Replacement Of Consumables; Macro (Center) Table: If A Vacuum Error Has Occurred Or The Table Has Become Damaged - Olympus AL120-12 Series Maintenance Manual

300mm semiconductor wafer loader
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Maintenance Manual

4 Replacement of Consumables

Consult your nearest OLYMPUS distributor for the inquiry about consumables.
Please give the distributor the product name and serial No.
The tools and accessories required are indicated with Tools and Accessories in this text. Tools are not
included with this product.
Replacement cycles are indicated with Replacement Cycle.
The standard time required for replacement work is indicated with Standard Working Time.
CAUTION
CAUTION

1 Macro (Center) Table: If a vacuum error has occurred or the table has become damaged

Be sure to turn the main switch OFF and unplug the power cord before replacing
consumables.
Use the right tool for the right accessory when assembling this product. If the tools
are not used properly or this manual is not followed during assembly, parts may be
damaged and product safety cannot be guaranteed.
If any noise occurs in the operation of a part, please contact your OLYMPUS
distributor.
This loader uses specialized clean grease. Improper greasing may cause a
malfunction.
Tools Phillips-head screwdriver (No. 0)
Accessories M2 cross recessed pan head machine screws
1)
Standard Working Time 10 minutes
Remove the three M2 cross recessed pan head machine screws
①and replace the macro (center) table.
Replacement of Consumables
Page
4-1

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