1. Manuals
  2. Brands
  3. Fischione Manuals
  4. Laboratory Equipment
  5. 1060 SEM Mill
  6. Instruction manual

Fischione 1060 SEM Mill Instruction Manual

Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
SEM Mill
Instruction
Manual
E.A. Fischione Instruments, Inc.
9003 Corporate Circle
Export, PA 15632
724-325-5444
www.fischione.com
Part Number 041-0557-02 Revision 03 November 2012

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the 1060 SEM Mill and is the answer not in the manual?

Questions and answers

Summary of Contents for Fischione 1060 SEM Mill

  • Page 1 SEM Mill Instruction Manual E.A. Fischione Instruments, Inc. 9003 Corporate Circle Export, PA 15632 724-325-5444 www.fischione.com Part Number 041-0557-02 Revision 03 November 2012...
  • Page 2 Model 1060 SEM Mill Instruction Manual Software version 1.6.0 E.A. Fischione Instruments, Inc.

  • Page 3: Table Of Contents

    Using this Manual ..........7 Model 1060 SEM Mill Introduction ....... . 9 Features .
  • Page 4 Model 1060 SEM Mill Accessory Kit ........
  • Page 5 Model 1060 SEM Mill Instruction Manual Superuser ............65 Administrator .
  • Page 6 Model 1060 SEM Mill Instruction Manual Editing an Existing Recipe ......... . 102 Defining Process Cycles .
  • Page 7 Model 1060 SEM Mill Instruction Manual Understanding High-Voltage Outputs in Premium Edition Instruments ... 141 Troubleshooting Motion System Issues ........142 Z Axis Motion Faults .
  • Page 8 Model 1060 SEM Mill Instruction Manual Beam Calibration Worksheet ........209 Index .

  • Page 9: Warnings, Cautions, And Legal Notices

    Model 1060 SEM Mill Instruction Manual Warnings, Cautions, and Legal Notices Important. Please read these instructions completely before installing, operating, or servicing the instrument. Electrical Shock Hazard. Removing the instrument enclosure can expose the user to potentially harmful voltages. DO NOT OPERATE THE INSTRUMENT WITH THE COVERS REMOVED.

  • Page 10: Legal Notices

    • No part of this document may be copied or distributed by any means without the express written permission of E.A. Fischione Instruments, Inc. • E.A. Fischione Instruments, Inc. assumes no liability for any direct, indirect, or consequential damages arising from use not described in this manual.
  • Page 11 By using the functionality, you also agree to all terms set forth in the following Disclaimer. • Disclaimer. Under no circumstances shall E.A. Fischione Instruments, Inc., or affiliates, agents, or contractors thereof, be liable for any direct, indirect, incidental, special, punitive, or consequential damages that result in any way from your use of the secondary network interface.
  • Page 12 Model 1060 SEM Mill Instruction Manual Software version 1.6.0 E.A. Fischione Instruments, Inc.

  • Page 13: Warranty

    • Failure due to use under improper conditions. • Failure due to power supply voltage/frequency other than specified by Fischione Instruments or due to power failure. • Corrosion or deterioration of the tubing (vacuum or gas) due to impurities contained in gas supplied by the customer.

  • Page 14: Limitation

    In no event shall Fischione Instruments be liable for any direct, indirect or consequential damages of any nature, or losses or expenses resulting from any defective product or the use of any product.

  • Page 15: Using This Manual

    Model 1060 SEM Mill Instruction Manual Using this Manual The Model 1060 SEM Mill is available in two configurations: Basic Edition and Premium Edition. This manual covers both configurations. While most of the content for operating either configuration is the same, the user interface is different.
  • Page 16 Model 1060 SEM Mill Instruction Manual Software version 1.6.0 E.A. Fischione Instruments, Inc.

  • Page 17: Model 1060 Sem Mill Introduction

    Ion accelerating voltages are programmable and can be continuously varied from as high as 6.0 keV for rapid milling to as low as 100 eV for final sample polishing. The Model 1060 SEM Mill is equipped with Faraday cups for measuring ion beam current.
  • Page 18 The vacuum level is measured with a Pirani gauge and is continuously indicated. • Sample mounting and positioning. The Model 1060 SEM Mill accommodates a wide range of sample sizes and configurations for applications such as bulk milling, electron backscatter diffraction (EBSD), semiconductor preparation, as well as traditional slope cutting and cross-sectional polishing.
  • Page 19 Model 1060 SEM Mill Instruction Manual • Precise angle adjustment. With the sample stage fixed in position, the ion sources are tilted to provide the desired milling angle. Tilt angles are continuously adjustable in the range from 0° to +10°.
  • Page 20 Model 1060 SEM Mill Instruction Manual Software version 1.6.0 E.A. Fischione Instruments, Inc.

  • Page 21: Specifications

    Model 1060 SEM Mill Instruction Manual Specifications Model 1060 SEM Mill Ion sources • Two TrueFocus ion sources • Variable energy (100 eV to 6.0 keV) operation, continuously adjustable • Beam current density up to 10 mA/cm • Choice of single or dual ion source operation •...
  • Page 22 Model 1060 SEM Mill Instruction Manual Model 1060 SEM Mill Enclosure Weight: 161 lb (73 kg) Dimensions: Basic Edition: 26.7 in. (67.8 cm) W x 14.6 in. (37.1 cm) H (to top of cabinet) x 29.0 in. (73.7 cm) H (to top of microscope) x 19.2 in. (48.8 cm) D Premium Edition: 42.0 in.

  • Page 23: Selecting A Location And Unpacking The Instrument

    If a high magnification microscope is attached to the ion mill, the work space should be free from other equipment that may cause vibrations; vibrations may cause imaging difficulties. Assessing Utility and Environmental Requirements The Model 1060 SEM Mill has the following utility and environmental requirements: • Gasses on page 16 •...

  • Page 24: Gasses

    Model 1060 SEM Mill Instruction Manual Gasses Gas Gas Tank Instrument Customer type Pressure Fitting Supplied Process 20 to 30 psi .25 in. tube connection; Gas source, regulator, and † Argon, 99.999%  tubing to instrument ® Swagelok (ultra high purity)

  • Page 25: Unpacking The Instrument

    Model 1060 SEM Mill Instruction Manual The oxygen concentration in the locations where the liquid Nitrogen is stored and/or used should be above 19.5% Warning. Liquid Nitrogen can cause asphyxia (suffocation), as well as severe eye and skin burns. Use and store liquid Nitrogen in a well-ventilated area. Ensure that the oxygen concentration of the area where the instrument is located remains above 19.5%.
  • Page 26 Model 1060 SEM Mill Instruction Manual Software version 1.6.0 E.A. Fischione Instruments, Inc.

  • Page 27: Setting Up The Instrument

    25 Setting up the Basic Edition Instrument The Model 1060 SEM Mill Basic Edition instrument set-up is required for both Basic and Premium Edition instruments. If your facility is installing a Premium Edition instrument, complete the Basic Edition instrument set up first, then continue to Setting up the Premium Edition Instrument on page 23.
  • Page 28 Model 1060 SEM Mill Instruction Manual Connect the supplied 8 mm tubing to the roughing pump. Connect the opposite end of the 8 mm tubing to the back of the instrument. Connect the roughing pump AC power cord to the receptacle on the instrument labeled ROUGH PUMP.
  • Page 29 Model 1060 SEM Mill Instruction Manual Connect the control gas supply line to the control gas supply. See Gasses page 16 for a listing of the gasses appropriate for use as a control gas and specifications. Connect the control gas supply to the 0.25 in.
  • Page 30 Model 1060 SEM Mill Instruction Manual Plug the load lock light cable into the jack on the instrument labeled LIGHT. If you are installing a Model 1060 SEM Mill Premium Edition, continue to Setting up the Premium Edition Instrument on page 23.

