Nikon ECLIPSE L200ND / ECLIPSE L200N Instructions Manual

Nikon ECLIPSE L200ND / ECLIPSE L200N Instructions Manual

Ic inspection microscope
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M513E
09.3.NF.2 (2/4)
IC Inspection Microscope
ECLIPSE L200ND / L200N
Instructions

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Table of Contents
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Summary of Contents for Nikon ECLIPSE L200ND / ECLIPSE L200N

  • Page 1 M513E 09.3.NF.2 (2/4) IC Inspection Microscope ECLIPSE L200ND / L200N Instructions...
  • Page 3: Introduction

    Introduction Introduction Thank you for purchasing a Nikon product. This instruction manual is written for users of IC Inspection Microscope, ECLIPSE L200ND/L200N. To ensure correct usage, read this manual carefully before operating the product. • No part of this manual may be reproduced or transmitted in any form without prior written permission from Nikon.
  • Page 4: Safety Precautions

    Safety Precautions Safety Precautions To ensure correct and safe operation, read this manual before using the product. Warning and Caution Symbols Used in This Manual Although this product is designed and manufactured to be completely safe during use, incorrect usage or failure to follow the safety instructions provided may cause personal injury or property damage.
  • Page 5: Meaning Of Symbol Used On The Equipment

    Meaning of Symbol Used on the Equipment Meaning of Symbol Used on the Equipment The following symbol placed on the equipment indicates that you need to be cautious when using the equipment. Before you operate the part of the equipment with this symbol, check this instruction manual.
  • Page 6: Safety Notes

    Disassembly may cause malfunction, electrical shock and/or injury. Do not disassemble any part other than those described in this manual. If you experience any problem with the microscope, contact your nearest Nikon representative. 4 Power cord Use only the specified power cord. Using other power cords could result in failures or fire. Also note that the protection Class 1 equipment should be connected to the PE (protective earth) terminal for grounding.
  • Page 7 Safety Notes The fiber illuminator can be used on the L200ND microscope, but not on the L200N microscope. Please note that if a light source not specified for the L200ND microscope is attached on the microscope, the microscope will not be considered as a TUV/SEMI-approved product. 8 Ultraviolet light from an external light source (including those not specified) If you use a light source other than those specified, and if the light source has a mercury lamp, etc., the light source radiates ultraviolet light from the emission port.
  • Page 8 (flip it to the “ ” side) and unplug the power cord from the wall outlet. Then use a dry cloth to wipe away the moisture. If any liquid gets inside the microscope, do not use it; instead, notify your nearest Nikon representative. 5 Weak electromagnetic emission This product emits weak electromagnetic waves.
  • Page 9 They may come off and may cause serious injury or malfunction. • Ask your nearest Nikon representative for the carrying rods of the microscope. • Before carrying the stage, attach the two fixing metals to hold the movement of the stage plate.
  • Page 10: Layout Diagram

    Layout Diagram Layout Diagram 645 (Stage movable range) Gravity point 710 (Stage movable range) <Operator space> Eye point Gravity point Gravity point Dimensions are in mm. Figure-2 Layout diagram VIII IC Inspection Microscope ECLIPSE L200ND / L200N Instructions...
  • Page 11: Operating Posture

    Operating Posture Operating Posture The figure below shows the posture that prevents strain on your body when you operate this equipment. Choose a workbench and a chair having the similar dimensions to those shown on the figure. The 95th percentile male (Height: 1895 mm) (The front clearance for the knees)
  • Page 12: Table Of Contents

    Contents Introduction ......................... I Safety Precautions ......................II Meaning of Symbol Used on the Equipment..............III Safety Notes........................IV Layout Diagram....................... VIII Operating Posture ......................IX Names of the Parts ................1 Names of the parts....................1 Names of the operational parts................. 2 Microscopy ....................
  • Page 13 Contents Aperture diaphragm ....................17 3.6.1 Adjusting the size of the aperture diaphragm............17 3.6.2 Centering the episcopic aperture diaphragm ............18 Changing the illumination ..................19 8 × 8 Stage ......................20 3.8.1 The coarse mode ..................... 20 3.8.2 The fine mode ......................
  • Page 14 Contents 4.7.1 When removing the objectives ................. 39 4.7.2 If the objectives are out of the optical path when they are switched ......39 Attaching the eyepieces..................39 Installing the filter block (for fluorescent illumination only) ........39 4.10 Attaching breath shielding plate (ultraviolet light shield)......... 40 4.11 Seismic restraint .....................
  • Page 15: Names Of The Parts

