User Manuals: Celerity UNIT 3165 Mass Flow Controller

Manuals and User Guides for Celerity UNIT 3165 Mass Flow Controller. We have 1 Celerity UNIT 3165 Mass Flow Controller manual available for free PDF download: User Manual

Celerity UNIT 122 Series User Manual

Celerity UNIT 3165 User Manual (39 pages)

Analog and Digital Mass Flow Controllers and Meters

Brand: Celerity | Category: Measuring Instruments | Size: 1 MB

Table of Contents

Table of Contents
3
1 Overview

6
- Flow Controller / Flow Meter Model Designations
  6
- Flow Controller / Flow Meter Model Designations, by Applications
  6
2 Standard Features

7
3 Optional Features

7
- Auto Shut-Off Option
  7
- Response Time Options
  7
- Connector Options
  8
- Special Adapters
  8
- Valve Options
  8
- Flow Direction Options
  8
- Auto-Zero Option
  8
- Fittings Options
  9
4 Power Supplies

9
5 Product Drawings

9
6 Product Specifications

9
- MFC Side Can Label
  9
- Traceability
  10
7 Installation

10
- Unpacking
  10
- Purging before Installing the MFC
  10
- Positioning the Controller
  10
- Mounting the Controller
  11
- Connecting to Gas Supply Line
  11
8 Electrical Connections

11
- Voltage and Pinouts
  11
- Connections to a Power Supply
  12
- Warm up
  12
9 Multiflo Virtual Interface

12
- Features
  12
- Configure the DMFC for Networking
  12
10 Operation and Performance Checks

13
- Automatic Zero Initialization
  13
- Proper Sequencing
  13
- Leak Test
  13
- Purge
  13
- Non-Reactive Gases
  14
- Reactive Gases
  14
- Zero Check
  14
- Full Flow Check
  15
- Flow Control Response Check
  15
- Calibration Check
  15
11 Troubleshooting

16
- Environmental Factors
  16
- MFC Troubleshooting Checklist
  16
12 Removal

17
- Purging before Removing the MFC
  17
- Removing the MFC
  17
- Packaging the MFC
  17
- Un-Packaging
  17
- Cleaning
  17
- Shipping
  17
- Shipping Costs
  18
- Returned Material Authorizations (RMA)
  18
- Documentation
  18
13 Maintenance

18
- Emergency Service
  18
- Routine Maintenance
  18
- Factory Calibration and Service
  18
- Field Service
  18
- Technical Support
  19
14 Warranty

19
15 Web Site Technical Resources

19
16 Appendices

20

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