J.A. Woollam alpha-SE Manuals

Manuals and User Guides for J.A. Woollam alpha-SE. We have 1 J.A. Woollam alpha-SE manual available for free PDF download: Hardware Manual

J.A. Woollam alpha-SE Hardware Manual (96 pages)

Spectroscopic Ellipsometer

Brand: J.A. Woollam | Category: Measuring Instruments | Size: 1.92 MB

Table of Contents
5
Safety Instructions
9
Message Boxes
9
General Safety Instructions
9
Environmental Operating Range
10
Quick Guide
11
Manual Overview
11
Quick Setup
13
Unpack and Assemble the Instrument
13
Install, Activate, and Run Completeease Software
13
Check the Beam and Calibrate the System
14
Collect Data
15
System Installation
17
Alpha-SE Specifications
17
Measurement Capabilities
17
Data Analysis Capabilities
17
Facilities Requirements
18
Unpacking the Hardware
19
Opening the Shipping Container
19
Attaching the Sample Chuck
20
Releasing the Z-Stage Shipping Lock
21
Installing the Software
23
Before Installation
23
Running the SETUP Program
23
Operating Hardware
28
Activating the Software
29
Connecting the Alpha-SE
29
Verifying the Alpha-SE Driver Installation
30
Running the Completeease Software
31
Learning Data Analysis
32
Initial System Checks and Calibration
33
Initial System Operation
33
Alpha-SE System Components
33
Changing the Angle of Incidence (AOI)
34
Checking Beam Alignment at 90
36
Checking Signal Intensity
37
Low Intensity
37
High Intensity
37
Checking Straight-Through SE Data Accuracy
38
Measuring the Reference Wafer
39
S-T Baseline
42
Off-Sample Baseline
44
Calibrating the Angle of Incidence
46
Powering down
50
Data Collection
51
Measurement Tab Overview
51
Off-Sample Measurements
53
Measuring a Sample
53
Straight-Through Measurements
55
Mueller-Matrix Measurements
57
Hardware Tab
61
Hardware
61
Re-Initialize
61
Park Z-Stage
61
Signal
62
Display
62
Max. Sig. Display
62
Z-Stage Scan
62
Calibration
63
S-T Baseline
63
Off-Sample Baseline
63
Angle Offsets
64
Show Logs
64
Hardware and Error Logs
64
Camera
65
Show Image Dialog
65
Mark Beam Position
66
Illumination on
67
Routine Test Measurement
67
Measure
68
Show Results
68
Configuration Files
68
Hardware.cnf
68
Privileges.cnf
69
Alpha-Cal.cnf
69
Motorinfo.cnf
69
Completeease.cnf and Completeeasehard.cnf
69
Accessories
71
Focusing
71
Tips When Using Focus Probes
71
How to Test Focus Probe Alignment
72
Before Attempting to Align Focus Probes
72
Aligning Focus Probes
73
Camera
74
Installation
75
Liquid Cell
76
Transmission Mount
77
Manual Translation
77
QCM Adaptor
78
Service and Troubleshooting
79
Lamp Change Procedure
79
Upgrading Completeease
80
Troubleshooting Guide
80
Creating a Debug File
82
Appendices
83
Spectroscopic Ellipsometry
83
Ellipsometry Advantages
84
Intensity Measurements
84
Mueller-Matrix Measurements
85
Determining Sample Properties (Data Analysis)
86
Film Thickness
86
Ultra-Thin Films (<10Nm)
88
Optical Constants
88
Additional References
89
Conventions Used in this Manual
89
Tabs
90
Screen Panels
90
Buttons
90
Short-Cut Guide
91
Contacting J.A. Woollam Co
93
Index
95

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J.A. Woollam alpha-SE Hardware Manual (96 pages)

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