    1 Names of the Parts Names of the Parts Names of the parts Analyzer slider * Polarizer slider * Eyepiece tube Episcopic lamphouse Eyepieces Attaching part for the pinhole slider * Microscope arm Microscope main body DIC slider * Revolving nosepiece Breath shielding Objective...
  • Page 16: Names Of The Operational Parts

    1 Names of the Parts Names of the operational parts Optical path selection lever Clamp for various adapters Analyzer slider * Polarizer slider * Diopter adjustment rings Attaching part for the pinhole slider * Prism movement knob Prism selection Dark -field/bright- knob field/fluorescent selection lever...
  • Page 17 1 Names of the Parts Aperture diaphragm Filter sliders centering screw holes Focusing target lever Filter sliders Screw hole for carrying rod Coarse focus stopper ring Screw holes for AF drive Slots for diascopic illumination filter (for L200ND only) Figure-6 Names of the operational parts (2) “Caution for heat”...
  • Page 18: Microscopy

    2 Microscopy Microscopy In this chapter, each type of microscopy is described. Please also refer to “3 Operation of Each Part” for how to operate each part. 1. Episcopic bright-field microscopy --------------------------------------------------------------------- p.5 2. Episcopic dark-field microscopy ----------------------------------------------------------------------- p.6 3. Episcopic DIC (differential interference contrast) microscopy---------------------------------- p.7 4.
  • Page 19: Episcopic Bright-Field Microscopy

    2 Microscopy Episcopic bright-field microscopy Set each part as follows. You can perform steps in any sequence. Press in the NCB and ND filters. (Insert the NCB filter into the nearest slot to the lamphouse.) Press in for 100% binocular observation.
  • Page 20: Episcopic Dark-Field Microscopy

    2 Microscopy Episcopic dark-field microscopy Mount the BD objectives. However, only the objectives marked “BD” can be used on the dark-field microscopy. BD marking on the objective Observe the sample by following the steps for the episcopic bright-field microscopy. --------------------------------------------------------------------- See “2.1 Episcopic bright-field microscopy”...
  • Page 21: Episcopic Dic (Differential Interference Contrast) Microscopy

    2 Microscopy Episcopic DIC (differential interference contrast) microscopy Attach the analyzer, polarizer and DIC sliders. Slide them out to the click-stop position. Observe the sample by following the steps for the episcopic bright-field microscopy. ------------------------------------------------------------------- See “2.1 Episcopic bright-field microscopy” Switch to the DIC microscopy.
  • Page 22: Episcopic Bright-Field Simplified Polarization Microscopy

    2 Microscopy Episcopic bright-field simplified polarization microscopy Attach the analyzer and polarizer. Slide them out to the click-stop position. Observe the sample by following the steps for the episcopic bright-field microscopy. --------------------------------------------------------------------- See “2.1 Episcopic bright-field microscopy” Switch to the episcopic bright-field simplified polarization microscopy. Adjust brightness with the ND filters.
  • Page 23: Episcopic Fluorescent Microscopy (For L200Nd Only)

    2 Microscopy Episcopic fluorescent microscopy (for L200ND only) Attach the filter block for the desired excitation method. -------------------------------------------- See “4.9 Installing the filter block (for fluorescent illumination only)” Observe the sample by following the steps for the episcopic bright-field microscopy. --------------------------------------------------------------------- See “2.1 Episcopic bright-field microscopy”...
  • Page 24: Diascopic Bright-Field Microscopy (For L200Nd Only)

