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Agilent Technologies 979 Replacement Manual

Helium mass spectrometer leak detector
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Model 979 Helium
Mass Spectrometer
Leak Detector
Manual No. 699909976
Revision B
January 2003
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
vacuum technologies
FIELD SERVICE
COMPONENT REPLACEMENT
MANUAL

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  • Page 1 NOTICE: This document contains references to Varian. Please note that Varian, Inc. is now part of Agilent Technologies. For more information, go to www.agilent.com/chem. vacuum technologies Model 979 Helium FIELD SERVICE COMPONENT REPLACEMENT Mass Spectrometer MANUAL Leak Detector Manual No. 699909976...
  • Page 2 Model 979 Helium Mass Spectrometer Leak Detector Model 979 Helium Mass Spectrometer Leak Detector Alconox is a registered trademark of Alconox, Inc. Apiezon is a registered trademark of M&I Materials Ltd. Scotch-Brite is a trademark of 3M. Loctite and PST are registered trademarks of Loctite Corporation Teflon is a registered trademarks of E.
  • Page 3 Model 979 Helium Mass Spectrometer Leak Detector to which this declaration relates is in conformity with the following standard(s) or other normative documents. auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.

  • Page 4: Warranty

    Model 979 Helium Mass Spectrometer Leak Detector Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid war- ranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of the Product.
  • Page 5 Model 979 Helium Mass Spectrometer Leak Detector Items Not Covered Under Warranty Examples of items not normally covered under warranty include ion sources, TC gauges, O-rings, spectrometer tube cleaning and overhaul, mechanical pump oils, vacuum system overhauls, and obvious abuse or customer error. These items are considered normal maintenance for this type of equipment.
  • Page 6 Model 979 Helium Mass Spectrometer Leak Detector Operators and service personnel must be aware of all hazards associated with this equipment. They must know how to recognize hazardous and potentially hazardous conditions, and know how to avoid them. The consequences of unskilled, improper, or careless operation of the equipment can be serious.
  • Page 7 Varian strongly recommends the use of surge protection to CAUTION improve the immunity of the 979 Series leak detectors against unidirectional transients caused by the following phenomena: Switching phenomena in the power network (e.g., switching...
  • Page 8 Model 979 Helium Mass Spectrometer Leak Detector This equipment is designed to meet current EEC regulations: WARNING LVD (Low Voltage Directive, 73/23/EEC) and EMC (Electromagnetic Compatibility, 89/336/EEC Directive) for Installation Category II, Pollution Degree II environment for Industrial, Scientific, Measuring and Process Control electrical equipment.
  • Page 9 Model 979 Helium Mass Spectrometer Leak Detector This equipment generates, uses, and can radiate RF energy and CAUTION if not installed and used in accordance with the instructional manual, may cause harmful interference to radio communications. When this equipment is operated in a commercial environment...
  • Page 10 Model 979 Helium Mass Spectrometer Leak Detector O-ring Care When removing, checking or replacing O-rings: Varian Vacuum Technologies recommends replacing all NOTE O-rings during routine maintenance or during any maintenance procedure requiring that O-rings be removed. Remove O-rings carefully with your fingers. Do not use metal CAUTION tools for this task.
  • Page 11 Model 979 Helium Mass Spectrometer Leak Detector Spectrometer Tube The spectrometer tube operates at a very high vacuum CAUTION produced by the high vacuum pump. Service of the spectrometer tube requires that this vacuum be vented to the atmosphere. Do not use grease or other substance on O-rings that will come CAUTION in contact with the spectrometer tube.
  • Page 12 Model 979 Helium Mass Spectrometer Leak Detector Pumps To avoid injury, use proper lifting techniques when moving WARNING pumps. Your system may have pumps that require two people to move them safely. The vacuum pumps are also compressors; incorrect operation WARNING may be dangerous.
  • Page 13 Model 979 Helium Mass Spectrometer Leak Detector Varian Services The following are just a few of the many services that Varian offers its customers. Please see our catalog, or contact us to learn of the services that are available. Contact Varian Vacuum Technologies Customer Service at 1-800-8VARIAN for details.

  • Page 14: Preface

    Model 979 Helium Mass Spectrometer Leak Detector Preface This manual contains information for field replacement of components of the Model 979 Mass Spectrometer Helium Leak Detector. It is organized so that similar items or procedures are included in a section. The manual moves from a brief overview of the leak detector to specific replacement procedures to calibration and tuning procedures that must be run after the replacement of certain components.
  • Page 15 Model 979 Helium Mass Spectrometer Leak Detector xiii...
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  • Page 17: Table Of Contents

    1.3.3 Side View — Calibrated Leak, Valve Block Side ............1-6 1.3.4 Rear View........................1-6 Section 2. Cleaning the Test Port ....................2-1 Section 3. Removing the Covers from the 979 ................3-1 3.1 Opening the Front Panel ..................... 3-1 3.2 Removing the Front Panel ....................3-3 3.3 Removing the Rear Panel....................
  • Page 18 Model 979 Helium Mass Spectrometer Leak Detector 5.4 Replacing the Button Thermocouple.................. 5-10 5.5 Removing the Ion Source ....................5-12 5.6 Replacing the Ion Source....................5-15 5.7 Removing the Preamplifier....................5-17 5.8 Replacing the Preamplifier....................5-19 5.9 Spectrometer Tube Overhaul..................... 5-20 5.9.1 Removing the Spectrometer Tube Assembly as Part of Overhaul......
  • Page 19 Section 10. Leak Checking for Reliability ..................10-i 10.1 General Suggestions for Leak Checking ................. 10-i Appendix A. Assembly Drawings and Bills of Materials ..............A-1 Appendix B. 979 COM Cable ......................B-1 Appendix C. 979 Spare Parts List ....................C-1 Index ..............................1 xvii...
  • Page 20 Model 979 Helium Mass Spectrometer Leak Detector This page intentionally left blank.
  • Page 21 Slotted Post on Coil and Plunger Assembly ............... 4-5 Securing the Coil to Loosen Plunger Assembly..............4-5 979 Side View: End Cap, Valve Stem, and Coil and Plunger Assembly Removed .... 4-6 4-10 Elbow Flat Secured with Crescent Wrench................. 4-7 4-11 Loosening Leak with Open Wrench ..................
  • Page 22 Model 979 Helium Mass Spectrometer Leak Detector Wing Nut Under Shelf ......................5-3 NW-25 Quick Clamp on Turbo-to-Spec Tube Manifold ............5-4 O-ring Inspection ........................ 5-5 Button TC, Spectrometer Tube, and Turbo Pump .............. 5-7 Connector Removal ......................5-8 Phillips Screws on Button TC Assembly ................5-8 Flange Cap and Center Post on Button TC Assembly ............
  • Page 23 Test Port Thermocouple Gauge O-ring and Backing Ring ..........6-2 Test Port Thermocouple Gauge O-Ring amd Backing Ring ..........6-3 979 Interior: Side View of Card Cage ................. 7-1 979 Circuit Boards in Card Cage ..................7-2 Card Cage Bracket and Connectors on Front of Boards ............ 7-3 Shared Power Cable......................
  • Page 24 Model 979 Helium Mass Spectrometer Leak Detector This page intentionally left blank.
  • Page 25 Model 979 Helium Mass Spectrometer Leak Detector List of Tables Table Description Page Example: Setting the REPELLER Parameter using the Manual Spectube Tuning Screen 9-3 Example: Setting the REPELLER Parameter Value using J12 Diagnostic Port ....9-5 Assembly Drawings Included .....................A-1 Bills of Materials Included ....................A-1...
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  • Page 27: Section 1. System Overview