  • Page 31: Setting Up The Premium Edition Instrument

    Model 1060 SEM Mill Instruction Manual Setting up the Premium Edition Instrument Complete the steps for Setting up the Basic Edition Instrument on page 19. Unpack the computer and monitor. Confirm that computer power voltage selector is set to the proper line voltage.
  • Page 32 Model 1060 SEM Mill Instruction Manual Connect the ethernet cable between the instrument and the computer's RJ45 receptacle, which is labeled INSTR. Remove the shipping battery isolator from the supplied keyboard batteries and install the batteries into the wireless keyboard.

  • Page 33: Setting Up The Instrument Accessories

    Read the Security Warning and Disclaimer on page 2 to learn more about the use of the Model 1060 SEM Mill over a network. Setting up the Instrument Accessories Installing the Microscope Post The microscope post (part number 041-0023) is required for installing any of the following Model 1060 SEM Mill microscope options: •...

  • Page 34: Attaching The Stereo Microscope

    Model 1060 SEM Mill Instruction Manual To install the microscope post: Thread the microscope post into the hole located in the white (left) instrument cover. Use a flat-blade screwdriver to tighten the post. Attaching the Stereo Microscope The stereo microscope's (part number 041-0330) working distance is sized for viewing the sample at the milling position.

  • Page 35: Attaching The High Magnification Microscope With Ccd Camera

    Model 1060 SEM Mill Instruction Manual Turn the bracket wheel clockwise until the microscope is held firmly in place. Attaching the High Magnification Microscope with CCD Camera The High Magnification Microscope with CCD (part number 041-0445) is designed to view the sample when the sample is at the load/unload position in the load lock.
  • Page 36 Model 1060 SEM Mill Instruction Manual On the back of the instrument, identify the power supply labeled MIC LIGHT PWR and insert the power supply's small plug into the port labeled 12VDC. Plug the power end of the power supply into one of the LINE VOLTAGE receptacles.
  • Page 37 Model 1060 SEM Mill Instruction Manual Connect the other end of the S Video cable to the monitor side panel S-VIDEO port. Use the monitor remote control to turn on the monitor and set it to use the S Video input: Press POWER.

  • Page 38: Attaching The High Magnification Microscope With Image Capture

    Model 1060 SEM Mill Instruction Manual Attaching the High Magnification Microscope with Image Capture The High Magnification Microscope with Image Capture (part number 041-0334) is attached to the top of the instrument. This optional accessory is available for Premium Edition systems only.

  • Page 39: Positioning The Stack Light

    Model 1060 SEM Mill Instruction Manual Connect the camera’s USB cable to the camera. Connect the other end of the USB cable to the back of the computer. Positioning the Stack Light The optional stack light (part number 041-0406) is shipped with the light affixed to the back of the instrument, but in a horizontal position.

  • Page 40: Setting Up The Cold Trap

    Model 1060 SEM Mill Instruction Manual Light Meaning System is in a fault condition; system operation cannot continue until the fault is cleared. Yellow System is unavailable because it completing a user initiated task, such as placing the chamber at vacuum.

  • Page 41: Model 1060 Sem Mill Accessory Kit

    If you will be starting a milling process shortly, you can purge the gas while you are waiting for the temperature to stabilize. Model 1060 SEM Mill Accessory Kit The Model 1060 SEM Mill Accessory Kit (part number 041-0553) ships with the following additional accessories: Part Number...
  • Page 42 Model 1060 SEM Mill Instruction Manual Part Number Description Part Illustration Mounted Sample Holder Assembly 041-0413 Quantity: • 041-0127 Mounted Sample Holder: 1 • 041-0414 Screw: 4 (plus 4 spares) • 500-0752 Screw Socket: 4 (plus 1 spare) • 500-3022 Ball-Point Hex Key: 1...

  • Page 43: Using The Interface Controls

    Model 1060 SEM Mill Instruction Manual Using the Interface Controls Basic Edition On a Basic Edition system, the user interacts with instrument in the following areas: • Power switch. See Starting the Instrument on page 36 and Turning off the Instrument on page 36.

  • Page 44: Starting The Instrument

    Model 1060 SEM Mill Instruction Manual Starting the Instrument The instrument power is controlled by the power switch, which is located on the back panel of the instrument. To turn the power on: Press on the power switch. Power cord not shown in illustration.

  • Page 45: Restarting The Instrument After An Incorrect Shut Down

    Model 1060 SEM Mill Instruction Manual Press Hold Camber. Press on the power switch. Restarting the Instrument after an Incorrect Shut Down If the recommended shut-down procedure was not followed, do the following to restart the instrument: To restart the instrument following an incorrect shut down: •...

  • Page 46: Premium Edition

    Model 1060 SEM Mill Instruction Manual A T is engraved on the knob to indicate the ion source is in the top range of its travel (the ion beam impinges the top of the sample). The knob is engraved with extra numbers, which indicates that the ion source is aimed at the bottom (B) of the sample.

  • Page 47: Using The Touch Screen

    Model 1060 SEM Mill Instruction Manual Using the Touch Screen The touch screen controls include a mix of buttons, check boxes, and numeric values. Pressing a button or selecting/deselecting a check box activates or deactivates that control. Entering Data There are two methods of entering data for controls that require a numeric value: •...

  • Page 48: Touch Screen Tab Organization

    Model 1060 SEM Mill Instruction Manual Touch Screen Tab Organization The touch screen is organized in the following tabular format: • Main Tab, see page 40. • Beams Tab, see page 43. • Termination Tab, see page 44. • Motion Tab, see page 45.
  • Page 49 Model 1060 SEM Mill Instruction Manual The touch screen’s Main tab offers the following controls: Control  Action  Default Setting Name or Use Setting Range START/STOP/ Press START to begin a milling operation using the parameters defined START —...
  • Page 50 Press to change the position of the shutter. The shutter can be opened Open — Shutter at any time to view the interior of the chamber. Fischione recommends that the shutter be closed during milling to reduce the amount of sputtered material that accumulates on the viewing window. Sample Height Displays the calculated height of the sample holder and sample from —...

  • Page 51: Beams Tab

    Model 1060 SEM Mill Instruction Manual Beams Tab Use the Beams tab to set the ion source parameters. The touch screen’s Beams tab offers the following controls: Control  Action  Default Name or Use Setting Range Enable Left Source...

  • Page 52: Termination Tab

    Model 1060 SEM Mill Instruction Manual Control  Action  Default Name or Use Setting Range Angle (Left) Enter the left ion source beam angle percentage. For 0 to 10 Basic Edition instruments, be sure to enter the same value that you set manually.

  • Page 53: Motion Tab

    Model 1060 SEM Mill Instruction Manual The touch screen’s Termination tab offers the following control: Control  Action  Default Name or Use Setting Range Time Limit Click to place a check mark in the Time Limit check box, Deselected which enables you to set the length of the milling cycle.
  • Page 54 Model 1060 SEM Mill Instruction Manual The touch screen’s Motion tab offers the following controls: Action  Control Default Name or Use Setting Range Sample Select one of the following sample rotation angles: None — Rotation • None: Sample does not rotate during milling.
  • Page 55 Model 1060 SEM Mill Instruction Manual Control Action  Default Name or Use Setting Range Speed Select the speed at which the stage rotates. Press set to apply the new 3 rpm 1 to 6 setting. Offset Enter the vertical offset position of the sample with respect to the 0.0 mm...

  • Page 56: Utility Tab

    Model 1060 SEM Mill Instruction Manual Utility Tab The Utility tab presents additional tabs: • General tab. See General Tab on page 48. • Imaging tab. See Imaging Tab on page 49. Additional service function tabs can be viewed by entering a password. See...

  • Page 57: Imaging Tab

    Model 1060 SEM Mill Instruction Manual The touch screen’s Utility tab | General tab offers the following controls: Control  Action  Default Name or Use Setting Range Instrument status Displays the status of the instrument’s various subsystems, — —...