    2 Microscopy Diascopic bright-field microscopy (for L200ND only) Set each part as follows. You can perform steps in any sequence. Press in for 100% binocular observation. Slide out the analyzer. Pull out to the limit for DF (dark-field). Slide out the DIC slider. Lower the stage to the limit.
  • Page 25: Operation Of Each Part

    3 Operation of Each Part Operation of Each Part Filters Use filters to adjust color temperature, brightness, and contrast. Up to four episcopic illumination filters can be installed to the left side of the microscope arm, while two diascopic illumination filters can be installed to the front of the lamphouse. Note that the diascopic illumination filters can be used only for L200ND.
  • Page 26: Placing The Filter In And Out Of The Optical Path (For Episcopic Illumination)

    3 Operation of Each Part 3.1.2 Placing the filter in and out of the optical path (for episcopic illumination) You can insert an episcopic illumination filter slider in either of the two slots provided for each of two places on the left side of the microscope arm. You can find two click-stop positions as you place a filter slider in a slot.
  • Page 27: Coarse / Fine Focus Knobs

    3 Operation of Each Part Coarse / fine focus knobs 3.2.1 The relationship between the focus knob rotation and the stage vertical movement The relationship between the direction of the focus knob rotation and the stage vertical movement is shown in the figure. Turn the focus knobs in the direction indicated by the arrows to lower...
  • Page 28: Coarse Focus Stopper Ring

    3 Operation of Each Part • Increasing the torque of the coarse focus knobs To increase the torque, turn the coarse torque adjustment ring counter-clockwise. • Reducing the torque of the coarse focus knobs To reduce the torque, turn the coarse torque adjustment ring clockwise, but make sure that the stage does not fall on its own weight when you take your hands off the coarse focus knob.
  • Page 29: Eyepiece Tube

    3 Operation of Each Part Eyepiece tube 3.3.1 Optical path selection The optical path selection lever can be used to switch the destination of light from the binocular part to the vertical tube. 100% Pull OUT Push IN 100% Figure-14 Optical path selection 3.3.2 Tilting function The binocular part of the trinocular tilting eyepiece tube can be swung up and down for finding the best viewing position.
  • Page 30: Diopter Adjustment

    3 Operation of Each Part Diopter adjustment The diopter adjustment compensates for differences in eyesight between your left and right eyes. After the correct adjustment, you will find the observation with both eyes easier and the focus shift is reduced when switched to the different objectives. Be sure to adjust the diopter adjustment rings on both eyepieces.
  • Page 31: Interpupillary Distance Adjustment

    3 Operation of Each Part Interpupillary distance adjustment Adjust the interpupillary distance to observe a sample with both eyes. Merge the viewfields into one. Figure-18 Interpupillary distance adjustment Perform the diopter adjustment and focus on the image with the 10 × objective. Adjust the interpupillary distance so that the viewfield for each eye is at the same position on the sample.
  • Page 32: Centering The Episcopic Aperture Diaphragm

    3 Operation of Each Part If your sample is of low reflectance and observed under episcopic illumination, you may not be able to see the aperture diaphragm image. In this case, replace the sample with of higher reflectance. 3.6.2 Centering the episcopic aperture diaphragm Tools required: hexagonal screwdriver (2 mm) ×...
  • Page 33: Changing The Illumination

    3 Operation of Each Part Changing the illumination You can change illumination with the selection lever on the arm. To change illumination, push/pull the dark-field/bright-field/fluorescent selection lever for the L200ND or the dark-field/bright-field selection lever for the L200N. Dark-field/bright-field/fluorescent selection lever (for L200ND only) (Dark-field/bright-field selection lever provided for the L200N) Figure-21 Changing the illumination...
  • Page 34: Stage

    3 Operation of Each Part 8 × 8 Stage The 8 × 8 stage can be moved in either the coarse mode for swift and long-ranging movement, or the fine mode for minute movement. To switch between the modes, use the coarse movement ON and OFF switches on the stage coarse movement lever.
  • Page 35: The Fine Mode

    3 Operation of Each Part 3.8.2 The fine mode Press down the coarse movement OFF switch at the left side of the stage coarse movement lever. The stage is now in the fine mode. Turn the stage fine movement knobs to move the stage minutely in the X or Y direction.
  • Page 36: Motorized Nosepiece

