Zeiss EVO Series Manuals

Manuals and User Guides for Zeiss EVO Series. We have 1 Zeiss EVO Series manual available for free PDF download: Instruction Manual

Zeiss EVO Series Instruction Manual (246 pages)

Scanning Electron Microscope

Brand: Zeiss | Category: Microscope | Size: 12 MB

Table of Contents
3
About this Manual
9
Safety Instructions in this Manual
10
Typographical Conventions
11
Definition of Terms
12
Safety
13
Intended Use
13
Prevention of Accidents and of Improper Use
13
Safety Summary
14
Hazards Related to Personal Injury
14
Hazards Not Related to Personal Injury
17
Fire Risk Summary
19
Safety Equipment
20
Safety Devices
20
Protective Cover Panels
20
Column Interlock
20
Vacuum Interlock System
20
Beam Deceleration Kit Interlock System
21
Main Circuit Breaker
21
Main Shut-Off Valves
21
Safety Labels
21
At the Rear of the Electron Optical Column (with Optional Ion Pump System Only)
22
At the Rear of the Instrument
23
Inside SEM
24
Description
25
Overview
25
EVO ® MA and LS
26
Evo ® Hd
26
Control Elements
27
Smartsem ® User Interface
27
Dual Joystick
28
Optional Control Panel
29
Principle of Operation
30
Vacuum System
30
High Vacuum Mode
32
Variable Pressure Mode
33
Extended Pressure Mode
35
Pressure Ranges and Apertures
36
Specimen Stage
38
Electron Optics
39
EVO Column Optibeam Modes
41
Signal Detection
43
Principles of Detection
44
SE Detector (SE Detector)
46
VPSE G3 Detector (Optional)
51
HD)BSD Detector (Optional)
53
CL Detector (Optional)
54
STEM Detector (Optional)
55
Specification
56
Evo
56
Evo ® Hd
57
Technical Data
58
Layout and Connections
58
System Layout
59
Installation Requirements
60
Options
62
Customer Service
62
Transport and Storage
63
Transport
63
Storage
64
Installation
65
Operation
67
Switching on the SEM
67
Starting the Smartsem ® User Interface
68
Finding Your Way in the Smartsem ® User Interface
70
Showing or Hiding Toolbars
70
Showing or Hiding the Data Zone
71
Showing and Hiding a Full Screen Image
71
Using Docking Panels
72
Opening the Panel Configuration Bar
74
Obtaining a First Image
75
Preparing the Specimen Holder
76
Loading the Specimen Chamber
77
Locating the Specimen
81
Switching on the Gun
82
Switching on the EHT
83
Generating, Optimising and Saving Images
85
Generating an Image
85
Optimising the Image
87
Saving the Image
90
Using Automated or Semi-Automated Functions
91
Using the Auto Saturation Function
91
Using the Auto Gun Alignment Function
92
Using the Auto Aperture Alignment Function
93
Using the Drift Correction Function
94
Using the Sample Type Selection Function
96
Using the Image Navigation Function
98
Using the Automated Image Acquisition Function
99
Setting SEM Conditions
104
Consider the Properties of the Specimen
104
Guide to SEM Operating Parameters
105
Selecting the Operation Mode
107
Changing the Pressure Mode
109
Changing to HV Mode
109
Changing to Variable Pressure Configuration from High Vacuum Configuration
110
Changing to Extended Pressure Mode
112
Aligning Easy VP
113
Changing from Easyvp to Variable Pressure Mode
118
Changing from Easyvp to Extended Pressure Mode
118
Changing from VP Mode / EP Mode to Easyvp
119
Measuring the Specimen Current (Probe Current Monitor)
119
Setting Detection Parameters
121
Selecting a Detector
121
Using the SE Detector
122
Using the BSD Detector (Optional)
122
Other Optional Detectors
129
Imaging Wet Specimens with the Peltier Coolstage
130
Fitting the Peltier Coolstage
130
Purging the Chamber
141
Obtaining an Image in EP Mode
144
Setting SEM Parameters for Imaging the Specimen in Wet Mode
144
Using the Help Functions
146
Calling the Smartsem ® Help
146
Printing Help Texts
146
Bringing Help Texts to the Foreground
146
Calling the Context-Sensitive Help
147
Searching for a Topic
147
Using the Step-By-Step Guides
148
Getting Started
148
Frequently Used Operation Sequences
148
Calling the Short Cuts Help
149
Showing Information about Smartsem
150
Version History
150
About Smartsem
150
Finishing the Work Session
151
Tungsten Emitter
151
Lab6 Emitter
151
Closing the Smartsem ® User Interface
152
Logging off
152
Exiting
152
Switching off the SEM as a Matter of Routine
153
Changing to STANDBY Mode
153
Changing to off Mode
154
Switching off in an Emergency
155
Switching on Again after an Emergency off
155
Switching off the SEM Completely
156
Maintenance and Repair
159
Change of Consumables and Chemicals
160
Adjusting the Isolation Mounts
161
Replacing the Tip Seal of the Pre-Vacuum Pump
162
Replacing Filaments
163
Replacing Pre-Aligned Tungsten Filaments
164
Replacing Tungsten Filaments (Not Pre-Aligned) - Cleaning, Maintenance & Alignment
174
Replacing Lab6 Filaments
184
Replacing Lab6 Filaments with Tungsten Filaments
198
Basic Preventive Maintenance Performed by the Operator
215
Checking for Safe Operation
215
Cleaning up the PC
215
Initialising the Stage
215
Servicing the Pre-Vacuum Pump
216
Baking out the Gun and the Chamber
216
O-Ring Maintenance
217
Checking the Column O-Ring
217
Checking the Chamber Door O-Ring
218
Cleaning the Firing Unit
220
Cleaning the Filament Holder
223
Cleaning the Anode
224
Preventive Maintenance Performed by a ZEISS Service Representative
227
Repair
228
Replacing the Chamber Door O-Ring
228
Checking the Circuit Breakers
230
Troubleshooting
231
Shutdown and Disposal
233
Putting the SEM out of Operation
233
Disposal
233
Disposing of Solid Waste (Consumables)
233
Disposing of the SEM
234
Parts and Tools
235
Important Consumables
235
Important Spare Parts
236
Optional Software Licences
236
Tools and Accessories
236
Abbreviations
237
Glossary
239
Declaration of Conformity
241
Index
243

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Zeiss EVO Series Instruction Manual (246 pages)

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