    Varian Vacuum Technologies’ Platform leak detector electronics, and an operator interface in a rugged housing. The 979 is available as a stand-alone, bench-mount unit or as a single or dual, dry or oil sealed mechanically pumped leak testing station on a cart.

  • Page 28: Key Switch

    Model 979 Helium Mass Spectrometer Leak Detector 1.1.1 Key Switch The 979 Key Switch allows three different levels of access to the touch panel system controls—RUN, SET-UP or SERVICE. Two different keys are provided with the leak detector: Key T009 operates the switch in RUN, SET-UP or SERVICE positions.

  • Page 29: Rear Panel

    Model 979 Helium Mass Spectrometer Leak Detector 1.2 Rear Panel The rear panel of the 979 (Figure 1-2) includes power and communications connections as well as a manifold for connection to a mechanical pump. Power Connections Foreline Pump Connection Communication Connections Figure 1-2 979 Rear Panel 1.2.2 System Control and Communication Panel...

  • Page 30: Inside The Model 979

    Model 979 Helium Mass Spectrometer Leak Detector 1.3 Inside the Model 979 1.3.1 Inside Front View Most serviceable parts are accessed from the front of the leak detector (Figure 1-4). Test Spectrometer Tube Port Spectrometer Tube Thermocouple Valve Block Ground Strap...

  • Page 31: Side View - Card Cage Side

    Model 979 Helium Mass Spectrometer Leak Detector 1.3.2 Side View — Card Cage Side The left side of the 979 provides access to the card cage (Figure 1-5). Front Side of Unit Card Cage Card Cage Bracket Figure 1-5 979 Interior: Side View Card Cage...

  • Page 32: Side View - Calibrated Leak, Valve Block Side

    Model 979 Helium Mass Spectrometer Leak Detector 1.3.3 Side View — Calibrated Leak, Valve Block Side The right side of the 979 allows access to the Internal Calibrated Leak (option) (Figure 1-6). Internal Calibrated Leak Cal Leak Valve Block Assembly...

  • Page 33: Section 2. Cleaning The Test Port

    Section 2. Cleaning the Test Port The test port is located on the outside of the Model 979 leak detector. Therefore, it is not necessary to turn the leak detector off or disconnect it from mains power if this is the only procedure being performed.
  • Page 34 Model 979 Helium Mass Spectrometer Leak Detector 2. Remove the test port blank-off flange cap and/or centering ring from the top of the test port (Figure 2-2). Figure 2-2 Centering Ring with O-ring 3. Remove the O-ring from the centering ring.
  • Page 35 Model 979 Helium Mass Spectrometer Leak Detector 7. Place the centering ring onto the top of the test port (Figure 2-3). Figure 2-3 O-ring and Centering Ring on Test Port 8. Replace the blank-off flange cap or connected device. 9. Replace the quick clamp onto the test port and tighten the wing nut clockwise until it is just tight enough to stay in place.
  • Page 36 Model 979 Helium Mass Spectrometer Leak Detector This page intentionally left blank.

  • Page 37: Section 3. Removing The Covers From The 979

    1. Disconnect the mains power supply and make sure all pumps are off. Disconnect power from the 979 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system. 2. Remove the 2 Phillips screws from the 979 front panel (Figure 3-1). Front Panel Screw Front Panel Screw...
  • Page 38 Model 979 Helium Mass Spectrometer Leak Detector 3. Lean the top of the front panel forward. Be careful not to place tension on the front panel display PCB CAUTION harness. 4. If it is not already supported on a bench, support the front panel with one hand and press the release tab on the white molex connector (Figure 3-2) located on the touch panel assembly and pull it to disconnect the PCB harness.

  • Page 39: Removing The Front Panel

    Model 979 Helium Mass Spectrometer Leak Detector 3.2 Removing the Front Panel To remove the front panel: 1. Open the front panel as described in Section 3.1 “Opening the Front Panel”. The ground strap, which must be removed, is located in the right bottom corner of the front panel (Figure 3-3).
  • Page 40 Model 979 Helium Mass Spectrometer Leak Detector 3. If it is not already supported on a bench, support the front panel with one hand and lift the ground strap up and away from the screw post it is on. 4. Remove the front panel and place it in a safe place where damage cannot occur to the front panel displays, buttons, or to the touch panel assembly PCB located inside the front panel.

  • Page 41: Removing The Rear Panel

    3.3 Removing the Rear Panel To perform this procedure: 1. Disconnect the mains power supply and make sure all pumps are off. Disconnect power from the 979 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system.

  • Page 42: Removing The Side Panel

    Model 979 Helium Mass Spectrometer Leak Detector 3.4 Removing the Side Panel To remove the side panel: 1. Open and remove the front panel as described in Section 3.1 “Opening the Front Panel” on page 3-1 and Section 3.2 “Removing the Front Panel” on page 3-3.