  • Page 58: Accessing Utility Tab Service Functions

    Model 1060 SEM Mill Instruction Manual The touch screen’s Utility tab | Imaging tab offers the following control: Default Control Name Action or Use Setting Range Illuminator field 0 to 100 Direct enter or use to select the percentage of light intensity.

  • Page 59: Motion Tab

    Model 1060 SEM Mill Instruction Manual Press Utility to display the Utility tab. Touch your finger or the stylus to the box in the lower right of the touch screen to select it. Enter the password using the keypad. The Utility tab will expand to display the available standard tabs, as well as special service controls.
  • Page 60 Model 1060 SEM Mill Instruction Manual In normal operation, the rotary position of the stage is homed when the stage moves to the chamber position and when the stage moves to the load position. The touch screen’s Utility tab | Motion tab offers the following controls: Control ...

  • Page 61: Laser Tab

    Model 1060 SEM Mill Instruction Manual Control  Action  Default Name or Use Setting Range Right Gun Enter the angle of the right ion source. 0° -10 to +10 Press set to apply the value entered in the Right Gun field.

  • Page 62: Ion Guns Tab

    Model 1060 SEM Mill Instruction Manual The touch screen’s Utility tab | Laser tab offers the following controls: Control  Action  Default Name or Use Setting Range Laser output Displays the laser output in mV as detected by the photodetector —...

  • Page 63: System Tab

    Model 1060 SEM Mill Instruction Manual The touch screen’s Utility tab | Ion Guns tab offers the following controls: Control  Action  Default Name or Use Setting Range Ion source adjust The display shown above is the default Adjust screen. To Adjust —...
  • Page 64 Model 1060 SEM Mill Instruction Manual The touch screen’s Utility tab | System tab offers the following controls: Control  Action  Default Name or Use Setting Range Recalibrate Screen Press to recalibrate the touch screen. See the instructions below. —...

  • Page 65: About Tab

    Model 1060 SEM Mill Instruction Manual Wait 10 seconds. Turn the instrument AC power on. See Starting the Instrument on page 36. The screen will now prompt the user to touch a cross hair on the screen. Use the stylus to touch the center of the cross hair (you cannot use your finger tip for screen calibration).
  • Page 66 Model 1060 SEM Mill Instruction Manual The touch screen’s About tab offers the following information: Control  Action  Name or Use Instrument Displays the: information • Software version, for example, “Operator Console v1.6.2.” • Embedded control software version, for example, “Control System v1.6.2.”...

  • Page 67: Using The Operator Console Application

    Model 1060 SEM Mill touch screen interface. The Model 1060 SEM Mill is controlled through the touch screen, which interfaces with the instrument’s embedded control system. Users can successfully perform milling operations using the touch screen interface. The Operator Console application, however, offers more features and increased functionality than what is available through the touch screen interface.

  • Page 68: Launching The Operator Console Application

    Model 1060 SEM Mill Instruction Manual tabs). A description of the displays and controls available on each tab are included in this section. • Defining Projects, Samples, and Protocols on page 98 This section explains how to assign “context” to milling operations through the use of project, sample, and protocol designations.

  • Page 69: From The Windows Start Menu

    The instrument software applications and associated software are available from the Windows Start menu: Press the Windows Start menu icon and display All Programs. Select Fischione Instruments | Premium Edition Software | Operator Console. The Operator Console application opens. Exiting the Operator Console Application on page 125.

  • Page 70: Opening The User Manager Application

    Model 1060 SEM Mill Instruction Manual To log in as a different user: Press Log In. The Log In dialog opens. Enter your user name and password and then press OK. You are now logged in under a different user account.
  • Page 71 The User Login dialog opens. — From the Windows Start menu Press the Windows Start menu icon and display All Programs. Select Fischione Instruments | Utilities | User Manager. The User Login dialog opens. Enter your user name and password and then press Login.

  • Page 72: Understanding User Account Types And Privileges

    The Operator and Service account types are not listed on the User Manager list of user accounts. The Operator account is the default account and has the same privileges as the User account. The Service account is reserved for Fischione Instruments’ service personnel or for your facility’s service personnel working under the direction of Fischione Instruments’...

  • Page 73: Custom Privileges

    Model 1060 SEM Mill Instruction Manual Custom Privileges Two types of custom privileges are available to all users and are displayed on the Custom tab: • Can edit recipes • Can edit process parameters When a new user account is added, the system administrator may choose to add the custom privileges to the account.

  • Page 74: Service

    • Access diagnostic and configuration functions • Perform tests and modify the operating characteristics of the instrument (this should only be done under the guidance of Fischione Instruments’ service personnel) Service users’ access should not be used on a day-to-day basis for operating the instrument.
  • Page 75 Model 1060 SEM Mill Instruction Manual The user is added to the list of users in the left column of the User Manager application and is moved from the Add User field to the Delete User field. In addition, the Name and Password fields become editable. The new account was assigned a User account by default, without custom privileges.
  • Page 76 Lab Technician. Enter the user’s password in the Password field, if desired. Account passwords are optional; however, Fischione Instruments recommends passwords for all user levels above the User account type. In addition, the User Manager application log in requires the user to have a password.
  • Page 77 Model 1060 SEM Mill Instruction Manual By default, a Superuser has the privileges of a User (as well as additional privileges); however, it is not necessary to check both the User and Superuser check boxes. If you check the Superuser check box only, the Superuser will still retain User account privileges.

  • Page 78: Editing An Existing User Account

    Model 1060 SEM Mill Instruction Manual Until Save Changes is pressed, the User Manager application may be closed without altering the user database. Editing an Existing User Account To edit an existing user account: Select an existing user name from list of user accounts on the left side of the User Manager account.

  • Page 79: Entering Numeric Values

    Model 1060 SEM Mill Instruction Manual Entering Numeric Values For those controls that require the selection of a numeric value, the Operator Console offers two options. • Using the Selector on page 71 • Using the Keyboard on page 71...

  • Page 80: Mouse Shortcuts

    Model 1060 SEM Mill Instruction Manual Mouse Shortcuts To page quickly through any of the interface’s tab sets, place the cursor on a tab and turn the mouse wheel. Stop turning the wheel when the tab you wish to view is displayed.
  • Page 81 Model 1060 SEM Mill Instruction Manual The instrument graphic. This area is a visual representation of the instrument operation and is displayed at all times. The instrument graphic can be changed to display the instrument operation in a text format from the Service tab.

  • Page 82: Instrument Graphic

    Model 1060 SEM Mill Instruction Manual Instrument Graphic The instrument graphic displays the current status of the Model 1060 SEM Mill. Depicted in the image are the load lock, chamber, shutter, stage, sample, ion sources, and ion beams. In addition, values associated with the selected instrument operations are displayed.
  • Page 83 Fischione Instruments recommends that the above settings be selected on the working side of the tab, before the recipe is activated. If you do not have sufficient account privileges, you will not be able to change the instrument graphic settings for a predefined recipe.

  • Page 84: Timer, Load Lock, And Sample Position

    Model 1060 SEM Mill Instruction Manual Component Message Chamber Chamber At Vacuum, as well as the Pirani Gauge reading, for example, 3.8E-04. Stage and Sample • Rotate Homing (if the sample is being rotated to a specified position) • Stage Position (mm) •...

  • Page 85: Active Recipe Area

    Model 1060 SEM Mill Instruction Manual The displays and controls are: Display/ Type of Control Display Name Control Action Remaining/ Radio buttons • Select Elapsed to see the time that has elapsed since the current milling process started. Elapsed • Select Remaining to see the time that is remaining of the current milling process.

  • Page 86: Status Bar

    Model 1060 SEM Mill Instruction Manual The displays and controls in this area include: Control/ Type of Display Display/ Name Control Action START/STOP Button • Press START to start the milling process defined in the active recipe area. • Press STOP to stop the milling process.

