Specifications - Omega 3200 User Manual

Thermal mass flow controllers
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E.

Specifications

Series
Accuracy
(including linearity)
Repeatability
Pressure Rating
Pressure Sensitivity
Temperature Rating
Temperature
Sensitivity
Valve
Body Leak Integrity
Wetted Materials
O-Ring Material
Fitting Material
Recommended
Filtration
Compatible gases
Output Signal
External Set-point
Signal
Internal Set-point
Signal
Warm-Up Time
Integrated Display
Typical Power
Consumption
Peak Power
Consumption
Electrical
Connections
Certifications
*Specifications from 10-100% of rated flow. Linearity is best fit straight line. All calibrations
performed with air unless otherwise stated on calibration certificate.
FMA 3200
FMA 3400
±1.5% of
±1.5% of
Full Scale*
Full Scale*
Second and
third gases
±3.0% F.S.*
±0.25% Full Scale*
150 psig (10.3 bar)
±0.02% Full Scale* per psi (per 69 mbar)
Operating Range: 5 to 55ºC
Recommended Range (for best performance) : 10 to 40ºC
Storage Range: 0 to 70ºC
±0.15% F.S.* or less per ºC
Normally Closed
Positive Shut-off up to 60psig (4 bar)
1x10
Aluminum
304 Stainless Steel
316 Stainless Steel
Choose from acetal, brass, or stainless steel
20 microns or less
Optional inline filters available
Clean, dry gases compatible with wetted materials
0-5VDC, Impedance greater than 2.5 KΩ
0-5VDC, Integrated 2MΩ load
N/A
Front Panel
Adjustment
Less than 5 minutes
N/A
3½ digit
Standard: 12 VDC @ 250 mA (12.5-15 VDC)
"E" Suffix: 24 VDC @ 130 mA (22-25 VDC)
Standard: 12 VDC @ 400 mA (12.5-15 VDC)
"E" Suffix: 24 VDC @ 260 mA (22-25 VDC)
Integrated 36" (92 mm) cable, terminated with:
Standard: 6-pin Mini-DIN male (PS/2 Style)
D1 Option: 9-pin D-Sub male
D2 Option: 15-pin D-Sub male
CE Approved
89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive
FMA 3200ST
FMA 3400ST
±1.5% of
±1.5% of
Full Scale*
Full Scale*
Second and
third gases
±3.0% F.S.*
500 psig (34.5 bar)
-7
sccs of He
303 Stainless Steel
304 Stainless Steel
316 Stainless Steel
Epoxy
®
Viton
N/A
Front Panel
Adjustment
N/A
M-4271/0707, pg. 19 of 26
3½ digit

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