entegris A198-80MB-47C02 Manuals

Manuals and User Guides for entegris A198-80MB-47C02. We have 1 entegris A198-80MB-47C02 manual available for free PDF download: Installation And Use Manual

entegris A198-80MB-47C02 Installation And Use Manual

entegris A198-80MB-47C02 Installation And Use Manual (15 pages)

200 mm wafer carrier

Brand: entegris | Category: Industrial Equipment | Size: 1 MB

Table of Contents

Overview

2
- Table of Contents
  2
General Terminology and Definitions

3
- Definitions
  4
Wafer Plane

5
- Specification Purpose
  5
- Benefits
  5
- General Definitions
  5
- Specification Description
  6
- Specification Values
  6
- Use with Automated Equipment
  6
Four Point Contact

7
General Interface Information

8
- Print Based Interface Design
  8
Interface Points: Wafers Horizontal

8
- General Recommendations
  8
- Sample Interface Plate
  8
- Contact Area a
  9
- Contact Area B
  9
- Contact Area C
  9
Interface Points: Wafers Vertical

10
- General Recommendations
  10
- Sample Interface Plate
  10
- Contact Area a
  10
- Contact Areas B and C
  11
Interface Points: Robotic Handling

11
- General Recommendations
  11
- Robotic Handling Features
  11
- Endwall Flanges
  11
- H" Bar End Flanges
  12
- Endwall Handle
  12
- Top Flanges
  12
Material Information

13
- Material Properties and Equipment Interface
  13
- Static Protection
  13
- Moisture Absorption
  13
- Applications
  13
- Wafer Transport Carriers
  13
- Process Wafer Carriers
  14
Detailed Material Properties

14
For more Information

15
Terms and Conditions

15
Product Warranties

15

Advertisement

Advertisement

Related Products

entegris Categories

Industrial Equipment Water Filtration Systems Measuring Instruments Controller Transducer

More entegris Manuals