  • Page 87: Main Tab

    Model 1060 SEM Mill Instruction Manual Display  Information  Name Displayed Project The name of the project. If no project was selected, the field is blank. Sample The name of the sample. If no sample was selected, the field is blank.
  • Page 88 Model 1060 SEM Mill Instruction Manual Software version 1.6.0 E.A. Fischione Instruments, Inc.
  • Page 89 Model 1060 SEM Mill Instruction Manual The displays and controls specific to the Main tab are: Control/ Type of Control Display Display/ Default Setting Group Name Control Action Setting Range Sequence Buttons The sequence selection functionality allows the user to edit —...
  • Page 90 Model 1060 SEM Mill Instruction Manual Control/ Type of Control Display Display/ Default Setting Group Name Control Action Setting Range Cycle Button To add a process cycle to the recipe: — — Use the cycle Start control to select the step that will be used for the cycle (this is the step that will be repeated for multiple iterations).
  • Page 91 Model 1060 SEM Mill Instruction Manual Control/ Type of Control Display Display/ Default Setting Group Name Control Action Setting Range Options Rotation Offset Scrollable or Select the angular offset from the normal sample position for 0° -180 to +180 direct enter field milling with rocking or no motion.
  • Page 92 Model 1060 SEM Mill Instruction Manual Control/ Type of Control Display Display/ Default Setting Group Name Control Action Setting Range Cancel Button If you select a step and then change the parameters of the If no change is — step, press Cancel to reject the change.

  • Page 93: Imaging Tab

    Model 1060 SEM Mill Instruction Manual Control/ Type of Control Display Display/ Default Setting Group Name Control Action Setting Range Button — — Save Press Save to select a recipe file to overwrite. The Save Recipe window opens; select an existing recipe file from the directory and then press OK.

  • Page 94: Tracking Tab

    Model 1060 SEM Mill Instruction Manual Displays and controls specific to the Imaging tab are: Control/ Type of Control Display Display/ Default Setting Group Name Control Action Setting Range Imaging Show Button Press Show to open the Imaging Console application.

  • Page 95: Data Logging Tab

    Model 1060 SEM Mill Instruction Manual Controls and indicators specific to the Tracking tab are: Control Type of Display  Display Name Control Action Refresh Button Press Refresh to update the display with the most recent data. The data is automatically refreshed every 10 seconds.
  • Page 96 Model 1060 SEM Mill Instruction Manual Displays and controls specific to the Data Logging tab are: Control Type of Display Display Name Control Action Refresh Button Press Refresh to display the most recent data. Stop Button Select a tracked component from the component drop-down menu, then press Stop to stop data logging for the selected component.

  • Page 97: Service Tab

    Model 1060 SEM Mill Instruction Manual Service Tab The components of the Model 1060 SEM Mill are listed on the Service tab of the Operator Console. The Service tab is only visible to users with Service privileges. The following content is displayed on all tabs: •...
  • Page 98 Operator Console Service tab (for example, press Diagnostics). If the message count (both send and receive) remains at 0 (zero), then the Operator Console and the embedded control system are not communicating; contact Fischione Instruments’ service department for assistance. • Current: State.

  • Page 99: Additional Tabs

    Model 1060 SEM Mill Instruction Manual Additional Tabs Beneath the current state, position, value, and condition displays are tabs. Depending upon the component, the following tabs may be active: State Machine. The state machine, which is the top level of a system or subsystem, can be in one of a finite number of states.

  • Page 100: Displays And Controls Specific To The Service Tab

    Changes at this level should be done only by or under the direction of Fischione Instruments’ service personnel. Press Update to make the changes that were entered in the Configuration Update field. If you want to make the...

  • Page 101: Displays And Controls Specific To The Setup Tab

    Model 1060 SEM Mill Instruction Manual • Status bar Tab Organization on page 72 for information on this content. Displays and Controls Specific to the Setup Tab Displays and controls specific to the Setup tab are: Control/ Type of Display ...
  • Page 102 Press Enable Basic to share control between the Operator — — Console and the touchscreen control. Fischione Instruments does not recommend this for general use. This functionality is intended for use by service personnel for maintenance or troubleshooting. Event Logs...
  • Page 103 Model 1060 SEM Mill Instruction Manual Control/ Type of Control Display  Display/ Default Setting Group Name Control Action Setting Range Production Set Folder Button Production recipes are listed in the Recipe drop-down menu on — — Recipes the Main tab.

  • Page 104: Info Tab

    Press Archive to archive the user database and preferences. — — Archiving Set Location Button The default location for archive files is: C:\opt\Fischione\. — — To change the location: Press Set Location to open the Select Archive Folder window. Use the window’s navigational controls to select a folder where the archives will be stored.

  • Page 105: Displays And Controls Specific To The Info Tab

    About Button Press to refresh the Info tab display. User Online Help Link Click Online Help to open the Model 1060 SEM Mill online help in Manuals a separate window. Events Instrument Link Click Instrument to display the Instrument log.

  • Page 106: Defining Projects, Samples, And Protocols

    Model 1060 SEM Mill Instruction Manual Control/ Type of Control Display Display/ Group Name Control Description Instrument Users Link Click Users to display the Usage Tracking by User log. Usage Instrument Projects Link Click Projects to display the Usage Tracking by Project log.

  • Page 107: Setting The Current Project

    Model 1060 SEM Mill Instruction Manual The third-level identifier, protocol, can be used for documentation purposes if a formal processing protocol is being used on the sample. For organizations using formal identification of samples, such as, a laboratory information management system (LIMS) or chain of custody, a bar code scanner (not supplied) may be connected to the computer and used to input project and sample identifiers.

  • Page 108: Defining And Saving Recipes

    Model 1060 SEM Mill Instruction Manual The project name may be entered directly or by selecting a previously defined project from the drop-down menu. Unprivileged users are only able to select from the drop- down menu. Select or enter the Sample and Protocol information and then press OK to assign the specified context.
  • Page 109 Model 1060 SEM Mill Instruction Manual The settings or parameters for milling steps The New Step group of controls generate new steps. Pressing any of the buttons in this group immediately creates a new step in the working recipe. The working recipe field contains the list of steps in the current working recipe.

  • Page 110: Documenting Recipes

    Model 1060 SEM Mill Instruction Manual Documenting Recipes Recipes are stored as text files on the computer (or network location, if specified) and can be reused or edited. Only users with the appropriate privileges can create, edit, or overwrite recipes.
  • Page 111 Model 1060 SEM Mill Instruction Manual Open an existing recipe by selecting it from the Recipe drop-down menu or by using the Open button. The recipe steps are displayed in the working recipe field. Edit the recipe steps: — Add new steps using the New Step group of controls.

  • Page 112: Defining Process Cycles

    Model 1060 SEM Mill Instruction Manual — Add a comment to a recipe step by right-clicking on the step and selecting Comment from the context menu. The Edit Step Comment dialog opens. Enter the comment and press OK to save the comment with the recipe. The recipe step comment is displayed next to the recipe step number above the working recipe field.
  • Page 113 Model 1060 SEM Mill Instruction Manual In the following example, the process cycle is to mill the sample in the normal orientation using one ion source for 5 minutes and then rotate the sample 180° using a rotation offset to mill from the other side for another 5 minutes.

  • Page 114: Organizing Recipes

    Model 1060 SEM Mill Instruction Manual Organizing Recipes An Operator with normal user privileges is able to select predefined recipes from the Recipe drop-down menu. The recipes that appear as selections in the Recipe menu are production recipes. Production recipes are located in a folder that may be specified by any user with Administrator privileges.

  • Page 115: Working With The Instrument Logs

    Model 1060 SEM Mill Instruction Manual • Manage to open the production recipes folder in Windows Explorer. Recipe files can be added to the production recipes folder by copying or dragging the recipes from other locations. Recipe files may also be deleted, copied, or renamed.

