Shimadzu TMP-3203MC Manuals

Shimadzu TMP-3203MC Manuals

Manuals and User Guides for Shimadzu TMP-3203MC. We have 1 Shimadzu TMP-3203MC manual available for free PDF download: Instruction Manual

Shimadzu TMP-3203MC Instruction Manual

Shimadzu TMP-3203MC Instruction Manual (62 pages)

Magnetically Levitated Turbo Molecular Pump

Brand: Shimadzu | Category: Water Pump | Size: 1 MB

Table of Contents

Copyrights and Disclaimers
2
Precautions for Safe Operation
3
Explanation of Label
6
Location of Label
6
Installation Precautions
7
Part Replacement
7
Air Cooled Turbo Molecular Pump
8
Conditional Warranty
8
Scope of the Warranty
8
Warranty of Repaired or Replacement Parts
8
Exemption from the Warranty
8
Disposal of Products and Parts
9
Limitation of Liability
9
Table of Contents
10
Table of Contents
11
Section 1 OUTLINE and DESCRIPTIONS
14
Outline
15
Descriptions
16
- Outside Drawing of Pump Main Unit
  16
  - Outside Drawing of Series of TMP-3203
    16
  - Outside Drawing of TMP-3403LMC
    18
- Standard Accessories
  19
Section 2 IDENTIFICATION and FUNCTION
20
Pump Main Unit
21
Pump Construction
23
Principle of Turbo Molecular Pumping
23
Pump Main Unit
27
- Specification of Series of TMP-3203
  27
- Specification of TMP-3403LMC
  28
Standards Fulfilled
29
Installation
31
Connection of the Pump to the Power Supply Unit
39
Interlock for Vacuum System
40
Outline
43
- Introduction
  43
Start-Up Preparation
44
Start-Up
44
- Start-Up Sequence
  44
Shutting down
45
Baking Operation
47
Turbo Molecular Pump Return Request
53
Turbo Molecular Pump Decontamination
54
Touch-Down Bearing Replacement
54
Check of the Rotor Blades
54
Section 9 TROUBLESHOOTING
56
Vacuum Pressure Rise
57
Abnormal Noise And/Or Vibration
57

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