  • Page 43: Replacing All Covers And Panels

    Model 979 Helium Mass Spectrometer Leak Detector 3.5 Replacing All Covers and Panels Each of the procedures in this section is complete for its stated purpose. If all panels and covers have been removed, however, they must be replaced in the order given in this procedure.
  • Page 44 Model 979 Helium Mass Spectrometer Leak Detector 5. Lift the panel towards the leak detector and insert the white PCB harness molex connector plug into the connector located on the touch panel PCB assembly (Figure 3-7). Be sure the white PCB harness molex connector plug clicks into NOTE place securely.

  • Page 45: Section 4. The Internal Calibrated Leak

    Helium calibrated leaks typically degrade at 3 percent per year. The calibrated leak supplied with your 979 must be checked at least once a year to ensure it is at the value stated on its tag. Failure to check the leak could result in unreliable testing. You can arrange for testing and recalibration at a lab of your choice.

  • Page 46: Removing The Valve Block Coil And Plunger Assembly

    To remove the Valve Block Coil and Plunger Assembly: 1. Disconnect the mains power supply and make sure all pumps are off. Disconnect power from the 979 before performing any WARNING procedure that requires physically disconnecting any part of the system.
  • Page 47 Model 979 Helium Mass Spectrometer Leak Detector 3. Loosen and remove the end cap from the valve stem (Figure 4-3) using a 9-16 wrench. Be careful not to drop or lose the black sleeve located inside NOTE the end cap.
  • Page 48 Model 979 Helium Mass Spectrometer Leak Detector 4. Use a 9-16 wrench to loosen the valve stem (Figure 4-5), then rotate the connection counterclockwise until you hit the stop. Reposition the wrench and repeat. When it is loose enough, you can finish removing it by hand.
  • Page 49 Model 979 Helium Mass Spectrometer Leak Detector 6. Being careful not to scratch the valve block, insert a long slotted screwdriver through the top of the leak detector down to the slotted post on the top of the coil and plunger assembly (Figure 4-7).

  • Page 50: Removing The Internal Calibrate Leak

    1. Remove the 2 large Phillips screws that hold the calibrated leak straps (Figure 4-9). Leak Strap and Screw Leak Strap and Screw Brass Valve Block Swagelok Fitting Figure 4-9 979 Side View: End Cap, Valve Stem, and Coil and Plunger Assembly Removed...
  • Page 51 Model 979 Helium Mass Spectrometer Leak Detector 2. Remove the straps by sliding them up and over the top of the calibrated leak. 3. Hold the flats of the nut on the swagelok fitting (elbow) below the calibrated leak with a crescent wrench (Figure 4-10).
  • Page 52 Model 979 Helium Mass Spectrometer Leak Detector 5. Reposition the wrench and repeat this action until the leak is loose enough to finish loosening it by hand (Figure 4-12). Figure 4-12 Removal of Calibrated Leak Handle the calibrated leak carefully. It is a delicate piece of...

  • Page 53: Replacing The Internal Calibrated Leak

    Model 979 Helium Mass Spectrometer Leak Detector 4.2.3 Replacing the Internal Calibrated Leak To replace the internal calibrated leak: Be careful not to get any Loctite PST 565 into the valve or in the CAUTION small hole in the valve. The valve can become plugged, resulting in unreliable leak detection.
  • Page 54 Model 979 Helium Mass Spectrometer Leak Detector 4. Position a crescent wrench on the flats of the swagelok fitting (Figure 4-14), hold it still and finish tightening the calibrated leak using a 13-16 open wrench. Be sure the calibrated leak is oriented so that information on the label can be read without having to disturb it.

  • Page 55: Examining And Cleaning The Valve Block Coil And Plunger Assembly

    Model 979 Helium Mass Spectrometer Leak Detector 4.2.4 Examining and Cleaning the Valve Block Coil and Plunger Assembly The various parts of the Valve Block Coil and Plunger Assembly must be examined and cleaned before reassembling the valve. 4.2.4.1 Examining and Cleaning the Cal Leak Valve Block To examine and clean the cal leak valve block: 1.

  • Page 56: Examining And Cleaning The Coil And Plunger Assembly

    Model 979 Helium Mass Spectrometer Leak Detector 4.2.4.2 Examining and Cleaning the Coil and Plunger Assembly The plunger has elastomer at the top and at the bottom. This elastomer helps to form the seal when the valve closes. It must be kept clean and free of debris. Do not use any solvent that will dry out the elastomer.

  • Page 57: Examining And Cleaning The Valve Stem And End Cap

    Model 979 Helium Mass Spectrometer Leak Detector 4. Examine the bottom of the plunger (Figure 4-17) for wear and debris and wipe off any debris using a dry lint-free cloth, being careful not to lose the spring. Figure 4-17 Bottom of Plunger 5.

  • Page 58: Replacing The Coil And Plunger Assembly

    Model 979 Helium Mass Spectrometer Leak Detector 4.2.5 Replacing the Coil and Plunger Assembly The final steps of replacing the internal calibrated leak include replacing the coil and plunger assembly, the valve stem, and the end cap. To replace the coil and plunger assembly: 1.
  • Page 59 Model 979 Helium Mass Spectrometer Leak Detector 4. Carefully thread the coil by hand until it is tight enough to be held on its own. 5. Being careful not to scratch the valve block, insert a long slotted screwdriver through the top of the leak detector down to the slotted post (Figure 4-19) on the top of the coil and plunger assembly.
  • Page 60 Model 979 Instruction Manual. 14. Calibrate the 979 using the procedure described in Section 9.1 “Calibrate the 979” on page 9-1. 15. Leak check the assembly before using the 979 for testing.

