1. Manuals
  2. Brands
  3. Sigma Manuals
  4. Controller
  5. SQC-122c
  6. User manual

Sigma SQC-122c User Manual

Thin film deposition controller
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
SQC-122c
Thin Film Deposition Controller
User's Guide
Version 2.0
© Copyright Sigma Instruments, Inc. 1999 - 2002
Sigma
instruments

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the SQC-122c and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for Sigma SQC-122c

Summary of Contents for Sigma SQC-122c

  • Page 1 SQC-122c Thin Film Deposition Controller User’s Guide Version 2.0 © Copyright Sigma Instruments, Inc. 1999 - 2002 Sigma instruments...

  • Page 2: Safety Information

    Read this manual before installing, operating, or servicing equipment. Do not install substitute parts, or perform any unauthorized modification of the product. Return the product to Sigma Instruments for service and repair to ensure that safety features are maintained. Safety Symbols...

  • Page 3: Warranty Information

    1 year from the date of shipment, when used in accordance with the instructions in this manual. During the warranty period, Sigma Instruments will, at its option, either repair or replace products that prove to be defective.

  • Page 4: Table Of Contents

    Table of Contents Chapter 1 Quick Start 1.0 Introduction...1-1 1.1 Thin Film Process Overview...1-1 1.2 System Connections...1-2 1.3 Front Panel...1-3 1.4 Rear Panel ...1-4 1.5 Installation ...1-5 1.6 Process Setup ...1-6 1.7 Depositing a Film ...1-8 Chapter 2 Operation 2.0 Introduction...2-1 2.1 Definitions...2-1 2.2 Defining a Film...2-1 2.3 Defining a Process ...2-5...
  • Page 5 Appendix A. Material Parameters B. Specifications C. I/O Connections D. Handheld Remote Controller E. Declaration of Conformity...

  • Page 6: Chapter 1 Quick Start

    The SQC-122c can also be controlled via the standard RS-232 interface and Windows control program. An optional handheld remote power control is also available. Note: The SQC-122 (color display) replaces our original (monochrome) SQC-122.

  • Page 7: Front Panel

    Chapter 1 1.2 Front Panel SoftKeys SoftKeys Provide access to instrument operations and setup menus. The functions of the SoftKeys change to adapt to different operations and are displayed on the left of the screen. Control Used to adjust values and select menu items. Pushing the Knob control knob stores the current setting and moves to the next.

  • Page 8: Rear Panel

    Sensor 1 Sensor 2 Sensor 1 & 2 Connects to quartz crystal sensor remote oscillator. Output 1 & 2 Connects the SQC-122c output to your evaporation supply control input. I/O (1-8) Connects 8 relays and 8 digital inputs to external equipment for process control.

  • Page 9: System Connections

    Oscillator Contains the electronics to operate the quartz crystal. Total cable length to the crystal should be under 40”. Sensor Input Connects the oscillator to the SQC-122c input. Lengths up to BNC Cable 100’ are acceptable. Control Output Connects the SQC-122c output to the evaporation source’s BNC Cable control voltage input.

  • Page 10: Installation

    Chapter 1 1.5 Installation : Care should be exercised to route SQC-122c cables as far as practical from ARNING other cables that carry high voltages or generate noise. This includes other line voltage cables, wires to heaters that are SCR-controlled, and cables to source power supplies that may conduct high transient currents during arc down conditions.

  • Page 11: Process Setup

    If no Quick Setup option is visible, no processes are defined in the SQC-122c. In that case, press Film Menu, then scroll the cursor until an <Empty> film is selected. Press Create to create a new film, then press Main Screen. Now press Process Menu, then Create, then Edit.
  • Page 12 Chapter 1 Edit Mode To edit a setting in any menu, turn the control knob to scroll to the desired setting, then press the Edit SoftKey. In Edit mode, the cursor moves to the setting value and the SoftKey functions change to show: Next: Store the parameter and move to next parameter for editing.

  • Page 13: Depositing A Film

    Chapter 1 1.7 Depositing a Film If you have followed this Quick Start chapter, you are ready to deposit a film. Note: You can simulate the steps below, without actually depositing a film, by going to the System Parameters Menu and selecting Simulate Mode ON. Simulate mode is useful for testing processes before applying power to the evaporation supply.
  • Page 14 Chapter 1 Quick Start This page left blank for your notes.

