J.A. Woollam M-2000U Ellipsometer System Manuals

Manuals and User Guides for J.A. Woollam M-2000U Ellipsometer System. We have 1 J.A. Woollam M-2000U Ellipsometer System manual available for free PDF download: Hardware Manual

J.A. Woollam M-2000U Hardware Manual (178 pages)

Spectroscopic ellipsometer

Brand: J.A. Woollam | Category: Measuring Instruments | Size: 10.81 MB

Table of Contents
5
Safety Instructions
11
Message Boxes
11
General Safety Instructions
11
Environmental Operating Range
12
Hardware Description
13
System Configurations
13
System Components
13
Source Units
13
Receiver Units
18
Fiber Optic Cables
19
Detector/Lamp Power Control Module
20
Electronics Control (EC) Module
20
Computer
21
Surge Suppressor
21
USB Camera (Optional)
21
Auto-Angle ESM-300 Base Unit
21
Power Control Module (Optional)
22
Installation
23
System Assembly
23
Preliminary
23
Base Assembly
25
AC Wiring
29
Cabling
31
Computer
33
Rack Mount Table Option
33
System Enclosure Option
36
Lamp Installation (if Applicable)
41
Electronics Control (EC) Module Setup
42
Configuring the EC Module
42
Operator Computer Setup
43
Software Installation
44
Windows Network Setup
44
USB Camera
46
High Performance Mode
49
Preparing the System for Use
51
Power up Procedure
51
Conventions Used in this Manual
52
File Organization & Manipulation
53
Operation
53
System Alignment
54
Sample Alignment
57
System Check (Calibration)
57
System Alignment (with Manual Tip/Tilt)
58
Source Unit Alignment
59
Receiver Unit Alignment
61
Verify Signal
63
System Alignment (with Automated Tip/Tilt)
66
Source Unit Alignment
68
Receiver Unit Alignment
69
Verify Signal
71
Sample Stage Alignment
74
Lookdown Detector Alignment
77
Sample Alignment (with Manual Tip/Tilt)
82
Sample Alignment (with Automated Tip/Tilt)
84
System Check (Calibration)
85
Evaluating Calibration Results
87
Instrument Shutdown
88
Data Acquisition
89
Acquiring Ellipsometric Data
89
Recipes
92
Prompt for Recipe Components
93
Creating New Recipes
94
Creating New Acquisition Parameters
95
Creating New Analysis Models
95
Using a Recipe
95
Data Types
97
Standard
97
Mueller Matrix
98
Reflection Intensity
99
Routine Test Measurements
101
Initial Setup
101
Viewing Results
102
Focusing Optics
103
General Overview
103
Installation
104
Standard Receiver Unit
105
Alignment Camera Receiver Unit
108
Lens Correction
110
Sample Alignment & System Check with Focusing Optics
111
Data Acquisition with Focusing Optics
113
Removal
114
Automated Translation (Optional)
115
General Operation
115
Scan Patterns
116
Substrate Dimensions
117
Point List and Point Commands
117
Grid and Line Fill
119
Test Scan
120
Alignment Position
121
Save
121
Rotator Option
122
Wobble Correction
123
Sample Camera
125
Illumination Control
125
Marking the Measurement Beam Position
126
Field of View Calibration
134
In Situ
137
Scheduled Maintenance
139
D2 & QTH Lamps (M-2000D, DI, U, & UI) in XLS-200
139
Lamp Installation/Replacement
139
Lamp Alignment
141
Xe Lamp (M-2000X, XI, X-210, & XI-210) in FLS-860
141
Lamp Installation/Replacement
142
Lamp Alignment
145
Arc Lamp Disposal
147
Mirror Replacement
147
QTH Lamp (M-2000V & VI) in FQTH-100
148
Lamp Installation/Replacement
148
Lamp Alignment
150
Optical Fiber
151
Cleaning
151
Performance Checks
153
Calibration Wafer & Straight-Through Measurement
153
System Check
155
Verify Sample Alignment
155
Verify Signal/Lamp Intensity
156
Verify System Alignment
156
Angle of Incidence Offset Correction
157
System Calibration
157
Overview
158
System Calibration
158
Wavelength Calibration
163
Troubleshooting
165
General Procedures
165
Debug File
165
Common Screen Error Messages
166
Phase Sensor Error Message
166
Polarizer Homing Error Message
167
Spectrometer Is Not Scanning
167
Communication Problems
167
General Problems
168
Software Problems and Error Messages
169
Calibration Problems
169
Signal Screen Problems
169
Lamp and Light Problems
170
USB Camera
171
Specifications
173
Components
173
Electronics Control (EC) Module
173
Detector / Lamp Power Supply Modules
174
Power Control Module
176
Surge Suppressor
178
Computer
178
Monitor
178
Environmental Operating Range
178

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J.A. Woollam M-2000U Ellipsometer System Manuals

J.A. Woollam M-2000U Hardware Manual (178 pages)

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