  • Page 116: Log Types

    Model 1060 SEM Mill Instruction Manual Log Types The instrument has the following log types: • Process Log on page 108 • Instrument Log on page 110 • Operation Log on page 110 Process Log The Process log is a detailed record of instrument operations and provides an excellent historical account of instrument use.
  • Page 117 Model 1060 SEM Mill Instruction Manual Project  Sample  Log  File proj1 undefined logs/proj1/process.log proj1 samp1 logs/proj1/samp.log Working with the Instrument Logs on page 107 and Managing Data on page 123 for additional information on how and where log files are stored.

  • Page 118: Instrument Log

    Model 1060 SEM Mill Instruction Manual Instrument Log The Instrument log records events related to problems with instrument components and may also be used for debugging. The log is unique in that multiple levels of detail can be recorded. A privileged user controls the level of detail by way of the Setup tab.

  • Page 119: Managing Logs

    Model 1060 SEM Mill Instruction Manual Managing Logs The event logs are text files stored in a log file folder on the computer (or network location, if specified). See Location and Format of Data on page 123 for more information on the organization of Operator Console data.

  • Page 120: Recording Instrument Use

    Model 1060 SEM Mill Instruction Manual The Instrument Log Level control sets the amount and type of data recorded in the Instrument log. See Instrument Log on page 110. Recording Instrument Use Instrument use data can be recorded by: •...

  • Page 121: Project Tracking

    Model 1060 SEM Mill Instruction Manual Project Tracking Instrument use can be tracked by project: • Logins. The number of times a user logs in. • LoginTime. The accumulated duration of user log ins. • Runs. The number of times a recipe was executed.

  • Page 122: Component Tracking

    Model 1060 SEM Mill Instruction Manual Component Tracking All system components may be tracked by both running time and cycles. The meaning of these two quantities varies by component. For instance, the left ion source running time is the total duration that the ion source is energized, while cycles is a count of the number of times it transitions to being energized.

  • Page 123: Viewing Tracking Data

    Model 1060 SEM Mill Instruction Manual Press Add. The Tracking tab displays the current cycle and duration accumulators. Press Reset to reset each counter to 0 (zero). Use the Maintenance Setup controls to set maintenance cycles or hours. Press Remove to disable tracking for the component.

  • Page 124: Tracking Notification

    Tracking Data Access. All tracking data is stored in the C:\opt\Fischione\var\tracking folder in binary files with an .eafx extension. Users with Administrator or Service privileges can export tracking data to XML files. This functionality appears in the Tracking Data group of the Setup tab. The Export subgroup contains controls to export the component, user, and project tracking data separately.

  • Page 125: Component Data Logging

    Model 1060 SEM Mill Instruction Manual Component Data Logging The instrument is a complex machine consisting of many mechanical and electrical components. These components are orchestrated by a sophisticated embedded control system designed to provide efficient and safe operation of the instrument. The control system also provides a mechanism to obtain diagnostic information about the various components by way of Operator Console interfaces.
  • Page 126 Model 1060 SEM Mill Instruction Manual Components with subcomponents are the subsystems. Each component has an address in a dot notation (similar to IP addresses) that defines its position in the component hierarchy. For example, the Vacuum Subsystem has address 1.1, indicating that it is the first subsystem of the SEM Instrument subsystem with address 1.

  • Page 127: Viewing Component Logging Data

    While the Service tab | Logging tab presents options for starting and stopping logging (in the Control group) and for exporting data (in the Data group), Fischione Instruments recommends that users start/stop logging and export log data from the Data Logging tab, instead.
  • Page 128 Model 1060 SEM Mill Instruction Manual The Data Logging tab controls are: • Refresh. Press Refresh to display the most recent data. • Stop. Select a tracked component from the component drop-down menu, then press Stop to stop data logging for the selected component.
  • Page 129 Model 1060 SEM Mill Instruction Manual menu is empty. Select the component from the menu for which you would like to view the logged data. To start data logging for a component (data logging for the component must first be enabled from the Service tab): On the Data Logging tab, select the component from the drop-down menu.

  • Page 130: Exporting Component Tracking And Logging Data

    Exporting Component Tracking and Logging Data All component tracking and logging data is stored in the C:\opt\Fischione\var\data folder in files with a .dat extension. The export function writes the current collected data to a comma-separated (CSV) text file. The log file is named by component address and component name.

  • Page 131: Managing Data

    The Operator Console application loosely follows the UNIX directory structure hierarchy. The applications are contained in subfolders under the /opt/Fischione folder, which on Microsoft Windows is C:\opt\Fischione. Data shared among the applications is contained in subfolders under /opt/Fischione/var. The /var subfolders are: data: Contains the export files from data logging.

  • Page 132: Archiving Data

    Contains the user database. See Working with User Accounts on page 61. In addition, the default archiving folder is /opt/Fischione/archive, which on Microsoft Windows is C:\opt\Fischione\archive This location is changeable and may be removable storage (for example, USB flash drive).

  • Page 133: Data Management Support Functions

    Model 1060 SEM Mill Instruction Manual • Press Manage to open Windows Explorer and display the archive folder. Data Management Support Functions The Setup tab provides a number of functions to support data management. The tab is available to users with Administrator privileges.

  • Page 134: From The Service Tab

    Model 1060 SEM Mill Instruction Manual • to return instrument operational control to the touch screen, after exiting the Operator Console application you should restart the instrument before beginning touch screen operation. • but intend to subsequently restart the Operator Console to resume normal operation, restarting the instrument is not necessary.

  • Page 135: Loading Samples

    Model 1060 SEM Mill Instruction Manual Loading Samples Rotary Orientation The sample holder hole aligns with the stage pin; this design forces a specific orientation between the sample holder and the instrument. The stage home position locates the pin at the 6 o'clock position (the front of the instrument).
  • Page 136 Model 1060 SEM Mill Instruction Manual sample is loaded in the holder, you can transfer the holder to the instrument’s load lock in preparation for milling operations. Rotate the loading station knob so that the pin moves to the side closest to the hole.
  • Page 137 Model 1060 SEM Mill Instruction Manual Insert the sample into the jaw. Turn the loading station knob to close the front jaw on the sample. The front jaw pivots to align to the sample face. Adjust the screw to align the layers/ substrate interface with the center line of the cross-section holder.
  • Page 138 Model 1060 SEM Mill Instruction Manual Insert the cross-section holder into the adapter plate (included with the cross- section holder): • Slide the cross-section holder post into the adapter plate hole. • Align the cross-section holder slot with the adapter plate pin.

  • Page 139: Unloading The Sample From The Load Lock

    Model 1060 SEM Mill Instruction Manual Load the cross-section holder/adapter plate: • Insert the cross-section holder post into the stage hole. • Align the adapter plate hole with the stage pin. Close the load lock cover. Press Vacuum on the touch screen or the Operator Console application.
  • Page 140 Model 1060 SEM Mill Instruction Manual Software version 1.6.0 E.A. Fischione Instruments, Inc.

  • Page 141: Troubleshooting

    Model 1060 SEM Mill Instruction Manual Troubleshooting Warning. Removing the instrument covers potentially exposes high voltage. Only remove the covers if the AC power is disconnected. Warning. The ion source contains strong magnets that create a strong magnetic field. Individuals with an implanted pacemaker or implantable cardioverter-defibrillators (ICD) must keep a safe distance from the ion source magnets.
  • Page 142 Model 1060 SEM Mill Instruction Manual If a beam is not apparent, it may be out of alignment. Look back toward the ion source instead of at the sample target to see if a beam is coming from the ion source.

  • Page 143: Verify The Process Gas Delivery

    Model 1060 SEM Mill Instruction Manual Symptom Possible Cause Remedy K' has no effect in Electrical shorting High-Voltage Shock Hazard. High voltage changing focus between K and K' may be higher than a typical voltage meter can measure. Use a high-voltage probe or ensure that the anode voltage is set to 500 V (.4 kV).