  • Page 61: Section 5. Spectrometer Tube Assembly

    5.1.1 Removing the Spectrometer Tube Assembly for Complete Exchange To remove and replace the spectrometer tube assembly: 1. Disconnect the mains power supply and make sure all pumps are off. Disconnect power from the 979 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system.
  • Page 62 Model 979 Helium Mass Spectrometer Leak Detector 3. Vent the spectrometer tube (Figure 5-1) by turning the knurled nut on the turbo pump (knurled nut not shown in this view) approximately 1/4 turn counterclockwise. Spectrometer Tube Turbo Pump (Knurled Nut is not shown in this view.)
  • Page 63 Model 979 Helium Mass Spectrometer Leak Detector Ground Cable and Screw Figure 5-2 Ground Cable and Screw for Removing Connectors 7. Disconnect the ground cable (Figure 5-2) from the spectrometer tube by removing the screw using a slotted screwdriver. 8. Taking care not to damage the turbo pump controller PCB located underneath the shelf, remove the wing nut, locking washer and flat washer located underneath the shelf below the spectrometer tube (Figure 5-3).
  • Page 64 Model 979 Helium Mass Spectrometer Leak Detector 9. Remove the NW-25 quick clamp to disconnect the spectrometer tube from the turbo-to-spec tube manifold (Figure 5-4). Figure 5-4 NW-25 Quick Clamp on Turbo-to-Spec Tube Manifold 10. Lift the spectrometer tube assembly off of the shelf and lay it down on a clean non-magnetic surface.

  • Page 65: Examining And Cleaning The Centering Ring And O-Ring

    Model 979 Helium Mass Spectrometer Leak Detector 5.1.2 Examining and Cleaning the Centering Ring and O-Ring To examine and clean the centering ring and O-ring: 1. Examine the centering ring, wipe it clean using a VacuSolv wipe, and let it air dry.

  • Page 66: Reinstalling The Spectrometer Tube

    14. Perform the system pressure gauge calibration described in Section 9.3.1 “System Pressure Gauge Calibration Procedure” on page 9-7. 15. Calibrate the 979 using the procedure described in Section 9.1 “Calibrate the 979” on page 9-1. 16. Leak check the assembly before using the 979 for testing.

  • Page 67: Removing The Button Thermocouple From The Spectrometer Tube

    To perform this procedure: 1. Disconnect the mains power supply and make sure all pumps are off. Disconnect power from the 979 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system.
  • Page 68 Model 979 Helium Mass Spectrometer Leak Detector 4. Remove the connector labeled SYSTEM from the top of the Button TC (Figure 5-7) by grasping the plug of the connector and gently pulling it straight up and off of the contact pins.
  • Page 69 Model 979 Helium Mass Spectrometer Leak Detector 6. Remove the Button TC flange cap (Figure 5-9) by pressing down on the Button TC center post and lifting the flange cap up and off of the Button TC. Flange Cap Center Post...

  • Page 70: Replacing The Button Thermocouple

    Model 979 Helium Mass Spectrometer Leak Detector 5.4 Replacing the Button Thermocouple Handle the Button TC carefully (Figure 5-10). The sensing wire CAUTION on the bottom side of the TC is approximately 3 mils thick. Care must be taken not to damage this wire.
  • Page 71 13. Perform the system pressure gauge calibration described in Section 9.3.1 “System Pressure Gauge Calibration Procedure” on page 9-7. 14. Calibrate the 979 using the procedure described in Section 9.1 “Calibrate the 979” on page 9-1. 15. Leak check the assembly before using the 979 for testing.

  • Page 72: Removing The Ion Source

    To remove the ion source: 1. Disconnect the mains power supply and make sure all pumps are off. Disconnect power from the 979 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system.
  • Page 73 Model 979 Helium Mass Spectrometer Leak Detector 4. Remove the connector labeled ION SOURCE from the top of the Ion Source by grasping the plug of the connector and gently pulling it straight up and off of the contact pins.
  • Page 74 Model 979 Helium Mass Spectrometer Leak Detector 9. Examine the ion source (Figure 5-14) and cavity (Figure 5-15) for deposits and discoloration. 10. If either is discolored or dirty contact Varian Vacuum Technologies Customer Service at 1-800-8VARIAN. Dark carbon-like deposits around the ion source filament and/...

  • Page 75: Replacing The Ion Source

    Model 979 Helium Mass Spectrometer Leak Detector 5.6 Replacing the Ion Source It is good practice when replacing the preamplifier, ion source NOTE and Button TC to have the key of the center post line up perpendicular to the spectrometer tube body and face the back.
  • Page 76 9. Turn the leak detector on and wait for the system to be ready. 10. Allow the pumps to warm up if the detector has been off for some time. 11. Calibrate the 979 using the procedure described in Section 9.1 “Calibrate the 979” on page 9-1.

  • Page 77: Removing The Preamplifier

    To remove the preamplifier: 1. Disconnect the mains power supply and make sure all pumps are off. Disconnect power from the 979 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system.
  • Page 78 Model 979 Helium Mass Spectrometer Leak Detector 4. Remove the connector labeled PRE-AMP from the top of the preamplifier by grasping the plug of the connector and gently pulling it straight up and off of the contact pins. 5. If the cable is not labeled, label it now.

  • Page 79: Replacing The Preamplifier

    Model 979 Helium Mass Spectrometer Leak Detector 5.8 Replacing the Preamplifier To replace the preamplifier: It is good practice when replacing the preamplifier, ion source NOTE and Button TC to have the key of the center post line up perpendicular to the spectrometer tube body and face the back.

  • Page 80: Spectrometer Tube Overhaul

    9. Turn the leak detector on and wait for the system to be ready. 10. Allow the pumps to warm up if the detector has been off for some time. 11. Calibrate the 979 using the procedure described in Section 9.1 “Calibrate the 979” on page 9-1.

  • Page 81: Removing The Spectrometer Tube Assembly As Part Of Overhaul

    Technologies Customer Service at 1-800-8VARIAN for details. To perform this procedure: 1. Disconnect the mains power supply and make sure all pumps are off. Disconnect power from the 979 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system.
  • Page 82 Model 979 Helium Mass Spectrometer Leak Detector 4. Remove the three connectors (Figure 5-22 on page 5-21) from the top of the spectrometer tube by grasping the plug of each connector and gently pulling it straight up and off of the contact pins (Figure 5-23).
  • Page 83 Model 979 Helium Mass Spectrometer Leak Detector 7. Remove the NW-25 quick clamp to disconnect the spectrometer tube from the turbo-to-spec tube manifold (Figure 5-25). Wing Nut Figure 5-25 NW-25 Quick Clamp on Turbo-to-Spec Tube Manifold 8. Lift the spectrometer tube assembly up and off of the shelf and lay it down on a clean non-magnetic surface.
  • Page 84 Model 979 Helium Mass Spectrometer Leak Detector 9. Remove the centering ring and O-ring from the spectrometer tube. Do not remove the 6 magnet body bracket screws shown in CAUTION Figure 5-26. Threaded Stud Hole Magnet Body Magnet Body Bracket Screws...

