FEI Quanta FEG 650 Manuals

Manuals and User Guides for FEI Quanta FEG 650. We have 1 FEI Quanta FEG 650 manual available for free PDF download: User's Operation Manual

FEI Quanta FEG 650 User's Operation Manual (228 pages)

Brand: FEI | Category: Microscope | Size: 7 MB

Table of Contents
3
Chapter 1 Preface

9
User Manuals

9
- The User Safety Manual
  9
- The User Operation Manual
  9
How to Use this Manual

10
Chapter 2 System Overview

11
How Quanta FEG SEM Works

11
- Vacuum System
  12
- Image Viewing and Capture
  13
- Positioning of the Stage
  13
System Layout of Quanta FEG

14
- Software Interface Elements
  14
- Hardware Interface Elements
  14
Quanta FEG Options

17
Chapter 3 System Operation

19
Quanta FEG Vacuum System

20
Vacuum Statuses

21
- Pump Button
  21
- Vent Button
  21
Vacuum Modes

22
- High Vacuum (Hivac) Mode
  22
- Low Vacuum (Lovac) and ESEM Modes
  22
Quanta FEG System States

25
- Power off
  27
Chapter 4 Software Control

29
- Other Software and Hardware
  29
Software Interface Elements

30
- Icons
  30
- Tool-Tips
  30
- Pull-Down Menus
  30
- Command Buttons
  31
- List Boxes
  31
- Property Editors
  31
- Edit Boxes
  31
- Radio Buttons / Check Boxes
  31
- Adjusters
  32
- 2D Controls
  33
- Modules
  33
- Dialogues
  33
- Tabs
  33
- Progress Bars
  33
Xt Microscope Server Software

34
Xt Microscope Control Software

35
- The Title Bar
  36
- The Menu Bar
  36
- The Toolbar
  48
- Image Windows
  49
- Pages and Modules
  50
- Preferences
  57
FEI User Management Software

66
- Control Possibilities
  66
- FEI Account Administrators
  66
- Account Logging
  68
Entering Commands in Summary

69
- Using the Mouse
  69
- Using the Keyboard
  70
Chapter 5 Operating Procedures

73
Specimen Preparation and Handling

74
Obtaining an Image

76
- Operation Pre-Check
  76
- Selecting Vacuum Mode
  77
- Spot Size
  78
- Obtaining an Image on Screen
  79
Optimising an Image

79
- Principles of SEM Imaging
  79
- Magnification
  79
- Scan Speed and Filtering
  80
- Contrast and Brightness
  81
- Focusing
  82
- Correcting Astigmatism
  82
- Pressure and Working Distance (WD)
  83
- Digital Imaging Enhancement / Imaging Mixing / Coloring
  84
Detector Types and Usage

86
Capturing and Handling Single Image

93
- Image Types
  93
- Saving / Opening / Printing
  94
Recording Movies (Saving Multiple Images)

95
- Movie TAB Preferences Dialogue
  95
- Movie Procedure
  97
- FEI Movie Creator
  98
- Playing a Movie
  100
Measurement and Annotation Functions

101
- Tools
  101
Chapter 6 Alignments

103
Quanta FEG System Alignments

104
- Common Rules
  104
- Buttons and Control Elements
  105
Final Lens Aperture Strip Alignment

106
- Aligning Procedure
  106
Gun Alignment

107
Stigmator Alignment

109
Stage Rotation Centre

110
Emitter Startup

111
94 - CCD Camera Alignment

113
154 - Water Bottle Venting

114
Chapter 7 Stages

115
Stages Types and Accessories

116
- Quanta FEG 250 - 50 MM Stage
  116
- Quanta FEG 450 / 650 - 100 / 150 MM Stage
  117
- Eucentric Position
  118
- Stage Movement Limits
  120
Software Stage Functions

121
- Map Tab
  121
- Coordinates Tab
  123
- Tilt Tab
  124
- Navigation Tab
  124
Stage Related Functions

125
- Stage Movements
  125
- Specimen Alignment
  128
- Scan Rotation (Shift + F12)
  132
Chapter 8 Maintenance and Troubleshooting

133
Cleaning Procedures Overview

134
- List of Applied Cleaners
  134
- Cleaning Column Parts
  134
- Materials and Technique
  135
The Standard Insert

136
- Removing and Disassembling
  136
- Housing Cleaning
  137
- Platinum Apertures Cleaning
  137
- Platinum Apertures Installing
  138
Aperture Strip Module

139
- Removing the Aperture Rod
  139
- Replacing the Aperture Module
  140
- Replacing the Aperture Rod
  140
Gaseous Detectors

