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Smart Sensor
Dummy
Hydrogen Chloride (HCI) 0 - 8ppm, 2 years E2
Silane (SiH4) 0 -20 ppm, 2 years
Hydrogen (H2) 0 - 1000ppm, 2 years
Chlorine (CI2) 0 - 2ppm, 2 years
Ammonia (NH3) 0 - 100ppm, 2 years
Carbon Monoxide (CO) 0 - 100ppm, 2 years C2
Phosphine (PH3) 0 - 1200ppb, 2 years
Ozone (O3) 0 - 0.4ppm, 2 years
Oxygen (O2) 0 - 25%v/v, 3 years
Sulphur Dioxide (SO2) 0 - 8ppm, 2 years
Hydrogen Flouride (HF) 0 - 12ppm, 2 years Z2
Smart Sensor
Part
Description
number
MMS-00 Midas-M Dummy Sensor
MMS-E2 Midas-M Hydrogen Chloride (HCI) 0 - 8ppm, 2 years
MMS-X2 Midas-M Silane (SiH4) 0 -20 ppm, 2 years
MMS-G2 Midas-M Hydrogen (H2) 0 - 1000ppm, 2 years
MMS-L2 Midas-M Chlorine (CI2) 0 - 2ppm, 2 years
MMS-A2 Midas-M Ammonia (NH3) 0 - 100ppm, 2 years
MMS-C2 Midas-M Carbon Monoxide (CO) 0 - 100ppm, 2
years
MMS-R2 Midas-M Phosphine (PH3) 0 - 1200ppb, 2 years
MMS-U2 Midas-M Ozone (O3) 0 - 0.4ppm, 2 years
MMS-D2 Midas-M Oxygen (O2) 0 - 25%v/v, 3 years
MMS-S2 Midas-M Sulphur Dioxide (SO2) 0 - 8ppm, 2 years
MMS-Z2 Midas-M Hydrogen Flouride (HF) 0 - 12ppm, 2 years
Accesories
Modules / Replacements
Midas-M
Code
00
X2
G2
L2
A2
R2
U2
D2
S2
78
User Manual
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