Ulvac C30MVRT Manuals

Manuals and User Guides for Ulvac C30MVRT. We have 1 Ulvac C30MVRT manual available for free PDF download: Installation, Operation, Maintenance And Troubleshooting Instructions

Ulvac C30MVRT Installation, Operation, Maintenance And Troubleshooting Instructions

Ulvac C30MVRT Installation, Operation, Maintenance And Troubleshooting Instructions (110 pages)

Compressor Unit for Cryopump and Super Trap

Brand: Ulvac | Category: Compressor | Size: 5 MB

Table of Contents

Table of Contents
9
Compressor Unit Safety Instructions

13
- Table 1-6 Electromagnetic Environment Resistance Characteristics
  15
Disposal Considerations

17
C30Vr_Compressor Description

19
- Introduction
  19
- Compressor Model Descriptions
  19
- Figure 1-1 C30VR Compressor Models
  19
- Terminology
  20
- Cryopump System Documents
  20
- Roles of Compressor in Cryopump System
  20
C30VR Compressor Instruction Manual

20
Considerations before Installation

33
Unpacking and Inspection

49
- Compressor Carton
  49
- Shipping Carton Inspection
  49
- Unpacking
  50
- Carton Contents
  51
- Table 3-1 Carton Contents
  51
- Table 3-2 Optional Parts
  51
- Inspection of the Compressor and Accessories
  52
- Flexible Hoses and Specifications
  52
- Table 3-3 Flexible Hose Specifications
  52
Equipment Installation, Piping, and Wiring

55
Operation

69
Wiring and Piping Removal and Storage

75
Maintenance

79
Troubleshooting

89
- Problem Types
  89
- Troubleshooting Procedures
  90
- Alarm Code Descriptions
  92
Appendix A Operating Log

95
- Table A-1 Operating Log
  95
- Table B-1 Combination of C30VR Series Compressor and Cryopump/Supertrap
  97
Appendix B Combination of C30V R Compressor Unit and Cryopump/Supertrap ······ B-1

99
Appendix C C30VR Schematic Diagram

99
- Table C-1 Differences on Devices between Compressor Unit Models
  99
Appendix D C30V R Compressor Flow Diagram

105
- P.2-4 Table 2-3 "Recommended Cooling Water for Compressor
  109

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