  • Page 85: Removing The Magnet Assembly From Spectrometer Tube As Part Of Overhaul

    Model 979 Helium Mass Spectrometer Leak Detector 5.9.2 Removing the Magnet Assembly from Spectrometer Tube as Part of Overhaul To remove the magnet assembly from spectrometer tube: 1. Remove the 2 slotted screws that mount the spectrometer tube magnet assembly to the spectrometer tube body (Figure 5-27).

  • Page 86: Removing The Button Thermocouple As Part Of Spectrometer Tube Overhaul

    Model 979 Helium Mass Spectrometer Leak Detector 5.9.3 Removing the Button Thermocouple as part of Spectrometer Tube Overhaul To remove the button thermocouple: 1. Remove the 4 Phillips screws that hold the Button TC flange cap (Figure 5-29). Phillips Screws...

  • Page 87: Removing The Ion Source As Part Of Spectrometer Tube Overhaul

    Model 979 Helium Mass Spectrometer Leak Detector 3. If the flange cap and Button TC come up together, hold one hand under the Button TC to catch it, and push down on the center post to remove the flange cap from the Button TC.
  • Page 88 Model 979 Helium Mass Spectrometer Leak Detector 4. Remove the ion source from the spectrometer tube body (Figure 5-32). Figure 5-32 Removal of Ion Source from Spectrometer Tube 5. Examine the ion source (Figure 5-33) and cavity (Figure 5-34) for deposits and discoloration.
  • Page 89 Model 979 Helium Mass Spectrometer Leak Detector 6. Remove the O-ring from the Ion Source. 7. Locate the ground slit plate inside the ion source cavity (Figure 5-34). If this is highly discolored, contact Varian Vacuum Technologies Customer Service at 1-800-8VARIAN.

  • Page 90: Removing The Preamplifier As Part Of Spectrometer Tube Overhaul

    Model 979 Helium Mass Spectrometer Leak Detector 5.9.5 Removing the Preamplifier as Part of Spectrometer Tube Overhaul The preamplifier is a static sensitive device. Wear a grounding CAUTION device while the preamplifier is being handled. To remove the preamplifier: 1. Remove the 4 Phillips screws that hold the preamplifier flange cap.

  • Page 91: Removing The Deflecting Magnetic Pole Pieces As Part Of Spectrometer Tube Overhaul

    Model 979 Helium Mass Spectrometer Leak Detector 5.9.6 Removing the Deflecting Magnetic Pole Pieces as Part of Spectrometer Tube Overhaul To remove the deflecting magnetic pole pieces: 1. Remove the 4 slotted screws to free the deflecting magnetic pole piece (Figure 5-37).

  • Page 92: Examining And Cleaning The Spectrometer Parts

    Model 979 Helium Mass Spectrometer Leak Detector 4. Repeat Step 1and Step 2 to remove the second deflecting magnetic pole piece (Figure 5-39) from the other side of the spectrometer tube body. Figure 5-39 Removal of Second Deflecting Magnetic Pole Piece 5.
  • Page 93 Model 979 Helium Mass Spectrometer Leak Detector 3. Using the Scotch-Brite pad, polish away any discolored areas of the deflecting magnetic pole pieces (Figure 5-41). Figure 5-41 Discolored Deflecting Magnetic Pole Piece 4. Using the VacuSolv presaturated cleaning wipes and swabs (Figure 5-42), thoroughly wipe down all surfaces of the spectrometer tube body, deflecting magnetic pole pieces, magnet assembly, and ground slit plate.
  • Page 94 Model 979 Helium Mass Spectrometer Leak Detector Remove O-rings carefully with your fingers. Do not use metal CAUTION tools for this task. This prevents scratching of any sealing surfaces. Do not use alcohol, methanol or other solvents on O-rings. To do so causes deterioration and reduces their ability to hold a vacuum.

  • Page 95: Reassembling The Spectrometer Tube

    Model 979 Helium Mass Spectrometer Leak Detector 5.10 Reassembling the Spectrometer Tube 5.10.1 Replacing the Deflecting Magnetic Pole Pieces To perform this procedure: 1. Place the O-ring onto the deflecting magnetic pole piece. 2. Lay the spectrometer tube body on its side and place the deflecting magnetic pole piece into the cavity.

  • Page 96: Replacing The Ion Source As Part Of Spectrometer Tube Overhaul

    Model 979 Helium Mass Spectrometer Leak Detector 3. Replace the preamplifier flange cap so that the grooves in the depression of the flange cap line up with the legs on either side of the center post (Figure 5-45). Flange Cap...
  • Page 97 Model 979 Helium Mass Spectrometer Leak Detector 2. Carefully place the ground slit plate into the cavity, being sure to align the slit so that it is perpendicular to the back and front of the spectrometer tube (Figure 5-47). The hole in the ground slit plate lines up with the alignment hole on the bottom of the spectrometer tube body ion source cavity.
  • Page 98 Model 979 Helium Mass Spectrometer Leak Detector 5. Hold the ion source by the connector pins, and the O-ring if necessary, and insert it into the cavity so that its alignment pin falls in the center of the hole in the cavity (Figure 5-47 on page 5-37 and Figure 5-48).

  • Page 99: Replacing The Button Thermocouple As Part Of Spectrometer Tube Overhaul

    Model 979 Helium Mass Spectrometer Leak Detector 5.10.4 Replacing the Button Thermocouple as Part of Spectrometer Tube Overhaul Handle the Button TC carefully. The sensing wire on the bottom CAUTION side of the TC is approximately 3 mils thick. Care must be taken not to damage this wire.

