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Summary of Contents for CyberOptics WaferSense
- Page 1 CyberOptics Semiconductor ™ WaferSense ATS User’s Guide...
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Page 2: General Information
Changes or modifications not expressly approved by CyberOptics Semiconductor, Inc., may void your authority to operate the WaferSense ATS. The radio contained in the WaferSense ATS meets all the applicable FCC requirements for RF Safety. While in operation, the FCC requires users and nearby persons to maintain a minimum separation distance of 20 cm (8 inches) or farther from the WaferSense ATS. - Page 3 800-366-9131 (US and Canada only) Fax: (503) 495-2201 WaferSense, TeachView, and TeachTarget are trademarks of CyberOptics Semiconductor, Inc. Third-party brands and names are the property of their respective owners. Copyright © 2006 - 2007, CyberOptics Semiconductor, Inc. All rights reserved.
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Page 4: Table Of Contents
Table of Contents General Information ............ii Chapter 1 Introduction..................1.1 Chapter 2 Installing Your ATS ............... 2.1 Installing the Software..............2.1 Installing the Wireless Link............2.3 Checking Communications Between the Link and the Wafer ..2.5 Registering Your Teaching Wafer for Calibration Service.....2.6 Running the TeachView Application ..........2.7 Technical Support ................2.9 Chapter 3 Using Your ATS................ - Page 5 Table of Contents Using the Rechargeable Battery........... 3.17 Monitoring the Battery Level..............3.17 Charging the Battery ................3.17 Monitoring the Wireless Connection to the Teaching Wafer ..3.18 Changing the Pairing Between the Teaching Wafer and Link..3.19 Saving Your Settings..............3.20 Loading Settings from a File..............
- Page 6 List of Illustrations Chapter 2 Figure 2.1: The InstallShield Wizard............2.2 Figure 2.2: Found New Hardware Wizard..........2.3 Figure 2.3: Installing the WaferLink Device...........2.4 Figure 2.4: Starting the TeachView Application........2.7 Figure 2.5: Calibration Registration Dialog..........2.8 Figure 2.6: The About TeachView Dialog ..........2.9 Figure 2.7: The About your ATS Wafer Dialog........2.9 Chapter 3 Figure 3.1: The TeachView Application ..........3.3...
- Page 7 List of Illustrations Chapter 5 Figure 5.1: ATS Wafer Calibration Status Dialog ........5.2 Figure 5.2: Starting the ATS Firmware Updater Application ....5.4 Figure 5.3: Cycle Power dialog..............5.5...
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Page 8: Chapter 1 Introduction
Chapter 1 Introduction The CyberOptics Semiconductor WaferSense™ Automatic Teaching System (ATS) measures three-dimensional offsets to teach wafer handoff positions. Using machine vision technology, it “sees” targets inside semiconductor equipment. The TeachView™ software application makes it easy to precisely adjust equipment. The large display and wireless link let you place the computer at a convenient distance from the teaching wafer. -
Page 9: Chapter 2 Installing Your Ats
Chapter “Maintaining Your ATS.” Installing the Software To run the WaferSense ATS software, your computer must have the following: • Windows 2000, Windows XP, or Windows Vista operating system • One free high-power USB 1.1 or USB 2.0 port To install the WaferSense ATS software: 1. -
Page 10: Figure 2.1: The Installshield Wizard
By default, the Setup program installs the TeachView and TeachTarget applications in a new program group called WaferSense ATS. Setup also installs an online copy of this user’s guide, which is available from the TeachView and TeachTarget Help menus and in the WaferSense... -
Page 11: Installing The Wireless Link
Chapter 2. Installing Your ATS Installing the Wireless Link To install the wireless link: 1. Turn on your computer. 2. Locate an unused, high-power USB port on your computer. The ATS wireless link module requires a high-power USB port, such as the built-in ports on your computer and ports on USB hubs that have power cords. -
Page 12: Figure 2.3: Installing The Waferlink Device
Chapter 2. Installing Your ATS The wizard offers to help you install software for the CyberOptics WaferSense link device, as shown in Figure 2.3. Figure 2.3: Installing the WaferLink Device 6. Choose Install the software automatically and click Next. If you already installed the WaferSense ATS software (see “Installing the Software,”... -
