Overview; Flow Controller / Flow Meter Model Designations; Flow Controller / Flow Meter Model Designations, By Applications - Celerity UNIT 122 Series User Manual

1. OVERVIEW

Celerity Mass Flow Controllers precisely monitor and control the mass flow of gases in processes
such as Plasma Etching, CVD, Diffusion, EPI, and Sputtering where superior accuracy is required.
Mass Flow Meters are identical to mass flow controllers, except that they do not have a controlling
valve. Therefore they do not control, but only accurately measure and report the gas flow that is
passing through them.
1.1

Flow Controller / Flow Meter Model Designations

Unit Mass Flow Controller models have the prefix of "UFC-" (Unit Flow Controller), and Mass
Flow Meters have the prefix of "UFM-" (Unit Flow Meter).
Mass Flow Controllers:
Mass Flow Meters:
1.2

Flow Controller / Flow Meter Model Designations, by Applications

Table 1 shows the general applicability of each model covered by this manual.
Category / Model Family
Elastomer Seal Products - 32 µ in Ra Finish
122 series Control Valves
180 series Standard Flow Applications
7300 series Standard Flow Applications
7320 series Standard Flow w/ Auto Shutoff
8100 series Standard Flow Applications
8130 series Setpoint Pressure Control
High Purity Metal Seal Products - 10 or 16 µ in Ra Finish
132 series Control Valves
1551 series Standard Flow Applications
1630 series Setpoint Pressure Control
1660 series Standard Flow Applications
1660 SDS series Safe Delivery Source
3160 series High Flow Applications
5360 series High Flow Applications
7360 series Standard Flow Applications
9660 series High Temperature Applications
Ultra High Purity Metal Seal Products - 4 µ in Ra Finish
8160 series Standard Flow Applications
8160 SDS series Safe Delivery Source
8260 series Standard Flow Applications
8560 series Standard Flow Applications
8560 SDS series Safe Delivery Source
9500 series High Temperature Applications
9860 series High Temperature Applications
Table 1. Model Designations by applications
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UFC-XXXX (Unit Flow Controller)
UFM-XXXX (Unit Flow Meter)
Footprint
1.1" 10 sccm - 30 slm
1" 10 sccm - 30 slm
1.5" 10 sccm - 30 slm
1.5" 10 sccm - 30 slm
1.5" 10 sccm - 30 slm
1.5" 10 sccm - 30 slm
1.42" 10 sccm - 30 slm
1.5" 30 sccm - 6 slm
1.5" 10 sccm - 30 slm
1.5" 10 sccm - 30 slm
1.5" 10 sccm - 30 slm
1.5" 30 slm - 100 slm
1.5" 30 slm - 100 slm
1.5" 10 sccm - 30 slm
1.5" 10 sccm - 30 slm
1.5" 10 sccm - 30 slm
1.5" 10 sccm - 30 slm
1.5" mini 10 sccm - 30 slm
1.125" 10 sccm - 30 slm
1.125" 10 sccm - 30 slm
1.125" 10 sccm - 30 slm
1.5" 10 sccm - 30 slm
4/05
Full Scale <Digital> <Digital>
Flow Range RS485 DeviceNet™
(Min - Max) Analog PROFIBUS
122
7301 7304
7321 7324
8101 8105
8130
132
1551
1661 1665
1663 1664
3161 3165
5361 5365
7361 7364
8161 8165
8163 8164
8261
8561 8565
8563 8564
9561 9565
9861 9865
<Analog>
Analog
Protocol
180HS /180HA
7300
7320
8100
1630
1660
1662/1662L
7360
9660
8160
8162/8162L
8260
1