Fischione 1010 ION MILL Precision Manuals

Manuals and User Guides for Fischione 1010 ION MILL Precision. We have 1 Fischione 1010 ION MILL Precision manual available for free PDF download: Instruction Manual

Fischione 1010 ION MILL Instruction Manual (78 pages)

Brand: Fischione | Category: Microscope | Size: 2 MB

Table of Contents
2
Safety
5
Background
6
Ion Milling Theory
6
Model 1010 Features
6
Ion Sources
7
Basic Procedure for Sample Preparation and Ion Milling
7
System Overview
8
Sample Chamber
9
Vacuum System
10
Gas Flow
11
Water Flow
11
Sample Cooling Capability (Optional)
11
Endpoint Detection Capability (Optional)
11
Visual Monitoring
12
Control System and Software
12
Specifications
12
Installation and Setup
13
Warnings, Cautions, and Notes
13
Assessing Initial Condition
13
Unpacking and Inspecting
13
Accessories
14
Connections
15
Process Gas
15
Exhaust Gas
16
Water
16
Microscope Installation
16
Process Control Computer
17
Laser Installation (Optional)
18
Power Connections
18
For US Application
18
For Non-US Application
18
To Change Operating Voltage
19
Operation
20
Basic Startup Procedure
20
Dewar Bakeout
21
Laser Calibration
22
Loading TEM Specimens
23
Specimen Cooling (Optional)
24
Ion Milling
25
Insert Specimen
26
Microscope
26
Endpoint Determination (Optional)
26
Set Milling Parameters
26
Set Data Logging Options
28
Save Recipe
28
Start Milling
29
View Data
31
Basic Shutdown Procedure
33
Maintenance
34
Preventive Maintenance Schedule
34
Cleaning the Air Filters
34
Changing the Fuses
35
Opening the Enclosure
36
Enclosure Removal
36
Window Cleaning
37
Front Access Door Window
37
Bottom Light Window
38
Cleaning O-Rings
40
Lamp Replacement
40
Ion Source Maintenance
42
Disconnect Gas Line
43
Remove Ion Source Cartridge
43
Remove Cathode
45
Remove Anode and Extractor
45
Inspect Components
46
Clean Components
47
Service Ion Source Body Components
47
Ultrasonically Clean and Inspect Components
49
Reassemble Ion Sources
49
Verify Electrical Connections
49
Replace Ion Source
50
Attach Gas and Electrical Connections
50
Check Leaks
50
Start up Ion Source
51
Ion Source Alignment
51
Adjust Source Alignment
51
Verify Alignment
52
Dewar Maintenance
52
Remove Dewar
52
Change Zeolite® Desiccant
55
Install Dewar
56
Evacuate Dewar Wall Space
56
Chamber and Specimen Stage Cleaning
56
Stage Maintenance
56
Ion Source Flange
60
Pirani Gauge Tube
62
Bottom Plate
63
Mass Flow Controllers
64
Verify Electronics
64
Evaluate Flow
65
Replace Mass Flow Controller
65
Leak Detection
66
High Pressure
66
Vacuum
67
Turbomolecular Vacuum Pump
68
Reinstall Enclosure
68
Back Panel
68
Troubleshooting
69
Diagnosis Chart
69
Error Messages
71
Laser
72
Spare Parts and Consumables
73
References
75

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