  • Page 100: Replacing The Magnet Assembly

    Model 979 Helium Mass Spectrometer Leak Detector 3. Replace the Button TC flange cap so that the grooves in the depression of the flange cap line up with the center post key (Figure 5-51). Flange Cap Grooves Figure 5-51 Flange Cap Grooves Aligned with Button TC Center Post Key 4.
  • Page 101 Model 979 Helium Mass Spectrometer Leak Detector To perform this procedure: 1. Hold the spectrometer tube in one hand in the upright position (flange caps and contacts up). 2. With the other hand, pick up the magnet assembly and orient it so that the GA pole pieces are the first part to slide onto the spectrometer tube (Figure 5-53).
  • Page 102 Model 979 Helium Mass Spectrometer Leak Detector 8. Replace the 2 slotted magnet body bracket screws on the front of the magnet assembly to complete mounting the magnet assembly to the spectrometer tube (Figure 5-54). 9. Place the 8-32 threaded stud with Teflon standoff into the bottom of the spectrometer tube and tighten it using a 5-64 Allen wrench.

  • Page 103: Re-Installing The Spectrometer Tube

    14. Perform the system pressure gauge calibration described in Section 9.3.1 “System Pressure Gauge Calibration Procedure” on page 9-7. 15. Calibrate the 979 using the procedure described in Section 9.1 “Calibrate the 979” on page 9-1. 16. Leak check the assembly before using the 979 for testing.
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  • Page 105: Section 6. Test Port Thermocouple Gauge

    The Test Port Thermocouple Gauge monitors pressure at the test port. The test port pressure is shown on the test port pressure display bar graph and touch panel Home Screen. For more information, see the Model 979 Instruction Manual. 6.1 Removing the Test Port Thermocouple Gauge To remove the Test Port Thermocouple Gauge it is not necessary to remove the front panel completely.
  • Page 106 Model 979 Helium Mass Spectrometer Leak Detector 4. Grasp the plug and remove the plug and the thermocouple gauge from the valve block (Figure 6-1). Thermocouple Plug Gauge Valve Block Figure 6-1 Test Port Thermocouple Gauge, Plug, and Valve Block 5.

  • Page 107: Replacing The Test Port Thermocouple Gauge

    Model 979 Helium Mass Spectrometer Leak Detector 7. Examine the O-ring for wear. If necessary, use a new O-ring, otherwise clean the O-ring. Varian Vacuum Technologies recommends replacing all NOTE O-rings during routine maintenance or during any maintenance procedure requiring that O-rings be removed.
  • Page 108 Section 9.3.2 “Test Port Pressure Thermocouple Gauge Calibration Procedure” on page 9-8. 11. Calibrate the 979 using the procedure described in Section 9.1 “Calibrate the 979” on page 9-1. 12. Leak check the assembly before using the 979 for testing.

  • Page 109: Section 7. The Varian Platform

    Model 979 Helium Mass Spectrometer Leak Detector Section 7. The Varian Platform The 979 uses Varian Vacuum Technologies’ Platform leak detector electronics architecture to operate the spectrometer assembly, control the mechanical and high vacuum pumps, control the valve block, and provide leak rate and system status information to the operator interface.
  • Page 110 I/O Board Quad Serial Board Figure 7-2 979 Circuit Boards in Card Cage The Turbo Controller Board is located in the front of the unit, directly under the shelf that the spectrometer tube sits on. The boards that control the Touch Panel Screen and the Controls and Bar Graph Displays are located inside the front panel.

  • Page 111: Removing The Card Stack From The Card Cage

    7.2 Removing the Card Stack from the Card Cage The circuit boards are static sensitive devices. Wear a CAUTION grounding device when accessing any circuit board. Disconnect power from the 979 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system.

  • Page 112: Removing The Connections From The Front Of The Boards

    Model 979 Helium Mass Spectrometer Leak Detector 7.2.1 Removing the Connections from the Front of the Boards To perform this procedure: 1. Remove the first 5 connectors from the front (Figure 7-3 on page 7-3) boards, that is, the Digital Interface Board, Preamplifier Board (short), Gauges Board, Power Supply Board and the Valve Driver Board.

  • Page 113: Removing The Connections From The Back Of The Boards

    7.2.2 Removing the Connections from the Back of the Boards There are 5 power connectors and two molex connectors that are visible from the back of the boards. Access to these connectors is easy from the top front or rear of the 979. To perform this procedure: 3.

  • Page 114: Removing The Cpu Board Power Connection

    7.2.3 Removing the CPU Board Power Connection You can disconnect the CPU power connection once all other connections have been removed. Once again, work from the side of the 979. To perform this procedure: 1. Back the cards out of the card cage enough so that the short boards are out of the card guides (Figure 7-7).

  • Page 115: Removing The Card Stack

    Model 979 Helium Mass Spectrometer Leak Detector 7.2.4 Removing the Card Stack To remove the card stack: 1. After all the connections have been removed, pull the card stack the rest of the way out of the cage holding both sides of the stack (Figure 7-9).

  • Page 116: Replacing A Board

    Model 979 Helium Mass Spectrometer Leak Detector 7.3 Replacing a Board To replace a board you must first remove the card stack as described in Section 7.2 “Removing the Card Stack from the Card Cage”. The location of the boards is shown in Figure 7-10.

  • Page 117: Replacing The Card Stack Into The Card Cage

    Model 979 Helium Mass Spectrometer Leak Detector 7.4 Replacing the Card Stack into the Card Cage The card stack has 11 guides. The left and right guides are slightly offset from each other with the left guides a bit closer to the front of the card cage than the right guides. This makes it easier to insert the boards.

  • Page 118: Replacing The Turbo Controller Board

    5. When the boards are part way in, stop to insert the CPU power connection. 6. Move to the front or back of the 979, reach in from the back of the card cage and lay the CPU power connection up onto the Power Supply board so you can reach it from the left side of the stack.

  • Page 119: Removing The Turbo Controller Board

    Model 979 Helium Mass Spectrometer Leak Detector 7.5.1 Removing the Turbo Controller Board Disconnect power from the 979 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system. To perform this procedure: 1. Disconnect the mains power supply and make sure all pumps are off.

  • Page 120: Installing The Turbo Controller Board

    Model 979 Helium Mass Spectrometer Leak Detector 7.5.2 Installing the Turbo Controller Board To perform this procedure: 1. Place a washer on the front of each screw. 2. Place the screws into the holes in the turbo board. 3. Place a washer on the back of each screw.