141
- Cleaning the GSED / LFD
  141
- Cleaning the GBSD
  141
Stage Maintenance

142
- Stage Mechanics
  142
- Specimen Holders
  142
Refilling the Water Bottle

143
Pre-Vacuum Pump Maintenance

144
- Periodic Check
  144
Troubleshooting

145
- Diagnostics Auto Report
  147
- Simple TAD
  148
Chapter 9 System Options

149
Manual User Interface

150
Joystick

150
Automatic Aperture System

151
- Aperture Alignment
  151
Nav-Cam

153
- Capturing Navigation Image Procedure
  153
- 401 - Nav-Cam Autobrightness
  154
Optional Detectors

155
Energy Dispersive X-Ray (EDX) Analysis

166
- The Support PC
  166
- High Vacuum EDX Analysis
  166
- LFD EDX Analysis
  167
- GSED EDX Analysis
  167
- GAD EDX Analysis
  168
- STEM EDX Analysis
  168
Cooling Stage / Waterless Cooling Stage

169
- Cooling Stage Parts
  169
- Cooling Stage Installation
  172
- Software Control
  175
- Cooling Stages Basic Operations
  178
- Water Cooled Temperature Stage Operation Termination
  180
Wet STEM

181
- Wet STEM Basic Operations
  182
Heating Stage 1000 °C / Heating Stage 1500 °C

183
- Heating Stages Parts
  183
- Heating Stage Installation
  188
- Software Control
  189
- Heating Stages Basic Operations
  192
- HS Maintenance
  196
Cryocleanerec

198
- Parts and Accessories
  198
- Cryocleaner Operation
  199
- Maintenance
  201
- Spare Vessel
  201
Plasma Cleaner

202
- Sample Cleaning Procedure
  203
- 104 - Plasma Cleaning Alignment
  204
Quanta Morphologi

205
- Sample Preparation
  205
- Image Acquisition
  206
- Recommended Settings
  207
- Symmetrical Low Vacuum Detector (SLVD)
  208
- Mapping Tool
  209
Image Analysis

210
- Measurement Accuracy Verification
  210
Remote Imaging

213
Beam Deceleration

215
- Detection Principles
  215
- Stage Modification
  216
- Beam Deceleration Applications
  217
- Beam Deceleration Module
  217
Specimen Holder Kit Option

219
- Location Positions
  219
- Older Interface Adapter
  220
- Interface Pillar
  220
- Multi-Holders
  221
- Polished Mount Holders
  222
- Clamp Stubs
  222
- Torx Drivers
  222
Quick Loader

223
- General Description
  223
- Installation
  226
- Operations
  227

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More FEI Manuals

FEI Quanta FEG 650 Manuals

FEI Quanta FEG 650 User's Operation Manual (228 pages)

Table of Contents

Chapter 1 Preface

User Manuals

How to Use this Manual

Chapter 2 System Overview

How Quanta FEG SEM Works

System Layout of Quanta FEG

Quanta FEG Options

Chapter 3 System Operation

Quanta FEG Vacuum System

Vacuum Statuses

Vacuum Modes

Quanta FEG System States

Chapter 4 Software Control

Software Interface Elements

Xt Microscope Server Software

Xt Microscope Control Software

FEI User Management Software

Entering Commands in Summary

Chapter 5 Operating Procedures

Specimen Preparation and Handling

Obtaining an Image

Optimising an Image

Detector Types and Usage

Capturing and Handling Single Image

Recording Movies (Saving Multiple Images)

Measurement and Annotation Functions

Chapter 6 Alignments

Quanta FEG System Alignments

Final Lens Aperture Strip Alignment

Gun Alignment

Stigmator Alignment

Stage Rotation Centre

Emitter Startup

94 - CCD Camera Alignment

154 - Water Bottle Venting

Chapter 7 Stages

Stages Types and Accessories

Software Stage Functions

Stage Related Functions

Chapter 8 Maintenance and Troubleshooting

Cleaning Procedures Overview

The Standard Insert

Aperture Strip Module

Gaseous Detectors

Stage Maintenance

Refilling the Water Bottle

Pre-Vacuum Pump Maintenance

Troubleshooting

Chapter 9 System Options

Manual User Interface

Joystick

Automatic Aperture System

Nav-Cam

Optional Detectors

Energy Dispersive X-Ray (EDX) Analysis

Cooling Stage / Waterless Cooling Stage

Wet STEM

Heating Stage 1000 °C / Heating Stage 1500 °C

Cryocleanerec

Plasma Cleaner

Quanta Morphologi

Image Analysis

Remote Imaging

Beam Deceleration

Specimen Holder Kit Option

Quick Loader

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