BOC Edwards Seiko Seiki STP-1003 Series Manuals

Manuals and User Guides for BOC Edwards Seiko Seiki STP-1003 Series. We have 1 BOC Edwards Seiko Seiki STP-1003 Series manual available for free PDF download: Instruction Manual

BOC Edwards Seiko Seiki STP-1003 Series Instruction Manual (119 pages)

Turbomolecular Pump

Brand: BOC Edwards | Category: Water Pump | Size: 3 MB

Limited Warranty
10
Table of Contents
12
Precautions for Safe Operation of the STP Pump
17
Usable Gases
17
Maintenance and Inspection Precautions
17
Labels
18
Operation Principle of the STP Pump
22
Figure 2.1 Cross Sectional View of the STP Pump
23
Unpacking
24
Unpacking the STP Pump and the STP Control Unit
24
Accessories
25
Table 3.1 Accessories
25
Figure 3.1 Example of Lifting the STP Pump
25
Installation of the STP Pump
26
Name and Function of each Part
26
Figure 4.1 Configuration of the STP Pump
27
Precautions before Installation
28
Operating Environment
28
Installation Area
29
Bench
29
How to Install the STP Pump
31
Figure 4.2 Installation of the STP Pump to the Vacuum Equipment
31
Cleaning the Seal
32
STP Pump Installation Positions
33
Figure 4.3 STP Pump Installation Positions
33
Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
33
How to Secure the STP Pump
34
Table 4.1 Tightening Torque of Bolt
34
Table 4.2 Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
35
Figure 4.5 Example of Securing the STP Pump (When Securing the Inlet Port with Bolts)
35
Table 4.3 Number of Claw Clamps by Size of Flange
36
Vacuum Piping
38
Connecting the Purge Port
40
Figure 4.8 Connecting the Purge Port
40
Gas Pumping, Cooling and Baking the STP Pump
41
Gas Pumping
41
How to Introduce a Purge Gas
41
Cooling the STP Pump
43
Water Cooling Method
43
Air Cooling Method
44
Baking the STP Pump
45
Attaching a Baking Heater
45
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater
46
Installation of the STP Control Unit
47
Name and Function of each Part
47
Front Panel
47
Figure 6.1 STP Control Unit Front Panel
49
Rear Panel
50
Figure 6.2 STP Control Unit Rear Panel
50
Precautions before Installation
51
Operating Environment
51
Insulation Test
51
Installation Area
52
Figure 6.3 Peripheral Space of the STP Control Unit
52
Attaching the STP Control Unit to a Rack
53
Figure 6.4 Example of Securing the STP Control Unit
53
Cable Connection
54
Name and Dimensions of each Cable
54
Figure 6.5 External Dimensions of each Cable
54
Figure 6.6 External Dimensions of each Cable
55
How to Connect the Cables
56
Table 6.1 Connecting the Power Cable
57
Connecting to Semiconductor Equipment
58
Connecting to Power
58
Emergency off Circuit (EMO Circuit)
58
How to Start/Stop the STP Pump
59
Before Starting
59
Start Procedures
60
Stop Procedures
60
Stopping the STP Pump
60
Starting the STP Pump after Stopping
62
Powering off
62
Starting the STP Pump after a Safety Function Operates
62
Remote Operation
63
Powering on
63
Starting/Stopping the STP Pump
63
Table 7.1 Starting/Stopping the STP Pump During Remote Operation (REMOTE X7)
63
Starting the STP Pump after Stopping
64
Powering off
64
Starting the STP Pump after a Safety Function Operates
64
Table 7.2 Reset Operation During Remote Operation (REMOTE X7)
64
Figure 7.1 STP Pump Operation Procedures
65
Remote Input/Output Signal Connector
66
Input Signal Pins
66
Table 8.1 REMOTE X7 Input Signal Pins
67
Figure 8.1 REMOTE X7 Input Signal Pins
68
Output Signal Pins
69
Table 8.2 REMOTE X7 Output Signal Pins
69
Figure 8.2 REMOTE X7 Output Signal Pins
71
Table 8.3 Rated Contacts for Relays CR1 to CR8
72
Adjustment Methods
73
Tuning
73
Tuning Method
73
Each of Data after Tuning
74
Table 9.1 Data List
74
Figure 9.1 Tuning Procedures
75
Confirmation Mode
76
Parameter Set Mode
78
Figure 9.3 Parameter Setting Method
79
Figure 9.4 Remote Mode Setting Method
80
Safety Functions
81
Power Failure
81
Table 10.1 States of Lamps and REMOTE Output Signals at a Power Failure
82
Table 10.2 Operations of the STP Pump after a Power Recovery
82
Abnormal State of Magnetic Bearing
83
Excessive Vibration
83
Motor Driver Overload
83
Overheating Inside the STP Pump
83
Overheating Inside the STP Control Unit
84
Overspeed
84
Troubleshooting, Maintenance, and Inspection
88
Troubleshooting Immediately after an Abnormality/Error Occurs
88
Troubleshooting Power Failure
88
Troubleshooting Other Abnormality/Error
88
When Error Message Is Displayed on LCD
89
Error Messages
89
Table 11.1 Error Messages (1/5)
90
Other Abnormalities
96
Abnormalities When Powering on
96
Abnormalities When Performing the STP Pump Start Operation
96
Table 11.2 Troubleshooting after Powering on
96
Table 11.3 Troubleshooting When Performing the STP Pump Start Operation
96
Other Abnormalities
97
Table 11.4 Troubleshooting While the STP Pump Is Rotating
97
WARNING" Message Display Function
98
First Damage Limit
98
Second Damage Limit
99
ERROR RECORD" Message Display Function
99
Maintenance and Inspection
100
Cleaning and Decontamination
101
Table 11.5 Cleaning and Decontamination
101
Inspecting the Deposit
102
Overhaul
103
Transporting for Repair or Overhaul
104
Storage and Disposal
105
Storage of the STP Pump
105
Storage of the STP Control Unit
105
Disposal
106
Table 13.1 Specifications for the STP Pump
107
Figure 13.2 External Appearance of the STP Pump (STP-1003 Series)
109
Specifications for the STP Control Unit
111
Table 13.2 Specifications for the STP Control Unit
111
Unit Conversion Table
115

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BOC Edwards Seiko Seiki STP-1003 Series Instruction Manual (119 pages)

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