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MKS 246C Manuals
Manuals and User Guides for MKS 246C. We have
1
MKS 246C manual available for free PDF download: Instruction Manual
MKS 246C Instruction Manual (92 pages)
Single Channel Power Supply/Readout
Brand:
MKS
| Category:
Power Supply
| Size: 0 MB
Table of Contents
Table of Contents
5
Safety Information
11
Symbols Used in this Instruction Manual
11
Symbols Found on the Unit
12
Table 1: Definition of Symbols Found on the Unit
12
Safety Procedures and Precautions
13
Sicherheitshinweise
15
In dieser Betriebsanleitung Vorkommende Symbole
15
Am Gerät Angebrachte Symbole
16
Tabelle 2: Definitionen der am Gerät Angebrachten Symbole
16
Sicherheitsvorschriften und Vorsichtsmaßnahmen
17
Informations Relatives À la Sécurité
19
Symboles Utilisés Dans Ce Manuel D'utilisation
19
Symboles Apparaissant Sur L'appareil
20
Tableau 3 : Définition des Symboles Apparaissant Sur L'appareil
20
Mesures de Sécurité Et Mises en Garde
21
Información sobre Seguridad
23
Símbolos Usados en el Manual de Instrucciones
23
Símbolos que Aparecen en la Unidad
24
Tabla 4 : Definición de Los Símbolos que Aparecen en la Unidad
24
Procedimientos y Precauciones de Seguridad
25
Chapter One: General Information
27
Introduction
27
How this Manual Is Organized
28
Customer Support
28
Chapter Two: Installation
29
How to Unpack the Type 246 Unit
29
Unpacking Checklist
29
Interface Cables
30
System Interface Cables
30
Table 5: System Interface Cables
30
Generic Shielded Cables
31
Product Location and Requirements
32
Operating Environmental Requirements
32
Safety Conditions
32
Setup
33
Dimensions
33
Figure 1: Front Panel Dimensions
33
Figure 2: Rear Panel Dimensions
33
Figure 3: Side Panel Dimensions
34
Power Requirements
35
Mounting Instructions
35
System Configurations
36
Manual Set Point Control
36
Figure 4: Internal Set Point Control Setup - Ratio Flow Control
37
External Set Point Control
38
Figure 5: External Set Point Control Setup - Individual Flow Control
38
Figure 6: External Set Point Control Setup - Ratio Flow Control
39
Remote Flow Control
40
Electrical Information
41
Power up
41
Grounding
41
Fuses
41
Table 6: Fuse Information
41
Line Voltage
42
Connectors
43
Interface Connector J9
43
Table 7: Interface Connector J9 Pinout
43
MFC Connector J8
44
Table 8: MFC Connector J8 Pinout
44
Microjack Connectors
45
Chapter Three: Overview
47
General Information
47
Flow Signal Path
47
Set Point Signal
48
Front Panel Controls
49
Digital Panel Meter
49
Flow Control Switch
49
Figure 7: Front Panel Controls
49
Zero Control
50
Set Point Source Switch
50
Set Point Control
50
Rear Panel Controls
51
Gauge Factor Scaling Control Potentiometer
51
AC Line Cord Connector
51
Figure 8: Rear Panel Controls
51
Fuse Holder
52
MFC Connector J8
52
Interface Connector J9
52
Flow out Microjack Connector
52
Set Point In/Out Microjack Connector
52
Underside Control
53
Line Voltage Selector Switch
53
Side Panel Control
53
Decimal Point Selector Dipswitches
53
Gauge Factor Scaling Control
54
Scaling Control Factor
55
Table 9: MFC Gauge Factors
55
Scaling Control Potentiometer
56
Figure 9: Scaling Control Potentiometer - Initial Setting
56
Gas Correction Factor
57
How to Calculate the GCF for Pure Gases
58
How to Calculate the GCF for Gas Mixtures
59
Labels
61
Serial Number Label
61
Figure 10: Serial Number Label
61
Chapter Four: Operation
63
How to Setup the System
63
Table 10: Type 246 Unit Setup - Front Panel Controls
63
Figure 11: Gauge Factor Scaling Control Potentiometer - Example Setting
66
Manual Flow Control
70
How to Manually Control Individual Gas Flows
70
How to Manually Control Ratioed Gas Flows
71
External Set Point Control
72
How to Control Individual Gas Flows with an External Set Point
72
How to Control Ratioed Gas Flows with an External Set Point
73
Table 11: External Controller - Front Panel Controls
73
Remote Flow Control
76
How to Control Gas Flow with TTL Logic
76
Chapter Five: Maintenance and Troubleshooting
77
General Information
77
Maintenance
77
How to Clean the Unit
77
How to Replace the Fuses
77
Figure 12: Fuse Holder Clip
78
Troubleshooting
79
Power Supply
79
Flow Amplifiers
80
Internal +5 V Voltage Reference
81
Digital Panel Meter
81
Set Point Buffer and Flow Switching Circuit
82
Appendix A: Product Specifications
83
Appendix B: Model Code Explanation
85
Model Code
85
Appendix C: Gas Correction Factors for Commonly Used Pure Gases
87
Table 12: Gas Correction Factors for Pure Gases
87
Index
91
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