  • Page 144: Verify The Mass Flow Controllers

    Model 1060 SEM Mill Instruction Manual — Is the instrument pressure switch closed (indicating that gas pressure is present)? — Is the regulator inside the instrument set to 10 to 15 psi? — Is the gauge inside the unit reading pressure?
  • Page 145 Model 1060 SEM Mill Instruction Manual Once you select Right, the beam calibration screen for the right ion source is displayed. Enter 0.05 in the Gas field, then press set to apply the change. Use a voltage meter to check the set value (orange wire) and the feedback value (blue wire).

  • Page 146: Check The Ion Source For Short Circuits

    Model 1060 SEM Mill Instruction Manual If the set value does not equal 1.25 V, then the board has failed. If the feedback value is not near or equal to 1.25 V, then the MFC has failed. Check the Ion Source for Short Circuits On the Utility tab | Ion Guns tab, turn the high-voltage power supply off (HV Off ).

  • Page 147: Verify The High-Voltage Output

    Model 1060 SEM Mill Instruction Manual Connector Pins 5 = Large Connector; Continuity Check 3 = Small Connector Anti Cathode to Ground 5-5 to 3-3 Cathode to Ground 5-3 to 3-3 Focus to Ground 3-1 to 3-3 Focus to Anti-Cathode...

  • Page 148: Understanding The Orientation Of High-Voltage Power Supply Connectors

    Model 1060 SEM Mill Instruction Manual The details of the instrument and its components are displayed, including the board revision level. Understanding the Orientation of High-Voltage Power Supply Connectors The orientation of the connectors is reversed from top to bottom between a high- voltage supply installed on the left as compared to a high-voltage supply installed on the right (Premium Edition instruments, only).

  • Page 149: Understanding High-Voltage Outputs In Premium Edition Instruments

    Model 1060 SEM Mill Instruction Manual During troubleshooting of the instrument, it may be necessary to verify the high-voltage outputs of the power supplies. Measure the voltages as follows: Measurement Probe Between Connector Pins Anode Anode and ground 5-1 and 3-3...

  • Page 150: Troubleshooting Motion System Issues

    Troubleshooting Motion System Issues Z Axis Motion Faults Over time, the top O-ring in the Model 1060 SEM Mill may lose lubrication. When the lubrication of the O-ring is inadequate, a small motion error may occur each time the Z axis moves into the load lock. These accumulated errors can cause a Z axis fault error.

  • Page 151: Z Axis Height Adjustment And Beam Alignment

    Model 1060 SEM Mill Instruction Manual To correct the fault condition, you should first clean and lubricate the O-ring and clean the stage. See O-Ring and Stage Cleaning on page 162. If cleaning and lubricating the O-ring and stage fails to resolve the Z axis motion fault, contact Fischione Instruments’...

  • Page 152: Troubleshooting Vacuum System Issues

    Model 1060 SEM Mill Instruction Manual The following software parameters determine where the sample is positioned for milling: • Z Home Position. This is the position where the Z axis is set to 0. The position is at the bottom of the travel of the Z axis where the flag on the Z axis trips a through- beam switch.

  • Page 153: Troubleshooting Pressure Transducer Errors

    Model 1060 SEM Mill Instruction Manual Troubleshooting vacuum system issues: Problem Possible Cause Possible Solution Touch screen or Operator The atmospheric Change the atmospheric pressure threshold. See Console application will threshold is not set Changing the Load Lock Atmospheric Pressure Threshold...
  • Page 154 Model 1060 SEM Mill Instruction Manual If the pressure gauge appears to be connected correctly and still will not function, it may need to be replaced. Contact Fischione Instruments’ service department for assistance. Software version 1.6.0 E.A. Fischione Instruments, Inc.

  • Page 155: Service

    Model 1060 SEM Mill Instruction Manual Service Electrical Shock Hazard. Removing the instrument enclosure can expose the user to potentially harmful voltages. DO NOT OPERATE THE INSTRUMENT WITH THE COVERS REMOVED. Operation of the instrument without the covers installed should only be performed by qualified service personnel.

  • Page 156: Exiting Service Mode: Touch Screen

    Model 1060 SEM Mill Instruction Manual Enter the code number in the box in the lower right of the tab. The numbers you enter will be displayed as asterisks. If you have entered the code correctly, an expanded list of Utility tabs is displayed: General, Imaging, Motion, Laser, Ion Guns, and System tabs.

  • Page 157: Venting The Chamber: Touch Screen

    Model 1060 SEM Mill Instruction Manual Venting the Chamber: Touch Screen To vent the chamber: Press Utility to bring the Utility tab to the front. On the Utility | General tab, press Vent Chamber. The stage lowers to the homing position, the turbo pump stops, and gas is purged from the ion sources.

  • Page 158: Returning The Chamber To Vacuum: Operator Console Application

    Model 1060 SEM Mill Instruction Manual The stage lowers to the homing position, the turbo pump stops, and gas is purged from the ion sources. The venting process takes approximately two minutes. Attempt to remove the load lock cover; when the chamber is at atmosphere, you will be able to remove it.

  • Page 159: Cover Removal

    Model 1060 SEM Mill Instruction Manual Cover Removal Ion Source Cover Plate If you wish to clean the ion sources and/or focus assemblies, it is not necessary to remove the instrument’s white (left) or blue (right) covers. Removing the ion sources’...

  • Page 160: Cover Plate Reinstallation

    Model 1060 SEM Mill Instruction Manual Slide the cover plate out and away from the instrument to remove it. Repeat steps 1-5 to remove the right cover plate. The ion sources will be visible once the cover plates are removed.
  • Page 161 Model 1060 SEM Mill Instruction Manual To remove the white (left side) cover: Remove any samples from the instrument stage. If you are operating a Premium Edition instrument, exit the Operator Console application. Close the load lock cover. On the Main tab of the touch screen, press Vacuum to place the load lock under vacuum.
  • Page 162 Model 1060 SEM Mill Instruction Manual Detach the USB camera cable from the back of the computer and the camera (if installed). Back of camera Back of computer Remove the microscope post (if installed) by unscrewing it. Loosen screw with flat-blade screwdriver.
  • Page 163 Model 1060 SEM Mill Instruction Manual Use an 1/8 in. hex key to remove the shoulder screw that retains the load lock cover. Disconnect the top light cable and place the load lock cover in a safe place. Protect the O-ring in the bottom of the load lock cover from nicks and contamination.
  • Page 164 Model 1060 SEM Mill Instruction Manual Use a 3 mm hex key to remove the two button- head screws that hold the left cover plate in place. Slide the cover plate out and away from the instrument to remove it.
  • Page 165 Model 1060 SEM Mill Instruction Manual Slowly maneuver the cover off of the instrument: Lift the cover clear of the dewar (if the dewar option is installed). Slowly rotate the cover counter-clock- wise to negotiate the left side of the cover around the threaded rod.

  • Page 166: White Cover Reinstallation

    Model 1060 SEM Mill Instruction Manual White Cover Reinstallation For white cover reinstallation, reverse the cover removal procedure. See White Cover Removal on page 152. Blue (Right) Cover Blue Cover Removal Required tools: • Metric hex wrench (key) set • SAE hex wrench (key) set •...
  • Page 167 Model 1060 SEM Mill Instruction Manual Reach under the blue cover and remove the thumb nut. Remove the 5 screws that hold the blue cover to the chassis (2 front, 2 top, 1 on right side). Allow the cover to rest on the support or dewar cap that was placed under the front edge of the cover.
  • Page 168 Model 1060 SEM Mill Instruction Manual Tape, or use a binder clip, to temporarily attach the frame to the support brackets. If you need to disconnect the touch screen cable from the touch screen circuit board, locate the cable on the circuit board. Gently open the pivoting latch and then carefully remove the cable.

  • Page 169: Blue Cover Reinstallation

    Model 1060 SEM Mill Instruction Manual Blue Cover Reinstallation Remove the tape or binder clip that is holding the frame to the brackets (if installed). Reattach the cable connector to the pivoting latch on the touch screen circuit board. Latch closed (cable not installed).