Page 13: Checking Communications Between The Link And The Wafer
Chapter 2. Installing Your ATS Checking Communications Between the Link and the Wafer To complete the installation, verify that the teaching wafer and link can communicate: 1. The teaching wafer operates from an internal rechargeable battery. Before using the teaching wafer for the first time, charge it for two hours. For information on checking the charge on the battery and the procedure for recharging, see “Using the Rechargeable Battery,”... -
Page 14: Registering Your Teaching Wafer For Calibration Service
These services can be performed only at the factory. To help you keep track of the next service date so you can schedule this service when it is convenient, register your WaferSense ATS teaching wafer with the factory. When you start the TeachView application (see “Running the TeachView Application,”... -
Page 15: Running The Teachview Application
Chapter 2. Installing Your ATS Running the TeachView Application To start the TeachView application: 1. From the Windows Start > All Programs menu, choose WaferSense ATS > TeachView. The TeachView application starts, as shown in Figure 2.4. Initializing communications usually takes less than a second. For information on using TeachView, see Chapter “Using Your... -
Page 16: Figure 2.5: Calibration Registration Dialog
Chapter 2. Installing Your ATS 2. If TeachView displays the WaferSense ATS Calibration Registration dialog, as shown in Figure 2.5, you haven’t registered your teaching wafer. Follow the instructions in the dialog to complete the registration. Figure 2.5: Calibration Registration Dialog... -
Page 17: Technical Support
Chapter 2. Installing Your ATS Technical Support CyberOptics Semiconductor offers free technical support to customers. If the ATS hardware or software appear to be malfunctioning, please contact us, and we’ll be happy to assist you. When you contact us, please make sure that you have the following information available: •... - Page 18 Chapter 2. Installing Your ATS Technical support is available Monday through Friday, 8:00 A.M. to 5:00 P.M. Pacific Time. • Voice: (503) 495-2200 • Toll free: 800-366-9131 (US and Canada only) • Fax: (503) 495-2201 • E-mail: CSsupport@cyberoptics.com • Internet: www.CyberopticsSemi.com 2.10...
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Page 19: Chapter 3 Using Your Ats
Chapter 3 Using Your ATS This chapter gives you instructions for performing the following tasks with the ATS: • Using the ATS teaching wafer buttons and indicators • Performing a basic target measurement • Using the target overlay • Using find once and continuous find •... -
Page 20: Using The Ats Teaching Wafer Buttons And Status Lights
Chapter 3. Using Your ATS Using the ATS Teaching Wafer Buttons and Status Lights ATS teaching wafers have two buttons: • ON OFF. Turns the teaching wafer on and off. • NEW PAIR. Changes the pairing between a teaching wafer and a link (see “Changing the Pairing Between the Teaching Wafer and Link,”... -
Page 21: Finding A Target
Chapter 3. Using Your ATS Finding a Target The camera in the teaching wafer captures live video from within the semiconductor process equipment. An image processor in the wafer reports the coordinates (X, Y, Z) of the teaching wafer in relation to a target on the equipment. When you tell ATS to find the target, the TeachView application displays the coordinates. -
Page 22: Figure 3.2: Aligning The Teaching Wafer
2. Place the teaching wafer on the equipment you want to check. Align the teaching wafer so it matches the TeachView display by rotating the wafer until the WaferSense™ ATS logo is right-side up and level as you face the wafer, as shown in Figure 3.2. -
Page 23: Figure 3.3: Target Configuration List
Chapter 3. Using Your ATS 3. From the Target configuration list (see Figure 3.3), choose the appropriate target configuration file for the equipment you are working on. If the file isn’t shown in the list, choose Select, which is always the last entry in the Target configuration list, or choose the menu item File >... - Page 24 Chapter 3. Using Your ATS All measurements are in millimeters. Readings outside the working range of the teaching wafer are displayed as ####. If the readings display None, ATS was not successful in finding the target. This can be caused by the following: •...
