Instruction Manual
Table of Contents
1
1.1
Description ....................................................................................................................................3
1.2
Specifications ................................................................................................................................3
1.3
Dimensions ....................................................................................................................................4
1.4
Part Numbers ................................................................................................................................4
2
Important Safety Information ...............................................................................................................6
2.1
2.2
2.3
Electrical Conditions ......................................................................................................................7
2.3.1
2.3.2
2.4
2.5
3
Installation ............................................................................................................................................9
3.1
Mechanical Installation .................................................................................................................9
3.2
Electrical Installation ...................................................................................................................10
3.2.1
Grounding ............................................................................................................................10
3.2.2
Electrical Connections..........................................................................................................10
4
Setup and Operation ...........................................................................................................................12
4.1
User Interface Basics ...................................................................................................................12
4.2
Programming ...............................................................................................................................12
4.3
5
6
Display .................................................................................................................................................17
6.1
Display - Torr / mTorr ..................................................................................................................17
6.2
Display - mbar .............................................................................................................................18
InstruTech, Inc.
VGC301 Controller
Page 1