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Angle Characteristic
ZX2-LD50V
Side-to-side Inclination for Flat Mirror
3.0
-1.0°
2.5
-0.5°
2.0
0°
+ Inclination
1.5
- Inclination
1.0
0.5
0
-0.5
-1.0
-1.5
-2.0
-2.5
-3.0
-5
-4
-3
-2
-1
0
1
2
3
4
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Front-to-back Inclination for Silicon Wafer Side-to-side Inclination for Glass
3.0
-1.0°
2.5
-0.5°
10.5°
2.0
0°
+ Inclination
1.5
- Inclination
1.0
0.5
0
-0.5
-1.0
-1.5
-2.0
-2.5
-3.0
-5
-4
-3
-2
-1
0
1
2
3
4
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Linearity Characteristic for Different Materials
ZX2-LD50V
0° Inclination
1.0
Flat Mirror
0.8
Silicon Wafer
Glass
0.6
10.5°
0.4
0° Inclination
0.2
0
-0.2
-0.4
-0.6
-0.8
-1.0
-5
-4
-3
-2
-1
0
1
2
3
FAR side
NEAR side
Measurement center distance
Displacement (mm)
Note: The x-axis displacement indicates the measurement distance displayed by the amplifier unit. The measurement distance displayed by the amplifier
unit takes the measurement center distance as 0, and the NEAR and FAR sides from the sensor are displayed by + and −, respectively.
Front-to-back Inclination for Flat Mirror
3.0
0.5°
2.5
1.0°
10.5°
2.0
+ Inclination
1.5
- Inclination
1.0
0.5
0
-0.5
-1.0
-1.5
-2.0
-2.5
-3.0
5
-5
-4
-3
-2
FAR side
Measurement center distance
3.0
0.5°
2.5
1.0°
2.0
+ Inclination
1.5
- Inclination
1.0
0.5
0
-0.5
-1.0
-1.5
-2.0
-2.5
-3.0
5
-5
-4
-3
-2
FAR side
Measurement center distance
4
5
Side-to-side Inclination for Silicon Wafer
-1.0°
0.5°
-0.5°
1.0°
0°
-1
0
1
2
3
4
5
NEAR side
Displacement (mm)
Front-to-back Inclination for Glass
-1.0°
0.5°
-0.5°
1.0°
0°
-1
0
1
2
3
4
5
NEAR side
Displacement (mm)
3.0
-1.0°
2.5
-0.5°
2.0
0°
+ Inclination
1.5
- Inclination
1.0
0.5
0
-0.5
-1.0
-1.5
-2.0
-2.5
-3.0
-5
-4
-3
-2
-1
0
1
2
3
4
FAR side
NEAR side
Measurement center distance
Displacement (mm)
3.0
-1.0°
2.5
-0.5°
10.5°
2.0
0°
+ Inclination
1.5
- Inclination
1.0
0.5
0
-0.5
-1.0
-1.5
-2.0
-2.5
-3.0
-5
-4
-3
-2
-1
0
1
2
3
4
FAR side
NEAR side
Measurement center distance
Displacement (mm)
ZX2
0.5°
1.0°
5
0.5°
1.0°
5
9
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