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User Manuals: CyberOptics WaferSense Devices
Manuals and User Guides for CyberOptics WaferSense Devices. We have
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CyberOptics WaferSense Devices manual available for free PDF download: User Manual
CyberOptics WaferSense User Manual (56 pages)
Brand:
CyberOptics
| Category:
Semiconductors
| Size: 1 MB
Table of Contents
General Information
2
Table of Contents
4
Chapter 1 Introduction
8
Chapter 2 Installing Your ATS
9
Installing the Software
9
Figure 2.1: the Installshield Wizard
10
Installing the Wireless Link
11
Figure 2.3: Installing the Waferlink Device
12
Checking Communications between the Link and the Wafer
13
Registering Your Teaching Wafer for Calibration Service
14
Running the Teachview Application
15
Figure 2.5: Calibration Registration Dialog
16
Technical Support
17
Chapter 3 Using Your ATS
19
Using the Rechargeable Battery
19
Using the ATS Teaching Wafer Buttons and Status Lights
20
Finding a Target
21
Figure 3.2: Aligning the Teaching Wafer
22
Figure 3.3: Target Configuration List
23
Figure 3.5: Target Centered in the Sight Ring
25
Using the Target Overlay
26
Using Find Once and Continuous Find
27
Taking a Single Reading
27
Taking Continuous Readings
27
Setting the Target Criteria
28
Figure 3.7: Set Target Criteria Dialog
29
Logging Your Readings
30
Logging a Reading
31
Including User-Specified Information in the Log File
32
Changing the Log File
33
Displaying Readings from a Log File
33
Printing the Teachview Window
33
Monitoring the Operating Temperature
34
Monitoring the Battery Level
35
Charging the Battery
35
Monitoring the Wireless Connection to the Teaching Wafer
36
Changing the Pairing between the Teaching Wafer and Link
37
Loading Settings from a File
38
Saving Your Settings
38
Chapter 4 Creating Target Configuration Files
39
Choosing a Target
39
Measuring the Target
40
Running Teachtarget
40
Figure 4.2: Step 1. Position the Wafer
41
Figure 4.3: Step 2. Optimize Lighting
42
Figure 4.4: Step 3. Acquiring Image
43
Figure 4.5: Step 4. Secondary Target Parameter
44
Figure 4.6: Step 5. Overlay Alignment, Primary Target
45
Figure 4.7: Step 5. Overlay Alignment, Secondary Target
46
Figure 4.8: Step 6. Generating Target Parameters
47
Chapter 5 Maintaining Your ATS
48
Annual Factory Calibration and Battery Replacement
48
Battery Use and Disposal
48
Updating Your ATS Wafer Firmware
48
Figure 5.2: Starting the ATS Firmware Updater Application
51
Figure 5.3: Cycle Power Dialog
52
Chapter 6 Specifications
53
System Requirements
53
ATS Hardware
53
Environmental
53
Power
53
Range and Accuracy
53
Index
54
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