by the manufacturer.
  • Page 32 Section 4 Maintenance In this section: Introduction ................4-1 Mechanical disassembly ............4-2 Moving PCA cable connections ..........4-3 Cleaning ..................4-3 Replacing a pogo pin ..............4-4 Replacing a pogo pin socket .............4-5 Replacing the vacuum connection ..........4-6 Introduction This section describes how to maintain and preserve the high-performance characteristics of the probe card adapter.

  • Page 33: Maintenance

    Section 4: Maintenance Model 9139B Probe Card Adapter Instructions Mechanical disassembly Disassembly of the probe card adapter is required when replacing device under test (DUT) cables or when motherboard maintenance is required. When reassembling the probe card adapter, use VAC Goop ®...

  • Page 34: Moving Pca Cable Connections

    • Flux from soldering • Condensation from room conditions that do not meet Keithley specifications Observe the following precautions when it is necessary to use solder on a circuit board: • Use lead-free solder, and take care not to spread the solder to other areas on the circuit board.

  • Page 35: Replacing A Pogo Pin

    Section 4: Maintenance Model 9139B Probe Card Adapter Instructions Replacing a pogo pin Hazardous voltages may be present on an installed probe card even after the output is disconnected, that if contacted, may cause personal injury or death. To replace a pogo pin: 1.

  • Page 36: Replacing A Pogo Pin Socket

    Model 9139B Probe Card Adapter Instructions Section 4: Maintenance Replacing a pogo pin socket If a pogo pin breaks off in a socket or if the pin becomes lodged in a socket, the pogo pin socket can be replaced. Hazardous voltages may be present on an installed probe card even after the output is disconnected, that if contacted, may cause personal injury or death.

  • Page 37: Replacing The Vacuum Connection

    Section 4: Maintenance Model 9139B Probe Card Adapter Instructions 12. Install a pogo pin in the socket. 13. Clean the flux from the solder connection (see Cleaning (on page 4-3) for more information). 14. Reinstall the probe card. Replacing the vacuum connection The vacuum connection of the probe card adapter can be replaced if damaged.

  • Page 38: Replaceable Parts

    Parts list ..................5-1 Ordering information To place an order or get information about replacement parts, contact your Keithley representative or see the back cover of this manual for contact information. When ordering parts, be sure to include the following information: 1.

  • Page 39: 9139B-01 And 9139B-02 Parts List

    Spring contact retainer 9139B-302 Socket, 0.025 SO-146-1 Socket, 0.040 SO-146-2 Socket, 0.060 SO-146-3 Spacer 3.790 cm (1.492 in.) (9139B-PCA-01) ST-166-9 Spacer 3.378 cm (1.330 in.) (9139B-PCA-02) ST-166-10 Vacuum connection PF-6 Washer (motherboard to spring contact retainer) WA-102-2 Wire guide quadrant HI (strain relief for high-voltage cables) 386-8008-XX* * XX represents the revision.

  • Page 40: Mechanical Specifications

    Section 6 Mechanical specifications In this section: Probe card adapter mechanical drawings .........6-1 Probe card adapter mechanical drawings You can use the drawings in this section to determine whether your prober is compatible with the 9139B. Probe card adapter assembly Figure 15: Probe card adapter with probe card installed...

  • Page 41: Probe Card Adapter Width And Stack Height

    Section 6: Mechanical specifications Model 9139B Probe Card Adapter Instructions Probe card adapter width and stack height Figure 16: Stack width and height Probe card adapter top view pin arrangement Figure 17: Pin arrangement 9139B-901-01 Rev. A / January 2019...

  • Page 42: Probe Card Dimensions

    Model 9139B Probe Card Adapter Instructions Section 6: Mechanical specifications Probe card dimensions Figure 18: 9139B 1.1 kV 64-channel probe card dimensions 9139B-901-01 Rev. A / January 2019...
  • Page 43 All Keithley trademarks and trade names are the property of Keithley Instruments. All other trademarks and trade names are the property of their respective companies. Keithley Instruments Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-800-935-5595 • www.tek.com/keithley 12/17...

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