  • Page 170: O-Ring And Stage Cleaning

    Model 1060 SEM Mill Instruction Manual Guide the right side of the frame into the clip while centering the frame so that it can pop into the rectangular cut out. Install the thumb nut. Install the five screws that attach the cover to the chassis.
  • Page 171 Model 1060 SEM Mill Instruction Manual Required tools: • Isopropyl alcohol • Low lint, low electrostatic discharge, laboratory quality disposable wipes • Apiezon® N lubricating grease (part number 500-3062) If you have a Premium Edition system and are operating the instrument using the Operator Console application, exit the application to return control of the device to the touch screen.

  • Page 172: Replacing The O-Ring

    Model 1060 SEM Mill Instruction Manual Use a disposable wipe dampened with isopropyl alcohol to wipe the edges of the stage (where the stage comes into contact with the O-ring). Lightly grease the inside diameter of the O-ring. Use a very small amount of ultra-high vacuum compatible grease, such as Apiezon N lubricating grease (part number 500-3062).

  • Page 173: Ion Source Cleaning

    • aligning the focus assemblies • reinstalling the ion sources and focus assemblies Fischione Instruments recommends that you clean the focus assemblies whenever you clean the ion sources. The frequency in which you should clean the ion sources varies based on time and application. Generally, the ion sources and focus assemblies should be cleaned when ion beam quality starts to degrade or fluctuate.

  • Page 174: Ion Source Removal

    Model 1060 SEM Mill Instruction Manual • Ultrasonic cleaner • Heat gun • Scotch-Brite® pad • 2000-grit paper • Low lint, low electrostatic discharge, laboratory quality, disposable wipes • Cotton-tipped applicators Ion Source Removal To remove the ion sources: Vent the chamber. See...
  • Page 175 Model 1060 SEM Mill Instruction Manual Use a Phillips (+) screwdriver to remove the two screws indicated. Removal of these two screws frees the rotator assembly, which will be removed later to gain access to the focus assembly. Some Basic Edition models may have a third screw.

  • Page 176: Cleaning The Magnet Assembly

    Model 1060 SEM Mill Instruction Manual  Caution. The pink wires have limited slack; be careful while manipulating the ion source to not bind or break the wires. Loosen the screw in the center of the connector. Gently pull the plug from the ion source.
  • Page 177 Model 1060 SEM Mill Instruction Manual If the ion source is being removed to investigate a possible electrical short, check the resistance between each of the pins. All combinations should be open circuits: — A to K — A to K’...
  • Page 178 Model 1060 SEM Mill Instruction Manual Review the parts of the assembly. Magnet assembly Cathode and anti-cathode Look for any debris that may be shorting the ion source. Look for debris in this gap and around the base of the pin. Use a loupe or microscope, if necessary.
  • Page 179 Model 1060 SEM Mill Instruction Manual Disassemble the components of the magnet. Magnet assembled Magnet component parts Slide the pole piece from the magnet. E.A. Fischione Instruments, Inc. Software Version 1.6.0...
  • Page 180 Model 1060 SEM Mill Instruction Manual Push the insulator/anode out of the magnet/sleeve as a unit. Check for debris at both ends of the anode/insulator subassembly. Push the anode out of the insulator. Loosen the screws to release the contactor subassembly from the feed through body.
  • Page 181 Model 1060 SEM Mill Instruction Manual Remove the contactor subassembly from the feed through body. Remove the contact pin (part number 041-0480) from the contactor subassembly. Loosen and then remove the two screws that secure the contactor subassembly. These are the anode and anti-cathode pins.
  • Page 182 Model 1060 SEM Mill Instruction Manual Remove the insulator ring (part number 041-0392) from the cathode (part number 041-0394). Inspect each part and remove any loose fragments of material from the parts. Use tweezers to remove any debris from the magnet. It may be helpful to push debris to an edge of the magnet and then pluck out the pieces with tweezers.

  • Page 183: Reassembling The Magnet Assembly

    Model 1060 SEM Mill Instruction Manual Reassembling the Magnet Assembly Place the insulator ring (part number 041-0392) on the cathode (part number 041-0394). Add the pole piece, cathode end (part number 041-0478). Note the orientation; the pins must align for electrical contact.
  • Page 184 Model 1060 SEM Mill Instruction Manual Tighten the screws to secure the contactor subassembly to the feed through body. Push the anode into the insulator. Push the anode/insulator into the magnet/sleeve. Software version 1.6.0 E.A. Fischione Instruments, Inc.
  • Page 185 Model 1060 SEM Mill Instruction Manual Note the arrangement of the parts. The magnet will have some discoloration from running on one interior edge. This side of the magnet is installed opposite the pole piece. The sleeve overhangs on one side; the...

  • Page 186: Cleaning The Focus Assembly

    If the ion beam is too wide at ≥ 3 kV, this may be and indication that the focus cup is dirty. Fischione Instruments does not recommend that users clean the focus assembly because of the delicate wire connection. However, Fischione Instruments’ service personnel may use the following procedure to clean the focus assembly before reinstalling the ion source.
  • Page 187 Model 1060 SEM Mill Instruction Manual To clean and align the focus assembly: Gently pull the focus assembly from the instrument. Loosen the two 1.5 mm hex screws that secure the focus cup to the focus assembly. The focus cup will easily move once you loosen the screws sufficiently;...
  • Page 188 Model 1060 SEM Mill Instruction Manual Carefully remove the insulator/pin/ wire assembly. The focus cup cover screws onto the focus cup; use needle-nose pliers to remove the focus cup cover. When the cover is removed; gently remove the focus from the cup.
  • Page 189 If the pogo pin is bent or cannot be positioned above the focus, you will probably need to return the focus assembly to the Fischione Instruments’ service department for repair. — Screw the cover onto the cup, using needle-nose pliers to tighten it.

  • Page 190: Reinstalling The Ion Source And Aligning The Focus Cup

    Model 1060 SEM Mill Instruction Manual Reinstalling the Ion Source and Aligning the Focus Cup Inspect the ion source’s O-ring. Ensure it is installed, debris free, and lightly lubricated. Attach the ion source to the plug. Carefully position the source into the hole in the rotator.
  • Page 191 Model 1060 SEM Mill Instruction Manual Tighten the two captive screws that hold the ion source in position. To get the holes aligned, it is helpful to lightly press on one of the screws while rotating the body and rotate until the screw is felt to drop into the tapped hole.
  • Page 192 Model 1060 SEM Mill Instruction Manual Remove the alignment tool. Gently reinsert the focus assembly into the instrument. It will fit in the hole snugly. Be certain that the rectangular portion of the ion source body is positioned so that it is at the same horizontal level (indicated by the yellow line) as the two posts (indicated by arrows).

  • Page 193: Beam Calibration

    Model 1060 SEM Mill Instruction Manual Use a Phillips (+) screwdriver to reinstall the two screws indicated. Reinstall the ion source covers. See the appropriate procedure for your particular situation: — Ion Source Cover Plate on page 151 — Blue (Right) Cover on page 158 —...