    3 Operation of Each Part 3.10 Motorized nosepiece Use the motorized nosepiece forward/reverse rotation switches to control the rotations of the motorized nosepiece. When using the reverse rotation switch to rotate in the reverse direction, rotating the nosepiece in the direction from the nosepiece socket number “1” towards “6” is prohibited in order to protect the observation target.
  • Page 37: Placing/Removing The Polarizer In/From The Optical Path

    3 Operation of Each Part 3.11.2 Placing/removing the polarizer in/from the optical path Polarizer slider Push in: The polarizer is in the optical path. Figure-26 Episcopic polarizer • Placing the polarizer in the optical path Push in the slider to the second click-stop position to place the polarizer in the optical path.
  • Page 38: Analyzer Slider

    3 Operation of Each Part 3.12 Analyzer slider Use together with the polarizer slider for episcopic bright-field simplified polarization microscopy. Use together with the polarizer and the DIC sliders for episcopic DIC microscopy. Empty hole Analyzer Figure-28 Analyzer slider 3.12.1 Attaching the analyzer slider Remove the cap near the indication “ANALYZER”...
  • Page 39: Dic Slider

    3 Operation of Each Part 3.13 DIC slider Use together with the polarizer and analyzer sliders for episcopic DIC microscopy. Prism selection knob Prism movement knob Sliding limit groove Prism position indication (A/B) Figure-30 DIC slider 3.13.1 Attaching (removing) the DIC slider Use a hexagonal screwdriver to loosen the DIC slider limit screw on the revolving nosepiece.
  • Page 40: Selecting The Dic Prism Position

    3 Operation of Each Part • Placing the DIC prism in the optical path Push in the slider to the second click-stop position to place the DIC prism in the optical path. • Removing the DIC prism from the optical path Pull out the slider to the first click-stop position to remove the DIC prism from the optical path.
  • Page 41: Pinhole Slider

    3 Operation of Each Part 3.14 Pinhole slider When using the high magnification objectives, placing the pinhole on the optical path gives deep depth of focus to the image. This is especially effective when viewing contact holes. Pinhole slider Pinhole adapter Pinhole centering Flat head screws...
  • Page 42: Centering The Pinhole

    3 Operation of Each Part 3.14.3 Centering the pinhole Be sure to center the pinhole (match the centers of the pinhole and the optical path) before observation. Remove one eyepiece and while looking into the open sleeve, turn the pinhole centering screws to bring the pinhole image to the center of the exit pupil of the objective.
  • Page 43 3 Operation of Each Part Diascopic lamphouse Lamp cable TI-PS 100W Power Supply Power cord Figure-36 Attaching the diascopic lamphouse (for simultaneous illumination) Front Rear POWER switch Rating label Flip the power switch to the “ I ” side to turn The equipment is designed for AC power of 100 on the power supply.
  • Page 44: Assembly

    4 Assembly Assembly Assemble each part of the microscope referring to the diagram on the next page. WARNING • Before assembling the microscope, be sure to read the WARNING and CAUTION at the beginning of this instruction manual and follow the instructions written therein. •...
  • Page 45: Installation Location

    4 Assembly Installation location This equipment is a precision optical instrument. Using or storing the microscope under unsuitable conditions may damage it or may have an adverse effect on its accuracy. Read the “Safety Notes” explained in the beginning of this manual and select the location that satisfies the indicated conditions.
  • Page 46: System Diagram

    4 Assembly System diagram Figure-38 System diagram IC Inspection Microscope ECLIPSE L200ND / L200N Instructions...
  • Page 47: Attaching The Lamphouse And Replacing The Lamp

    • Use the Nikon LV-HL50W 12V 50W LONGLIFE halogen lamp or non-Nikon 12V 50W SHORTLIFE halogen lamp (model OSRAM HLX 64610, OSRAM HLX 64611, or PHILIPS 7027) for the lamp. If you wish to buy these lamps, please contact your nearest Nikon representative.
  • Page 48: Replacing The Lamp

