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AL120-VS12
Olympus AL120-VS12 Manuals
Manuals and User Guides for Olympus AL120-VS12. We have
1
Olympus AL120-VS12 manual available for free PDF download: Maintenance Manual
Olympus AL120-VS12 Maintenance Manual (68 pages)
300mm Semiconductor Wafer Loader
Brand:
Olympus
| Category:
Microscope
| Size: 7.2 MB
Table of Contents
Table of Contents
15
Nomenclature
17
Wafer Loader Main Body
17
Al120-Lmb12
17
Al120-Lmb12-Lp3
18
Back Part [Main Disconnector][Al120-LMB12-F]
19
Back Part [Main Disconnector][Al120-LMB12-LP3]
19
Operation Panel
20
Foup Opener Operation Display Panel
20
Remote Controller (Option)
21
Adjustments
23
Registration of Inspection Wafer by Type
23
Registration of a New Type of Inspection Wafer
23
Thickness)
23
Adjusting the Vacuum Switches
28
How to Adjust Vacuum Switches
28
Test Programs
29
How to Use the Programs
29
To Open the Door of the FOUP Opener of AL120-LMB12-LP3
30
Test Names and Functions
31
Replacement of Consumables
60
Macro (Center) Table: if a Vacuum Error Has Occurred or the Table Has Become Damaged
60
Macro (Center) Table Oil Seal: if a Vacuum Error Has Occurred
61
Arm: if a Vacuum Error Has Occurred or the A-Arm Vacuum Pad Has Become Damaged
62
Vacuum Table: if a Vacuum Error Has Occurred or the Table Has Become Damaged
63
Oil Seal for Vacuum Table: if a Vacuum Error Has Occurred
63
Arm: if a Vacuum Error Has Occurred or the L-Arm Vacuum Pad Has Become Damaged
65
Arm: if a Vacuum Error Has Occurred or the F-Arm Vacuum Pad Has Become Damaged
65
Rubber Microscope Legs: if Wafer Transfer Sound Has Increased
66
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