  • Page 194: Basic Edition System Beam Calibration

    Model 1060 SEM Mill Instruction Manual Basic Edition System Beam Calibration Basic Edition systems use a single high-voltage power supply that, when using dual sources, supplies the same voltage to each ion source. Therefore, the voltage calibration is done using the controls for the right ion source. When using the ion sources individually, the instrument uses the settings for each ion source.
  • Page 195 Model 1060 SEM Mill Instruction Manual The following procedure explains how to calibrate the right and left ion source for six voltages (6 kV, 5 kV, 4 kV, 3 kV, 2 kV, and 1 kV) on Basic Edition instruments. Required tools: •...
  • Page 196 Model 1060 SEM Mill Instruction Manual Under Sample Rotation, select None. Press Utility and then Motion to display the Utility tab | Motion tab. Set the absolute position of the ion sources: Enter -10 in the Left Gun field. Press set to save the setting.
  • Page 197 Model 1060 SEM Mill Instruction Manual Enter -10 in the Right Gun field. Press set to save the setting. Manually rotate the left and right ion source knobs to -10. Press Beams to display the Beams tab. Click the Enable Left Source and Enable Right Source check boxes to enable both ion beam sources.
  • Page 198 Model 1060 SEM Mill Instruction Manual Press Utility and then Ion Guns to display the Utility tab | Ion Guns tab. Select Right to display the voltage and gas controls for the right ion source. Values that are retrieved from the instrument.
  • Page 199 Model 1060 SEM Mill Instruction Manual The voltage and gas controls are displayed: Symbol Definition Measurement Anode Voltage (V) Cathode Voltage (V) K’ Anti-cathode Voltage (V) Focus Voltage (V) Gas flow Standard cubic centimeters per minute (sccm) The first column of the Utility tab | Ion Guns tab displays the current data from the instrument.
  • Page 200 Model 1060 SEM Mill Instruction Manual Use the concentric circles etched in the center of the SEM alignment stub to ascertain beam width. The three circles are 1, 2, and 3 mm in diameter. The beam should be 1.5 mm in width, therefore, the beam should be approximately halfway between the 1 and 2 mm circles.

  • Page 201: Premium Edition System Beam Calibration

    Model 1060 SEM Mill Instruction Manual You want the K’ values for the right and left ion source to be the same, so toggle back and forth between the two beam settings and adjust each ion source’s K’ value until they are equal and the optimal beam width is reached.
  • Page 202 Model 1060 SEM Mill Instruction Manual Parameter Comments Anti-cathode voltage (K’) • Adjust the anti-cathode voltage and the gas flow delivery rate to calibrate the beams with voltages ≥ 4 kV. • Adjust the anti-cathode voltage, the gas flow delivery rate, and the focus voltage to calibrate beams with voltages <...
  • Page 203 Model 1060 SEM Mill Instruction Manual Enter the touch screen service mode. See Service Mode: Touch Screen page 147. The remainder of the beam calibration procedure is performed using the touch screen, not the Operator Console application. Press Utility to display the Utility tab.
  • Page 204 Model 1060 SEM Mill Instruction Manual — stage is in the chamber, press Load to move it to the loading position. Do not press Start. — load lock cover is closed, lift and rotate the load lock cover away from the stage.
  • Page 205 Model 1060 SEM Mill Instruction Manual Press Beams to display the Beams tab. Click the Enable Left Source and Enable Right Source check boxes to enable both ion beam sources. For each ion source, set the Voltage to 6.0 kV. Press set to select the value.
  • Page 206 Model 1060 SEM Mill Instruction Manual Select Right to display the voltage and gas controls for the right ion source. Values that are retrieved from the instrument. Current set points (not stored until you press Save). The voltage and gas controls are displayed:...
  • Page 207 Model 1060 SEM Mill Instruction Manual Press HV On to turn on the high-voltage power to the ion source. Adjust the voltages and gas flow. You will be making adjustments by way of the touch screen and then checking the beam to see the size.

  • Page 208: Recalibrating The Pirani Gauge Or Adjusting The Offset

    Model 1060 SEM Mill Instruction Manual Press Stop Calibration. Press Save. Press Right to return to the right ion source settings. Press Stop Calibration. Press Save. Repeat steps 17 through 35 for the remaining ion source kV settings (5 kV, 4 kV, 3 kV, 2 kV, and 1 kV).

  • Page 209: Adjusting The Pirani Gauge Offset

    Model 1060 SEM Mill Instruction Manual For adjusting the zero, operate the gauge under the same atmospheric conditions and in the same mounting orientation as normally. The gauge is adjusted to default values. However, it can also be adjusted to other pressure values, if the exact pressure value is known (reference measurement).
  • Page 210 Model 1060 SEM Mill Instruction Manual If the Console View is not already set to Text, select the Text radio button to display text in the left pane. Press Clear to clear the console view. Expand the Component tree to display Chamber.
  • Page 211 Model 1060 SEM Mill Instruction Manual In this case, the current value is 0.000375837 and the current condition is OK. The OK condition means that the value is within the range of the gauge. A condition of Under Range indicates that the value is lower than the gauge range.
  • Page 212 Model 1060 SEM Mill Instruction Manual The offset can be adjusted to force the Pirani gauge to read higher or lower; a positive offset will make the gauge read high, while a negative offset will make the gauge read low.

  • Page 213: Changing The Load Lock Atmospheric Pressure Threshold

    Range because the value being converted is outside the range of the Pirani gauge. This is still a permissible reading, it is just outside the range of the Pirani gauge. Fischione Instruments recommends that you try a -50 offset to clear the vacuum system fault.

  • Page 214: Reseating The Screen Cable To Fix White Screen At Start Up

    Model 1060 SEM Mill Instruction Manual Determine the new value for the load lock at atmospheric pressure. The value should allow for some variability in atmospheric pressure. With Load Lock still selected in the component tree, enter the following string...

  • Page 215: Correcting A Mismatch Between The Light Source Setting And Actual Output

    Model 1060 SEM Mill Instruction Manual Verify that the touch screen works. If not, you may need to replace the touch screen cable. Contact Fischione Instrument’s Service for assistance. Correcting a Mismatch between the Light Source Setting and Actual Output...

  • Page 216: Backing Up System Software

    Model 1060 SEM Mill Instruction Manual Backing Up System Software If you would like to make a back up of the instrument’s system software, you will need the USB drive that contains the software upgrade, which is included in the 1060 SEM Mill Accessory Kit, part number 041-0553.
  • Page 217 Model 1060 SEM Mill Instruction Manual Beam Calibration Worksheet Use this worksheet to record beam calibration levels. See Beam Calibration page 185 for more information. 6 kV Beam Calibration Parameter Default Value Calibrated Value Right Calibrated Value Left Comments A (Anode)
  • Page 218 Model 1060 SEM Mill Instruction Manual 4 kV Beam Calibration Parameter Default Value Calibrated Value Right Calibrated Value Left Comments A (Anode) 4000 V Anode values should not be altered during the beam calibration process. K (Cathode) -710 V Cathode values should not be altered during the beam calibration process.
  • Page 219 Model 1060 SEM Mill Instruction Manual 1 kV Beam Calibration Parameter Default Value Calibrated Value Right Calibrated Value Left Comments A (Anode) 1000 V Anode values should not be altered during the beam calibration process. K (Cathode) -700 V Cathode values should not be altered during the beam calibration process.
  • Page 220 Model 1060 SEM Mill Instruction Manual Software version 1.6.0 E.A. Fischione Instruments, Inc.
  • Page 221 Model 1060 SEM Mill Instruction Manual Index Capture 84 Data access, tracking 116 Cautions 1 Data logging About tab 57 Chamber 42 Clear 88 Accessories, setting up 25 Venting 148 Clear all 88 Accessory kit 33 Check setting 41 Component 117...
  • Page 222 Model 1060 SEM Mill Instruction Manual Project tracking data 96 Instrument User tracking data 95 Activity 58 Instrument 110 Graphic 73 Managing 111 Information 58 Operation 110 Log 97 Process 108 Faraday cups 49 Level 94 Log in 77 Fast acquisition 54...
  • Page 223 Model 1060 SEM Mill Instruction Manual Operator 65 Documenting 102 Unloading 131 Operator Console application Editing existing 102 Save config 92 Interface 70 Organizing 106 Screen cable, reseating the 206 Launching 60 Saving new 102 Seconds 81 Tab organization 72...
  • Page 224 Model 1060 SEM Mill Instruction Manual System software, backing up Unpacking 15 Update 92 System tab 55 Usage tracking Projects 98 User 98 User TAB key 42 Data, archiving 96 Tab organization Tracking 112 Operator Console User account 65 application 72...

Table of Contents