    4 Assembly For episcopic illumination Figure-39 To remove the lamphouse, reverse the above procedure. 4.4.2 Replacing the lamp The lamp can be removed without having to detach the lamphouse from the microscope. Before performing the following procedures, turn off the power switch for the microscope (flip it to the “...
  • Page 49: Attaching The Fiber Adapter And External Light Source

    4 Assembly 4.4.3 Attaching the fiber adapter and external light source If the brightness of the specified light source is less than the desired brightness, an external light source can be used to perform the episcopic fluorescent microscopy. The external light source, the C-HGFIE HG Precentered Fiber Illuminator (motorized type), can be attached through the light guide fiber when the optional HG fiber adapter (L3N-FIAD Fiber Guide Adapter for L200ND) is mounted on the light source mount part.
  • Page 50 4 Assembly Dark-field/bright-field/ Knob fluorescent selection lever Figure-41 Attach the dark-field/bright-field/fluorescent selection lever to the optical path selection block (for bright-field microscopy), which is installed inside the arm, and pull the lever to the near side. Remove the dark-field/bright-field/fluorescent selection lever and attach it to the compensation filter.
  • Page 51 4 Assembly Fiber adapter clamp screw Fiber clamp screw Light guide fiber Figure-43 Connecting the microscope and an external light source CAUTION When the microscope is used with an external light source, be sure to attach the C-HGFIE HG Precentered Fiber Illuminator (motorized type). The shutter must be controlled in synchronization with the motorized nosepiece.
  • Page 52: Attaching The Stage And The Holder

    4 Assembly Attaching the stage and the holder CAUTION The stage weighs about 10 kg. Use caution not to drop it or get your hands and fingers caught. Lower the substage to the limit with the coarse focus knob. Place the stage on the substage and fix it by four M6 screws (supplied together with the substage) using the 5 mm hexagonal wrench.
  • Page 53: Attaching The Objectives

    4 Assembly Attaching the objectives Lower the stage to the limit. Insert the objectives starting from the lowest magnification into the sockets for the nosepiece addresses from 1 to 6 in numeric order. The objectives of ∅25 mm and ∅32 mm screws can be attached to the revolving nosepiece. Note that the ∅25 mm objectives need objective mount adapters to change their screws to ∅32 mm, whereas ∅...
  • Page 54: Attaching Breath Shielding Plate (Ultraviolet Light Shield)

    4 Assembly Insert the filter block along the block installation guide. • Insert the block until you feel a click. • You cannot remove the two illumination blocks at the back of the guide. Remove the dark-field/bright-field/fluorescent selection lever again and retain the lid at its original position.
  • Page 55: Seismic Restraint

    4.11 Seismic restraint Nikon recommends you to screw securely the microscope on the base to prevent sliding of the microscope on the base during an earthquake. Provide two pieces of the angles as illustrated below (the below figure shows the installation dimensions to the microscope.
  • Page 56: Connecting The Power Cord

    4 Assembly 4.12 Connecting the power cord WARNING Use only the supplied power cord. Using the wrong power cord could result in damage or fire. (The specification of the supplied power cord is written below.) Also note that the protection Class 1 equipment should be connected to the PE (protective earth) terminal for grounding.
  • Page 57: Digital Cameras

    4 Assembly Adjust the direction of the camera and secure the camera using the clamp screw of the photo adapter. (2) When using a 0.35 × , 0.45 × , or 0.6 × C-mount lens After attaching the LV-TV TV adapter to the vertical tube of the trinocular eyepiece tube, attach the V-T photo adapter to the LV-TV TV adapter and secure it with the set-screw.
  • Page 58: Setting The Dip Switch On The L200Nd/L200N Main Body

    4 Assembly Adjust the direction of the camera and secure the camera using the set-screw of the vertical tube of the trinocular eyepiece tube. 4.14 Setting the Dip switch on the L200ND/L200N main body The following shows the default settings and functions of the “S1” Dip switch on the board attached to the rear panel of the L200ND/L200N main body.
  • Page 59: Communications Control