  • Page 121: Removing The Touch Screen Assembly

    7.6.1 Removing the Touch Screen Assembly The circuit boards are static sensitive devices. Wear a CAUTION grounding device when accessing any circuit board. Disconnect power from the 979 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system.
  • Page 122 Model 979 Helium Mass Spectrometer Leak Detector 7. Check to see if the connection at the touch screen assembly is labeled “This side up”. If not, label or otherwise mark it so it can be reconnected properly. 8. Pull the connection straight out.

  • Page 123: Replacing The Touch Screen Assembly

    13. Turn the leak detector on and wait for the system to be ready. 14. Allow the pumps to warm up if the detector has been off for some time. 15. Calibrate the system as described in Section 9.1 “Calibrate the 979” on page 9-1. 7-15...

  • Page 124: Removing The Control Panel Assembly

    7.6.3 Removing the Control Panel Assembly The circuit boards are static sensitive devices. Wear a CAUTION grounding device when accessing any circuit board. Disconnect power from the 979 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system.

  • Page 125: Replacing The Control Panel Assembly

    Model 979 Helium Mass Spectrometer Leak Detector Kep Nut Kep Nut Key Switch Power Connection Center Control Panel Bracket Assembly Connection Kep Nut Figure 7-15 Control Panel Assembly (Right) 5. Remove the 4 corner 8-32 kep nuts using an 11-32 nut driver (two of the corner kep nuts are not visible in this view).
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  • Page 127: Section 8

    Turbo-V 70LD pumps. Only the Turbo V70LPM is available. 8.1 Removing the Turbo Pump The turbo pump is located in the right front of the 979 (Figure 8-1). It sits up in the air supported by its connections via the manifold to the spectrometer tube and via connection to the valve block.

  • Page 128: Moving The Spectrometer Tube Assembly

    Model 979 Helium Mass Spectrometer Leak Detector To perform this procedure: Disconnect power from the 979 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system. 1. Disconnect the mains power supply and make sure all pumps are off.
  • Page 129 Model 979 Helium Mass Spectrometer Leak Detector The spectrometer tube is located in the center front of the 979 just behind the front panel (Figure 8-2). It is not necessary to remove the connectors to the Button TC, ion source, or preamplifier.

  • Page 130: Removing The Turbo-To-Spec Tube Manifold

    Model 979 Helium Mass Spectrometer Leak Detector 3. Remove the NW-25 quick clamp to disconnect the spectrometer tube from the turbo-to-spec tube manifold (Figure 8-4). NW-25 Wing Nut Wing Nut Figure 8-4 NW-25 Quick Clamp on Turbo-to-Spec Tube Manifold 4. Lift the spectrometer tube assembly up and move it to the left, away from the turbo-to-spec tube manifold.

  • Page 131: Removing The Power And Valve Block Connections

    Model 979 Helium Mass Spectrometer Leak Detector 3. Loosen and remove the NW-40 clamp at the top of the pump that connects the turbo-to-spec tube manifold to the pump (Figure 8-5). 4. Remove the centering ring, O-ring, and manifold. 5. Place the clamps, manifold, centring ring and O-ring on a clean surface.

  • Page 132: Replacing The Turbo Pump

    Model 979 Helium Mass Spectrometer Leak Detector 8.2 Replacing the Turbo Pump Before you replace the turbo pump, examine and clean all O-rings, centering rings, clamps and the turbo-to-spec tube manifold. 8.2.1 Examining and Cleaning Centering Rings, O-rings and the Manifold To perform this procedure: 1.

  • Page 133: Replacing The Turbo Pump

    Model 979 Helium Mass Spectrometer Leak Detector 8.2.2 Replacing the Turbo Pump To perform this procedure: 1. Hold the turbo pump by the top with the power connection angled out. 2. Lower the pump through the top of the chassis and position it so that the pump outlets are in line with the valve block connections.

  • Page 134: Replace The Turbo-To-Spec Tube Manifold

    Model 979 Helium Mass Spectrometer Leak Detector 8.2.3 Replace the Turbo-to-Spec Tube Manifold Refer to Figure 8-9 while performing this procedure. NW-25 Wing Nut NW-16 Wing Nut NW-40 Wing Nut Figure 8-9 Turbo-to-Spec Tube Manifold Connections To perform this procedure: 1.

  • Page 135: Replacing The Spectrometer Tube

    13. Turn the leak detector on and wait for the system to be ready. 14. Allow the pumps to warm up if the detector has been off for some time. 15. Calibrate the 979 using the procedure described in Section 9.1 “Calibrate the 979” on page 9-1.

  • Page 136: Replacing The Mechanical Pumps

    WARNING pumps. Your system may have pumps that require two people to move them safely. Disconnect power from the 979 before performing any maintenance procedure that requires physically disconnecting any part of the system. 1. Disconnect the mains power supply and make sure all pumps are off.
  • Page 137 Model 979 Helium Mass Spectrometer Leak Detector 6. To move the manifold out of the way, loosen the wing nut on the upper NW-25 clamp (Figure 8-10) that connects the manifold to the flexible pipe. Do not remove the clamp.
  • Page 138 Model 979 Helium Mass Spectrometer Leak Detector 9. If the pumps are mounted on a cart, remove the four 1/4-20 bolts (Figure 8-12). To avoid injury, use proper lifting techniques when moving WARNING pumps. Your system may have pumps that require two people to move them safely.

  • Page 139: Examining And Cleaning The Centering Ring And O-Ring

    Model 979 Helium Mass Spectrometer Leak Detector 8.3.1 Examining and Cleaning the Centering Ring and O-Ring To perform this procedure: 1. Examine the centering ring and wipe it clean using a VacuSolv wipe. Let it air dry. 2. Carefully inspect the O-ring (Figure 8-13). If it is damaged, replace it.

  • Page 140: Replacing The Mechanical Pumps

    8.4 Changing the Mechanical Pump Fluid Refer to the Mechanical Pump Operation Manual, provided with the pumps that came with your Model 979 Leak Detector. See the 979 accessory item list in this manual for the replacement oil part number.

  • Page 141: Section 9. Calibration And Manual Tuning

    9.1 Calibrate the 979 To calibrate the Model 979, the leak detector should be running and the pumps warmed up for at least 20 minutes, if the leak detector has been off for a period of more than 2 hours.

