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User Manuals: CyberOptics WaferSense APS Sensor
Manuals and User Guides for CyberOptics WaferSense APS Sensor. We have
1
CyberOptics WaferSense APS Sensor manual available for free PDF download: User Manual
CyberOptics WaferSense APS User Manual (80 pages)
Brand:
CyberOptics
| Category:
Accessories
| Size: 1 MB
Table of Contents
General Information
2
Table of Contents
5
Chapter 1 Introduction
10
Figure 1.1: Wafersense APS Controls and Indicators
11
Chapter 2 Installing Your APS
12
Installing the Wafersense APS Software
13
Figure 2.2: Final Software Installshield Screen
14
Figure 2.3: Link Device Install Wizard
15
Installing the Wireless Link
16
Checking Communications between the Link and the Wafer
17
Registering Your APS Wafer for Calibration Service
18
Running the Particleview Application
19
Figure 2.6: Calibration Registration Dialog
20
Technical Support
21
Chapter 3 Using Your APS
23
Configuring the Display
23
Opening and Closing the Charging Case
24
Using the APS Wafer Buttons and Status Lights
25
Making a Simple Particle Measurement Run
26
Figure 3.3: Reading the Particleview Display
27
Setting the Purge and Measurement Times
29
Monitoring for Excessive Particle Levels
30
Figure 3.6: Setting the Go/No-Go Thresholds
31
Recording the Particle Measurements
33
Placing Marks in a Log File
34
Including User-Specified Information in the Log File
35
Log File Directory Location
36
Log File Names
36
Importing Log Files into Other Applications
37
Changing the Log File Directory
38
Selecting the Particle Size to Graph
39
Displaying Particle Density or Frequency
39
Configuring the Display
39
Changing the Vertical Scale
40
Changing the Horizontal Scale
41
Changing the Averaging Interval
41
Changing Colors in Particleview
42
Figure 3.21: the Color Palette
43
Figure 3.22: the Custom Colors Palette
44
Printing the Particleview Window
45
Monitoring the Operating Temperature
46
Figure 3.23: Temperature Monitoring Gauge
46
Using the Rechargeable Battery
47
Monitoring the Battery Level
47
Charging the Battery
47
Figure 3.24: Battery Monitor
47
Figure 3.25: Contact Points for Charging the Battery
48
Monitoring the Wireless Connection to the APS Wafer
49
Figure 3.26: Wireless Connection Monitor
49
Monitoring the Pressure, Laser, Fan, and Coincidence
50
Figure 3.27: Pressure, Laser, Fan, and Coincidence Status
50
Reporting APS System Events
51
Low Battery
51
Laser Failure
51
Low Pressure Environment
51
Changing the Pairing between the APS Wafer and Link
53
Saving Your Settings
54
Loading Settings from a File
54
Chapter 4 Viewing Log Files
55
Running Particlereview
56
Figure 4.1: Running the Particlereview Application
56
Figure 4.2: Opening a Log File
57
Using the Playback Controls
58
Figure 4.3: Playback Controls
58
Working with Marks
60
Finding Marks in a File
60
Figure 4.4: Finding Marks
60
Adding Marks to a File
61
Figure 4.5: Marks and Annotations
61
Editing Existing Marks
62
Figure 4.6: Editing Marks
62
Figure 4.7: Annotating Marks
62
Monitoring for Excessive Particle Levels
63
Figure 4.8: Go State Indicator
63
Figure 4.9: No-Go State Indicator
63
Figure 4.10: Setting the Go/No-Go Thresholds
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Figure 4.11: Configuring the Go/No-Go Thresholds
64
Reviewing Go/No-Go Thresholds
64
Reviewing Coincidence
65
Figure 4.12: Coincidence Status
65
Changing Log Files
66
Figure 4.13: Selecting a Log File
66
Configuring the Display
67
Reviewing Numeric Measurements
67
Figure 4.14: Numeric Display
67
Reviewing Graphs and Resetting Parameters
68
Figure 4.15: Selecting Graph Parameters
68
Changing Colors in Particlereview
69
Figure 4.16: Menu of Graph Display Elements
69
Figure 4.17: the Color Palette
70
Figure 4.18: the Custom Colors Palette
71
Displaying User-Specified Information from the Log File
72
Figure 4.19: Station Information Dialog
72
Printing the Particlereview Window
73
Chapter 5 Maintaining Your APS
74
Annual Factory Calibration and Battery Replacement
76
Figure 5.1: the about Your APS Wafer Dialog
76
Battery Use and Disposal
77
Figure 5.2: APS Wafer Calibration Status Dialog
77
Chapter 6 Specifications
78
System Requirements
78
Product Components
78
APS Hardware
78
Environmental
78
Power and Range
78
Laser
79
General Characteristics
79
Figure 6.1: Wafersense APS Dimension Drawing
79
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