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Page 25: Figure 3.5: Target Centered In The Sight Ring
Chapter 3. Using Your ATS 5. Adjust the equipment and click Find Once again. Repeat this process until the target is centered in the sight ring, and the X and Y values are zero or close enough (see Figure 3.5). Figure 3.5: Target Centered in the Sight Ring You can resize the TeachView window to make the video image larger or smaller. -
Page 26: Using The Target Overlay
Chapter 3. Using Your ATS Using the Target Overlay A target overlay feature lets you verify that the ATS has correctly identified the target. To activate the target overlay: • Check Display target overlay below the numeric readouts. The target overlay appears as a circle with cross hairs, as shown in Figure 3.6. -
Page 27: Using Find Once And Continuous Find
Chapter 3. Using Your ATS • Target criteria. You might not have the target criteria set correctly. For more information, see “Setting the Target Criteria,” on page 3.10. In particular, verify that the Z distance you have specified in the target criteria is within 1 mm of the Z distance used to create the target configuration file. -
Page 28: Setting The Target Criteria
Chapter 3. Using Your ATS While the Continuous find box is checked, the Find Once button is disabled. To cancel continuous find, uncheck the box. Setting the Target Criteria When you have successfully centered the target within the sight ring, the X and Y coordinates will both ideally be zero. -
Page 29: Figure 3.7: Set Target Criteria Dialog
Chapter 3. Using Your ATS The Set Target Criteria dialog is displayed, as shown in Figure 3.7. Figure 3.7: Set Target Criteria Dialog 2. To specify one tolerance for both X and Y measurements, check the box for x and y the same. -
Page 30: Logging Your Readings
Chapter 3. Using Your ATS Logging Your Readings TeachView can keep a record of your activities as you use the teaching wafer to check various pieces of equipment. TeachView keeps the record in a log file. You can specify the log file path (see “Changing the Log File,”... -
Page 31: Logging A Reading
Chapter 3. Using Your ATS Logging a Reading TeachView posts entries to the log file on your command. To post an entry to the log file: • In the main TeachView window, click Log a Reading (see Figure 3.8). TeachView immediately writes a log entry each time you click the button. Log a Reading button Figure 3.8: Logging a Reading 3.13... -
Page 32: Including User-Specified Information In The Log File
Chapter 3. Using Your ATS Including User-Specified Information in the Log File Operator, Tool, Station, and Comment are text fields you can use to record your own information with each log entry. You can fill in any text information you want in these fields. To include user-specified information for logging: 1. -
Page 33: Changing The Log File
Chapter 3. Using Your ATS Changing the Log File By default, TeachView writes log entries to the file My Documents\ATS Files\ATS Readings.csv. If you prefer, you can specify a different log file. The name of the current log file is displayed below the Log a Reading button (see Figure 3.8 on page 3.13). -
Page 34: Monitoring The Operating Temperature
Chapter 3. Using Your ATS Monitoring the Operating Temperature The operating range for the teaching wafer to achieve the specified accuracy for readings is 20 °C to 50 °C. The teaching wafer can withstand exposure to 120 °C (5 minutes or less) if not in direct contact with the heating element. -
Page 35: Monitoring The Battery Level
45 °C might damage your gapping wafer or create a safety hazard. 3. Place the teaching wafer in the charging clean box. Rotate the wafer until the WaferSense ATS logo is right side up and approximately level when the hinged edge of the box is away from you. -
Page 36: Monitoring The Wireless Connection To The Teaching Wafer
Chapter 3. Using Your ATS 4. Plug the charger line adapter into a 100 VAC to 240 VAC supply and plug the other end into the charging clean box. The Charging light is on while the teaching wafer is charging. If the Charging light does not turn on, make sure the lid of the box is closed completely and the charging pins in the charging clean box are making electrical contact with the teaching wafer. -
Page 37: Changing The Pairing Between The Teaching Wafer And Link
Chapter 3. Using Your ATS • Red - No connection. Indicates that there is no connection between the teaching wafer and link module. The values in the display do not update when the indicator is red. Figure 3.12: Wireless Connection Monitor The Bluetooth wireless link technology used in the ATS is a low-power technology that operates in the 2.4 GHz radio frequency band. -
Page 38: Loading Settings From A File
Chapter 3. Using Your ATS 3. On the teaching wafer, press and hold the NEW PAIR button until the Pair Status and Connection Status lights start to blink rapidly (about four times per second). 4. On the link module, press and hold the NEW PAIR button until the Pair Status and Connection Status lights start to blink rapidly (about four times per second). -
Page 39: Creating Target Configuration Files
Chapter 4 Creating Target Configuration Files ATS helps you adjust wafer handling equipment so that the equipment can pick up a wafer or put down a wafer in exactly the right position. To determine the correct position, ATS uses a target, which is a round physical feature inside the equipment that ATS can recognize and precisely locate. -
Page 40: Measuring The Target
3. Place the teaching wafer on the equipment. Align the teaching wafer so it matches the TeachTarget display by rotating the wafer until the WaferSense™ ATS logo is right-side up and level as you face the wafer, as shown in Figure 4.1. -
Page 41: Figure 4.2: Step 1. Position The Wafer