  • Page 142: Manual Tuning

    Model 979 Helium Mass Spectrometer Leak Detector 9.2 Manual Tuning To manually tune the 979, the system must be in TEST mode with the test port isolated. For additional information about running modes, refer to the Model 979 Operations Manual.
  • Page 143 Model 979 Helium Mass Spectrometer Leak Detector 8. Check the leak rate by observing the leak rate bar graph display. 9. When the maximum leak rate is found, enter that value for the REPELLER value and press OK. See the example in Table 9-1.

  • Page 144: Manual Tuning Using The Serial Port

    19. If the time for the leak rate decay is more than a few seconds, there could be a vacuum leak or the vacuum system might not be fully stabilized. If necessary, invoke the ZERO function (from Step 14) again to re-zero the 979. 9.2.2 Manual Tuning using the Serial Port Manual tuning is an advanced procedure.
  • Page 145 Model 979 Helium Mass Spectrometer Leak Detector 10. When the maximum leak rate is found, enter the same value for the REPELLER but use the INIT-REPELLER<CR> command instead of the PUT-REPELLER <CR> command (refer to Table 9-2). Because of the sensitivity of the procedure, manipulating the...

  • Page 146: Gauge Calibration Procedures

    Model 979 Helium Mass Spectrometer Leak Detector 16. Enter ZERO<CR> and check that the SPEC TUBE LED on the front of the control unit flashes while zeroing is in process. The zeroing process runs for less than five seconds. 17. When zeroing is complete, turn the leak on to expose the calibrated leak to the foreline of the turbo pump again.

  • Page 147: System Pressure Gauge Calibration Procedure

    Model 979 Helium Mass Spectrometer Leak Detector 9.3.1 System Pressure Gauge Calibration Procedure This procedure allows for calibration of the system pressure thermocouple (Button TC) gauge. Both the Vacuum and Atmospheric Calibration procedures must be performed in the order written.

  • Page 148: Atmospheric Calibration

    2. Turn the power ON to the 979 and move to the Gauge Calibration touch screen menu. 3. Place the service key (T009) into the key switch and set the key switch to the SERVICE position.

  • Page 149: Vacuum (Low Pressure) Calibration

    Model 979 Helium Mass Spectrometer Leak Detector 9.3.2.1 Vacuum (Low Pressure) Calibration To perform this procedure: 1. Verify that the leak detector is in the SYSTEM READY condition (Figure 9-3 on page 9-7) and that the test port blank-off flange cap is in place.
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  • Page 151: Section 10. Leak Checking For Reliability

    To ensure reliable testing, the 979 must be leak checked before NOTE performing testing after servicing any part of the vacuum system.
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  • Page 153: Appendix A. Assembly Drawings And Bills Of Materials

    Appendix A. Assembly Drawings and Bills of Materials Assembly Drawings and Bills of Materials (BOM) for the 979 are included in this appendix. They are included for reference purposes only and are not intended for repair. Not all parts shown on the drawings and included in the BOM can be ordered by the customer. Most of the field serviceable units are component parts, which have a separate component or kit part number.
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  • Page 169: Appendix B. 979 Com Cable

    Model 979 Helium Mass Spectrometer Leak Detector Appendix B. 979 COM Cable Table B-1 provides non-isolated RS-232 serial interface information. Figure B-1 shows the cable wiring diagram from a standard RS-232 DB-9 connection to the 979C I/O DB-37. RS-232 serial I/O connections are referenced to the chassis ground and are not isolated.
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  • Page 171: Appendix C. 979 Spare Parts List

    Model 979 Helium Mass Spectrometer Leak Detector Appendix C. 979 Spare Parts List Table C-1 979 Spare Parts Assembly Part Number Ion Source 82850302 Button TC R1266301 Preamplifier L9030301 (Std Sensitivity) R1003301 (High-Sensitivity) Thermocouple Gauge (TC), Model 531 F0472301 Spectrometer Tube Magnet Assembly...
  • Page 172 Model 979 Helium Mass Spectrometer Leak Detector Table C-1 979 Spare Parts (Continued) Assembly Part Number Maintenance Kit, Triscroll 300 Family Primary Pump PTSS0300MK* Maintenance Tool Kit, Triscroll 300 Primary Pump PTSS0300TK Oil Mist Eliminator Cartridge (Qty 2) 949-9394 Valve, Pump Isolation, NW25, 120 V 50/50 Hz...

  • Page 173: Index

    Model 979 Helium Mass Spectrometer Leak Detector Index Centering rings 5-5, 8-6, 8-13 Numerics Circuit boards 979 COM cable B-1 Card cage 7-1 Wiring diagram B-1 Installing turbo controller board 7-12 Location 7-1 About the Model 979 1-1 Power connections 7-5...
  • Page 174 Model 979 Helium Mass Spectrometer Leak Detector Manual spectube tuning screen 9-2 Manual tuning 9-2, 9-4 Digital interface board Materials needed 1-xi Location 7-2, 7-8 Mechanical pump fluid change 8-14 Displays and controls on front panel 1-1 Mechanical pumps 8-10...
  • Page 175 Model 979 Helium Mass Spectrometer Leak Detector Reassembly of spectrometer tube 5-35 pieces 5-35 Re-installing spectrometer tube 5-6 Replacing ion source 5-15, 5-36 Removing Replacing magnet assembly 5-40 Button TC 5-7 Replacing preamplifier 5-19, 5-35 Card stack from card cage 7-3...
  • Page 176 Model 979 Helium Mass Spectrometer Leak Detector Valve block coil Cleaning 4-11 Removing 4-2 Replacement 4-14 Valve driver board Location 7-2, 7-8 Valve stem Cleaning 4-13 Replacement 4-15...
  • Page 178 Varian Vacuum Technologies Sales and Service Offices Argentina Germany and Austria Taiwan Varian Argentina Ltd. Varian Deutschland GmbH Varian Technologies Asia Ltd. Sucursal Argentina Alsfelder Strasse 6 14F-16 No.77, Hsin Tai Wu Road Sec. 1, Av. Ricardo Balbin 2316 Postfach 11 14 35 Hsi Chih, Taipei Hsien 1428 Buenos Aires 64289 Darmstadt...

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