  • Page 15: Chapter 2 Operation

    To define a new film, scroll to <Empty> and press Create. A new Film# is added to the list of existing films (you can use the SQC-122c setup software later to assign descriptive film names). Press Edit to display the parameters for this...
  • Page 16 Factor for the selected material now, but it is unlikely those values are wrong. To add a material name that is not listed, you must use the SQC-122c setup software. Once the material is selected, set up the source parameters. Scroll to Output and select the SQC-122c rear panel output that is connected to the source evaporation supply.
  • Page 17 Chapter 2 The PID parameters control the response of the SQC-122c to changes in deposition rate. These values are unique to each deposition chamber setup, and to a lesser extent to each material. The P Term is proportional (or gain), the % process rate change divided by the % input power change.
  • Page 18 Set Shutter Delay and Capture to zero to disable this feature. If the SQC-122c is unable to maintain the desired deposition rate (for example, out of material or a bad sensor), one of three actions is possible. Keep trying (Ignore), set power to zero to halt deposition (Stop), or maintain constant power (Hold) and extrapolate thickness from the last good rate reading.

  • Page 19: Defining A Process

    (or <Empty>) will be displayed. To define a new process, scroll to <Empty> and press Create. A new Process# is added to the list of existing processes (use the SQC-122c setup software to assign descriptive process names). Press Select, then Edit to display the sequence of layers and films that comprise the selected process.
  • Page 20 Operation Initial Rate and Final Thickness are the main process setpoints for this layer of material. Keep in mind that the SQC-122c zeroes thickness at the beginning of each layer. It is not a cumulative value. Time Setpoint and Thickness Limit are arbitrary values that will activate a relay when they are reached.

  • Page 21: Sensor Setup

    Max Frequency slightly above the nominal value, to say 6.1MHz, will avoid this problem with no effect on instrument accuracy. Min Frequency is the frequency where the SQC-122c will flag a sensor as bad. For a 6MHz crystal, the Min Frequency is typically 5 MHz.
  • Page 22 Chapter 2 Operation Sensor Tooling, also found in the System Params menu, adjusts for the difference in measured deposition rate between the sensor and the substrate being coated. Substrate Substrate Tooling T o o l i n g O v e r 1 0 0 % U n d e r 1 0 0 % In the illustration above (left), the sensor will measure less rate or thickness than is actually deposited on the substrate because of its positioning.
  • Page 23 Once the sensor parameters are set, test your sensor setup to assure reliable readings at the SQC-122c. A typical single sensor setup is shown below: On the SQC-122c, press Next Menu until the Sensor Info option is shown, then press Sensor Info.

  • Page 24: Source Setup

    Output 1, set Scale 1 to the control voltage that corresponds to 100% output on the source supply. The SQC-122c uses 0 volts as 0% output, and the programmed value as 100% output. Scale values from –10 volts to 10 volts are possible.

  • Page 25: Running A Process

    Note: It is best (and safest!) to place the SQC-122c in Simulate mode when a process is first run. If the bottom SoftKey does not show Start Simulate, press System Params and turn Simulate ON.
  • Page 26 Manual control. Manual/Auto indicates Manual control; a key press changes to Automatic mode. In Manual mode, the SQC-122c immediately starts the deposition phase for the current layer, whether the process was stopped or running. However, the PID loop is disabled and output power is controlled by the front panel control knob.
  • Page 27 Start mode was programmed as Manual, you will need to press the Start Layer SoftKey now to start the layer. Note: Don’t confuse Manual and Auto Start mode with the Manual/Auto SoftKey. Manual Start is a Process setup parameter that tells the SQC-122c to wait for operator intervention before starting a Layer. THICKNESS(kA)
  • Page 28 Chapter 2 THICKNESS(kA) Next M e n u 100.0 Zero 50.0 Auto / Manual Start Nxt Layer Restart Layer Process : My Process 1 Abort Layer: 1 of 4 Film : Film1 Restart Layer repeats the stopped layer, beginning with preconditioning. Start Nxt Layer skips the remainder of the current layer and immediately starts the next layer.

  • Page 29: Loop Tuning

    Continue to turn the control knob until a Rate(A/s) above 0 is shown. Again, verify that the power supply output agrees with the SQC-122c Power(%) reading. If the readings don’t agree, check your wiring and process setup. In particular, verify that the System Parameters output scale agrees with your power supply input specifications.
  • Page 30 Chapter 2 Operation about 10% overshoot, lower the P Term. If the time to reach PWR is very slow, increase the P Term. A lower I Term will increase response time, a higher value will eliminate ringing and setpoint deviations. It is unlikely you will need any D Term. Continue to Start the process and adjust PID until steady-state response is smooth and the step response is reasonably controlled.

  • Page 31: Troubleshooting

    SQC-122c, and verify that the SQC-122c is properly grounded. Also check that the crystal is seated properly in the sensor head. Swap the sensor to the other SQC-122c input. If both SQM-122 inputs show zero or unstable readings, the problem is almost certainly a wiring or sensor problem.
  • Page 32 Chapter 2 Operation When the frequency reading is stable, reconnect the source supply. Start the deposition process in Manual mode with 0% output. The % Life readings should remain stable. Slowly raise the % Output until a rate reading is displayed above the graph. As material is deposited on the crystal, the % Life reading should remain stable, or drop slowly and consistently.
  • Page 33 Chapter 2 Operation This page left blank for your notes. 2-19...