4. If TeachView is running on the computer, exit the application. At any given time, only one application can communicate with the teaching wafer. 5. From the Windows Start > All Programs menu, choose WaferSense ATS > TeachTarget. 6. Make sure the computer running the TeachTarget application is within the range of the link module, about 30 ft (10 m). -
Page 42: Figure 4.3: Step 2. Optimize Lighting
Chapter 4. Creating Target Configuration Files 9. Step 2, Optimize Lighting. TeachTarget performs this step all by itself. When Optimization complete is displayed below the indicator bar (see Figure 4.3), click Next. Optimization complete Figure 4.3: Step 2. Optimize Lighting... -
Page 43: Figure 4.4: Step 3. Acquiring Image
Chapter 4. Creating Target Configuration Files 10. Step 3, Acquiring Image. TeachTarget performs this step all by itself. While the image is being acquired, no video image is displayed. When the step is complete, the video image appears and TeachTarget displays Image retrieval complete below the indicator bar (see Figure 4.4). -
Page 44: Figure 4.5: Step 4. Secondary Target Parameter
Chapter 4. Creating Target Configuration Files 11. Step 4, Target Parameters. Enter the diameter of the target and the distance from the bottom of the teaching wafer to the target (Z distance). For more information on these values, see “Measuring the Target,” on page 4.2. -
Page 45: Figure 4.6: Step 5. Overlay Alignment, Primary Target
Chapter 4. Creating Target Configuration Files 13. Step 5, Overlay Alignment. For this step, you’ll find it helpful to have a very large video image, so resize the TeachTarget window to make the video image as large as possible. TeachTarget adds two concentric red overlay rings to the captured image of the target (see Figure 4.6). -
Page 46: Figure 4.7: Step 5. Overlay Alignment, Secondary Target
Chapter 4. Creating Target Configuration Files Overlay rings enclosing the inner edge of the secondary target Figure 4.7: Step 5. Overlay Alignment, Secondary Target 16. When you have the rings aligned on the target, click Next. -
Page 47: Figure 4.8: Step 6. Generating Target Parameters
Save Target File, fill in a name for the file, and click Save. By default, target configuration files are saved in c:\Documents and Settings\All Users\Application Data\CyberOptics Semiconductor\ATS\Target Files\. Figure 4.8: Step 6. Generating Target Parameters 18. When you have finished saving the file, click Done. TeachTarget exits. -
Page 48: Maintaining Your Ats
Annual Calibration and Battery Replacement. Once a year, you should have your teaching wafer calibrated and the internal rechargeable battery replaced by returning the teaching wafer to the CyberOptics Semiconductor factory. • Cleaning the Teaching Wafer. If cleaning is required, wipe the outside of the teaching wafer with IPA (isopropyl alcohol). - Page 49 ATS Wafer Calibration Status dialog, as shown in Figure 5.1. Figure 5.1: ATS Wafer Calibration Status Dialog If you drop the teaching wafer or suspect that it is no longer in calibration, contact CyberOptics Semiconductor technical support (see “Technical Support,” on page 2.9).
- Page 50 1. Turn on the teaching wafer. 2. If either TeachView or TeachTarget is running on the computer, exit the application. 3. From the Windows Start > All Programs menu, choose WaferSense ATS > ATS Firmware Updater. The ATS Firmware Updater application starts, as shown in Figure 5.2.
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Page 51: Figure 5.2: Starting The Ats Firmware Updater Application
6. In the ATS Firmware File dialog, find and select the firmware file and click Open. By default, the ATS Firmware Updater looks for firmware files in c:\Documents and Settings\All Users\Application Data\CyberOptics Semiconductor\ATS\Firmware\. Caution In the next step, you will start the load firmware process. Once you start the process, the firmware is automatically uploaded to the wafer, committed, and verified. -
Page 52: Figure 5.3: Cycle Power Dialog
Chapter 5. Maintaining Your ATS 7. Click Load Firmware. The firmware file is uploaded to the wafer, committed, and verified. This process takes a few minutes, and the ATS Firmware Updater displays progress bars and messages so you can follow the progress. When the firmware has been verified, you will be prompted to cycle the power on the teaching wafer, as shown in Figure 5.3. -
Page 53: Chapter 6 Specifications
Chapter 6 Specifications System Requirements To run the WaferSense ATS software and link, your computer must have: • Windows 2000, Windows XP, or Windows Vista operating system • One free high-power USB 1.1 or USB 2.0 port ATS Hardware Environmental Operating pressure range: ≤10... -
Page 54: Index
Index About TeachView dialog displaying log entries 3.15 About your ATS Teaching Wafer dialog accuracy of measurements 5.1, 6.1 FCC standards installing 2.1 finding a target 3.3, 3.9 specifications 6.1 firmware version system components 1.1 firmware, updating ATS Firmware Updater 5.3–5.5 hardware specifications battery... - Page 55 Index Log a Reading button 3.13 rechargeable battery 3.17 log file 3.15 recharging 3.17 logging readings 3.12 replacement 5.1 Comment 3.14 registering your teaching wafer displaying log entries 3.15 log file 3.15 Operator 3.14 saving settings 3.20 Station 3.14 serial number, teaching wafer Tool 3.14 settings user-specified information 3.14...
- Page 56 Index teaching wafer technical support battery replacement 5.1 temperature, monitoring 3.16 buttons 3.2 Tool, including in log file 3.14 calibration 5.1 changing pairing with link module 3.19 cleaning 5.1 USB port 2.1, 2.3 firmware 5.3 maintenance 5.1 monitoring the connection 3.18 version of firmware NEW PAIR button 3.20 version of software...
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