Fischione 1060 SEM Mill Manuals

Manuals and User Guides for Fischione 1060 SEM Mill. We have 1 Fischione 1060 SEM Mill manual available for free PDF download: Instruction Manual

Fischione 1060 SEM Mill Instruction Manual (224 pages)

Brand: Fischione | Category: Laboratory Equipment | Size: 3 MB

Table of Contents
3
Warnings, Cautions, and Legal Notices
9
Legal Notices
10
Security Warning and Disclaimer
10
Warranty
13
Period
13
Details
13
Exclusions
13
Limitation
14
Using this Manual
15
Model 1060 SEM Mill Introduction
17
Features
17
Specifications
21
Selecting a Location and Unpacking the Instrument
23
Assessing Utility and Environmental Requirements
23
Gasses
24
Electrical Power
24
Networking
24
Ventilation
24
Unpacking the Instrument
25
Setting up the Instrument
27
Setting up the Basic Edition Instrument
27
Setting up the Premium Edition Instrument
31
Setting up the Instrument Accessories
33
Installing the Microscope Post
33
Attaching the Stereo Microscope
34
Attaching the High Magnification Microscope with CCD Camera
35
Attaching the High Magnification Microscope with Image Capture
38
Positioning the Stack Light
39
Setting up the Cold Trap
40
Model 1060 SEM Mill Accessory Kit
41
Using the Interface Controls
43
Basic Edition
43
Premium Edition
43
Starting the Instrument
44
Turning off the Instrument
44
Restarting the Instrument after an Incorrect Shut down
45
Controlling the Ion Beam Angle
45
Basic Edition
45
Premium Edition
46
Sample Rotary Orientation
46
Using the Touch Screen
47
Entering Data
47
Touch Screen Tab Organization
48
Main Tab
48
Beams Tab
51
Termination Tab
52
Motion Tab
53
Utility Tab
56
General Tab
56
Imaging Tab
57
Accessing Utility Tab Service Functions
58
Motion Tab
59
Laser Tab
61
Ion Guns Tab
62
System Tab
63
About Tab
65
Using the Operator Console Application
67
Launching the Operator Console Application
68
From the Computer Desktop
68
From the Windows Start Menu
69
Working with User Accounts
69
Logging into a User Account
69
Opening the User Manager Application
70
Understanding User Account Types and Privileges
72
Custom Privileges
73
Operator
73
User
73
Superuser
73
Administrator
73
Service
74
Managing Users
74
Adding a User Account
74
Editing an Existing User Account
78
Deleting a User Account
78
Working with the Operator Console Interface
78
Entering Numeric Values
79
Using the Selector
79
Using the Keyboard
79
Using Keyboard/Mouse Shortcuts
79
Keyboard Shortcuts
79
Mouse Shortcuts
80
Viewing Tooltips
80
Understanding the Operator Console Tab Organization
80
Tab Organization
80
Instrument Graphic
82
Timer, Load Lock, and Sample Position
84
Active Recipe Area
85
Status Bar
86
Main Tab
87
Displays and Controls Specific to the Main Tab
87
Imaging Tab
93
Displays and Controls Specific to the Imaging Tab
93
Tracking Tab
94
Displays and Controls Specific to the Tracking Tab
94
Data Logging Tab
95
Displays and Controls Specific to the Data Logging Tab
95
Service Tab
97
Additional Tabs
99
State Machine
99
Setting
99
Calibration
99
Tracking
99
Logging
99
Displays and Controls Specific to the Service Tab
100
Setup Tab
100
Displays and Controls Specific to the Setup Tab
101
Info Tab
104
Displays and Controls Specific to the Info Tab
105
Defining Projects, Samples, and Protocols
106
Setting the Current Project
107
Defining and Saving Recipes
108
Understanding Recipe Basics
108
Documenting Recipes
110
Saving a New Recipe
110
Editing an Existing Recipe
110
Defining Process Cycles
112
Organizing Recipes
114
Working with the Instrument Logs
115
Log Types
116
Process Log
116
Instrument Log
118
Operation Log
118
Managing Logs
119
Recording Instrument Use
120
User Tracking
120
Project Tracking
121
Component Tracking and Data Logging
121
Component Tracking
122
Component Tracking Set up
122
Viewing Tracking Data
123
Tracking Notification
124
Tracking Data Access
124
Component Data Logging
125
Data Logging Component Set up
125
Viewing Component Logging Data
127
Exporting Component Tracking and Logging Data
130
Managing Data
131
Location and Format of Data
131
Archiving Data
132
Data Management Support Functions
133
Exiting the Operator Console Application
133
From the Service Tab
134
From the Setup Tab
134
Loading Samples
135
Rotary Orientation
135
Loading a Sample
135
Unloading the Sample from the Load Lock
139
Troubleshooting
141
Ion Source Troubleshooting
141
General Troubleshooting
141
Verify the Process Gas Delivery
143
Verify the Mass Flow Controllers
144
Distinguishing between Board and Mass Flow Controller Failures
144
Check the Ion Source for Short Circuits
146
Pin Outs
146
Verify the High-Voltage Output
147
Determining the High-Voltage Board Revision Level
147
Understanding the Orientation of High-Voltage Power Supply Connectors
148
Understanding High-Voltage Outputs in Premium Edition Instruments
149
Troubleshooting Motion System Issues
150
Z Axis Motion Faults
150
Z Axis Height Adjustment and Beam Alignment
151
Troubleshooting Vacuum System Issues
152
Troubleshooting Pressure Transducer Errors
153
Service
155
Entering Service Mode
155
Service Mode: Touch Screen
155
Exiting Service Mode: Touch Screen
156
Service Mode: Operator Console Application
156
Exiting Service Mode: Operator Console Application
156
Venting the Chamber
156
Venting the Chamber: Touch Screen
157
Returning the Chamber to Vacuum: Touch Screen
157
Venting the Chamber: Operator Console Application
157
Returning the Chamber to Vacuum: Operator Console Application
158
Cover Removal
159
Ion Source Cover Plate
159
Cover Plate Removal
159
Cover Plate Reinstallation
160
White (Left) Cover
160
White Cover Removal
160
White Cover Reinstallation
166
Blue (Right) Cover
166
Blue Cover Removal
166
Blue Cover Reinstallation
169
O-Ring and Stage Cleaning
170
Replacing the O-Ring
172
Ion Source Cleaning
173
Ion Source Removal
174
Cleaning the Magnet Assembly
176
Reassembling the Magnet Assembly
183
Cleaning the Focus Assembly
186
Reinstalling the Ion Source and Aligning the Focus Cup
190
Beam Calibration
193
Basic Edition System Beam Calibration
194
Premium Edition System Beam Calibration
201
Recalibrating the Pirani Gauge or Adjusting the Offset
208
Pirani Gauge Manual Calibration
208
Adjusting the Pirani Gauge Offset
209
Changing the Load Lock Atmospheric Pressure Threshold
213
Reseating the Screen Cable to Fix White Screen at Start up
214
Correcting a Mismatch between the Light Source Setting and Actual Output
215
Backing up System Software
216

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Fischione 1060 SEM Mill Manuals

Fischione 1060 SEM Mill Instruction Manual (224 pages)

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