Content
Operation Notices
Precautions............................................................................................................1
Parts name ............................................................................................................6
Screen Operation Guide
Operation guide ...................................................................................................14
Emergency operation .......................................................................................... 15
Maintenance
Clean and maintenance....................................................................................... 15
Malfunction
Malfunction analysis ............................................................................................18
Installation Notice
Tools for installation .............................................................................................23
Installation
Vacuum pumping .................................................................................................33
Leakage detection ...............................................................................................33
Test and operation
Test operation ......................................................................................................34
Attachment
.........................................................................35
.......................................................................................37