  • Page 34: Chapter 3 Menus

    Chapter 3 3.0 Introduction SQC-122c operation during deposition is accomplished by pressing one of the six SoftKeys along the left of the display. Five menus provide access to all programmable and operating functions: Main The Main Menu is displayed at power up. It provides the...
  • Page 35 Chapter 3 3.1 Main Menu The default, power-up Main Screen display is shown below. THICKNESS(kA) Next M e n u 100.0 Quick Setup 50.0 Process M e n u Film M e n u System Params Process : My Process 1 Start Layer: 1 of 25 Film : Aluminum...
  • Page 36 Chapter 3 The Main Screen SoftKeys undergo subtle changes based on the current process status. The table below describes the function of each of the possible SoftKeys on the Main Screen. Next Displays additional Main Menu options as described in Section Menu 3.2.
  • Page 37 Auto / Toggles between Auto and Manual power control. When Manual Auto/Manual is shown, output power is set by the SQC-122c to achieve the programmed deposition rate. When Manual/Auto is shown, the control knob sets the output power. Next Cycles through options for the main display.

  • Page 38: Main Menu

    Chapter 3 3.3 Quick Setup Menu The Quick Setup Menu provides access to the most commonly adjusted parameters for the current process and layer. THICKNESS(kA) THICKNESS(kA) THICKNESS(kA) Main Exit to Exit to 0.000 THICKNESS(kA) Screen Main Main Exit to My Process 1 -> Layer 1 -> Aluminum Main Scroll Processes with Knob Prev...
  • Page 39 Chapter 3 Menus Quick Setup parameters are described below: Initial Rate: The beginning rate of deposition for this layer. Final Thickness: The desired final thickness of this layer. The deposition phase of this layer will end when this thickness is reached. P Term: Sets the gain of the control loop.

  • Page 40: Process Menus

    Chapter 3 3.4 Process Menus There are several tiers of Process Menus. The first menu (shown below) selects the current process. The current process is the process that is ready to run, and also the process that is selected for editing. THICKNESS(kA) Main 0.000...
  • Page 41 Chapter 3 The second Process Menu shows the sequence of layers that will be deposited in the current process. THICKNESS(kA) Main Screen My Process 2 -> Layer 2 -> Aluminum Layer Prev Menu Layer 1 Layer 2 Edit Cut / Paste Insert Layer...
  • Page 42 Chapter 3 Each layer consists of a film (i.e. a material), plus the deposition rate and thickness that are desired for this layer. The Layer Edit Menu provides access to these layer parameters: THICKNESS(kA) Exit to Main My Process 2 -> Layer 2 -> AluminumOxide Parameter Prev M e n u...
  • Page 43 Chapter 3 A description of each parameter on the Layer Edit Menu follows: Initial Rate: The beginning rate of deposition for this layer. Final Thickness: The desired final thickness of this layer. The deposition phase of this layer will end when this thickness is reached. Time Setpoint: Sets an arbitrary time, after deposition begins, when the time setpoint relay is activated.

  • Page 44: Film Menus

    Chapter 3 3.5 Film Menus Each film has certain characteristics that determine how it should be deposited. The Film Menus allow you to set parameters that regulate the deposition of each film in a certain process. THICKNESS(kA) Main 0.000 Screen My Process 1 Scroll Films with Knob Prev...
  • Page 45 Chapter 3 The material to be deposited is the most significant film parameter. However, a film definition also includes the setup parameters shown below: THICKNESS(kA) Exit to Main My Process 1 Parameter Prev Menu P Term I Term Edit D Term Sensor 1 Sensor 2 Film...
  • Page 46 Chapter 3 The Film Conds SoftKey displays these additional film conditioning settings: (Refer to section 2.2 for definitions). THICKNESS(kA) Exit to Main My Process 1 Parameter Prev Menu Ramp1 Power Ramp1 Time Edit Soak1 Time Ramp2 Power Ramp2 Time Soak2 Time Feed Power Ramp Time Feed Time...
  • Page 47 Chapter 3 The Deposit Controls SoftKey displays these additional film settings: (Refer to section 2.2 for deposition control definitions.) THICKNESS(kA) Exit to Main Current: Process 1 Parameter Prev Menu Shutter Delay Capture Edit Control Error Setting Error Rate Sampling Setting Accuracy Based Exit to Main Returns to the Main Menu.
  • Page 48 Chapter 3 Menus A description of each film parameter follows: P Term: The proportional term sets the gain of the control loop. High gains yield more responsive (but potentially unstable) loops. Try a value of 50, then gradually increase/decrease the value to respond to step changes in rate setpoint. I Term: The integral term controls the time constant of the loop response.
  • Page 49 Chapter 3 Disabled 30.0% 25.0% 20.0% 15.0% Note: The Crystal Quality setting is very sensitive to PID loop tuning. It is best to leave Crystal Quality disabled until you are confident of your process and PID settings. Crystal Stability: As material is deposited on the crystal, the frequency normally decreases.
  • Page 50 Chapter 3 Feed: The feed phase holds output power at the level and time required to wire feed new material. Idle: Idle power ramps output power back to zero, or holds the material at a state that is ready for deposition (usually the same as Ramp 2 power). Shutter Delay: It is often desirable to obtain deposition control before the substrate shutter opens.

