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User's Guide
Specifications
Supplemental Information
The following reference data is specified at 23 ± 5 °C and 50 % relative humidity.
•
SMU channel
Leakage Current
(force or sense to common)
Stray Capacitance
(force or sense to common)
Stray Capacitance
(force or sense to other SMUs)
Residual Resistance (force)
Residual Resistance (sense)
Guard Capacitance (force or
sense guard)
•
VSU channel
Residual Resistance
•
VMU channel
Residual Resistance
•
PGU channel
Characteristic Impedance
•
GNDU channel
Residual Resistance (force)
Residual Resistance (sense)
36
10 pA maximum at 200 V
15 pF maximum
3 pF typical
60 mW typical
60 mW typical
70 pF maximum
60 mW typical
60 mW typical
50 W typical
40 mW typical
40 mW typical
Agilent 16442A User's Guide, Edition 3
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