    4 Assembly 4.15 Communications control 4.15.1 Connecting external devices The table below shows a unit system capable of establishing network on a PC or the DS-L2 connected to L200N/L200ND via the USB cable. Camera cable Power cord [Note 1] DS-U2/DS-L2 AC adapter cable Camera cable...
  • Page 60: Control Options And Status Displays On A Pc Or The Ds-L2

    4 Assembly 4.15.2 Control options and status displays on a PC or the DS-L2 The table below shows control options and status displays of a unit that can be controlled on a PC or the DS-L2 connected to L200ND/L200N via the USB cable. The “/”...
  • Page 61: Registering Information On The Objective

    4 Assembly 4.15.3 Registering information on the objective You can register the information to be checked on a PC or the DS-L2 with the supplied “L200N Setup Tool” software. For details on how to install the “L200N Setup Tool,” refer to the “L200N Setup Tool Software Manual.”...
  • Page 62: Troubleshooting

    5 Troubleshooting Troubleshooting Improper use of the microscope may adversely affect its performance even though it will not damage the microscope. If any of the problems listed below arise, take the countermeasures indicated. Viewing and control systems Table-7 Troubleshooting (viewing and control systems) Trouble Causes Countermeasures...
  • Page 63 5 Troubleshooting Trouble Causes Countermeasures Dirt or dust in the viewfield. Aperture diaphragm stopped down Open it to the appropriate size. too far. (See “3.6.1 Adjusting the size of the aperture diaphragm”.) Dirt or dust on the lenses, Clean them. (See “6.2 Cleaning the lens”.) eyepieces, filters and the sample.
  • Page 64 5 Troubleshooting Trouble Causes Countermeasures Objective hits the sample Eyepiece diopter not adjusted. Adjust the diopter. when switched from low to (See “3.4 Diopter adjustment”.) high magnification. Eyepieces not mounted correctly. Mount them correctly (match Sample is out-focused by the positioning pin and the objective switching.
  • Page 65 5 Troubleshooting Trouble Causes Countermeasures No interference colors Analyzer or polarizer not in the Put them in the optical path. seen on DIC microscopy. optical path. (See “3.11.2 Placing/removing the polarizer in/from the optical path” and “3.12.2 Placing/ removing the analyzer in/from the optical path”.) DIC prism not in the optical path.
  • Page 66: Electrical

    5 Troubleshooting Electrical Table-8 Troubleshooting (electrical) Trouble Causes Countermeasures Lamp does not light when No electricity. Connect the power cord switched on. (Power cord not connected.) (See “4.12 Connecting the power cord”.) No lamp installed. Install the lamp. (See “4.4 Attaching the lamphouse and replacing the lamp”.) Lamp is blown.
  • Page 67: Care And Maintenance

    6 Care and Maintenance Care and Maintenance Nikon recommends daily care and maintenance for maintaining the performance as long as possible. Do not let dust, fingerprints, and the like, get on the lenses. Dirt on the lenses, filters, and the like will adversely affect the optical performance of the microscope.
  • Page 68: Cleaning Tool And Supplies (Consumables)

    “ ” side) and wait until the lamphouse is cool. Regular inspections (with charge) Regular inspections of this microscope are recommended in order to maintain peak performance. Contact your nearest Nikon representative for details about regular inspections. IC Inspection Microscope ECLIPSE L200ND / L200N Instructions...
  • Page 69: Technical Specifications

    , 3 m long maximum, rated at 125 VAC minimum) Lamp and Lamphouse: 12V 50W precentered lamphouse lamphouse manufactured by Nikon Model: LV-LH50PC Halogen lamp: 12V 50W LONGLIFE halogen lamp Model: LV-HL50W Average service life of the lamp: 1100h Operating...
  • Page 70 7 Technical Specifications Outer dimensions Dimensions: 360 (W) x 580 (H) x 704 (D) mm (without and weight the stage) (main body) Weight: Approximately 45 kg (including the stage and the eyepiece tube) Safety standards • These models satisfy the SEMI guideline (S2, S8). •...

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