  • Page 51: System Parameters Menu

    Chapter 3 3.6 System Parameters Menu The System Parameters Menu contains settings that affect the basic operation of the SQC-122c. System parameters generally pertain to the physical setup of your vacuum system equipment. THICKNESS(kA) Exit to Main My Process 1 -> Layer 1 -> Aluminum...
  • Page 52 Min/Max Frequency: The frequency values for the quartz crystal sensors used as inputs to the SQC-122c. The maximum frequency should be set to the frequency of a new crystal, typically 6MHz. Sensor readings outside the min/max values cause an error.
  • Page 53 Password: If password is enabled, this parameter sets the sequence of SoftKeys to press to enter menus. Press the desired sequence to set the password. Holding down the top and bottom switch while powering up the SQC-122c sets the password to “1111.”...

  • Page 54: I/O Setup

    Chapter 3 3.7 I/O Setup The I / O Setup SoftKey displays a menu allowing you to map the eight digital inputs and the eight digital outputs. THICKNESS(kA) Exit to Main My Process 1 -> Layer 1 -> Aluminum Parameter Prev Menu Input 1...
  • Page 55 Chapter 3 In the I/O Setup Menu, any number of “events” can be mapped to the eight digital inputs and eight relay outputs. Options are set by selecting a relay or input and then turning the control knob to select the desired setting. The following explains each event: Relays Source 1 Shutter Source 2 Shutter...
  • Page 56 Chapter 3 Menus This page left blank for your notes. 3-23...

  • Page 57: Chapter 4 Options

    4.1 Option Card No option cards are available for the SQC-122c, although the rear panel has locations for an expansion card. To expand the SQC-122c, the unit can be upgraded to an SQC-222. Contact Sigma for information on this factory-only upgrade.

  • Page 58: Material Parameters

    A. Material Parameters Material Density Aluminum Aluminum Oxide Antimony Arsenic Barium Beryllium Bismuth Bismuth Oxide Boron Cadmium Cadmium Selenium Cadmium Sulfide Cadmium Teluridium Calcium Calcium Fluoride Carbon Diamond Carbon Graphite Cerium Fluoride Cerium Oxide Chromium Chromium Oxide Cobalt Copper Copper Sulfide Copper Sulfide B Copper Sulfide A Dysprosium...

  • Page 59: Specifications

    B. Specifications Measurement Number of Sensors Frequency Range Frequency Accuracy Frequency Resolution Rate Accuracy Rate Resolution Thickness Accuracy Thickness Resolution Measurement Period Source Number of Sources Control Voltage Resolution Digital I/ O Digital Inputs Functions Input Rating Relay Outputs Functions Relay Rating General Specifications Mains Power Supply...
  • Page 60 Display Graphs Readouts Process Parameters (a Process is a sequence of layers) # Processes # Films # Layers (total all processes) Layer Parameters (Layer is a Film, plus these values) Initial Rate Final Thickness Time Setpoint Thickness Limit Start Mode # Rate Ramps Rate Ramp Start Rate Ramp Time...
  • Page 61 C. I/O Connections A 25 pin D-sub connector, located on the rear of the SQC-122c, provides Input/Output connections. Refer to Section 3.6 for relay and input functional assignments. Inputs can be activated either by connecting to a switch and shorting to Ground, or they can be driven by a TTL compatible signal.
  • Page 62 Appendix A Y adapter cable can be used to provide compatibility with older (non color) models of the SQC-122, as shown below. Contact Sigma for information on purchasing this adapter, or other custom I/O cables.
  • Page 63 To use the handheld controller, attach the cable from the handheld controller to the Remote jack on the SQC-122c front panel. Select a Process using the SQC-122c front panel SoftKeys. Press Next Menu until the Auto/Manual SoftKey is displayed. Press Auto/Manual to change to Manual power mode (SoftKey shows Manual/Auto).

  • Page 64: Ec Declaration Of Conformity

    EN 61000-4-4 EN 61000-4-6 ENV 50204 and complies with the Essential Health and Safety Requirements. Gary L. Halcomb President Sigma Instruments Fort Collins, CO 80524 USA Deposition Rate Controller SQC-122c Low Voltage Directive Electromagnetic Compatibility Directive Safety of Electrical Equipment for...

Table of Contents